JPS6449695U - - Google Patents
Info
- Publication number
- JPS6449695U JPS6449695U JP14392887U JP14392887U JPS6449695U JP S6449695 U JPS6449695 U JP S6449695U JP 14392887 U JP14392887 U JP 14392887U JP 14392887 U JP14392887 U JP 14392887U JP S6449695 U JPS6449695 U JP S6449695U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- bearing
- concave groove
- center shaft
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000013016 damping Methods 0.000 claims description 3
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案の第一実施例の縦断面図、第２
図は本考案の第二の実施例の縦断面図、第３図は
本考案の第三の実施例の縦断面図、第４図は従来
のターボ分子ポンプの断面図である。
１……ケーシング、６……ロータ、６ａ，２６
ａ，３６ａ……凹状溝、７……ロータの中心軸、
８……磁気軸受、９……すべり軸受、１５，２１
５，３１５……振れ減衰装置、１５ａ，２１５ａ
，３１５ａ……振れ減衰装置の先端部分。
Fig. 1 is a vertical sectional view of the first embodiment of the present invention;
The figure is a vertical cross-sectional view of a second embodiment of the present invention, FIG. 3 is a vertical cross-sectional view of a third embodiment of the present invention, and FIG. 4 is a cross-sectional view of a conventional turbomolecular pump. 1...Casing, 6...Rotor, 6a, 26
a, 36a...Concave groove, 7...Rotor central axis,
8...Magnetic bearing, 9...Sliding bearing, 15, 21
5,315... vibration damping device, 15a, 215a
, 315a... Tip portion of the vibration damping device.
Claims (1)
はすべり軸受を備え、同上部及び下部軸受でロー
タ中心軸を支承した竪形ターボ分子ポンプにおい
て、ロータの一部にロータ中心軸と同心の凹状溝
を設け、同凹状溝にケーシング側に設けたロータ
の振れ減衰装置の先端部分を挿入したことを特徴
とする竪形ターボ分子ポンプ。 In a vertical turbo-molecular pump in which the upper bearing is a magnetic bearing made of a permanent magnet and the lower bearing is a sliding bearing, and the rotor center shaft is supported by the upper and lower bearings, a concave groove concentric with the rotor center shaft is formed in a part of the rotor. A vertical turbo-molecular pump characterized in that a tip portion of a rotor vibration damping device provided on the casing side is inserted into the concave groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14392887U JPH068316Y2 (en) | 1987-09-22 | 1987-09-22 | Vertical turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14392887U JPH068316Y2 (en) | 1987-09-22 | 1987-09-22 | Vertical turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6449695U true JPS6449695U (en) | 1989-03-28 |
| JPH068316Y2 JPH068316Y2 (en) | 1994-03-02 |
Family
ID=31411188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14392887U Expired - Lifetime JPH068316Y2 (en) | 1987-09-22 | 1987-09-22 | Vertical turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH068316Y2 (en) |
-
1987
- 1987-09-22 JP JP14392887U patent/JPH068316Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH068316Y2 (en) | 1994-03-02 |