JPS6445006A - Transparent conductive substrate - Google Patents

Transparent conductive substrate

Info

Publication number
JPS6445006A
JPS6445006A JP62200894A JP20089487A JPS6445006A JP S6445006 A JPS6445006 A JP S6445006A JP 62200894 A JP62200894 A JP 62200894A JP 20089487 A JP20089487 A JP 20089487A JP S6445006 A JPS6445006 A JP S6445006A
Authority
JP
Japan
Prior art keywords
film
tin oxide
transparent
fluorine
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62200894A
Other languages
Japanese (ja)
Inventor
Kazuo Sato
Kunihiko Adachi
Yoshio Goto
Mamoru Mizuhashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP62200894A priority Critical patent/JPS6445006A/en
Publication of JPS6445006A publication Critical patent/JPS6445006A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Non-Insulated Conductors (AREA)

Abstract

PURPOSE:To make the substrate in the title have a low resistance, a high transparency and a high durability to hydrogen plasma by forming a transparent conductive film of tin oxide having fluorine doped on a transparent substrate, and forming a transparent film of tin oxide without including fluorine in the uppermost layer. CONSTITUTION:A barrier coat 2 of a film of silica or the like of about 1000Angstrom thick is formed on a transparent substrate 1 of glass or the like, and a transparent film 3 of tin oxide of film thickness of 500-10000Angstrom having fluorine of 0.1-10% doped is formed on it. A transparent film 4 of tin oxide of film thickness of 5-3000Angstrom without including fluorine is formed on it. The film thickness of the film 4 is adjusted based on durability to plasma. The film thickness shall preferably be about 10-20% of the total film thickness. For non-added film of tin oxide film 4, fluorine of less than 0.01% may be included.
JP62200894A 1987-08-13 1987-08-13 Transparent conductive substrate Pending JPS6445006A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62200894A JPS6445006A (en) 1987-08-13 1987-08-13 Transparent conductive substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62200894A JPS6445006A (en) 1987-08-13 1987-08-13 Transparent conductive substrate

Publications (1)

Publication Number Publication Date
JPS6445006A true JPS6445006A (en) 1989-02-17

Family

ID=16432023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62200894A Pending JPS6445006A (en) 1987-08-13 1987-08-13 Transparent conductive substrate

Country Status (1)

Country Link
JP (1) JPS6445006A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0697377A2 (en) * 1994-08-18 1996-02-21 Honjo Sorex Co. Ltd. Process for production of glass substrate coated with finely patterned Nesa glass membrane
GB2363182B (en) * 2000-01-27 2004-04-07 Nsk Ltd Collapsible shaft assembly
CN102074281A (en) * 2010-12-21 2011-05-25 苏州禾盛新型材料股份有限公司 RF plasma transparent conductive film

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0697377A2 (en) * 1994-08-18 1996-02-21 Honjo Sorex Co. Ltd. Process for production of glass substrate coated with finely patterned Nesa glass membrane
EP0697377A3 (en) * 1994-08-18 1996-09-18 Honjo Sorex Co Ltd Process for production of glass substrate coated with finely patterned Nesa glass membrane
GB2363182B (en) * 2000-01-27 2004-04-07 Nsk Ltd Collapsible shaft assembly
CN102074281A (en) * 2010-12-21 2011-05-25 苏州禾盛新型材料股份有限公司 RF plasma transparent conductive film

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