JPS6435188A - Vacuum valve - Google Patents
Vacuum valveInfo
- Publication number
- JPS6435188A JPS6435188A JP19040887A JP19040887A JPS6435188A JP S6435188 A JPS6435188 A JP S6435188A JP 19040887 A JP19040887 A JP 19040887A JP 19040887 A JP19040887 A JP 19040887A JP S6435188 A JPS6435188 A JP S6435188A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- piston
- feed screw
- opening
- closing direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Fluid-Driven Valves (AREA)
- Mechanically-Actuated Valves (AREA)
Abstract
PURPOSE:To sufficiently ensure operational stability and safety by adding a mechanism having a stepless valve opening adjustment function and an emergency cut-off function to a drive system for opening and closing a valve. CONSTITUTION:When gas is fed into a vacuum container so as to control the internal pressure thereof, a valve 201a is moved in the direction as indicated by the arrow. At this time, air pressures 203a, 204a are distributed so that a piston 207a is always urged in the valve closing direction. The movement of the piston 207a in the valve closing direction is inhibited by a feed screw 206a. When the feed screw 206a is rotated by a motor 205a, the valve is pushed out in the valve opening direction. When the operation of the device system becomes difficult due to occurrence of an abnormality, air pressure is at once led into the chamber 204a to close the valve.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19040887A JPS6435188A (en) | 1987-07-31 | 1987-07-31 | Vacuum valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19040887A JPS6435188A (en) | 1987-07-31 | 1987-07-31 | Vacuum valve |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6435188A true JPS6435188A (en) | 1989-02-06 |
Family
ID=16257647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19040887A Pending JPS6435188A (en) | 1987-07-31 | 1987-07-31 | Vacuum valve |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6435188A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5560586A (en) * | 1994-05-25 | 1996-10-01 | Anelva Corporation | Main valve |
JP2002054751A (en) * | 2000-08-07 | 2002-02-20 | Akatake Engineering Kk | Damper device for powder storage tank |
JP2005325928A (en) * | 2004-05-14 | 2005-11-24 | Smc Corp | Exhaust valve |
JP2006046415A (en) * | 2004-08-02 | 2006-02-16 | Smc Corp | Vacuum pressure regulating valve |
WO2007072602A1 (en) * | 2005-12-21 | 2007-06-28 | Kabushiki Kaisha Fujikin | Water hammer-less valve |
JP2011133005A (en) * | 2009-12-24 | 2011-07-07 | Murata Mfg Co Ltd | Opening and closing valve |
JP2013228109A (en) * | 2013-07-31 | 2013-11-07 | Murata Mfg Co Ltd | Opening/closing valve |
KR101422201B1 (en) * | 2012-11-23 | 2014-07-24 | 주식회사 태한이엔씨 | Gate valve device |
-
1987
- 1987-07-31 JP JP19040887A patent/JPS6435188A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5560586A (en) * | 1994-05-25 | 1996-10-01 | Anelva Corporation | Main valve |
JP2002054751A (en) * | 2000-08-07 | 2002-02-20 | Akatake Engineering Kk | Damper device for powder storage tank |
JP2005325928A (en) * | 2004-05-14 | 2005-11-24 | Smc Corp | Exhaust valve |
JP2006046415A (en) * | 2004-08-02 | 2006-02-16 | Smc Corp | Vacuum pressure regulating valve |
WO2007072602A1 (en) * | 2005-12-21 | 2007-06-28 | Kabushiki Kaisha Fujikin | Water hammer-less valve |
US8210493B2 (en) | 2005-12-21 | 2012-07-03 | Kabushiki Kaisha Fujikin | Water hammerless valve |
JP2011133005A (en) * | 2009-12-24 | 2011-07-07 | Murata Mfg Co Ltd | Opening and closing valve |
KR101422201B1 (en) * | 2012-11-23 | 2014-07-24 | 주식회사 태한이엔씨 | Gate valve device |
JP2013228109A (en) * | 2013-07-31 | 2013-11-07 | Murata Mfg Co Ltd | Opening/closing valve |
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