JPS6422025U - - Google Patents

Info

Publication number
JPS6422025U
JPS6422025U JP11740687U JP11740687U JPS6422025U JP S6422025 U JPS6422025 U JP S6422025U JP 11740687 U JP11740687 U JP 11740687U JP 11740687 U JP11740687 U JP 11740687U JP S6422025 U JPS6422025 U JP S6422025U
Authority
JP
Japan
Prior art keywords
work coil
chamber
susceptor
wafer
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11740687U
Other languages
English (en)
Other versions
JPH0521867Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11740687U priority Critical patent/JPH0521867Y2/ja
Publication of JPS6422025U publication Critical patent/JPS6422025U/ja
Application granted granted Critical
Publication of JPH0521867Y2 publication Critical patent/JPH0521867Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案装置の一実施例を示す簡略縦断
面図、第２図は本考案装置とローダ室、アンロー
ダ室との位置関係を示す簡略平面図である。 １……ワークコイル、２……石英ワークコイル
カバー、３……ウエーハ、４……サセプタ、６…
…石英インナベルジヤ、１０……プツシユプルロ
ツド、１５……縦型チヤンバ（水冷チヤンバ）、
１８……反応室、１９……ワークコイル室。

Claims (1)

    【実用新案登録請求の範囲】
  1. 水冷された縦型チヤンバ１５内に石英ワークコ
    イルカバー２を設けて反応室１８とワークコイル
    室１９を形成し、反応室１８内をインナベルジヤ
    ６で覆い、この反応室１８を形成するワークコイ
    ルカバー２の直上にウエーハ３を載置したサセプ
    タ４を配置し、ワークコイル室１９内にはウエー
    ハ加熱用のワークコイル１を設けると共に、ワー
    クコイル室１９、この室１９を形成するワークコ
    イルカバー２及びサセプタ４の中心部を貫通しサ
    セプタ４上のウエーハ３の押上げを図るプツシユ
    プルロツド１０を設け、かつ、サセプタ４を回転
    可能とした枚葉式ＣＶＤ装置。
JP11740687U 1987-07-29 1987-07-29 Expired - Lifetime JPH0521867Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11740687U JPH0521867Y2 (ja) 1987-07-29 1987-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11740687U JPH0521867Y2 (ja) 1987-07-29 1987-07-29

Publications (2)

Publication Number Publication Date
JPS6422025U true JPS6422025U (ja) 1989-02-03
JPH0521867Y2 JPH0521867Y2 (ja) 1993-06-04

Family

ID=31360840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11740687U Expired - Lifetime JPH0521867Y2 (ja) 1987-07-29 1987-07-29

Country Status (1)

Country Link
JP (1) JPH0521867Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001019590A (ja) * 1999-07-06 2001-01-23 Sony Corp 気相成長装置
JP2001118837A (ja) * 1992-09-07 2001-04-27 Mitsubishi Electric Corp 半導体製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001118837A (ja) * 1992-09-07 2001-04-27 Mitsubishi Electric Corp 半導体製造装置
JP2001019590A (ja) * 1999-07-06 2001-01-23 Sony Corp 気相成長装置

Also Published As

Publication number Publication date
JPH0521867Y2 (ja) 1993-06-04

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