JPS645998A - Linbo3/litao3 single crystal piezoelectric substrate having polarization reversal region and its production - Google Patents

Linbo3/litao3 single crystal piezoelectric substrate having polarization reversal region and its production

Info

Publication number
JPS645998A
JPS645998A JP16079287A JP16079287A JPS645998A JP S645998 A JPS645998 A JP S645998A JP 16079287 A JP16079287 A JP 16079287A JP 16079287 A JP16079287 A JP 16079287A JP S645998 A JPS645998 A JP S645998A
Authority
JP
Japan
Prior art keywords
polarization reversal
substrate
linbo3
single crystal
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16079287A
Other languages
Japanese (ja)
Other versions
JP2565346B2 (en
Inventor
Hiroshi Shimizu
Yoshinaga Nakamura
Haruyasu Ando
Kenichi Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP16079287A priority Critical patent/JP2565346B2/en
Publication of JPS645998A publication Critical patent/JPS645998A/en
Application granted granted Critical
Publication of JP2565346B2 publication Critical patent/JP2565346B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain the title LiNbO3 or LiTaO3 single crystal substrate having a formed polarization reversal region by forming a polarization reversal layer on the surface of the crystal by a proton exchange method. CONSTITUTION:A polarization reversal layer is formed on the surface (C face) of the crystal by a proton exchange method to obtain the LiNbO3/LiTaO3 single crystal piezoelectric substrate having a polarization reversal region. The flexural vibrator using a polarization reversal substrate by this method does not necessitate the adhesion of a substrate and the splitting of an electrode. Accordingly, the defect such as the difficulty in the splitting of the electrode when a low-frequency vibrator is obtained can be obviated, hence the vibrator is miniaturized, and a low resonance frequency can be obtained. When the substrate is applied to an ultrasonic transducer, an optical device of an integrated structure can also be furnished at a low cost. Consequently, the substrate is appropriately used for an optical information transmission system, an IDT electrode is not always required when an SAW device is constituted, and the difficulty in the formation of a high frequency can be obviated.
JP16079287A 1987-06-26 1987-06-26 LiNbO Lower 3 / LiTaO Lower 3 Single Crystal Piezoelectric Substrate Having Polarization Reversal Region and Manufacturing Method Thereof Expired - Fee Related JP2565346B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16079287A JP2565346B2 (en) 1987-06-26 1987-06-26 LiNbO Lower 3 / LiTaO Lower 3 Single Crystal Piezoelectric Substrate Having Polarization Reversal Region and Manufacturing Method Thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16079287A JP2565346B2 (en) 1987-06-26 1987-06-26 LiNbO Lower 3 / LiTaO Lower 3 Single Crystal Piezoelectric Substrate Having Polarization Reversal Region and Manufacturing Method Thereof

Publications (2)

Publication Number Publication Date
JPS645998A true JPS645998A (en) 1989-01-10
JP2565346B2 JP2565346B2 (en) 1996-12-18

Family

ID=15722553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16079287A Expired - Fee Related JP2565346B2 (en) 1987-06-26 1987-06-26 LiNbO Lower 3 / LiTaO Lower 3 Single Crystal Piezoelectric Substrate Having Polarization Reversal Region and Manufacturing Method Thereof

Country Status (1)

Country Link
JP (1) JP2565346B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01198819A (en) * 1988-02-03 1989-08-10 Fujitsu Ltd Manufacture of piezoelectric vibrator
JPH047909A (en) * 1990-04-25 1992-01-13 Murata Mfg Co Ltd Piezoelectric resonator
EP0511762A2 (en) * 1991-04-27 1992-11-04 Ngk Spark Plug Co., Ltd. Piezoelectric sensor
US5194117A (en) * 1990-02-27 1993-03-16 At&T Bell Laboratories Lithium niobate etchant
JP2004151031A (en) * 2002-10-31 2004-05-27 Murata Mfg Co Ltd Piezoelectric vibrator, vibration gyroscope, and electronic equipment
US7176599B2 (en) 2003-06-05 2007-02-13 Fujitsu Media Devices Limited Surface acoustic wave device and method of producing the same
JP2014224896A (en) * 2013-05-16 2014-12-04 株式会社島津製作所 Optical waveguide type diffraction grating and optical module
JP2021515989A (en) * 2018-03-12 2021-06-24 ソイテック Process for making thin layers of ferroelectric materials based on alkali metals
WO2024106123A1 (en) * 2022-11-14 2024-05-23 株式会社村田製作所 Elastic wave device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01198819A (en) * 1988-02-03 1989-08-10 Fujitsu Ltd Manufacture of piezoelectric vibrator
US5194117A (en) * 1990-02-27 1993-03-16 At&T Bell Laboratories Lithium niobate etchant
JPH047909A (en) * 1990-04-25 1992-01-13 Murata Mfg Co Ltd Piezoelectric resonator
EP0511762A2 (en) * 1991-04-27 1992-11-04 Ngk Spark Plug Co., Ltd. Piezoelectric sensor
JP2004151031A (en) * 2002-10-31 2004-05-27 Murata Mfg Co Ltd Piezoelectric vibrator, vibration gyroscope, and electronic equipment
US7176599B2 (en) 2003-06-05 2007-02-13 Fujitsu Media Devices Limited Surface acoustic wave device and method of producing the same
JP2014224896A (en) * 2013-05-16 2014-12-04 株式会社島津製作所 Optical waveguide type diffraction grating and optical module
JP2021515989A (en) * 2018-03-12 2021-06-24 ソイテック Process for making thin layers of ferroelectric materials based on alkali metals
WO2024106123A1 (en) * 2022-11-14 2024-05-23 株式会社村田製作所 Elastic wave device

Also Published As

Publication number Publication date
JP2565346B2 (en) 1996-12-18

Similar Documents

Publication Publication Date Title
EP0802628A3 (en) Piezoelectric resonator and method for fabricating the same
JPS57161672A (en) Measuring method utilizing ultrasonic wave
WO1994002911A1 (en) Ultrasonic touch system
GB1450820A (en) Acoustic surface wave device
JPS645998A (en) Linbo3/litao3 single crystal piezoelectric substrate having polarization reversal region and its production
JPS56116317A (en) Material for elastic surface wave
US5994817A (en) Ultrasonic touch-position sensing device
US5973438A (en) Ultrasonic switching device
Sinha et al. Acceleration and vibration sensitivity of SAW devices
US6005327A (en) Ultrasonic touch-position sensing device
US4707631A (en) Isotropic acoustic wave substrate
HK48282A (en) Piezo-electric vibrator
FR2437070A1 (en) FREQUENCY SELECTOR
CA2197018A1 (en) Surface acoustic wave device
US5760523A (en) Surface acoustic wave transducing device
JP2615020B2 (en) Ultrasonic transducer and surface wave device
EP0982857A3 (en) Surface acoustic wave resonator, surface acoustic wave filter, duplexer, communications apparatus and surface acoustic wave apparatus, and production method of surface acoustic wave device
KR970704268A (en) Surface Skimming Bulk Generation in KTiPO® and Its Analogues
EP1030443A3 (en) Surface-acoustic-wave device
JPS6173409A (en) Elastic surface wave device
JPS5656025A (en) Elastic surface wave resonator
Ballato Networks for crossed-field and in-line excitation of bulk and surface acoustic waves
JPS56140683A (en) Piezoelectric transformer
WO1998025437A3 (en) Method of making an acoustic transducer
JP3175275B2 (en) Ultrasonic delay element

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees