JPS6412105A - Speed control circuit for double acting cylinder - Google Patents

Speed control circuit for double acting cylinder

Info

Publication number
JPS6412105A
JPS6412105A JP16682287A JP16682287A JPS6412105A JP S6412105 A JPS6412105 A JP S6412105A JP 16682287 A JP16682287 A JP 16682287A JP 16682287 A JP16682287 A JP 16682287A JP S6412105 A JPS6412105 A JP S6412105A
Authority
JP
Japan
Prior art keywords
speed control
rod
supply port
air supply
double acting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16682287A
Other languages
Japanese (ja)
Other versions
JPH076526B2 (en
Inventor
Yoichi Ito
Yutaka Kakehi
Minoru Soraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16682287A priority Critical patent/JPH076526B2/en
Publication of JPS6412105A publication Critical patent/JPS6412105A/en
Publication of JPH076526B2 publication Critical patent/JPH076526B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Fluid-Pressure Circuits (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To restrain sticking phenomenon by providing one speed control valve at one air supply port and two speed control valves in the opposite direction at the other air supply port. CONSTITUTION:Speed control valves 8a, 8b are provided at an air supply port 4 on rod 3 side of a double acting cylinder 1 and a speed control valve 8c is provided at an air supply port 5 on non-rod side. In this arrangement, in case of operating the rod 3 to the non-rod side, the inflow and outflow of air is controlled by the flow control valves 8b, 8c to operate the rod 3 while the inflow and outflow are respectively throttled, so that a sudden pressure change at the time of starting operation can be prevented so as to control a sticking phenomenon.
JP16682287A 1987-07-06 1987-07-06 Speed control method for double-acting cylinder for wafer transfer Expired - Lifetime JPH076526B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16682287A JPH076526B2 (en) 1987-07-06 1987-07-06 Speed control method for double-acting cylinder for wafer transfer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16682287A JPH076526B2 (en) 1987-07-06 1987-07-06 Speed control method for double-acting cylinder for wafer transfer

Publications (2)

Publication Number Publication Date
JPS6412105A true JPS6412105A (en) 1989-01-17
JPH076526B2 JPH076526B2 (en) 1995-01-30

Family

ID=15838308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16682287A Expired - Lifetime JPH076526B2 (en) 1987-07-06 1987-07-06 Speed control method for double-acting cylinder for wafer transfer

Country Status (1)

Country Link
JP (1) JPH076526B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225202A (en) * 1982-06-23 1983-12-27 Katsuichi Saito Speed control system
JPS61154305U (en) * 1985-03-15 1986-09-25

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225202A (en) * 1982-06-23 1983-12-27 Katsuichi Saito Speed control system
JPS61154305U (en) * 1985-03-15 1986-09-25

Also Published As

Publication number Publication date
JPH076526B2 (en) 1995-01-30

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