JPS6419668A - Ion implanter - Google Patents

Ion implanter

Info

Publication number
JPS6419668A
JPS6419668A JP17389787A JP17389787A JPS6419668A JP S6419668 A JPS6419668 A JP S6419668A JP 17389787 A JP17389787 A JP 17389787A JP 17389787 A JP17389787 A JP 17389787A JP S6419668 A JPS6419668 A JP S6419668A
Authority
JP
Japan
Prior art keywords
work
transfer device
held
work holder
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17389787A
Other languages
Japanese (ja)
Other versions
JPH053107B2 (en
Inventor
Taizo Hoshino
Aiji Shirou
Yukio Nakamori
Yuzo Sakurada
Motoyoshi Furusawa
Kazuhiro Kashimoto
Takenobu Fuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Ulvac Inc
Original Assignee
Nippon Steel Corp
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp, Ulvac Inc filed Critical Nippon Steel Corp
Priority to JP17389787A priority Critical patent/JPS6419668A/en
Publication of JPS6419668A publication Critical patent/JPS6419668A/en
Publication of JPH053107B2 publication Critical patent/JPH053107B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To make it possible to keep the temperature of a work being ion- implanted constant by making the back surface of a work holder, held with a work holder transfer device, capable of freely coming into contact with a tank in which a low temperature medium is introduced, and at the same time by arranging a 1st radiation heating device located in front of the work and interlocked to a radiation thermometer. CONSTITUTION:A work holder 4 attached with a frame 3 is held with a work holder transfer device 20 while a cap 23 is held with a cap transfer device 24. Closing a door 25, inside air is discharged through a vacuum discharge hole 19. Opening a shutter valve 18, the work holder transfer device 20 is advanced into a vacuum ion implantation chamber 1 to transfer both the holder 4 and the work 3 both held with the device 20 to a work holder transfer device 8, the device 20 is retracted and the shutter valve 18 is closed. When the ion implantation to the work 3 is planned to be performed under a high temperature condition, a 1st radiation heating device 11 interlocked to a radiation thermometer 13 is turned on to heat the front surface of the work 3 to a specified temperature and then an ion beam 2 is irradiated. This makes it possible to perform the in implantation under a specified temperature condition.
JP17389787A 1987-07-14 1987-07-14 Ion implanter Granted JPS6419668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17389787A JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17389787A JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Publications (2)

Publication Number Publication Date
JPS6419668A true JPS6419668A (en) 1989-01-23
JPH053107B2 JPH053107B2 (en) 1993-01-14

Family

ID=15969114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17389787A Granted JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Country Status (1)

Country Link
JP (1) JPS6419668A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5795396A (en) * 1989-03-31 1998-08-18 Canon Kabushiki Kaisha Apparatus for forming crystalline film
JP2016031928A (en) * 2014-07-29 2016-03-07 ライカ ミクロジュステーメ ゲーエムベーハー Manipulation container for cryomicroscopy

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999015885A1 (en) * 1997-09-19 1999-04-01 Japan Science And Technology Corporation High vacuum xafs measuring instrument

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5795396A (en) * 1989-03-31 1998-08-18 Canon Kabushiki Kaisha Apparatus for forming crystalline film
JP2016031928A (en) * 2014-07-29 2016-03-07 ライカ ミクロジュステーメ ゲーエムベーハー Manipulation container for cryomicroscopy

Also Published As

Publication number Publication date
JPH053107B2 (en) 1993-01-14

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