JPS6169824U - - Google Patents
Info
- Publication number
- JPS6169824U JPS6169824U JP15344984U JP15344984U JPS6169824U JP S6169824 U JPS6169824 U JP S6169824U JP 15344984 U JP15344984 U JP 15344984U JP 15344984 U JP15344984 U JP 15344984U JP S6169824 U JPS6169824 U JP S6169824U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- semiconductor wafer
- deposition source
- irradiated
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
Description
第１図は本考案の一実施例を示す構成図である
。
２…保持台、３…半導体ウエハ、４…蒸着ソー
ス、５…ソース駆動機構。
FIG. 1 is a block diagram showing an embodiment of the present invention. 2... Holding stand, 3... Semiconductor wafer, 4... Evaporation source, 5... Source drive mechanism.
Claims (1)
着ソースを移動可能に設置し、該蒸着ソースより
の蒸着ビームを多方向から半導体ウエハに照射可
能としたことを特徴とする蒸着装置。 A vapor deposition apparatus characterized in that a vapor deposition source is movably installed relative to a semiconductor wafer set on a holding table, and the semiconductor wafer can be irradiated with vapor deposition beams from the vapor deposition source from multiple directions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15344984U JPS6169824U (en) | 1984-10-11 | 1984-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15344984U JPS6169824U (en) | 1984-10-11 | 1984-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6169824U true JPS6169824U (en) | 1986-05-13 |
Family
ID=30711468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15344984U Pending JPS6169824U (en) | 1984-10-11 | 1984-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6169824U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004311065A (en) * | 2003-04-02 | 2004-11-04 | Sanyo Electric Co Ltd | Manufacturing method of organic el display |
-
1984
- 1984-10-11 JP JP15344984U patent/JPS6169824U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004311065A (en) * | 2003-04-02 | 2004-11-04 | Sanyo Electric Co Ltd | Manufacturing method of organic el display |