JPS6435337A - Helium detector - Google Patents
Helium detectorInfo
- Publication number
- JPS6435337A JPS6435337A JP19316487A JP19316487A JPS6435337A JP S6435337 A JPS6435337 A JP S6435337A JP 19316487 A JP19316487 A JP 19316487A JP 19316487 A JP19316487 A JP 19316487A JP S6435337 A JPS6435337 A JP S6435337A
- Authority
- JP
- Japan
- Prior art keywords
- tube
- permanent magnets
- analysis tube
- analysis
- penning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
PURPOSE:To decrease the number of parts and to make effective utilization of space by integrally constituting an analysis tube and Penning vacuum tube. CONSTITUTION:Permanent magnets 32, 3 of the analysis tube are commonly used as the permanent magnets of the Penning vacuum tube. Electrodes for cold cathode ionization are disposed between the permanent magnets 2 and 3 of the analysis tube and within a vacuum system 1. The electrons released from the electrode (cathode) make spiral motion by magnetic fields and the gaseous helium in the vacuum system 1 are ionized when a high voltage is impressed between the electrodes 9 and 10. These ions collide against the electrode (anode). Ion current is induced in the circuit by this phenomenon and is detected by an ion current detector. Since the permanent magnets 2, 3 of the analysis tube and the Penning vacuum tube are commonly used in such a manner, the number of parts is decreased and the space is effectively utilized.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19316487A JPS6435337A (en) | 1987-07-31 | 1987-07-31 | Helium detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19316487A JPS6435337A (en) | 1987-07-31 | 1987-07-31 | Helium detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6435337A true JPS6435337A (en) | 1989-02-06 |
Family
ID=16303355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19316487A Pending JPS6435337A (en) | 1987-07-31 | 1987-07-31 | Helium detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6435337A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02298834A (en) * | 1989-05-12 | 1990-12-11 | Ulvac Corp | Inspecting apparatus of leakage of gas |
JP2003021100A (en) * | 2001-07-06 | 2003-01-24 | Tokico Ltd | Ejector and negative pressure supply device |
-
1987
- 1987-07-31 JP JP19316487A patent/JPS6435337A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02298834A (en) * | 1989-05-12 | 1990-12-11 | Ulvac Corp | Inspecting apparatus of leakage of gas |
JP2003021100A (en) * | 2001-07-06 | 2003-01-24 | Tokico Ltd | Ejector and negative pressure supply device |
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