JPS6378445A - Secondary electron detector - Google Patents
Secondary electron detectorInfo
- Publication number
- JPS6378445A JPS6378445A JP22085086A JP22085086A JPS6378445A JP S6378445 A JPS6378445 A JP S6378445A JP 22085086 A JP22085086 A JP 22085086A JP 22085086 A JP22085086 A JP 22085086A JP S6378445 A JPS6378445 A JP S6378445A
- Authority
- JP
- Japan
- Prior art keywords
- scintillator
- ring
- face
- detection means
- secondary electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 20
- 238000010894 electron beam technology Methods 0.000 abstract description 17
- 238000007689 inspection Methods 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔概 要〕
本発明は２次電子検出器に係り、電子ビーム装置等で試
料に照射した電子ビームによって生ずる２次電子をシン
チレータと電子増倍管等からなる２次電子の検出手段で
検出する際に、複数の検出手段のシンチレータに供給す
る高電圧をリング状電極で一括して供給する様にして、
検出手段の点検、交換を容易にしたものである。[Detailed Description of the Invention] [Summary] The present invention relates to a secondary electron detector, which detects secondary electrons generated by an electron beam irradiated onto a sample using an electron beam device, etc., using a secondary electron detector consisting of a scintillator, an electron multiplier, etc. When detecting electrons with the detection means, the high voltage to be supplied to the scintillators of the plurality of detection means is supplied all at once using a ring-shaped electrode.
This makes it easy to inspect and replace the detection means.
本発明は２次電子検出器に係り、特に複数の２次電子を
検出する検出手段を電子ビームが照射される試料面と平
行する面内に配設して、定量測定を行なう、電子ビーム
装置等に用いる２次電子検出器に関する。The present invention relates to a secondary electron detector, and particularly to an electron beam device that performs quantitative measurements by disposing detection means for detecting a plurality of secondary electrons in a plane parallel to a sample surface irradiated with an electron beam. This invention relates to secondary electron detectors used in applications such as secondary electron detectors.
電子ビーム装置では試料に照射した電子ビーノ、によっ
て発生する２次電子を検出するときに用いる２次電子検
出器の交換点検がしばしば行なわれる。この様な交換点
検の容易な２次電子検出器が要望されていた。In electron beam devices, the secondary electron detector used to detect secondary electrons generated by the electron beam irradiated onto a sample is often inspected for replacement. There has been a demand for such a secondary electron detector that is easy to replace and inspect.
電子ビーム装＝、例えば電子ビームテスタ、或いは測長
電子凹微鏡等の定量測定を行う様なものでは試料に電子
ビームを照射し、試料から放出された２次電子を２次電
子検出器で検出していた。Electron beam equipment = For example, in an electron beam tester or a length-measuring electron concave microscope that performs quantitative measurements, a sample is irradiated with an electron beam, and the secondary electrons emitted from the sample are detected by a secondary electron detector. was detected.
この場合に１つの２次電子検出器を用いていたが、最近
では第６図に示す様に複数の２次電子検出器２ａ〜２ｄ
を電子ビーム装置のチェンバー１内に気富に配置し、試
料から放射された２次電子３をシンチレータ４に加えて
ライトバイブロを通じて光電子増倍管７で増倍させて、
電気信号に変換していた。In this case, one secondary electron detector was used, but recently, as shown in FIG. 6, multiple secondary electron detectors 2a to 2d are used.
is placed in the chamber 1 of the electron beam device, and the secondary electrons 3 emitted from the sample are added to the scintillator 4 and multiplied by the photomultiplier tube 7 through the light vibro.
It was converted into an electrical signal.
２次電子を検出するための２次電子検出器２ａ〜２ｄの
構成としては円筒状のコレクタ電極５の底部に穿たれた
透孔１１を通じて、この透孔１１に対向配置したシンチ
レータ４に２次電子が入射される。２次電子３を受は入
れるシンチレータ１橿８はシンチレータ４の外周に設け
られ、この電極に１０Ｋｖ程度の高電圧を印加するため
に接続されたワイヤ１０は１つの高圧導入端子９に接続
されている。The secondary electron detectors 2a to 2d for detecting secondary electrons are configured such that secondary electrons are transmitted through a through hole 11 formed in the bottom of a cylindrical collector electrode 5 to a scintillator 4 disposed opposite to this through hole 11. Electrons are incident. A scintillator 1 rod 8 for receiving secondary electrons 3 is provided on the outer periphery of the scintillator 4, and a wire 10 connected to apply a high voltage of about 10 Kv to this electrode is connected to one high voltage introduction terminal 9. There is.
シンチレータ４の対向する透孔１１とは反対面にライト
バイブロを対接し、シンチレータ４に入射させた２次電
子を受けとり発光して、この光信号をライトバイブロを
通じて光電子増倍管７で光を増倍して電気信号が取り出
される。普通、コレクタ電極５には一２００〜５００Ｖ
程度の電圧が加えられている。A light vibro is placed in contact with the surface of the scintillator 4 opposite to the opposing through holes 11, receives the secondary electrons incident on the scintillator 4, emits light, and transmits this optical signal through the light vibro to a photomultiplier tube 7 to amplify the light. The electrical signal is extracted by multiplying it. Normally, the collector electrode 5 has a voltage of -200 to 500V.
A certain amount of voltage is applied.
上記従来構成による２次電子検出器ではチェンバー１内
は真空になされているが、この工学容器内で高圧を供給
するためのワイヤ１０を複数本引き回すためワイヤが多
く、且つ長くなる。又、２次電子検出器２ａ〜２ｄの特
にシンチレータ等を交換する際には、コレクタ重視５内
に押入されているシンチレータ電極８からワイヤ１０を
外さなければならない。しかし、狭いチェンバー１内で
複数の２次電子検出器のワイヤ１０を外すことは大変煩
雑である。これらは交換だけでなく点検等についても言
えることである。In the secondary electron detector having the above-mentioned conventional configuration, the chamber 1 is kept in a vacuum, but since a plurality of wires 10 for supplying high pressure are routed within this engineering container, the number of wires becomes large and long. Furthermore, when replacing the scintillators and the like of the secondary electron detectors 2a to 2d, the wire 10 must be removed from the scintillator electrode 8 that is inserted into the collector 5. However, removing the wires 10 of the plurality of secondary electron detectors within the narrow chamber 1 is very complicated. These things apply not only to replacement but also to inspection, etc.
又、コレクタ電極５がシンチレータ電極８やシンチレー
タ４を覆っているためにシンチレータ４の交換、点検は
益々煩られしくなる欠点があった。Furthermore, since the collector electrode 5 covers the scintillator electrode 8 and the scintillator 4, there is a drawback that replacing and inspecting the scintillator 4 becomes increasingly troublesome.
本発明は叙上の欠点に鑑みなされたもので、その目的と
するところは極めて簡単に保安、点検や交換が可能な２
次電子検出器を提供しようとするものである。The present invention was made in view of the above-mentioned drawbacks, and its purpose is to provide two systems that can be very easily secured, inspected, and replaced.
The present invention aims to provide a secondary electron detector.
本発明の２次電子検出器は第１図に示す様にシンチレー
タ電極８の働きをするシンチレータキャンプ２３を有す
るシンチレータ４と対向配置したライトバイブロの反対
面に光電子増倍管７を有する２次電子を検出する複数の
検出手段１２３〜１２ｄを、円筒状の中心部に電子ビー
ム１５が通過する円筒状コレクタ電極１４の円筒部に穿
った透孔１６に対向させて、シンチレータキャンプ２３
に印加する高電圧（１０Ｋｖ）をリング１３を通じて与
えるようにし、シンチレータ４等の交換を容易にしたも
のである。As shown in FIG. 1, the secondary electron detector of the present invention has a scintillator 4 having a scintillator camp 23 functioning as a scintillator electrode 8, and a secondary electron detector 4 having a photomultiplier tube 7 on the opposite side of a light vibro placed facing the scintillator 4. A plurality of detection means 123 to 12d for detecting the scintillator camp 23 are arranged to face the through hole 16 bored in the cylindrical portion of the cylindrical collector electrode 14 through which the electron beam 15 passes through the cylindrical center.
The high voltage (10 Kv) applied to the scintillator 4 is applied through the ring 13, making it easy to replace the scintillator 4 and the like.
本発明の２次電子検出器はチェンバー１に穿った透孔１
ａ〜ｌｄ（第２図）に本発明の複数の検出手段１２ａ〜
１２ｄを挿入し、チェンバー内で共通のリング１３を溝
１７内に落し込むと共にスプリング等で押圧するだけで
高圧供給のワイヤ１０とすることにより、シンチレータ
の保守が簡単になる。The secondary electron detector of the present invention has a through hole 1 bored in a chamber 1.
A to ld (FIG. 2) are a plurality of detection means 12a to 12a of the present invention.
12d, the common ring 13 is dropped into the groove 17 within the chamber, and the wire 10 is supplied with high pressure by simply pressing it with a spring or the like, thereby simplifying the maintenance of the scintillator.
以下、本発明の２次電子検出器を第１図乃至第５図（ａ
ｌ、 （ｂｌ、 （Ｃ）について詳記する。Hereinafter, the secondary electron detector of the present invention will be explained with reference to FIGS. 1 to 5 (a).
l, (bl, (C)) will be described in detail.
本発明の電子ビーム装置は図示しないが電子銃から放出
された電子ビームは真空のチェンバー１内を通って最終
段では対物レンズを形成する対物レンズ用コイル１８で
試料１９上に集束される。Although the electron beam apparatus of the present invention is not shown, an electron beam emitted from an electron gun passes through a vacuum chamber 1 and is focused on a sample 19 by an objective lens coil 18 forming an objective lens at the final stage.
電子ビーム照射によって試料１９から放出された２次電
子３は本発明の円筒状コレクタ電極（フォーカシング
グリッド）１４に形成した透孔１６を通じて検出手段１
２ａ〜１２ｄのシンチレータ４に入射される。The secondary electrons 3 emitted from the sample 19 by electron beam irradiation are transferred to the cylindrical collector electrode (focusing
The detection means 1 is detected through the through hole 16 formed in the grid) 14.
The light is incident on the scintillators 4 of 2a to 12d.
上述の円筒状コレクタ電極１４は第４図に示す様に全屈
等の円筒部２２に複数（本発明では４（固）の透孔１６
が穿たれ、これらは互いに円筒部２２の外周面に互に対
向して穿たれる。円筒部２２の一方はフランジ部２０で
塞がれ、このフランジ部２０の中央に電子ビーム１５を
通過させるための透孔２１が穿たれている。この透孔２
１は電子ビーム１５が通過し得る程度の小さな孔でもよ
い。The above-mentioned cylindrical collector electrode 14 has a plurality of (in the present invention, four (hard)) through holes 16 in a fully bent cylindrical portion 22, as shown in FIG.
These holes are bored on the outer peripheral surface of the cylindrical portion 22 so as to face each other. One side of the cylindrical portion 22 is closed with a flange portion 20, and a through hole 21 is bored in the center of the flange portion 20 through which the electron beam 15 passes. This through hole 2
The hole 1 may be small enough to allow the electron beam 15 to pass through.
この様にするとシンチレータ４に達する上方からの不用
な２次電子を吸収出来る。このコレクク電極には一２０
０Ｖ〜５００Ｖ程度の電圧を印加する。In this way, unnecessary secondary electrons reaching the scintillator 4 from above can be absorbed. This corrective electrode has 120
A voltage of about 0V to 500V is applied.
この円筒状コレクタ電極１４と対向配置された複数の検
出手段１２ａ〜１２ｄの構成は第３図に示す様に成され
ている。叩ちシンチレータ４は２次電子３が入射すると
、これを光に変換して、ライトバイブロを通じて電子増
倍管７ （第１図参照）に矢印Ｂで示す様に伝える。The configuration of the plurality of detection means 12a to 12d arranged opposite to the cylindrical collector electrode 14 is as shown in FIG. When the secondary electrons 3 are incident on the striking scintillator 4, they are converted into light and transmitted to the electron multiplier tube 7 (see FIG. 1) through the light vibro as shown by arrow B.
このために、シンチレータ４は光電面と反対側でライト
バイブロと対接され、ライトバイブロの先端外周に設け
た雄螺子部２６にシンチレータキャップ２３の内周に設
けた雌螺子部２５を螺合させて、シンチレータ４をライ
トバイブロの端面に対接させる。For this purpose, the scintillator 4 is brought into contact with the light vibro on the side opposite to the photocathode, and the female thread 25 provided on the inner periphery of the scintillator cap 23 is screwed into the male thread 26 provided on the outer periphery of the tip of the light vibro. Then, the scintillator 4 is brought into contact with the end surface of the light vibro.
シンチレータキャップ２３はシンチレータ電極８となる
ものでＵ字状の全屈キャップで構成され、前面の蓋部２
３ａには開口部２４が穿たれ、円筒状コレクタ電極１４
の透孔１６とシンチレータキャップ２３の開口部２４を
通過した２次電子３がシンチレータ４に入射される。The scintillator cap 23 serves as the scintillator electrode 8, and is composed of a U-shaped fully bent cap, and the front lid part 2
3a has an opening 24 formed therein, and a cylindrical collector electrode 14.
The secondary electrons 3 that have passed through the through hole 16 and the opening 24 of the scintillator cap 23 are incident on the scintillator 4.
更に第３図には示さないが第１図に示す様にライトバイ
ブロの途中にはフランジ２７が嵌着され、ライトバイブ
ロの端面ば電子増倍管７に接し、適当なケーシング２８
によって電子増倍管７やフランジ２７が覆われている。Although not shown in FIG. 3, a flange 27 is fitted in the middle of the light vibro as shown in FIG.
The electron multiplier tube 7 and the flange 27 are covered by this.
電子鏡筒を構成するチェンバー１には円周４等分位置に
透孔１ａ〜１ｄが穿たれ、その鏡筒内に円盤状の絶縁部
材２９が固定され、中心部には円筒状コレクタ電極１４
の円筒部２２が挿入出来る中心孔３１が穿たれ、円盤状
の絶縁部材２９の厚み方向の翼中位置に円周４等分位置
に外周から中心孔３１に向って雪道する４つの貫通孔３
０が穿たれこの宙通孔３０は鏡筒に穿った透孔１ａ〜１
ｄ位置と一致する。The chamber 1 constituting the electron lens barrel has through holes 1a to 1d formed at four equal positions on the circumference, a disc-shaped insulating member 29 is fixed inside the lens barrel, and a cylindrical collector electrode 14 is provided in the center.
A center hole 31 into which the cylindrical portion 22 can be inserted is bored, and four through holes extending from the outer periphery toward the center hole 31 are formed at positions in the blade in the thickness direction of the disc-shaped insulating member 29 at positions dividing the circumference into four equal parts. 3
0 is drilled, and this air through hole 30 is the same as the through holes 1a to 1 drilled in the lens barrel.
Matches the d position.
上述した検出手段１２ａ〜１２ｄの先端を透孔１ａ〜１
ｄと貫通孔３０に挿通させる。尚３２は透孔１ａ〜１ｄ
に配したＯリングでチェンバー１と検出手段間の気密保
持がなされる。フランジ２７は検出手段と一体化されて
いるのでチェンバー１の外壁に螺子３３で固定すること
でチェンバーと一体化される。絶縁部材２９には円筒状
の溝１７がリング１３と同径で形成され、満１７内にリ
ング１３が挿入される。少なくとも４つのシンチレータ
故障・７ブ２３と接する部分の溝１７の深さはシンチレ
ータキャップ２３外周面迄達している。溝１７の深さを
一様にシンチレータキャップ２３に達する迄切り込む様
にすればリング１３のシンチレータキャップ２３と接す
る面（底面）に第５図（ａ）に示す様な凸部３４を設け
る必要がなく第５図（ｂ）に示す様な底面が平らなリン
グ１３を用いることが出来る。この場合、リング１３の
下面の一部を第５図（Ｃ）にその断面を示す如く、テー
バ面３５にすることにより高電圧導入端子９との接合を
容易にすることができる。リング１３はチェンバー１に
気密な状態で取り付けられた高電圧導入端子９と接続さ
れ、更にリング１３は図示しないスプリング等を介して
溝１７内でシンチレータキャップ２３に押圧されて電気
的に接続されている。またリング１３自身のバネ性を利
用すればスプリングは不要となる。The tips of the detection means 12a to 12d described above are connected to the through holes 1a to 1.
d and through the through hole 30. In addition, 32 are through holes 1a to 1d.
An O-ring placed between the chamber 1 and the detection means is kept airtight. Since the flange 27 is integrated with the detection means, it can be integrated with the chamber by fixing it to the outer wall of the chamber 1 with screws 33. A cylindrical groove 17 having the same diameter as the ring 13 is formed in the insulating member 29, and the ring 13 is inserted into the groove 17. The depth of the grooves 17 in the portions in contact with at least four scintillator failure/7 tabs 23 reaches the outer peripheral surface of the scintillator cap 23. If the grooves 17 are cut to a uniform depth until they reach the scintillator cap 23, it is necessary to provide a convex portion 34 as shown in FIG. 5(a) on the surface (bottom surface) of the ring 13 that contacts the scintillator cap 23. Instead, a ring 13 with a flat bottom as shown in FIG. 5(b) can be used. In this case, by forming a part of the lower surface of the ring 13 into a tapered surface 35, as shown in the cross section of FIG. The ring 13 is connected to the high voltage introduction terminal 9 which is airtightly attached to the chamber 1, and the ring 13 is electrically connected to the scintillator cap 23 by being pressed inside the groove 17 via a spring or the like (not shown). There is. Further, if the springiness of the ring 13 itself is utilized, a spring is not necessary.
本発明の２次電子検出器は、上述の様に構成されている
ので点検、交換時には溝内からリングを取り出し、検出
手段をチェンバーに穿った透孔から引き出すだけでよく
、極めて簡単にシンチレータ等を交換することが可能と
なった。Since the secondary electron detector of the present invention is constructed as described above, when inspecting or replacing it, it is only necessary to take out the ring from the groove and pull out the detection means from the through hole bored in the chamber. It became possible to exchange.
本発明は上述の様に構成し、動作するのでシンチレータ
故障、或いは検出手段の点検等にはリングを外すだけで
検出手段を簡単に引き出すことが出来、長いワイヤをチ
ェンバー内に引き回す必要がない等の多（の特徴を有す
る。Since the present invention is constructed and operates as described above, in case of scintillator failure or inspection of the detection means, the detection means can be easily pulled out by simply removing the ring, and there is no need to route long wires into the chamber. have many (characteristics of)
第１図は本発明の２次電子検出装置の平面図、第２図は
第１図のＡ−Ａ ’断面矢視図、第３図は本発明に用い
る２次電子検出手段の一部拡大側断面図、
第４図は本発明に用いるコレクタ電極の斜視図゛、第５
図（ａｌ、 （ｂｌは本発明に用いるリングの外観を示
す斜視図、
第５図（Ｃ１は本発明のリングの断面図、第６図は従来
の２次電子検出器の平面図である。
１・・・チェンバー、
２８〜２ｄ・・・２次電子検出器、
４・・・シンチレータ、
５・・・コレクタ電極、
６・・・ライトパイプ、
７・・・光電子増倍管、
８・・・シンチレータ電極、
９・・・高電圧導入端子、
１０・・・ワイヤ、
１２ａ〜１２ｄ・・・検出手段、
１３・・・リング、
１４・・・円筒状コレクタ電極、
１６・・・透孔、
１７・・・溝、
２３・・・シンチレータ電極・ノブ、
２９・・・絶縁部材。Fig. 1 is a plan view of the secondary electron detection device of the present invention, Fig. 2 is a cross-sectional view taken along line A-A' in Fig. 1, and Fig. 3 is a partially enlarged view of the secondary electron detection means used in the present invention. 4 is a side sectional view, and FIG. 4 is a perspective view of the collector electrode used in the present invention.
Figures (al and bl are perspective views showing the external appearance of the ring used in the present invention, Figure 5 (C1 is a sectional view of the ring of the present invention, and Figure 6 is a plan view of a conventional secondary electron detector). 1... Chamber, 28-2d... Secondary electron detector, 4... Scintillator, 5... Collector electrode, 6... Light pipe, 7... Photomultiplier tube, 8... -Scintillator electrode, 9...High voltage introduction terminal, 10...Wire, 12a-12d...Detection means, 13...Ring, 14...Cylindrical collector electrode, 16...Through hole, 17...Groove, 23...Scintillator electrode/knob, 29...Insulating member.
Claims (1)
置したライトパイプの反対面に光電子増倍管（７）を有
する２次電子を検出する検出手段と、 複数の該検出手段を共通の円筒状コレクタの開口部に対
向配置し、 上記複数の検出手段のシンチレータ電極に供給する高電
圧をリング状電極で一体に供給してなることを特徴とす
る２次電子検出器。[Claims] A scintillator (4) having a scintillator electrode and a detection means for detecting secondary electrons having a photomultiplier tube (7) on the opposite side of a light pipe disposed facing each other; and a plurality of the detection means common to each other. A secondary electron detector, characterized in that a ring-shaped electrode is arranged to face the opening of a cylindrical collector and integrally supplies a high voltage to the scintillator electrodes of the plurality of detection means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22085086A JPS6378445A (en) | 1986-09-20 | 1986-09-20 | Secondary electron detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22085086A JPS6378445A (en) | 1986-09-20 | 1986-09-20 | Secondary electron detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6378445A true JPS6378445A (en) | 1988-04-08 |
| JPH0551136B2 JPH0551136B2 (en) | 1993-07-30 |
Family
ID=16757519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22085086A Granted JPS6378445A (en) | 1986-09-20 | 1986-09-20 | Secondary electron detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6378445A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002184340A (en) * | 2000-09-29 | 2002-06-28 | Schlumberger Technol Inc | Small size high efficiency scintillation detector for secondary electron detection |
-
1986
- 1986-09-20 JP JP22085086A patent/JPS6378445A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002184340A (en) * | 2000-09-29 | 2002-06-28 | Schlumberger Technol Inc | Small size high efficiency scintillation detector for secondary electron detection |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0551136B2 (en) | 1993-07-30 |
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