JPS643921A - Manufacture of superconductive thin film - Google Patents
Manufacture of superconductive thin filmInfo
- Publication number
- JPS643921A JPS643921A JP62160235A JP16023587A JPS643921A JP S643921 A JPS643921 A JP S643921A JP 62160235 A JP62160235 A JP 62160235A JP 16023587 A JP16023587 A JP 16023587A JP S643921 A JPS643921 A JP S643921A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- thin film
- barium
- copper
- onto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To make it possible to form an oxide ceramic superconductive thin film with high reproductivity by causing group IIIa metal, barium, copper and/or their oxide to adhere onto a substrate maintained at a specific temperature and irradiating oxygen neutral beam onto the substrate. CONSTITUTION:Evaporation materials chosen one each from respective groups of group IIIa metal (Sc, Y, Er, etc.) or oxides of group IIIa metal, barium or barium oxide, and copper or oxides of copper are put into crucibles 1-3 respectively and are made to evaporate by scanning the crucibles 1-3 with an electron beam (a) from an electron beam evaporation source 6. Here, the temperature of a substrate under evaporation is made 400-700 deg.C. As a result, simultaneously with the deposit of the respective metals or metallic oxides onto the substrate 8, oxygen ion drawn out of an oxygen source 7 is neutralized with a neutralizer 11, irradiated an an oxygen neutral beam (b) onto the surface of the substrate 8, reacts with respective substances evaporated, and forms a thin film on the surface of the substrate 8. This makes it possible to obtain the thin film made of group IIIa-barium-copper oxide with high reproductivity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62160235A JPS643921A (en) | 1987-06-25 | 1987-06-25 | Manufacture of superconductive thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62160235A JPS643921A (en) | 1987-06-25 | 1987-06-25 | Manufacture of superconductive thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS643921A true JPS643921A (en) | 1989-01-09 |
Family
ID=15710624
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62160235A Pending JPS643921A (en) | 1987-06-25 | 1987-06-25 | Manufacture of superconductive thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS643921A (en) |
-
1987
- 1987-06-25 JP JP62160235A patent/JPS643921A/en active Pending
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