JPS6420443A - Ultrasonic microscope - Google Patents
Ultrasonic microscopeInfo
- Publication number
- JPS6420443A JPS6420443A JP63092852A JP9285288A JPS6420443A JP S6420443 A JPS6420443 A JP S6420443A JP 63092852 A JP63092852 A JP 63092852A JP 9285288 A JP9285288 A JP 9285288A JP S6420443 A JPS6420443 A JP S6420443A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- receiving element
- revolver
- ultrasonic
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Microscoopes, Condenser (AREA)
Abstract
PURPOSE:To satisfactorily execute a scan by an ultrasonic wave, by bringing a focusing ultrasonic transmitting and receiving element provided on a revolver, to a high speed reciprocating motion, and also, moving a sample placing stage at a low speed. CONSTITUTION:A one-dimensional scanning part 16 of a focusing ultrasonic transmit ting and receiving element 4 is provided on a revolver 2 installed so as to be freely rotatable to a main body of an optical microscope. The ultrasonic transmitting and receiving element 4 is brought to a high speed reciprocating driving in the X direction by a miniature driving mechanism 17. Also, on a moving stage 20 of the optical micro scope, a sample plate 5 on which a sample 6 is placed is placed, and this moving stage 20 is driven at a low speed in the Y direction by the driving mechanism. In case of observing the sample 6 by using an ultrasonic microscope of such constitution, first of all, an optical image of the sample 6 is observed by an optical lens 3 attached to the revolver 2. Subsequently, by rotating the revolver 2, the ultrasonic transmitting and receiving element 4 of the scanning part 16 is opposed to the sample 6, the trans mitting and receiving element 4 is driven at a high speed in the X direction, the table 20 is driven at a low speed in the Y direction, and the sample 6 is brought to a two-di mensional scan by an ultrasonic wave.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63092852A JPS6420443A (en) | 1988-04-15 | 1988-04-15 | Ultrasonic microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63092852A JPS6420443A (en) | 1988-04-15 | 1988-04-15 | Ultrasonic microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6420443A true JPS6420443A (en) | 1989-01-24 |
Family
ID=14065958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63092852A Pending JPS6420443A (en) | 1988-04-15 | 1988-04-15 | Ultrasonic microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6420443A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019020121A1 (en) * | 2017-07-28 | 2019-01-31 | 上海和伍精密仪器股份有限公司 | Synchronous scanning apparatus, system and method for lossless detection |
-
1988
- 1988-04-15 JP JP63092852A patent/JPS6420443A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019020121A1 (en) * | 2017-07-28 | 2019-01-31 | 上海和伍精密仪器股份有限公司 | Synchronous scanning apparatus, system and method for lossless detection |
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