JPS645998A - Linbo3/litao3 single crystal piezoelectric substrate having polarization reversal region and its production - Google Patents
Linbo3/litao3 single crystal piezoelectric substrate having polarization reversal region and its productionInfo
- Publication number
- JPS645998A JPS645998A JP16079287A JP16079287A JPS645998A JP S645998 A JPS645998 A JP S645998A JP 16079287 A JP16079287 A JP 16079287A JP 16079287 A JP16079287 A JP 16079287A JP S645998 A JPS645998 A JP S645998A
- Authority
- JP
- Japan
- Prior art keywords
- polarization reversal
- substrate
- linbo3
- single crystal
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE:To obtain the title LiNbO3 or LiTaO3 single crystal substrate having a formed polarization reversal region by forming a polarization reversal layer on the surface of the crystal by a proton exchange method. CONSTITUTION:A polarization reversal layer is formed on the surface (C face) of the crystal by a proton exchange method to obtain the LiNbO3/LiTaO3 single crystal piezoelectric substrate having a polarization reversal region. The flexural vibrator using a polarization reversal substrate by this method does not necessitate the adhesion of a substrate and the splitting of an electrode. Accordingly, the defect such as the difficulty in the splitting of the electrode when a low-frequency vibrator is obtained can be obviated, hence the vibrator is miniaturized, and a low resonance frequency can be obtained. When the substrate is applied to an ultrasonic transducer, an optical device of an integrated structure can also be furnished at a low cost. Consequently, the substrate is appropriately used for an optical information transmission system, an IDT electrode is not always required when an SAW device is constituted, and the difficulty in the formation of a high frequency can be obviated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16079287A JP2565346B2 (en) | 1987-06-26 | 1987-06-26 | LiNbO Lower 3 / LiTaO Lower 3 Single Crystal Piezoelectric Substrate Having Polarization Reversal Region and Manufacturing Method Thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16079287A JP2565346B2 (en) | 1987-06-26 | 1987-06-26 | LiNbO Lower 3 / LiTaO Lower 3 Single Crystal Piezoelectric Substrate Having Polarization Reversal Region and Manufacturing Method Thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS645998A true JPS645998A (en) | 1989-01-10 |
JP2565346B2 JP2565346B2 (en) | 1996-12-18 |
Family
ID=15722553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16079287A Expired - Fee Related JP2565346B2 (en) | 1987-06-26 | 1987-06-26 | LiNbO Lower 3 / LiTaO Lower 3 Single Crystal Piezoelectric Substrate Having Polarization Reversal Region and Manufacturing Method Thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2565346B2 (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01198819A (en) * | 1988-02-03 | 1989-08-10 | Fujitsu Ltd | Manufacture of piezoelectric vibrator |
JPH047909A (en) * | 1990-04-25 | 1992-01-13 | Murata Mfg Co Ltd | Piezoelectric resonator |
EP0511762A2 (en) * | 1991-04-27 | 1992-11-04 | Ngk Spark Plug Co., Ltd. | Piezoelectric sensor |
US5194117A (en) * | 1990-02-27 | 1993-03-16 | At&T Bell Laboratories | Lithium niobate etchant |
JP2004151031A (en) * | 2002-10-31 | 2004-05-27 | Murata Mfg Co Ltd | Piezoelectric vibrator, vibration gyroscope, and electronic equipment |
US7176599B2 (en) | 2003-06-05 | 2007-02-13 | Fujitsu Media Devices Limited | Surface acoustic wave device and method of producing the same |
JP2014224896A (en) * | 2013-05-16 | 2014-12-04 | 株式会社島津製作所 | Optical waveguide type diffraction grating and optical module |
JP2021515989A (en) * | 2018-03-12 | 2021-06-24 | ソイテック | Process for making thin layers of ferroelectric materials based on alkali metals |
WO2024106123A1 (en) * | 2022-11-14 | 2024-05-23 | 株式会社村田製作所 | Elastic wave device |
-
1987
- 1987-06-26 JP JP16079287A patent/JP2565346B2/en not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01198819A (en) * | 1988-02-03 | 1989-08-10 | Fujitsu Ltd | Manufacture of piezoelectric vibrator |
US5194117A (en) * | 1990-02-27 | 1993-03-16 | At&T Bell Laboratories | Lithium niobate etchant |
JPH047909A (en) * | 1990-04-25 | 1992-01-13 | Murata Mfg Co Ltd | Piezoelectric resonator |
EP0511762A2 (en) * | 1991-04-27 | 1992-11-04 | Ngk Spark Plug Co., Ltd. | Piezoelectric sensor |
JP2004151031A (en) * | 2002-10-31 | 2004-05-27 | Murata Mfg Co Ltd | Piezoelectric vibrator, vibration gyroscope, and electronic equipment |
US7176599B2 (en) | 2003-06-05 | 2007-02-13 | Fujitsu Media Devices Limited | Surface acoustic wave device and method of producing the same |
JP2014224896A (en) * | 2013-05-16 | 2014-12-04 | 株式会社島津製作所 | Optical waveguide type diffraction grating and optical module |
JP2021515989A (en) * | 2018-03-12 | 2021-06-24 | ソイテック | Process for making thin layers of ferroelectric materials based on alkali metals |
WO2024106123A1 (en) * | 2022-11-14 | 2024-05-23 | 株式会社村田製作所 | Elastic wave device |
Also Published As
Publication number | Publication date |
---|---|
JP2565346B2 (en) | 1996-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |