JPS6410139A - Manufacture of vibration type transducer - Google Patents

Manufacture of vibration type transducer

Info

Publication number
JPS6410139A
JPS6410139A JP16617687A JP16617687A JPS6410139A JP S6410139 A JPS6410139 A JP S6410139A JP 16617687 A JP16617687 A JP 16617687A JP 16617687 A JP16617687 A JP 16617687A JP S6410139 A JPS6410139 A JP S6410139A
Authority
JP
Japan
Prior art keywords
substrate
groove
vacuum
epitaxial layer
opening part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16617687A
Other languages
Japanese (ja)
Other versions
JPH0519088B2 (en
Inventor
Kyoichi Ikeda
Tetsuya Watanabe
Hideki Kuwayama
Takashi Kobayashi
Sunao Nishikawa
Takashi Yoshida
Kinji Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP16617687A priority Critical patent/JPS6410139A/en
Publication of JPS6410139A publication Critical patent/JPS6410139A/en
Publication of JPH0519088B2 publication Critical patent/JPH0519088B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To improve pressure characteristics and temperature characteristics by forming a vibration beam integrally at a specific interval to an Si substrate and then sealing an opening part under a vacuum. CONSTITUTION:An oxide film 9 is formed on the surface of the n-type Si substrate 8, and then a groove 10 is formed in the center part and a groove 11 is further formed through the groove 10. Then, p-type epitaxial layers 12, 14, and 15 and an n-type epitaxial layer 16 are formed in the groove 11, and then the oxide film 8 and epitaxial layers 12 and 15 are removed to form an opening part 18 and a gap between the substrate 8 and epitaxial layer 14. Then, the opening part 18is filled by sputtering Si or SiO2 under a vacuum. Consequently, both ends of the epitaxial layer 14 as the vibration beam 13 are fixed integrally to the substrate 8 and the remaining part is formed at the specific interval. Further, a hollow chamber 21 is formed in the vacuum state, so a vacuum is produced internally. Consequently, a transducer with excellent pressure characteristics and temperature characteristics is obtained.
JP16617687A 1987-07-02 1987-07-02 Manufacture of vibration type transducer Granted JPS6410139A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16617687A JPS6410139A (en) 1987-07-02 1987-07-02 Manufacture of vibration type transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16617687A JPS6410139A (en) 1987-07-02 1987-07-02 Manufacture of vibration type transducer

Publications (2)

Publication Number Publication Date
JPS6410139A true JPS6410139A (en) 1989-01-13
JPH0519088B2 JPH0519088B2 (en) 1993-03-15

Family

ID=15826487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16617687A Granted JPS6410139A (en) 1987-07-02 1987-07-02 Manufacture of vibration type transducer

Country Status (1)

Country Link
JP (1) JPS6410139A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03226637A (en) * 1990-01-31 1991-10-07 Yokogawa Electric Corp Vibrator type semiconductor manometer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186725A (en) * 1984-03-06 1985-09-24 Yokogawa Hokushin Electric Corp Pressure sensor
JPS61221631A (en) * 1984-10-11 1986-10-02 バイサラ・オ−ワイ Capacity type absolute pressure transducer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186725A (en) * 1984-03-06 1985-09-24 Yokogawa Hokushin Electric Corp Pressure sensor
JPS61221631A (en) * 1984-10-11 1986-10-02 バイサラ・オ−ワイ Capacity type absolute pressure transducer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03226637A (en) * 1990-01-31 1991-10-07 Yokogawa Electric Corp Vibrator type semiconductor manometer

Also Published As

Publication number Publication date
JPH0519088B2 (en) 1993-03-15

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees