JPS6450433U - - Google Patents

Info

Publication number
JPS6450433U
JPS6450433U JP14657887U JP14657887U JPS6450433U JP S6450433 U JPS6450433 U JP S6450433U JP 14657887 U JP14657887 U JP 14657887U JP 14657887 U JP14657887 U JP 14657887U JP S6450433 U JPS6450433 U JP S6450433U
Authority
JP
Japan
Prior art keywords
adhesive
transparent member
exposed
ultraviolet
hardens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14657887U
Other languages
Japanese (ja)
Other versions
JPH0314049Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987146578U priority Critical patent/JPH0314049Y2/ja
Publication of JPS6450433U publication Critical patent/JPS6450433U/ja
Application granted granted Critical
Publication of JPH0314049Y2 publication Critical patent/JPH0314049Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の実施例を示す側断面図、第２
図は接着剤の硬化曲線図、第３図はワークを接着
した透明部材の部分拡大側断面図、第４図は本考
案の他の実施例を示す側断面図、第５図は透明シ
ートに貼り付けた半導体ウエハを示す斜視図であ
る。 ３……透明部材、４……紫外線硬化型接着剤、
５……ワーク、Ｎ２……不活性ガス。 Fig. 1 is a side sectional view showing an embodiment of the present invention;
The figure is a curing curve diagram of the adhesive, Figure 3 is a partially enlarged side sectional view of a transparent member to which a workpiece is adhered, Figure 4 is a side sectional view showing another embodiment of the present invention, and Figure 5 is a transparent sheet. FIG. 3 is a perspective view showing the attached semiconductor wafer. 3... Transparent member, 4... Ultraviolet curing adhesive,
5...Work, N2 ...Inert gas.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 一方の面に紫外線硬化型接着剤を介してワーク
を固定した透明部材の他の面より紫外線を照射し
接着剤を硬化させる装置において、上記透明部材
上のワーク間に露呈した接着剤表面に不活性ガス
を供給したことを特徴とする紫外線照射装置。 In a device that hardens the adhesive by irradiating ultraviolet rays from the other side of a transparent member with a workpiece fixed to one side via an ultraviolet curable adhesive, the surface of the adhesive exposed between the workpieces on the transparent member is exposed. An ultraviolet irradiation device characterized by supplying an active gas.
JP1987146578U 1987-09-25 1987-09-25 Expired JPH0314049Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987146578U JPH0314049Y2 (en) 1987-09-25 1987-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987146578U JPH0314049Y2 (en) 1987-09-25 1987-09-25

Publications (2)

Publication Number Publication Date
JPS6450433U true JPS6450433U (en) 1989-03-29
JPH0314049Y2 JPH0314049Y2 (en) 1991-03-28

Family

ID=31416197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987146578U Expired JPH0314049Y2 (en) 1987-09-25 1987-09-25

Country Status (1)

Country Link
JP (1) JPH0314049Y2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241437U (en) * 1988-09-14 1990-03-22
JP2006019258A (en) * 2004-06-30 2006-01-19 Chi Mei Optoelectronics Corp Ultraviolet-ray irradiation device
WO2006126390A1 (en) * 2005-05-24 2006-11-30 Lintec Corporation Energy beam irradiator and irradiating method
JP2016149581A (en) * 2016-05-16 2016-08-18 株式会社東京精密 Work division device
JP2017059841A (en) * 2016-11-10 2017-03-23 株式会社東京精密 Work division device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850164A (en) * 1981-09-19 1983-03-24 Nippon Steel Corp Continuous casting installation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850164A (en) * 1981-09-19 1983-03-24 Nippon Steel Corp Continuous casting installation

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241437U (en) * 1988-09-14 1990-03-22
JP2006019258A (en) * 2004-06-30 2006-01-19 Chi Mei Optoelectronics Corp Ultraviolet-ray irradiation device
WO2006126390A1 (en) * 2005-05-24 2006-11-30 Lintec Corporation Energy beam irradiator and irradiating method
JP2006328151A (en) * 2005-05-24 2006-12-07 Lintec Corp Apparatus and method for actinic radiation irradiation
JP2016149581A (en) * 2016-05-16 2016-08-18 株式会社東京精密 Work division device
JP2017059841A (en) * 2016-11-10 2017-03-23 株式会社東京精密 Work division device

Also Published As

Publication number Publication date
JPH0314049Y2 (en) 1991-03-28

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