JPS6443369A - Liquid discharge device - Google Patents

Liquid discharge device

Info

Publication number
JPS6443369A
JPS6443369A JP20061787A JP20061787A JPS6443369A JP S6443369 A JPS6443369 A JP S6443369A JP 20061787 A JP20061787 A JP 20061787A JP 20061787 A JP20061787 A JP 20061787A JP S6443369 A JPS6443369 A JP S6443369A
Authority
JP
Japan
Prior art keywords
valve
suck back
check valve
downstream side
forcibly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20061787A
Other languages
Japanese (ja)
Inventor
Tatsumi Suganuma
Yukio Imoto
Shuji Tazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Tokuda Seisakusho Co Ltd
Original Assignee
Toshiba Corp
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokuda Seisakusho Co Ltd filed Critical Toshiba Corp
Priority to JP20061787A priority Critical patent/JPS6443369A/en
Publication of JPS6443369A publication Critical patent/JPS6443369A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Nozzles (AREA)
  • Coating Apparatus (AREA)

Abstract

PURPOSE:To discharge stably by providing a suck back valve on the downstream side of a discharge valve, also providing a check valve between the downstream side of the suck back valve and a discharge needle and closing forcibly the check valve by the action of the suck back function. CONSTITUTION:A suck back valve 3 is provided on the downstream side of a check valve 2, and a check valve 6 is provided between the downstream side of said valve 3 and a discharge needle 4 in a manner to close forcibly the check valve 6 in complicance with the action of such back suction. Said valve 6 is consisted of a cylindrical body 7, a rigid ball 8 installed in the cylindrical body 7 and a compression coil spring 9 to encourage the rigid ball 8 in the inflow side. At the time of suck back, the rigid ball 8 of the valve 6 is pulled in forcibly to shut off securely jointly with the elasticity of the spring 9. As a result, the arrangement works for not only adjusting the suck back comparatively easily, but also lessening the spraying and dripping of liquid, and also response characteristics and stability can be enhanced.
JP20061787A 1987-08-11 1987-08-11 Liquid discharge device Pending JPS6443369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20061787A JPS6443369A (en) 1987-08-11 1987-08-11 Liquid discharge device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20061787A JPS6443369A (en) 1987-08-11 1987-08-11 Liquid discharge device

Publications (1)

Publication Number Publication Date
JPS6443369A true JPS6443369A (en) 1989-02-15

Family

ID=16427353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20061787A Pending JPS6443369A (en) 1987-08-11 1987-08-11 Liquid discharge device

Country Status (1)

Country Link
JP (1) JPS6443369A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04294538A (en) * 1991-03-22 1992-10-19 Rohm Co Ltd Chemical liquid supply device in chemical liquid coating device
JPH0556276U (en) * 1991-12-27 1993-07-27 マークテック株式会社 Marking gun
JP2011131188A (en) * 2009-12-25 2011-07-07 Tokyo Electron Ltd Chemical liquid supply nozzle and chemical liquid supply method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04294538A (en) * 1991-03-22 1992-10-19 Rohm Co Ltd Chemical liquid supply device in chemical liquid coating device
JPH0556276U (en) * 1991-12-27 1993-07-27 マークテック株式会社 Marking gun
JP2011131188A (en) * 2009-12-25 2011-07-07 Tokyo Electron Ltd Chemical liquid supply nozzle and chemical liquid supply method

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