JPS6412105A - Speed control circuit for double acting cylinder - Google Patents
Speed control circuit for double acting cylinderInfo
- Publication number
- JPS6412105A JPS6412105A JP16682287A JP16682287A JPS6412105A JP S6412105 A JPS6412105 A JP S6412105A JP 16682287 A JP16682287 A JP 16682287A JP 16682287 A JP16682287 A JP 16682287A JP S6412105 A JPS6412105 A JP S6412105A
- Authority
- JP
- Japan
- Prior art keywords
- speed control
- rod
- supply port
- air supply
- double acting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Fluid-Pressure Circuits (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To restrain sticking phenomenon by providing one speed control valve at one air supply port and two speed control valves in the opposite direction at the other air supply port. CONSTITUTION:Speed control valves 8a, 8b are provided at an air supply port 4 on rod 3 side of a double acting cylinder 1 and a speed control valve 8c is provided at an air supply port 5 on non-rod side. In this arrangement, in case of operating the rod 3 to the non-rod side, the inflow and outflow of air is controlled by the flow control valves 8b, 8c to operate the rod 3 while the inflow and outflow are respectively throttled, so that a sudden pressure change at the time of starting operation can be prevented so as to control a sticking phenomenon.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16682287A JPH076526B2 (en) | 1987-07-06 | 1987-07-06 | Speed control method for double-acting cylinder for wafer transfer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16682287A JPH076526B2 (en) | 1987-07-06 | 1987-07-06 | Speed control method for double-acting cylinder for wafer transfer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6412105A true JPS6412105A (en) | 1989-01-17 |
JPH076526B2 JPH076526B2 (en) | 1995-01-30 |
Family
ID=15838308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16682287A Expired - Lifetime JPH076526B2 (en) | 1987-07-06 | 1987-07-06 | Speed control method for double-acting cylinder for wafer transfer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH076526B2 (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58225202A (en) * | 1982-06-23 | 1983-12-27 | Katsuichi Saito | Speed control system |
JPS61154305U (en) * | 1985-03-15 | 1986-09-25 |
-
1987
- 1987-07-06 JP JP16682287A patent/JPH076526B2/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58225202A (en) * | 1982-06-23 | 1983-12-27 | Katsuichi Saito | Speed control system |
JPS61154305U (en) * | 1985-03-15 | 1986-09-25 |
Also Published As
Publication number | Publication date |
---|---|
JPH076526B2 (en) | 1995-01-30 |
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