JPS6416054U - - Google Patents
Info
- Publication number
- JPS6416054U JPS6416054U JP11012587U JP11012587U JPS6416054U JP S6416054 U JPS6416054 U JP S6416054U JP 11012587 U JP11012587 U JP 11012587U JP 11012587 U JP11012587 U JP 11012587U JP S6416054 U JPS6416054 U JP S6416054U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- clamp arm
- disk
- spring
- lever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案装置の正面図、第２図は第１図
の平面図、第３図は第１図の下面図、第４図は第
１図の断面図、第５図は第３図の断面図、第
６図はウエハーを本考案装置に装入する際の図、
第７図はウエハーが本考案装置のピンに保持され
た状態を示す図。第８図は従来技術（ウエハー置
き台切欠き型）の正面図、第９図は第８図の平面
図、第１０図は従来装置（クランプアームスライ
ド式）の正面図、第１１図は第１０図の平面図で
ある。
１，１′，１″……デイスク、２，２′，２″
……台本体、５，５′，５″……ウエハー、８，
８″……クランプアーム、９……レバー、１０…
…外側クランプ、１１……内側クランプ、１２，
１２″……ピン、１３……バネ、１５……バネ、
１９，１９′，１９″……バキユームチヤツク、
２０″……クランプロツド、２１′……ウエハー
クランプ。
Fig. 1 is a front view of the device of the present invention, Fig. 2 is a plan view of Fig. 1, Fig. 3 is a bottom view of Fig. 1, Fig. 4 is a sectional view of Fig. 1, and Fig. 5 is a Figure 6 is a cross-sectional view of the wafer being loaded into the device of the present invention;
FIG. 7 is a diagram showing a state in which the wafer is held by the pins of the device of the present invention. Fig. 8 is a front view of the conventional technology (wafer stand notch type), Fig. 9 is a plan view of Fig. 8, Fig. 10 is a front view of the conventional device (clamp arm sliding type), and Fig. 11 is the front view of the conventional device (clamp arm sliding type). FIG. 10 is a plan view of FIG. 1, 1', 1''...Disc, 2, 2', 2''
...stand body, 5,5',5''...wafer, 8,
8″...Clamp arm, 9...Lever, 10...
...Outer clamp, 11...Inner clamp, 12,
12″...Pin, 13...Spring, 15...Spring,
19, 19', 19''... Bakyumuchutsuku,
20″...Clamp rod, 21′...Wafer clamp.
Claims (1)
ンプアームとレバーとを揺動可能に枢着し、前記
デイスクに貫通してウエハーを押さえるクランプ
をクランプアームに複数個設けると共に、前記ウ
エハー置き台に貫通してウエハーを保持するピン
をレバーに複数個設け、前記クランプアームとデ
イスクとの間にバネを介在させ、該バネより強力
なバネ力を有するバネをクランプアームとレバー
との間に介在させたことを特徴とするデイスクの
ウエハー置き台に設けられたクランプ装置。 A clamp arm and a lever are pivotably attached to the back side of a disk having a wafer holder, and the clamp arm is provided with a plurality of clamps that penetrate the disk and hold the wafer, and the clamp arm is provided with a plurality of clamps that penetrate the wafer holder and hold the wafer. A plurality of pins for holding the wafer are provided on the lever, a spring is interposed between the clamp arm and the disk, and a spring having a stronger spring force than the spring is interposed between the clamp arm and the lever. A special feature is the clamp device installed on the wafer stand of the disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11012587U JPH0517798Y2 (en) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11012587U JPH0517798Y2 (en) | 1987-07-20 | 1987-07-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6416054U true JPS6416054U (en) | 1989-01-26 |
| JPH0517798Y2 JPH0517798Y2 (en) | 1993-05-12 |
Family
ID=31346998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11012587U Expired - Lifetime JPH0517798Y2 (en) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0517798Y2 (en) |
-
1987
- 1987-07-20 JP JP11012587U patent/JPH0517798Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0517798Y2 (en) | 1993-05-12 |