JPS6417859A - Method for controlling refractive index in plane direction - Google Patents
Method for controlling refractive index in plane directionInfo
- Publication number
- JPS6417859A JPS6417859A JP17543387A JP17543387A JPS6417859A JP S6417859 A JPS6417859 A JP S6417859A JP 17543387 A JP17543387 A JP 17543387A JP 17543387 A JP17543387 A JP 17543387A JP S6417859 A JPS6417859 A JP S6417859A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- ion beams
- ion
- plural
- refractive indices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE:To form vapor deposited films having light refractive indices which are different in the plane direction on a substrate by concentrating the ion beams of plural materials having different absolute refractive indices on the substrate and scanning the beams on the substrate while controlling ion currents. CONSTITUTION:The materials having the different absolute refractive indices are ionized by plural ion guns 21a-21c to the ion beams 22a-22c which are condensed as convergent ion beams 24a-24c respectively by magnetic lenses 23a-23c to one point on the substrate 13 so that the mixture composed of the convergent ion beams 24a-24c is deposited by evaporation on the substrate 13. The substrate 13 and the condensing point of the plural ion beams are relatively moved in this case so that the predetermined region on the substrate is scanned by the ion beams. The mixing ratios of the plural materials on the plane direction of the substrate 13 are controlled by controlling the relative ion currents between the plural ion beams during this scanning, by which the vapor deposited film having the different light refractive indices is formed on the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17543387A JPS6417859A (en) | 1987-07-13 | 1987-07-13 | Method for controlling refractive index in plane direction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17543387A JPS6417859A (en) | 1987-07-13 | 1987-07-13 | Method for controlling refractive index in plane direction |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6417859A true JPS6417859A (en) | 1989-01-20 |
Family
ID=15996015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17543387A Pending JPS6417859A (en) | 1987-07-13 | 1987-07-13 | Method for controlling refractive index in plane direction |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6417859A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1168833A2 (en) * | 2000-06-21 | 2002-01-02 | Matsushita Electric Industrial Co., Ltd. | CCD imaging apparatus |
| JP2006057117A (en) * | 2004-08-17 | 2006-03-02 | Ishikawajima Harima Heavy Ind Co Ltd | Combinatorial device manufacturing equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5744746A (en) * | 1980-08-29 | 1982-03-13 | Toyota Motor Corp | Controlling device of air-fuel ratio |
-
1987
- 1987-07-13 JP JP17543387A patent/JPS6417859A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5744746A (en) * | 1980-08-29 | 1982-03-13 | Toyota Motor Corp | Controlling device of air-fuel ratio |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1168833A2 (en) * | 2000-06-21 | 2002-01-02 | Matsushita Electric Industrial Co., Ltd. | CCD imaging apparatus |
| JP2006057117A (en) * | 2004-08-17 | 2006-03-02 | Ishikawajima Harima Heavy Ind Co Ltd | Combinatorial device manufacturing equipment |
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