JPS6459102A - Interferometer for measuring length or angle - Google Patents
Interferometer for measuring length or angleInfo
- Publication number
- JPS6459102A JPS6459102A JP62203244A JP20324487A JPS6459102A JP S6459102 A JPS6459102 A JP S6459102A JP 62203244 A JP62203244 A JP 62203244A JP 20324487 A JP20324487 A JP 20324487A JP S6459102 A JPS6459102 A JP S6459102A
- Authority
- JP
- Japan
- Prior art keywords
- split
- cube
- interferometer
- exhaustible
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
PURPOSE: To measure the length or angle of an object with high accuracy by guiding one split beam of the measurement arm of one interferometer system and the split beam of the comparison arm of another interferometer system through an exhaustible device. CONSTITUTION: For example, two parallel luminous fluxes 10 and 20 are emitted from a laser 31. The flux 10 belongs to an interferometer and is split into two split beams 11 and 12 though a splitting cube 32. The split beam 11 passes through a comparison arm V having an exhaustible chamber 41 after being changed in direction through a prism 33, is reflected by a mirror 5, and returns to the cube 32. The other split beam 12 passes through a measurement arm M having an exhaustible chamber 42, is reflected by a mirror 6, and returns to the cube 32 similarly to the beam 11. At the cube 32, the beam 12 is combined with the beam 11 into a common luminous flux 13 and interference occurs the two beams 11 and 12 superimposed upon another. The interference is detected by means of a photoreceptor 7 and processed by means of an evaluating unit 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62203244A JPS6459102A (en) | 1987-08-17 | 1987-08-17 | Interferometer for measuring length or angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62203244A JPS6459102A (en) | 1987-08-17 | 1987-08-17 | Interferometer for measuring length or angle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6459102A true JPS6459102A (en) | 1989-03-06 |
Family
ID=16470819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62203244A Pending JPS6459102A (en) | 1987-08-17 | 1987-08-17 | Interferometer for measuring length or angle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6459102A (en) |
-
1987
- 1987-08-17 JP JP62203244A patent/JPS6459102A/en active Pending
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