JPS6426104A - Appearance inspecting device for semiconductor device - Google Patents
Appearance inspecting device for semiconductor deviceInfo
- Publication number
- JPS6426104A JPS6426104A JP18416287A JP18416287A JPS6426104A JP S6426104 A JPS6426104 A JP S6426104A JP 18416287 A JP18416287 A JP 18416287A JP 18416287 A JP18416287 A JP 18416287A JP S6426104 A JPS6426104 A JP S6426104A
- Authority
- JP
- Japan
- Prior art keywords
- light
- semiconductor device
- cameras
- inspection
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To simply inspect the appearance of a semiconductor device by providing a light shield plate and shielding the light so that the lighting of each inspection part does not exert any influence upon TV cameras at other detection parts. CONSTITUTION:The semiconductor device 1 which is conveyed on a guide ratio 2 is detected by one sensor which is not shown in a figure and lighting devices 8, 8a, and 8b of respective inspection parts 3-6 emit flash light with the detection signal of the sensor to light the respective inspection positions. At this time, the respective inspection parts 3-6 are shielded by light shield plates 10-13, etc., from the light and the light beams from the respective lighting devices 8 are not made incident on the TV cameras 9 at other inspection parts, so the respective TV cameras 9 photograph the left and right lead flanks, lead reverse surface, and mark surface of the semiconductor device 1 irradiated by the lighting device to obtain respective images.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62184162A JPH0749934B2 (en) | 1987-07-22 | 1987-07-22 | Appearance inspection system for semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62184162A JPH0749934B2 (en) | 1987-07-22 | 1987-07-22 | Appearance inspection system for semiconductor devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6426104A true JPS6426104A (en) | 1989-01-27 |
JPH0749934B2 JPH0749934B2 (en) | 1995-05-31 |
Family
ID=16148449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62184162A Expired - Lifetime JPH0749934B2 (en) | 1987-07-22 | 1987-07-22 | Appearance inspection system for semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0749934B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0599635A (en) * | 1991-10-08 | 1993-04-23 | Seiwa Sangyo Kk | Visual inspection device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS622113A (en) * | 1985-06-28 | 1987-01-08 | Ando Electric Co Ltd | Surface roughness meter using reflected light |
JPS6236510A (en) * | 1985-08-12 | 1987-02-17 | Nec Kyushu Ltd | Detecting sensor for bend of lead |
-
1987
- 1987-07-22 JP JP62184162A patent/JPH0749934B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS622113A (en) * | 1985-06-28 | 1987-01-08 | Ando Electric Co Ltd | Surface roughness meter using reflected light |
JPS6236510A (en) * | 1985-08-12 | 1987-02-17 | Nec Kyushu Ltd | Detecting sensor for bend of lead |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0599635A (en) * | 1991-10-08 | 1993-04-23 | Seiwa Sangyo Kk | Visual inspection device |
Also Published As
Publication number | Publication date |
---|---|
JPH0749934B2 (en) | 1995-05-31 |
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