JPS6453433A - Semiconductor integrated circuit - Google Patents
Semiconductor integrated circuitInfo
- Publication number
- JPS6453433A JPS6453433A JP63069426A JP6942688A JPS6453433A JP S6453433 A JPS6453433 A JP S6453433A JP 63069426 A JP63069426 A JP 63069426A JP 6942688 A JP6942688 A JP 6942688A JP S6453433 A JPS6453433 A JP S6453433A
- Authority
- JP
- Japan
- Prior art keywords
- adhered
- film
- superconductive material
- isolation film
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To prevent a harmful metal, which is part of the composition of a superconductive material, from intruding into Si and SiO2, by a method wherein the superconductive material is covered with an isolation film. CONSTITUTION:An Si substrate 1 is oxidized to adhere a field, oxide 2. After that, an isolation film 3 is adhered and an oxide superconductive material having a perovskite crystal structure is adhered in the form of a thin film and is heat- treated at a temperature), to which an Si integrated circuit can withstand. After that, a resist is left at a desired part using a photolithograph and a wiring consisting of a superconductive material film 4 is formed using a sputter etching or ion milling method. After that, an isolation film 3 is again adhered, these are processed by a photo etching method and are formed in such a way as to cover the periphery of the film 4, a contact hole 5 is formed on this isolation film and a connecting electrode 6 is adhered. Thereby, a superconducting wiring can be constituted.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7146287 | 1987-03-27 | ||
JP62-71462 | 1987-05-13 | ||
JP11467487 | 1987-05-13 | ||
JP62-114674 | 1987-05-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6453433A true JPS6453433A (en) | 1989-03-01 |
JP3009146B2 JP3009146B2 (en) | 2000-02-14 |
Family
ID=26412553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63069426A Expired - Lifetime JP3009146B2 (en) | 1987-03-27 | 1988-03-25 | Semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3009146B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6464339A (en) * | 1987-09-04 | 1989-03-10 | Toshiba Corp | Semiconductor device |
JPH01218045A (en) * | 1988-02-26 | 1989-08-31 | Nec Corp | Semiconductor device |
JP2001217470A (en) * | 1999-12-02 | 2001-08-10 | Abb Res Ltd | High-temperature superconductive element and its manufacturing method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60154613A (en) * | 1984-01-25 | 1985-08-14 | Hitachi Ltd | Semiconductor device for ultra-low temperature |
JPS63224274A (en) * | 1987-03-12 | 1988-09-19 | Agency Of Ind Science & Technol | Superconductive device |
-
1988
- 1988-03-25 JP JP63069426A patent/JP3009146B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60154613A (en) * | 1984-01-25 | 1985-08-14 | Hitachi Ltd | Semiconductor device for ultra-low temperature |
JPS63224274A (en) * | 1987-03-12 | 1988-09-19 | Agency Of Ind Science & Technol | Superconductive device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6464339A (en) * | 1987-09-04 | 1989-03-10 | Toshiba Corp | Semiconductor device |
JPH01218045A (en) * | 1988-02-26 | 1989-08-31 | Nec Corp | Semiconductor device |
JP2001217470A (en) * | 1999-12-02 | 2001-08-10 | Abb Res Ltd | High-temperature superconductive element and its manufacturing method |
Also Published As
Publication number | Publication date |
---|---|
JP3009146B2 (en) | 2000-02-14 |
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