JPS6422741A - Semiconductor wafer transfer device - Google Patents
Semiconductor wafer transfer deviceInfo
- Publication number
- JPS6422741A JPS6422741A JP62180283A JP18028387A JPS6422741A JP S6422741 A JPS6422741 A JP S6422741A JP 62180283 A JP62180283 A JP 62180283A JP 18028387 A JP18028387 A JP 18028387A JP S6422741 A JPS6422741 A JP S6422741A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- wafer
- pushup
- cylinder
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Special Conveying (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To prevent breakage of a semiconductor wafer by arranging a pushup plate for transfer of wafer from a cassette in such a way as possible to advance and retract with respect to a driving member, fitting a spring resiliently in such a direction as to move apart the driving member and pushup plate, and sensing movement of the pushup plate. CONSTITUTION:A hole 21a is provided in the center of a supporting plate 21 fixed to the tip of a rod 17 of cylinder 16, and a guide shaft 22 is fitted with possibility of advancing and retracting. A pushup plate 18 is mounted at the tip of this guide shaft 22, and a spring 23 is installed around the guide shaft 22 resiliently between the pushup plate 18 and supporting plate 21 with such an energization as directed to move apart the pushup plate 18 and supporting plate 21. A support table 3 of a cassette 2a which accommodates a wafer 1 is moved by a rod 5 of a cylinder 4 to the center of a box 6. Then the rod 17 is elongated and pushes up the wafer 1 with the pushup plate 18. When the wafer 1 comes in contact with a carrier 10 and rising stops, the abovementioned spring 23 shrinks, and a shelter plate 25 mounted at the pushup plate 18 intrudes to a photo-electric switch 24 to stop the cylinder 16. Thus the wafer is prevented from breakage.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62180283A JPS6422741A (en) | 1987-07-20 | 1987-07-20 | Semiconductor wafer transfer device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62180283A JPS6422741A (en) | 1987-07-20 | 1987-07-20 | Semiconductor wafer transfer device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6422741A true JPS6422741A (en) | 1989-01-25 |
Family
ID=16080506
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62180283A Pending JPS6422741A (en) | 1987-07-20 | 1987-07-20 | Semiconductor wafer transfer device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6422741A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6502681B1 (en) | 1999-11-19 | 2003-01-07 | Honda Giken Kogyo Kabushiki Kaisha | Clutch connection control system |
-
1987
- 1987-07-20 JP JP62180283A patent/JPS6422741A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6502681B1 (en) | 1999-11-19 | 2003-01-07 | Honda Giken Kogyo Kabushiki Kaisha | Clutch connection control system |
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