JPS6375909A - Position controller - Google Patents
Position controllerInfo
- Publication number
- JPS6375909A JPS6375909A JP21940186A JP21940186A JPS6375909A JP S6375909 A JPS6375909 A JP S6375909A JP 21940186 A JP21940186 A JP 21940186A JP 21940186 A JP21940186 A JP 21940186A JP S6375909 A JPS6375909 A JP S6375909A
- Authority
- JP
- Japan
- Prior art keywords
- movable body
- signal
- actuator
- amplifier
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims 1
- 230000004075 alteration Effects 0.000 abstract 1
- 230000010355 oscillation Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003534 oscillatory effect Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、位置制御装置に関し、特に半導体露光装置等
に使用され、半導体ウェハおよびマスク等の精密な位置
決め等を行なうための装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a position control device, and in particular to a device used in semiconductor exposure equipment and the like for precise positioning of semiconductor wafers, masks, etc. be.
［従来の技術］
従来、この種の装置は例えば第３図に示すように構成さ
れていた。同図の装置は、積分器１、この装置のサーボ
特性を補正するための補償器２、増幅器３、駆動用アク
チュエータとしての圧電素子４、可動体５、可動体５の
位置を検出する位置検出器６、そして減算器７を備えて
いる。[Prior Art] Conventionally, this type of device has been configured as shown in FIG. 3, for example. The device shown in the figure includes an integrator 1, a compensator 2 for correcting the servo characteristics of this device, an amplifier 3, a piezoelectric element 4 as a drive actuator, a movable body 5, and a position detector for detecting the position of the movable body 5. 6 and a subtracter 7.
第３図の装置では、可動体５の目標位置信号と位置検出
器６によって検出された信号との誤差信号を減算器７で
生成し、その誤差信号を積分器１に加えて、可動体５を
移動させ、位置検出器６の信号を目標位置信号に一致さ
せるように可動体５の位置を制御する。In the apparatus shown in FIG. 3, a subtracter 7 generates an error signal between the target position signal of the movable body 5 and the signal detected by the position detector 6, and the error signal is added to the integrator 1. is moved, and the position of the movable body 5 is controlled so that the signal from the position detector 6 matches the target position signal.
［発明が解決しようとする問題点］
この方法では、誤差信号を積分器１に加えているため可
動体５の過渡特性が積分器１の特性によって決定され、
目標位置信号の印加時等において、第４図に示すように
積分器１の出力の立上りの遅れにより可動体５の変位の
立上りが大幅に遅れるという不都合があった。また、立
上りを速くするために第５図に示すように増幅器３１を
設け、入力目標位置信号を直接可動体に増幅して加える
方法もあるが、この方法では立上りは速くなるが可動体
の応答が第６図に示すように振動的になるという不都合
があフた。[Problems to be Solved by the Invention] In this method, since the error signal is applied to the integrator 1, the transient characteristics of the movable body 5 are determined by the characteristics of the integrator 1.
When applying a target position signal, etc., there is a problem in that the rise of the displacement of the movable body 5 is significantly delayed due to the delay in the rise of the output of the integrator 1, as shown in FIG. In addition, in order to speed up the rise, there is a method of installing an amplifier 31 as shown in Fig. 5 to amplify and apply the input target position signal directly to the movable body. The inconvenience that the signal became vibrating as shown in FIG. 6 was eliminated.
本発明は、前述の従来形における問題点にかんがみ、位
置制御装置において、可動体の位置制定時における立上
り特性の改善および位置決め時間の短縮を図ることを目
的とする。SUMMARY OF THE INVENTION In view of the above-mentioned problems with the conventional type, an object of the present invention is to improve the start-up characteristics and shorten the positioning time when determining the position of a movable body in a position control device.
［問題点を解決するための手段］
上述の問題点を解決するため、本発明においては、目標
位置信号を直接的に可動体のアクチュエータに加える増
幅器と、可動体の速度および位置を検出しこれらに対応
する信号を増幅してフィードバックする手段とを含む制
御系が使用される。[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention includes an amplifier that directly applies a target position signal to an actuator of a movable body, and an amplifier that detects the speed and position of the movable body. A control system is used that includes means for amplifying and feeding back a signal corresponding to the signal.
上述の手段において、目標位置信号を増幅器を介して直
接的に可動体のアクチュエータに加えることにより高速
の立上りが実現できるとともに、特に可動体の速度に対
応する信号をフィードバックすることにより、可動体の
振動が抑制され立上り特性が大幅に改善される。In the above-mentioned means, a high-speed start-up can be achieved by applying the target position signal directly to the actuator of the movable body via an amplifier, and in particular, by feeding back a signal corresponding to the speed of the movable body, Vibration is suppressed and start-up characteristics are significantly improved.
［実施例］
以下図面を参照して本発明の詳細な説明する。第１図は
、本発明の１実施例に係わる位置制御装置の概略を示す
。同図の装置は、目標位置信号を増幅する増幅器１１、
積分器１２、加減算器１３、増幅器１４．駆動用アクチ
ュエータとしての圧電素子１５、可動体１６、可動体の
位置情報を得るための位置検出器１７、検出した位置信
号を増幅するための増幅器１８、可動体変位時の速度情
報を得るための速度検出器１９、検出した速度信号を増
幅するための増幅器２０、加算器２１そして減算器２２
によってオ（３成されている。[Example] The present invention will be described in detail below with reference to the drawings. FIG. 1 schematically shows a position control device according to an embodiment of the present invention. The device shown in the figure includes an amplifier 11 for amplifying the target position signal;
Integrator 12, adder/subtractor 13, amplifier 14. A piezoelectric element 15 as a drive actuator, a movable body 16, a position detector 17 for obtaining position information of the movable body, an amplifier 18 for amplifying the detected position signal, and a movable body for obtaining velocity information when the movable body is displaced. A speed detector 19, an amplifier 20 for amplifying the detected speed signal, an adder 21, and a subtracter 22
By o(3).
増幅器１１は可動体１６を目標位置近辺へ素早く８動さ
せるために圧電素子１５にバイアス電圧を与える働きを
するための増幅器であり、積分器１２は可動体１６の位
置ずれ量をなくしかつ可動体１６の位置すなわち圧電素
子１５の変位量を保つためのものである。増幅器１４は
位置信号に合せて圧電素子１５を変位させるために必要
な電圧を得るためのものであり、圧電素子１５は可動体
１６を駆動するアクチュエータとして作用するものであ
る。The amplifier 11 is an amplifier that serves to apply a bias voltage to the piezoelectric element 15 in order to quickly move the movable body 16 to the vicinity of the target position, and the integrator 12 eliminates the amount of positional deviation of the movable body 16 and 16, that is, the amount of displacement of the piezoelectric element 15. The amplifier 14 is for obtaining the voltage necessary to displace the piezoelectric element 15 in accordance with the position signal, and the piezoelectric element 15 acts as an actuator for driving the movable body 16.
第１図の装置において、目標位置入力信号を加えると増
幅器１１によって入力信号が素早く増幅器１４に加えら
れ、この増幅器１４によって増幅され圧電素子１５を変
位させ可動体１６を目標位置近辺に急速に動かす。この
とき、可動体１６の現在位置を位置検出器エフによって
検出し、この現在位置と目標位置との誤差を減算器２２
によって求め、この誤差を補正するための信号を積分器
１２によって作り出す。この積分器１２の出力信号等か
ら加算器１３によって位置ずれ量を補正した信号を作り
出し、この信号に応じて可動体１δの位置を制御する。In the apparatus shown in FIG. 1, when a target position input signal is applied, the input signal is quickly applied to the amplifier 14 by the amplifier 11, and is amplified by the amplifier 14 to displace the piezoelectric element 15 and rapidly move the movable body 16 to the vicinity of the target position. . At this time, the current position of the movable body 16 is detected by the position detector F, and the error between this current position and the target position is calculated by the subtractor 22.
The integrator 12 generates a signal for correcting this error. From the output signal of the integrator 12, etc., an adder 13 generates a signal with the amount of positional deviation corrected, and the position of the movable body 1δ is controlled in accordance with this signal.
このようにして制御される可動体の位置に応じた信号す
なわち位置信号が位置検出器１７によって生成されこの
信号に応じて可動体１６の位置がフィードバック制御さ
れる。A signal corresponding to the position of the movable body controlled in this manner, that is, a position signal, is generated by the position detector 17, and the position of the movable body 16 is feedback-controlled in accordance with this signal.
また、一方で可動体１６の振動的な動きをおさえるため
の信号を可動体１６の速度を検出する速度検出器１９と
位置を検出する位置検出器１７のそれぞれの検出信号を
、各増幅器２０．１８によって増幅し、加算器２１によ
）て加え合せて作り出し、この信号をフィードバックす
ることにより、可動体１６の振動をおさえ位置決め時間
の短縮を図ることができる。このようにして、第２図に
示すように立上りが早く、非振動的な応答特性を得るこ
とが可能になる。On the other hand, a signal for suppressing the vibrational movement of the movable body 16 is transmitted to each amplifier 20. By amplifying the signal by 18, adding it by adder 21, and feeding back this signal, it is possible to suppress the vibration of the movable body 16 and shorten the positioning time. In this way, it is possible to obtain a quick rise and non-oscillatory response characteristic as shown in FIG.
［発明の効果］
以上説明したように、本発明によれば、目標位置信号を
直接アクチュエータに加える増幅器と可動体の速度と位
置を検出し、検出した信号を増幅してフィードバックす
る手段とを用いることにより、立上り特性が良く非振動
的な応答が得ら引１、位置決め時間の短縮を図ることが
できる。[Effects of the Invention] As explained above, according to the present invention, an amplifier that directly applies a target position signal to an actuator and a means for detecting the speed and position of a movable body, amplifying the detected signal, and feeding it back are used. By doing so, it is possible to obtain a non-vibratory response with good rise characteristics, and to shorten the positioning time.
第１図は本発明の１実施例に係わる位置制御装置の概略
を示すブロック回路図、第２図は第１図の装置における
可動体１６のステップ応答を示す波形図、第３図は従来
形の位置制御装置の構成を示すブロック回路図、第４図
は第３図の位置制御装置における可動体５のステップ応
答を示す波形図、第５図は他の従来形の位置制御装置の
構成を示すブロック回路図、そして第６図は第５図の位
置制御装置における可動体３７のステップ応答を示す波
形図である。
特許出願人 キャノン株式会社
代理人 弁理士 伊 東 辰 雄
代理人 弁理士 伊 東 哲 小
弟１図
第 ２ 図FIG. 1 is a block circuit diagram schematically showing a position control device according to an embodiment of the present invention, FIG. 2 is a waveform diagram showing a step response of the movable body 16 in the device of FIG. 1, and FIG. 3 is a conventional type 4 is a waveform diagram showing the step response of the movable body 5 in the position control device of FIG. 3, and FIG. 5 is a block circuit diagram showing the configuration of another conventional position control device. FIG. 6 is a waveform diagram showing a step response of the movable body 37 in the position control device shown in FIG. Patent Applicant Canon Co., Ltd. Agent Patent Attorney Tatsuo Ito Agent Patent Attorney Satoshi Ito Figure 1 Figure 2
Claims (1)
記アクチュエータに可動体を目標位置近辺に移動させる
ための信号を与える増幅器、可動体の現在位置を検出す
るための位置検出器、目標位置と現在位置との偏差に対
応する信号を積分して前記アクチュエータ駆動用信号を
生成するための積分器、および可動体の移動速度に対応
する速度信号をとり出す速度検出器を具備し、前記速度
信号成分をも前記アクチュエータにフィードバックする
ことにより、可動体の振動抑制を行なうことを特徴とす
る位置制御装置。 ２、前記速度検出器は可動体の位置検出信号を微分して
速度信号を生成する特許請求の範囲第１項に記載の位置
制御装置。[Claims] 1. A displacement command type actuator that drives a movable body, an amplifier that provides a signal to the actuator to move the movable body near a target position, and a position detector that detects the current position of the movable body. the actuator, an integrator for integrating a signal corresponding to the deviation between the target position and the current position to generate the actuator drive signal, and a speed detector for extracting a speed signal corresponding to the moving speed of the movable body. A position control device characterized in that vibration of the movable body is suppressed by also feeding back the speed signal component to the actuator. 2. The position control device according to claim 1, wherein the speed detector generates a speed signal by differentiating a position detection signal of the movable body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21940186A JPS6375909A (en) | 1986-09-19 | 1986-09-19 | Position controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21940186A JPS6375909A (en) | 1986-09-19 | 1986-09-19 | Position controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375909A true JPS6375909A (en) | 1988-04-06 |
Family
ID=16734832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21940186A Pending JPS6375909A (en) | 1986-09-19 | 1986-09-19 | Position controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375909A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4980597A (en) * | 1989-06-27 | 1990-12-25 | Brother Kogyo Kabushiki Kaisha | Ultrasonic motor with vibration suppressor |
| WO1991005295A1 (en) * | 1989-09-26 | 1991-04-18 | Fanuc Ltd | Closed loop servo motor control method |
| US5134348A (en) * | 1989-04-07 | 1992-07-28 | Canon Kabushiki Kaisha | Vibration wave motor |
| EP3882236A1 (en) | 2015-11-10 | 2021-09-22 | Kyushu University National University Corporation | Production method for 2,5-dicyano-3,6-dihalogenopyrazine |
-
1986
- 1986-09-19 JP JP21940186A patent/JPS6375909A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5134348A (en) * | 1989-04-07 | 1992-07-28 | Canon Kabushiki Kaisha | Vibration wave motor |
| US4980597A (en) * | 1989-06-27 | 1990-12-25 | Brother Kogyo Kabushiki Kaisha | Ultrasonic motor with vibration suppressor |
| WO1991005295A1 (en) * | 1989-09-26 | 1991-04-18 | Fanuc Ltd | Closed loop servo motor control method |
| EP3882236A1 (en) | 2015-11-10 | 2021-09-22 | Kyushu University National University Corporation | Production method for 2,5-dicyano-3,6-dihalogenopyrazine |
| EP3882243A1 (en) | 2015-11-10 | 2021-09-22 | Kyushu University National University Corporation | Dicyanopyrazine compound, luminescent material and light transmitter using same |
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