JPS6426015A - Bearing device of semi-conductor manufacturing apparatus - Google Patents
Bearing device of semi-conductor manufacturing apparatusInfo
- Publication number
- JPS6426015A JPS6426015A JP18102787A JP18102787A JPS6426015A JP S6426015 A JPS6426015 A JP S6426015A JP 18102787 A JP18102787 A JP 18102787A JP 18102787 A JP18102787 A JP 18102787A JP S6426015 A JPS6426015 A JP S6426015A
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- abrasion powder
- shaft
- sliding portion
- portions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent abrasion powder from being discharged out of a bearing by making a clearance between a bearing periphery and a shaft to be slightly larger than a clearance between the shaft and the sliding surface of the bearing. CONSTITUTION:Abrasion powder generated by sliding between a shaft 3 and the sliding portion of a bearing 2 is captured in peripheral direction grooves 4a, 4b. Inasmuch as the diameters of peripheral portions 6a, 6b are set larger than the diameter of a sliding portion 7, these portions are out of contact with a shaft 3 and any abrasion powder is not generated from these portions. Since the diameters of the peripheral portions 6a, 6b are also set slightly larger than the diameter of the sliding portion 7, there is extremely less probability that the abrasion powder generated at the sliding portion and captured in the peripheral direction grooves 4a, 4b may be discharged out of the bearing. In this manner, the abrasion powder generated on the sliding surface of the bearing is prevented from being discharged out of the bearing, so that it is effective to prevent environmental contamination in surroundings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18102787A JPS6426015A (en) | 1987-07-22 | 1987-07-22 | Bearing device of semi-conductor manufacturing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18102787A JPS6426015A (en) | 1987-07-22 | 1987-07-22 | Bearing device of semi-conductor manufacturing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426015A true JPS6426015A (en) | 1989-01-27 |
Family
ID=16093486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18102787A Pending JPS6426015A (en) | 1987-07-22 | 1987-07-22 | Bearing device of semi-conductor manufacturing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426015A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62240833A (en) * | 1986-04-14 | 1987-10-21 | Nippon Kokan Kk <Nkk> | Method and apparatus for detection of heat fluid leakage from fluid pipeline |
| JP2006258160A (en) * | 2005-03-16 | 2006-09-28 | Toshiba Corp | Radial slide bearing mechanism and rotary shaft |
| WO2010001850A1 (en) | 2008-06-30 | 2010-01-07 | ダイキン工業株式会社 | Lithium secondary cell |
| WO2010013739A1 (en) | 2008-07-30 | 2010-02-04 | ダイキン工業株式会社 | Solvent for dissolution of electrolytic salt of lithium secondary battery |
-
1987
- 1987-07-22 JP JP18102787A patent/JPS6426015A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62240833A (en) * | 1986-04-14 | 1987-10-21 | Nippon Kokan Kk <Nkk> | Method and apparatus for detection of heat fluid leakage from fluid pipeline |
| JP2006258160A (en) * | 2005-03-16 | 2006-09-28 | Toshiba Corp | Radial slide bearing mechanism and rotary shaft |
| WO2010001850A1 (en) | 2008-06-30 | 2010-01-07 | ダイキン工業株式会社 | Lithium secondary cell |
| WO2010013739A1 (en) | 2008-07-30 | 2010-02-04 | ダイキン工業株式会社 | Solvent for dissolution of electrolytic salt of lithium secondary battery |
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