JPS6448413A - Semiconductor device and manufacture thereof - Google Patents
Semiconductor device and manufacture thereofInfo
- Publication number
- JPS6448413A JPS6448413A JP20398387A JP20398387A JPS6448413A JP S6448413 A JPS6448413 A JP S6448413A JP 20398387 A JP20398387 A JP 20398387A JP 20398387 A JP20398387 A JP 20398387A JP S6448413 A JPS6448413 A JP S6448413A
- Authority
- JP
- Japan
- Prior art keywords
- silicon layer
- polycrystalline silicon
- substrate
- whole surface
- charges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To prevent the generation of breakdown by charges resulting from ion implantation by selectively implanting ions into a partial region in a polycrystalline silicon layer widely formed onto the whole surface of a substrate. CONSTITUTION:An insulating film 2 is shaped onto an silicon substrate 1 to which an element is formed, and a polycrystalline silicon layer 4 is shaped onto the insulating film 2. Impurity ions are implanted selectively to the polycrystalline silicon layer 4 in a resistance region, and the polycrystalline silicon layer 4 is removed from a section except the resistance region and a resistor composed of the polycrystalline silicon layer containing an impurity is formed. Consequently, charges are injected only into a resistance formation predetermined region, and the charges spread on the whole surface of the polycrystalline silicon layer covering the whole surface of the substrate. Accordingly, the potential of the polycrystalline silicon layer hardly rises, thus preventing the possibility of breakdown.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20398387A JPS6448413A (en) | 1987-08-19 | 1987-08-19 | Semiconductor device and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20398387A JPS6448413A (en) | 1987-08-19 | 1987-08-19 | Semiconductor device and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6448413A true JPS6448413A (en) | 1989-02-22 |
Family
ID=16482851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20398387A Pending JPS6448413A (en) | 1987-08-19 | 1987-08-19 | Semiconductor device and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6448413A (en) |
-
1987
- 1987-08-19 JP JP20398387A patent/JPS6448413A/en active Pending
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