JPS6420443A - Ultrasonic microscope - Google Patents

Abstract

PURPOSE:To satisfactorily execute a scan by an ultrasonic wave, by bringing a focusing ultrasonic transmitting and receiving element provided on a revolver, to a high speed reciprocating motion, and also, moving a sample placing stage at a low speed. CONSTITUTION:A one-dimensional scanning part 16 of a focusing ultrasonic transmit ting and receiving element 4 is provided on a revolver 2 installed so as to be freely rotatable to a main body of an optical microscope. The ultrasonic transmitting and receiving element 4 is brought to a high speed reciprocating driving in the X direction by a miniature driving mechanism 17. Also, on a moving stage 20 of the optical micro scope, a sample plate 5 on which a sample 6 is placed is placed, and this moving stage 20 is driven at a low speed in the Y direction by the driving mechanism. In case of observing the sample 6 by using an ultrasonic microscope of such constitution, first of all, an optical image of the sample 6 is observed by an optical lens 3 attached to the revolver 2. Subsequently, by rotating the revolver 2, the ultrasonic transmitting and receiving element 4 of the scanning part 16 is opposed to the sample 6, the trans mitting and receiving element 4 is driven at a high speed in the X direction, the table 20 is driven at a low speed in the Y direction, and the sample 6 is brought to a two-di mensional scan by an ultrasonic wave.