JPS643921A - Manufacture of superconductive thin film - Google Patents

Manufacture of superconductive thin film

Info

Publication number
JPS643921A
JPS643921A JP62160235A JP16023587A JPS643921A JP S643921 A JPS643921 A JP S643921A JP 62160235 A JP62160235 A JP 62160235A JP 16023587 A JP16023587 A JP 16023587A JP S643921 A JPS643921 A JP S643921A
Authority
JP
Japan
Prior art keywords
substrate
thin film
barium
copper
onto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62160235A
Other languages
Japanese (ja)
Inventor
Tomoji Kawai
Daisuke Inoue
Yasunori Ando
Shuichi Nogawa
Shinichi Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP62160235A priority Critical patent/JPS643921A/en
Publication of JPS643921A publication Critical patent/JPS643921A/en
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

PURPOSE:To make it possible to form an oxide ceramic superconductive thin film with high reproductivity by causing group IIIa metal, barium, copper and/or their oxide to adhere onto a substrate maintained at a specific temperature and irradiating oxygen neutral beam onto the substrate. CONSTITUTION:Evaporation materials chosen one each from respective groups of group IIIa metal (Sc, Y, Er, etc.) or oxides of group IIIa metal, barium or barium oxide, and copper or oxides of copper are put into crucibles 1-3 respectively and are made to evaporate by scanning the crucibles 1-3 with an electron beam (a) from an electron beam evaporation source 6. Here, the temperature of a substrate under evaporation is made 400-700 deg.C. As a result, simultaneously with the deposit of the respective metals or metallic oxides onto the substrate 8, oxygen ion drawn out of an oxygen source 7 is neutralized with a neutralizer 11, irradiated an an oxygen neutral beam (b) onto the surface of the substrate 8, reacts with respective substances evaporated, and forms a thin film on the surface of the substrate 8. This makes it possible to obtain the thin film made of group IIIa-barium-copper oxide with high reproductivity.
JP62160235A 1987-06-25 1987-06-25 Manufacture of superconductive thin film Pending JPS643921A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62160235A JPS643921A (en) 1987-06-25 1987-06-25 Manufacture of superconductive thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62160235A JPS643921A (en) 1987-06-25 1987-06-25 Manufacture of superconductive thin film

Publications (1)

Publication Number Publication Date
JPS643921A true JPS643921A (en) 1989-01-09

Family

ID=15710624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62160235A Pending JPS643921A (en) 1987-06-25 1987-06-25 Manufacture of superconductive thin film

Country Status (1)

Country Link
JP (1) JPS643921A (en)

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