JPS6446494U - - Google Patents
Info
- Publication number
- JPS6446494U JPS6446494U JP14046987U JP14046987U JPS6446494U JP S6446494 U JPS6446494 U JP S6446494U JP 14046987 U JP14046987 U JP 14046987U JP 14046987 U JP14046987 U JP 14046987U JP S6446494 U JPS6446494 U JP S6446494U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- vacuum chamber
- high vacuum
- casing
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
図面は本考案による真空ポンプの一実施例を示
すその断面図である。
１……ケーシング、２……ステータ翼（固定翼
）、３……ロータ、３ａ……ロータシヤフト、４
……ロータ翼（回転翼）、５，１３……ベース、
６……高周波モータ、７……支持プレート、７ａ
……孔、８……永久磁石固定用ブロツク、９……
凹部、１０，１１……永久磁石（磁気軸受）、１
２……スパイラルグルーブベアリング（動圧滑り
軸受）、１４……受け（動圧滑り軸受）、１５…
…凹部。
The drawing is a sectional view showing an embodiment of a vacuum pump according to the present invention. 1... Casing, 2... Stator blade (fixed wing), 3... Rotor, 3a... Rotor shaft, 4
...Rotor blade (rotor blade), 5,13...Base,
6... High frequency motor, 7... Support plate, 7a
... Hole, 8 ... Permanent magnet fixing block, 9 ...
Recessed portion, 10, 11...Permanent magnet (magnetic bearing), 1
2...Spiral groove bearing (hydrodynamic sliding bearing), 14...Receiver (hydrodynamic sliding bearing), 15...
...concavity.
Claims (1)
するケーシングと、このケーシング内でこれと同
軸上で回転し複数の回転翼を有するロータと、こ
のロータの前記高真空室側部と静止部材とのそれ
ぞれに互いに対向して設けられる複数の永久磁石
から構成される磁気軸受とを備え、前記ロータが
回転することにより前記高真空室の真空度を向上
させる真空ポンプにおいて、前記永久磁石の周面
に多孔を閉止するコーテイングを施したことを特
徴とする真空ポンプ。 a casing having an opening connected to a high vacuum chamber and having a plurality of fixed blades; a rotor rotating coaxially within the casing and having a plurality of rotary blades; a side portion of the high vacuum chamber of the rotor and a stationary member; and a magnetic bearing constituted by a plurality of permanent magnets provided facing each other, the vacuum pump improving the degree of vacuum in the high vacuum chamber by rotating the rotor, A vacuum pump characterized by having a coating applied to its surface to close pores.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14046987U JPS6446494U (en) | 1987-09-14 | 1987-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14046987U JPS6446494U (en) | 1987-09-14 | 1987-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6446494U true JPS6446494U (en) | 1989-03-22 |
Family
ID=31404669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14046987U Pending JPS6446494U (en) | 1987-09-14 | 1987-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6446494U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103967830A (en) * | 2013-01-29 | 2014-08-06 | 普发真空有限公司 | Rotor magnetic bearing, method of coating of and/or applying lacquer on magnetic rings of rotor magnetic bearing, and vacuum pump |
-
1987
- 1987-09-14 JP JP14046987U patent/JPS6446494U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103967830A (en) * | 2013-01-29 | 2014-08-06 | 普发真空有限公司 | Rotor magnetic bearing, method of coating of and/or applying lacquer on magnetic rings of rotor magnetic bearing, and vacuum pump |
| JP2014146795A (en) * | 2013-01-29 | 2014-08-14 | Pfeiffer Vacuum Gmbh | Method for coating and/or application onto magnetic rings of rotor magnetic bearing, rotor magnetic bearing, and vacuum pump |