JPS6445006A - Transparent conductive substrate - Google Patents
Transparent conductive substrateInfo
- Publication number
- JPS6445006A JPS6445006A JP62200894A JP20089487A JPS6445006A JP S6445006 A JPS6445006 A JP S6445006A JP 62200894 A JP62200894 A JP 62200894A JP 20089487 A JP20089487 A JP 20089487A JP S6445006 A JPS6445006 A JP S6445006A
- Authority
- JP
- Japan
- Prior art keywords
- film
- tin oxide
- transparent
- fluorine
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Laminated Bodies (AREA)
- Non-Insulated Conductors (AREA)
Abstract
PURPOSE:To make the substrate in the title have a low resistance, a high transparency and a high durability to hydrogen plasma by forming a transparent conductive film of tin oxide having fluorine doped on a transparent substrate, and forming a transparent film of tin oxide without including fluorine in the uppermost layer. CONSTITUTION:A barrier coat 2 of a film of silica or the like of about 1000Angstrom thick is formed on a transparent substrate 1 of glass or the like, and a transparent film 3 of tin oxide of film thickness of 500-10000Angstrom having fluorine of 0.1-10% doped is formed on it. A transparent film 4 of tin oxide of film thickness of 5-3000Angstrom without including fluorine is formed on it. The film thickness of the film 4 is adjusted based on durability to plasma. The film thickness shall preferably be about 10-20% of the total film thickness. For non-added film of tin oxide film 4, fluorine of less than 0.01% may be included.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200894A JPS6445006A (en) | 1987-08-13 | 1987-08-13 | Transparent conductive substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62200894A JPS6445006A (en) | 1987-08-13 | 1987-08-13 | Transparent conductive substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6445006A true JPS6445006A (en) | 1989-02-17 |
Family
ID=16432023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62200894A Pending JPS6445006A (en) | 1987-08-13 | 1987-08-13 | Transparent conductive substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6445006A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0697377A2 (en) * | 1994-08-18 | 1996-02-21 | Honjo Sorex Co. Ltd. | Process for production of glass substrate coated with finely patterned Nesa glass membrane |
GB2363182B (en) * | 2000-01-27 | 2004-04-07 | Nsk Ltd | Collapsible shaft assembly |
CN102074281A (en) * | 2010-12-21 | 2011-05-25 | 苏州禾盛新型材料股份有限公司 | RF plasma transparent conductive film |
-
1987
- 1987-08-13 JP JP62200894A patent/JPS6445006A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0697377A2 (en) * | 1994-08-18 | 1996-02-21 | Honjo Sorex Co. Ltd. | Process for production of glass substrate coated with finely patterned Nesa glass membrane |
EP0697377A3 (en) * | 1994-08-18 | 1996-09-18 | Honjo Sorex Co Ltd | Process for production of glass substrate coated with finely patterned Nesa glass membrane |
GB2363182B (en) * | 2000-01-27 | 2004-04-07 | Nsk Ltd | Collapsible shaft assembly |
CN102074281A (en) * | 2010-12-21 | 2011-05-25 | 苏州禾盛新型材料股份有限公司 | RF plasma transparent conductive film |
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