JPS6412202A - Semiconductor laser length measuring apparatus - Google Patents
Semiconductor laser length measuring apparatusInfo
- Publication number
- JPS6412202A JPS6412202A JP62167511A JP16751187A JPS6412202A JP S6412202 A JPS6412202 A JP S6412202A JP 62167511 A JP62167511 A JP 62167511A JP 16751187 A JP16751187 A JP 16751187A JP S6412202 A JPS6412202 A JP S6412202A
- Authority
- JP
- Japan
- Prior art keywords
- laser diode
- semiconductor laser
- box body
- light source
- oscillation wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Semiconductor Lasers (AREA)
Abstract
PURPOSE:To achieve stability of oscillation wavelength while compactizing the equipment, by using a semiconductor laser diode as light source while other optical components and optoelectronic components (excluding a cube corner of a moving part) are all housed in one box body. CONSTITUTION:An optical unit 12 has a laser diode 13 of a light source, required optical components and optoelectronic components arranged at specified positions in one box body to be compactized and fixed on a base table 11. A laser beam from the laser diode 13 is divided with beam splitters 17 and 20 into a measuring beam and a reference beam, the measuring beam reflected with a recurring mirror 4 of a moving section 7 is combined with the reference beam by a beam combination prism 21 and a beam with an interference fringe generated with the combination thereof is received with a light receiver 24. An output of the laser diode 13 is detected with a level detector 19 and an oscillation wavelength thereof 13 is controlled constantly through a Peltier element 15 according to an output level.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62167511A JPS6412202A (en) | 1987-07-03 | 1987-07-03 | Semiconductor laser length measuring apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62167511A JPS6412202A (en) | 1987-07-03 | 1987-07-03 | Semiconductor laser length measuring apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6412202A true JPS6412202A (en) | 1989-01-17 |
Family
ID=15851038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62167511A Pending JPS6412202A (en) | 1987-07-03 | 1987-07-03 | Semiconductor laser length measuring apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6412202A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56144109A (en) * | 1980-04-10 | 1981-11-10 | Meinan Machinery Works | Method and apparatus for restarting fixed speed outer circumference drive type veneer lathe |
EP0498575A2 (en) * | 1991-02-08 | 1992-08-12 | Hughes Aircraft Company | Stabilized two color laser diode interferometer |
US5428446A (en) * | 1993-03-29 | 1995-06-27 | Ziegert; John C. | Measurement instrument with interferometer and method |
-
1987
- 1987-07-03 JP JP62167511A patent/JPS6412202A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56144109A (en) * | 1980-04-10 | 1981-11-10 | Meinan Machinery Works | Method and apparatus for restarting fixed speed outer circumference drive type veneer lathe |
EP0498575A2 (en) * | 1991-02-08 | 1992-08-12 | Hughes Aircraft Company | Stabilized two color laser diode interferometer |
EP0498575A3 (en) * | 1991-02-08 | 1993-02-24 | Hughes Aircraft Company | Stabilized two color laser diode interferometer |
US5428446A (en) * | 1993-03-29 | 1995-06-27 | Ziegert; John C. | Measurement instrument with interferometer and method |
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