JPS637278A - Disaster prevention countermeasure type clean bench - Google Patents
Disaster prevention countermeasure type clean benchInfo
- Publication number
- JPS637278A JPS637278A JP14685686A JP14685686A JPS637278A JP S637278 A JPS637278 A JP S637278A JP 14685686 A JP14685686 A JP 14685686A JP 14685686 A JP14685686 A JP 14685686A JP S637278 A JPS637278 A JP S637278A
- Authority
- JP
- Japan
- Prior art keywords
- fire
- air
- work space
- storage box
- equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002265 prevention Effects 0.000 title claims description 29
- 238000003860 storage Methods 0.000 claims description 29
- 238000001514 detection method Methods 0.000 claims description 15
- 238000002955 isolation Methods 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 10
- 238000011144 upstream manufacturing Methods 0.000 claims description 8
- 239000003570 air Substances 0.000 description 81
- 239000007789 gas Substances 0.000 description 38
- 239000003795 chemical substances by application Substances 0.000 description 25
- 238000012986 modification Methods 0.000 description 22
- 230000004048 modification Effects 0.000 description 22
- 238000004080 punching Methods 0.000 description 22
- 238000004887 air purification Methods 0.000 description 14
- 230000005856 abnormality Effects 0.000 description 13
- 238000004140 cleaning Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000003749 cleanliness Effects 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000011045 prefiltration Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000779 smoke Substances 0.000 description 2
- 239000002689 soil Substances 0.000 description 2
- 102100034280 Ankyrin repeat domain-containing protein 26 Human genes 0.000 description 1
- 229920004449 Halon® Polymers 0.000 description 1
- 101000780116 Homo sapiens Ankyrin repeat domain-containing protein 26 Proteins 0.000 description 1
- 101001036145 Homo sapiens Serine/threonine-protein kinase greatwall Proteins 0.000 description 1
- 102100033491 THO complex subunit 2 Human genes 0.000 description 1
- 101710139407 THO complex subunit 2 Proteins 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000010849 combustible waste Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 1
- 238000010892 electric spark Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は清浄作業台Ｖこ係り、清浄度の維持とともに％
にクリーンルーム内で用いられて作業空間内１・空気よ
り比重の大きい可燃性又は４発性を有する物質などを取
り扱う場合の安全性の向上ｒ（好適な防災対策形清浄作
業台に関する。[Detailed Description of the Invention] [Industrial Field of Application] The present invention provides a cleaning workbench, which maintains cleanliness and reduces
Improving safety when handling flammable or flammable substances that have a higher specific gravity than air (1) in a work space when used in a clean room (relating to a suitable disaster prevention type clean work table).
従来の排気形の清浄作業台は例えは実開昭４４−２３５
１４号公報０％公昭５２−３１６０号公報等に開示され
ている。The conventional exhaust-type cleaning workbench is an example of the Utility Model 1977-235.
It is disclosed in Publication No. 14, 0% Publication No. 1983-3160, etc.
これらに示されるように従来の排気形清浄作業台の一般
的な構成は第２７図に示すように、作業室１０１は四方
に設けられた側面壁１０２と背面壁１０３、前面扉】０
４および床面に設けられた通気性を有するパンチング板
１０５および上面に設けられた清浄空気吹出口】１９に
より包囲され、清浄作業台下部に、プレフィルタ１０６
．ファン】０７とを備え、ファン】０７は給気ダクト】
０８を介して作業室】０】の上方に設けられた高性能フ
ィルタ】０９に供給し、高性能フィルタ１０９により浄
化された空気を作業室】０】内へ清浄空気１】０として
清浄空気吹出口１】９より垂直に供給する′！ＩＩｔａ
となっている。As shown in FIG. 27, the general configuration of a conventional exhaust type clean workbench is as follows: a work chamber 101 has side walls 102 and rear walls 103 on all sides, and a front door.
4 and a permeable punching plate 105 provided on the floor surface and a clean air outlet provided on the top surface] 19, and a pre-filter 106 is provided at the bottom of the clean workbench.
．． Fan]07 is equipped with fan]07, and fan]07 is an air supply duct.
08 is supplied to the high-performance filter 09 installed above the working room 0], and the air purified by the high-performance filter 109 is blown into the working room 1)0 as clean air 1)0. Outlet 1] Supply vertically from 9'! IIta
It becomes.
このような清浄作業台内に、作業時に引火性あるいは可
燃性の物質を扱う装置を設置する場合、例えば、半導体
製造用のヌビンナ装置を清浄作業台内で用いる場合には
、作業室】０１内に設訂るスピンナ装に１１は空気よ）
比重の大きい可燃性カス１２を発失しそのガスは、パン
チング板１０５および排気ダク）１１３を介し機外へ排
出されるが、前面扉】０４を開放の際、意外へ流出する
場合もあった。また作業室】０１内には、可燃性ガスが
充満するおそれがあるので室内のネ囲気に対する安全度
を高めた照明灯１１４を用い、これら照明灯１１４．フ
ァン】０７などの電気品を制御するコントロールボック
ス】】５を清浄作業台の脚部前面に設置していた。When installing equipment that handles flammable or combustible substances during work in such a clean workbench, for example, when using Nubinna equipment for semiconductor manufacturing inside the clean workbench, 11 is air for the spinner equipment installed in
The combustible gas 12 with high specific gravity is emitted and the gas is discharged to the outside of the machine via the punching plate 105 and the exhaust duct 113, but when the front door 04 is opened, it sometimes leaks out to unexpected places. . In addition, since there is a possibility that the work room 01 is filled with flammable gas, lighting lamps 114 with a higher degree of safety against the ambient air inside the room are used.These lighting lamps 114. A control box [5] was installed on the front of the leg of the cleaning workbench to control electrical components such as the fan [07].
そのためコントロールボックス１】５が可燃性ガス（ｆ
）ｔｆ７囲気中となることもあり、通常の電気品を使用
すると安全性の問題がおるとともに、安全上防爆仕様の
ものを使用するとコントロールボックス】】５が大形化
し、作業の障害になるという問題がらり、安全性と機能
性を同時に満たすようには配慮されていなかった。Therefore, the control box 1]5 is filled with flammable gas (f
) TF7 may be placed in the enclosure, so using normal electrical products will pose a safety problem, and for safety reasons, if you use an explosion-proof version, the control box]]5 will become larger and become a hindrance to work. There were many problems, and no consideration was given to satisfying safety and functionality at the same time.
なお、上記の他にこの種の装置として関連するものには
実公１％４７−３６６８３号が挙けられるが、作業空間
内で可燃性の物質を扱うことへの対策ｒ（つい１は開示
され１いない。In addition to the above, related devices of this type include Utility Model No. 1% 47-36683; There is no one.
上記従来技術は第２８図に示すよう前面Ｊｋ１０４を開
放した際、天井ケーク】】６の前部下面にデッドスペー
スかめるため、外気】】７を誘引し作業室】０］内の清
浄度が維持できない。また前面扉１０４の開放により室
内の空気か室外へ流出しやすぐ、なおかつ室内に露出し
た照明灯１１４があるため、その下部は対流現象か起き
ヌビンナ装鵠】】より発生した可燃性ガス】２は、意外
へ流出する。可燃性カス１２が空気よシ比重が大きいの
で室外へ流出した場合、清浄作業台下部に設置している
ファン】０７、コントロールポック２】１５内に収納し
ている開閉器などの火花により引火し、爆発する危険性
がある。In the above conventional technology, when the front Jk104 is opened as shown in Fig. 28, a dead space is created on the lower front surface of the ceiling cake]]6, thereby attracting outside air]]7 and maintaining the cleanliness inside the work room]] Can not. In addition, as soon as the front door 104 is opened, the air inside the room flows out to the outside, and since there is a lighting lamp 114 exposed inside the room, a convection phenomenon occurs in the lower part of the lamp, which generates flammable gas. leaks out unexpectedly. Since the combustible scum 12 has a higher specific gravity than air, if it leaks outside, it will catch fire due to sparks from the switch stored in the fan installed at the bottom of the clean work table 07, the control pock 2 15, etc. , there is a risk of explosion.
この流出した可燃性カス】２は、清浄作業台の下部に位
置しているファン】０７により吸引され、さらに給気ダ
クト】０８を介し作業室１０】内ヘリサイクルする悪循
環をくり返す。給槃ノ゛クト】０８内は外気に対し正圧
のため、このタクトが外気と接する全ての面は密閉度が
高くないと意外へ流出し拡散する可能性がある。This spilled combustible waste [2] is sucked by the fan [07] located at the bottom of the clean workbench, and is further recycled into the work room [10] via the air supply duct [08], repeating a vicious cycle. Since the inside of the supply nozzle 08 has a positive pressure with respect to the outside air, all surfaces of this tactile chamber that come in contact with the outside air may leak unexpectedly and spread unless the airtightness is high.
また前記コントロールボックス１１５を含め、内部の開
閉器類の安全性を高めた防爆仕様のものを使用した場合
、ボックスそのものが大きくなり、作業者が作業を行う
際の障害となるとともに、作業台外部へのはみ出し部分
が太き−ぐたり、作業者がぶつかることがあるという安
全上の問題もある。In addition, if the control box 115, including the control box 115, is made with explosion-proof specifications that increase the safety of the internal switches, the box itself becomes large and becomes an obstacle to the operator's work, and the outside of the workbench is There is also a safety issue in that the protruding part is thick and loose, which can cause workers to bump into it.
本発明の目的は従来の高清浄化はもちろんのこと、作業
室内にて発生する可燃性ガス、爆発性ガスの作業室内で
の対流および室外への流出を防止し、各種の災害を未然
に防ぎ安全度を高めた清浄作業台を提供することにある
。The purpose of the present invention is to prevent convection of flammable gases and explosive gases generated in the work room and to prevent them from leaking outside the work room, in addition to the conventional high level of cleanliness, thereby preventing various disasters and ensuring safety. Our objective is to provide a highly clean workbench.
上記目的は、前面に開口部を有し、内部ｒＣ′５′Ｊ燃
性物質を扱う機器を格納する作業空間と、該作業空間の
上方に配設された空気浄化手段と、前記作業空間の下方
に連通して前記作業空間内の空気を排気する排気部とを
備えて成る防災対策形清浄作業台において、隔離気流形
成手段と電気品格納箱とを備え、前記隔離気流形成手段
は削記作業空間の上方に配設され、前記電気品格納箱を
前記隔離気流形成手段により形成される気流に対し前記
機器より上流側に前記作業空間から隔離して配設すると
ともに、削記作業空間外の空気がｍ」起電気品格納箱内
を貫流するよう空気流通孔をｍｊ記方気品格納箱に形成
することにより達成される。The above purpose is to provide a working space having an opening in the front face and storing equipment handling internal rC'5'J flammable substances, an air purifying means disposed above the working space, and a A disaster prevention type clean workbench comprising an exhaust section that communicates with the lower part and exhausts the air in the work space, comprising an isolated airflow forming means and an electrical equipment storage box, the isolated airflow forming means being omitted. The electrical storage box is arranged above the work space, and the electrical equipment storage box is arranged upstream of the equipment and isolated from the work space with respect to the airflow formed by the isolation airflow forming means, and the electrical storage box is arranged to be isolated from the work space and located outside the writing work space. This is achieved by forming air circulation holes in the electromotive storage box such that air of m is allowed to flow through the electromotive storage box.
また、上記目的は前面に開口部を有し、内部に可燃性物
質を扱う機器を格納する作業空間と、該作業空間の上方
に配設された空気浄化手段と、前記作業空間の下方に連
通して前記作業空間内の空気を排気する排気部と、前記
作業全開内の空気が前記開口部から外部へ流出するのを
防止する隔離気流形成手段とを備えで成る防災対策形清
浄作業台において、電気品格納箱と消火装置と防火ダン
パとを設け、前記電気品格納箱を前記隔離気流形成手段
に・より形成される気流に対し前記機器より上流側に前
記作業空間から隔離して配設し、前記消火装置を前記作
業台下方に配設された消火剤容器と前記作業空間内で前
記機器の近傍に配設されて制御弁を介して前記消火剤容
器に接続てれたノズルと前記機器の近傍に配設された火
災検出手段と、該火災検出手段の信号に基いて消火剤を
放出するよう前記制御弁を制御する制御部とにより構成
し、該制御部に動作状態の表示手段を設けるとともに該
制御部を前記電気品格納箱に格納し、前記防火ダンパを
前記排気部内に設けて前記消火装置の動作に連動して前
記排気部を閉鎖するよう構成することにより達成される
。Further, the above purpose is to provide a work space having an opening on the front surface and storing equipment that handles flammable substances inside, an air purification means disposed above the work space, and communication with the lower part of the work space. In a disaster prevention type clean workbench, the workbench is equipped with an exhaust part for exhausting the air in the working space, and an isolation airflow forming means for preventing the air in the fully opened working space from flowing out to the outside from the opening. , an electrical equipment storage box, a fire extinguishing device, and a fire prevention damper are provided, and the electrical equipment storage box is arranged upstream of the equipment and isolated from the work space with respect to the airflow formed by the isolation airflow forming means. and the fire extinguishing device includes a fire extinguishing agent container disposed below the workbench, a nozzle located near the equipment in the work space and connected to the fire extinguishing agent container via a control valve, and the It is composed of a fire detection means disposed near the equipment, and a control section that controls the control valve to release a fire extinguishing agent based on a signal from the fire detection means, and a means for displaying the operating status on the control section. This is accomplished by providing a control unit, storing the control unit in the electrical storage box, and providing the fire damper in the exhaust section so as to close the exhaust section in conjunction with the operation of the fire extinguishing device.
好ましい実施態様によれば前記消火装置は圧力気体容器
を備え、該圧力気体容器は第２の制御弁を介して前記防
火ダンパの駆動装＃に接続され、削記制御部は削記消火
剤の放出時に前記第２の制御弁を制御して前記圧力気体
容器内の気体を放出し前記防火ダンパの閉動作を行うよ
う横取キれる。According to a preferred embodiment, the fire extinguishing device includes a pressurized gas container, the pressure gas container is connected to the drive unit of the fire damper via a second control valve, and the writing control unit controls the amount of the writing extinguishing agent. At the time of release, the second control valve is controlled to release the gas in the pressure gas container and close the fire damper.
隔離気流形成手段は作業空間内を上方から下方に流れる
気流を形成して作業空間内で発生した可燃性物質の作業
空間外への流出を防止するとともに作業空間外から外気
の侵入を防止する。排気部は作業空間内で発生した可燃
性物質の作業空間外への排出を有効に行なう。The isolation airflow forming means forms an airflow flowing from above to below within the workspace to prevent flammable substances generated within the workspace from flowing out of the workspace and to prevent outside air from entering from outside the workspace. The exhaust section effectively discharges flammable substances generated within the work space to the outside of the work space.
これにより作業空間内の可燃性物質の濃度全像くするこ
とができ、火災発生の危険性を少くすることができる。As a result, the concentration of combustible substances in the work space can be completely visualized, and the risk of fire outbreak can be reduced.
電気品格納箱は隔離気流形成手段により形成される気流
に対し可燃性物質を扱う機器より上流側に前記作業空間
から隔離されて配設されているので、刀−作業空間内に
可燃性物質か充満しても可燃性物質と電気品格納箱内の
機器との接触を防止する。The electrical equipment storage box is placed upstream of the equipment handling flammable materials and isolated from the work space with respect to the airflow formed by the isolation airflow forming means, so that there is no combustible material in the workspace. Prevent contact between flammable materials and equipment inside the electrical storage box even if the box is full.
電気品格納箱に形成された空気流通孔は、電気品格納箱
内の機器の発熱により電気品格納箱内を貫流する気流を
形成するので、万一可燃性物質が電気品格納箱内に侵入
しても有効に外部への排出を行なえ、電気品格納箱内で
の可燃性物質の滞留を防止する。The air circulation holes formed in the electrical equipment storage box create an airflow that flows through the electrical equipment storage box due to the heat generated by the equipment inside the electrical equipment storage box, so in the unlikely event that flammable substances enter the electrical equipment storage box, This prevents combustible materials from accumulating in the electrical storage box.
消火装置は、万−作業空間内で火災が発生したときに、
作業空間内に消火剤を噴射して消火を行うとともに、防
火ダンパを閉鎖して排気系統を通じての類焼を防止する
。A fire extinguishing system is a fire extinguisher that can be used in the event of a fire in the work space.
Extinguish the fire by injecting extinguishing agent into the work space, and close the fire damper to prevent spread of fire through the exhaust system.
以下本発明の実施例を第１図〜第２６図により説明する
。Embodiments of the present invention will be described below with reference to FIGS. 1 to 26.
本発明の第１実施例を第】図〜第２】図により説明する
。A first embodiment of the present invention will be explained with reference to FIGS.
第１図は本発明の第１実施例における防災対策形清浄作
業台の構成を示す側断面図である。本実施例の防災対策
形清浄作業台はクリーンルーム内に設置され、作業空間
である作業室】は前面に開口部５が設けられ、両側面に
は側面壁２．背面には背面壁３がそれぞｆｌ−設けられ
、天井面には清浄空気を供給する吹出パンチング板】９
．底面には排気パンチング板２０がそれぞれ設けられる
。開口部５には作業室１と外部とを隔離する前面扉４か
開閉自在に設けられる。本実施例においては前面扉４は
引戸であジ、外部」戸４ａ、内側戸４ｂとにより両開の
引戸となるよう構成されている。作業室】の背面壁３に
はその上方に埋込形の照明灯１４が設けられ、照明灯１
４の下方には消火ノズル２４が設けられる。作業室１の
天井面に設けられた吹出パンチング板１９は前面側に他
の部分と開孔率の異なるエアカーテン吹出部１９ａが形
成され、扉４が開放された場合でもエアカーテンにより
作業室ｌの内外を隔離でさるよう構成される。FIG. 1 is a side sectional view showing the structure of a disaster prevention clean workbench according to a first embodiment of the present invention. The disaster prevention type clean workbench of this embodiment is installed in a clean room, and the workspace (workroom) has an opening 5 in the front and side walls 2 on both sides. A rear wall 3 is provided on the back surface, and a blowout punching plate for supplying clean air is provided on the ceiling surface]9
．． An exhaust punching plate 20 is provided on the bottom surface. The opening 5 is provided with a front door 4 that can be opened and closed to isolate the work room 1 from the outside. In this embodiment, the front door 4 is a sliding door, and is configured to be a double-opening sliding door with an external door 4a and an internal door 4b. A recessed lighting lamp 14 is provided above the rear wall 3 of the work room.
A fire extinguishing nozzle 24 is provided below 4. The blow-off punching plate 19 provided on the ceiling surface of the work room 1 has an air curtain blow-off portion 19a having a different opening ratio from other parts on the front side, and even when the door 4 is opened, the air curtain keeps the work room l It is constructed so that the inside and outside of the building are isolated.
作業室】の前面側土部には垂れ壁２１か着脱自在に設け
られ、エアカーテン気流の形成を助長する。A hanging wall 21 is removably installed on the front soil part of the work room to promote the formation of an air curtain airflow.
本実施例においては、前面Ｂ４および垂れ壁２１は安全
のため網入シまたは線入フカラスを用いている。作業室
１の上方には給気浄化部１８か設けられる。給気浄化部
１８は、上面にプレフィルタ６か着脱自在に設けられる
とともに天井ケース】６の内部には、ファン７、ファン
７の吹出口に連通したチャンバ２６．チャンバ２６と圧
力室３１との間に設けられ、フナン７から供給された空
気を浄化する高性能フィルタ９が設けられる。高性能フ
ィルタ９により浄化されて圧力室３】Ｖ（供給された清
浄空気］０は吹出パンチング板１９を介し１作業空間１
に供給される。給気浄化部】８の内部はファン７の吸込
口に連通しているため圧力が周囲に対し負圧となり、フ
ィルタ取句部におけるリークなどがあっても清浄度に影
普を与えないよう配慮されている。給気浄化部１８の天
井ケース１６の前面には第２図に示すように段差１６ａ
が設けられ、この部分に操作回路等を含む電気品３０を
収納するコントロールボックス】５および操作パネル２
５とが取付けられる。操作パネル２５には空気流通孔２
５ａが設けられる。コントロールボックス１５は給気浄
化部１８と分離独立して設けられるとともに、作業室１
に面する側は密閉構造となるよう構成され、作業室】内
の空気がコントロールボックス１５内に侵入しないよう
構成されている。なお、操作パネル２５は電気品３０の
保守１点検が可能なよう、コントロールボックス１５に
着脱自在に取付けられる。コントロールボックス】５内
に設けられた電気品３０からの電線の引出しは、第３図
、第４図に示すようにコントロールボックス１５の給気
浄化部１８に面する側にコントロールボックス】５およ
び給気浄化部】８を貫通する開口部１５ａを設け、開口
部１５ａに密閉度の高いコネクタを取付けることにより
行う。In this embodiment, the front surface B4 and the hanging wall 21 are made of mesh or lined fabric for safety. A supply air purification section 18 is provided above the work chamber 1. The supply air purifying unit 18 has a pre-filter 6 removably installed on its upper surface, and inside the ceiling case 6 is a fan 7 and a chamber 26 communicating with the outlet of the fan 7. A high-performance filter 9 is provided between the chamber 26 and the pressure chamber 31 to purify the air supplied from the funnel 7. The pressure chamber 3] V (supplied clean air) 0 is purified by the high-performance filter 9 and is sent to the work space 1 through the blowout punching plate 19.
supplied to Supply air purification section] Since the inside of 8 is connected to the suction port of fan 7, the pressure is negative relative to the surroundings, and care has been taken to ensure that even if there is a leak in the filter section, the cleanliness will not be affected. has been done. As shown in FIG.
A control box 5 and an operation panel 2 are provided, and this part houses electrical components 30 including operation circuits, etc.
5 is attached. The operation panel 25 has air circulation holes 2.
5a is provided. The control box 15 is provided separately and independently from the supply air purifying section 18, and is also provided in the work chamber 1
The side facing the control box 15 is configured to have a sealed structure so that the air inside the work chamber does not enter the control box 15. Note that the operation panel 25 is detachably attached to the control box 15 so that maintenance and inspection of the electrical components 30 can be performed. The electric wires from the electrical components 30 installed in the control box 5 are connected to the control box 5 and the supply air on the side of the control box 15 facing the supply air purifying section 18, as shown in FIGS. 3 and 4. [Air Purification Section] This is accomplished by providing an opening 15a that passes through the air purification section 8, and attaching a highly airtight connector to the opening 15a.
コネクタはバッキング３５．レセプタクル３６゜プラグ
３７により構成され、レセフフクル、プラグを接続した
際、この間の密閉度か筒〈なつ１おり、空気の流通を防
止することがて゛きる。なおコネクタは、コントロール
ボックス１５内への空気の流入、流出防止、またファン
７その他給気浄化部】８内電装品の保守点検などを考慮
し、コネクタのプラグ３７が上部に位置するよう取付け
られる。またコネクタを用いることにより電装品接続用
配線材３８がコントロールボックス】５をＸ通する部分
の雷線被株の損傷防止、電線の固定化なども図ることも
できる。The connector is backing 35. The receptacle is composed of a 36° plug 37, and when the receptacle and the plug are connected, the airtightness between the receptacle and the cylindrical shape is 1, making it possible to prevent air from flowing. The connector is installed so that the plug 37 of the connector is located at the top, taking into account the prevention of air inflow and outflow into the control box 15, as well as the maintenance and inspection of the fan 7 and other electrical components inside the supply air purifying section/8. . Further, by using a connector, it is possible to prevent damage to the lightning wire sheathing at the part where the wiring material 38 for connecting electrical equipment passes through the control box 5, and to secure the electric wire.
コネクタ部の気密を高めるためには貫通部分にシール剤
４０を充填してもよい。In order to improve the airtightness of the connector portion, the penetrating portion may be filled with a sealant 40.
コントロールボックスの第１の変形例を第５図に示ｆ。A first modification of the control box is shown in FIG.
本変形例はエアーカーテン部に清浄空気】０がより多く
流れるようコントロールボックス１５の下部に勾装置５
ｂをつけ、前面扉４と垂れ壁２１の間にエアーカーテン
用スペース２９を設けたものである。清浄空気】Ｏは吹
出パンチング板１９に空気抵抗かあるため空気抵抗の小
さいエアーカーテン用スペース２９に流れ、エアーカー
テンか形成でき開口部５における空気の流入、流出を防
止できる。１だコントロールボックス１５に勾装置５ｂ
をつりることにより、コントロールボックス１５内での
空気の滞留を防止でき外気】７が空気流通孔２５ａから
流入しゃすくなシホツクス内部に設けている電気品３０
の冷却効果も高めることができる。In this modification, a gradient device 5 is installed at the bottom of the control box 15 to allow more clean air to flow into the air curtain section.
b, and an air curtain space 29 is provided between the front door 4 and the hanging wall 21. [Clean air] Since there is air resistance in the blowout punching plate 19, O flows into the air curtain space 29 where the air resistance is small, and an air curtain can be formed to prevent air from flowing in and out of the opening 5. 1, control box 15 and slope device 5b
The electric components 30 installed inside the box prevent air from stagnation inside the control box 15 and prevent outside air from flowing in through the air circulation holes 25a.
The cooling effect can also be enhanced.
第６図は給気浄化部の第】の変形例を示す。本変形例は
コントロールホックス１５の取付部を給気浄化部】８の
前面の中間の高さに設けたものである。本変形例によれ
は、圧力室３１を給気浄化部】８の肖１４面に１で延長
することか１き、エアーカーテン形成部に清浄堅気を多
く供給でき、エアーカーテンを有効に形成することかで
きる。FIG. 6 shows a modification of the supply air purifying section. In this modification, the mounting portion of the control hook 15 is provided at a height midway between the front surface of the supply air purifying portion 8. According to this modification, the pressure chamber 31 can be extended by 1 to 14 sides of the supply air purification section, and a large amount of clean air can be supplied to the air curtain forming section, thereby effectively forming the air curtain. I can do it.
第７図は給気浄化部の第２の変形例を示す。本変形例は
チューブ４１でチャンバ２６とコントロールボックス１
５とを連通させたものでめる。本変形例によれは、コン
トロールホックス１５内が正圧となり、作業室１内の空
気がコントロールボックス】内に侵入するのを防止でき
るとともＫ、コントロールボックス内に強制的に気流を
形成して電気品３０の冷却効果を高めることができる。FIG. 7 shows a second modification of the supply air purification section. In this modification, the tube 41 connects the chamber 26 and the control box 1.
5 and communicate with each other. According to this modification, positive pressure is created inside the control box 15, which prevents the air inside the work chamber 1 from entering the control box. The cooling effect of the electrical equipment 30 can be enhanced.
第８図は給気浄化部の第３の変形例を示す。本変形例は
、給気浄化部１８の天井ケース１６を段差１６ａを設け
ることなく直方体状とし、その前面にコントロールボッ
クス１５を固定したものである。本変形例は作業室】の
高さが充分に高く、作業者がコントロールボックスに頭
をぶつける心配のない場合に有効であり、天井ケース１
６の形状が簡単になり、天井ケース１６の↓造が容易に
なる。でた、作業室１の高さがそれほど高くない場合に
は、作業台３４の前面をコントロールボックス１５の突
出寸法と同程度突出させ、物理的に作業者の頭部がコン
トロールボックスに接近しないよう構成してもよい。FIG. 8 shows a third modification of the supply air purification section. In this modification, the ceiling case 16 of the air supply purifying unit 18 is shaped like a rectangular parallelepiped without providing a step 16a, and the control box 15 is fixed to the front surface of the ceiling case 16. This modification is effective when the height of the work room is sufficiently high and there is no risk of workers hitting their heads on the control box.
6 becomes simple, and the construction of the ceiling case 16 becomes easier. If the height of the work room 1 is not very high, the front surface of the work table 34 should be made to protrude to the same extent as the control box 15 so that the worker's head does not physically approach the control box. may be configured.
第９図は給気浄化部の第４の変形例を示す。FIG. 9 shows a fourth modification of the supply air purification section.
本変形例は、第３の変形例と同様に天井ケース１６を直
方体状とするととも罠、その側面にコントロール１５を
固定したものである。本変形例によれは、コントロール
ボックス１５と作業室１との間に側面壁２か介在するの
で、作業室】内で発生した可燃性の気体がコン）ＣＩ−
ルポツクヌ】５内へ侵入するのを有効に防止できる。In this modification, like the third modification, the ceiling case 16 is shaped like a rectangular parallelepiped, and the control 15 is fixed to the side surface of the trap. In this modification, since the side wall 2 is interposed between the control box 15 and the work chamber 1, the flammable gas generated in the work chamber is
[Rupotsukunu] 5 can be effectively prevented from entering.
また、第３の変形例、第４の変形例において、作業室ｌ
の高さが高い場合には、コントロールボックス１５の下
面に操作スイッチを設けてもよく、あるいは操作２イツ
チをプルスイッチにしてもよい。Further, in the third modification and the fourth modification, the work room l
If the height of the control box 15 is high, an operation switch may be provided on the bottom surface of the control box 15, or the two operations may be a pull switch.
作業室１の底部には作業台３４が配設され、作業台３４
は内部が箱状に形成され、その底部３４ｂには作業室】
内の作業に使用する機器が設置される。A workbench 34 is provided at the bottom of the workroom 1.
The inside is formed into a box shape, and the bottom part 34b has a work chamber]
Equipment used for internal work will be installed.
本実施例においては機器としてスピンナ装置１１が設置
される。In this embodiment, a spinner device 11 is installed as a device.
作業室ｌの下部に設置する２ビンナ装伽１１は、これよ
多発生する空気より比重の大きい可燃性ガス１２を効率
的に排気して室外への流出を防止できるよう、床面の排
気パンチング板２０内に落し込み可燃性ガス１２の発生
する部分がパンチング板２０に接近するようにして使用
する。The two-biner cabinet 11 installed at the bottom of the work room 1 has exhaust punching on the floor to efficiently exhaust the flammable gas 12, which has a higher specific gravity than air, which is generated in large numbers, and prevent it from leaking outside. The punching plate 20 is used so that the part of the punching plate 20 where the flammable gas 12 is generated is close to the punching plate 20.
排気パンチング板２０ｒ（は、第１０図に示すように、
略中矢部に機器１１を落し込んで設電するための角孔２
０ａ７５−設けられ、前面側には吹出パンチング板１９
のエアーカーテン吹出９１９”ｂに対兄、してエアーカ
ーテンを形成する吸込孔２’Ｏｂが形成される。背面側
には気流のバランスをとるための吸込孔２０ｃが形成さ
れる。本実側”例ｉｃおいてはエアーカーテンの効果を
高めるため、前面の吸込孔２０’ｌ）の開孔率を背面側
の吸込孔２０ｃの開口率より太きくしている。スピンナ
装置】】から発生する可燃性ガスの吸込を有効に行うた
めｒ（は、第１１図に示すよう洸、スピンナ製画］１の
周囲にパンチング部２０（ｉを設けてもよい。Exhaust punching plate 20r (as shown in FIG. 10,
Square hole 2 for installing power by dropping equipment 11 into the approximately middle arrow part
0a75- Provided with blow-out punching plate 19 on the front side
A suction hole 2'Ob forming an air curtain is formed opposite to the air curtain outlet 919''b.A suction hole 20c for balancing the airflow is formed on the rear side.The main side In Example IC, in order to enhance the effect of the air curtain, the aperture ratio of the front suction hole 20'l) is made larger than the aperture ratio of the rear suction hole 20c. In order to effectively suck in the combustible gas generated from the spinner device, a punching portion 20 (i) may be provided around the spinner device 1 as shown in FIG.
箱状に形成された作業台３４の内部は、排気部として背
面に設けられた排気ダクト］３に連通する。排気ダクト
】３は接続部１３ａを介して作業台３４の内部と連通し
、内部に差圧検出部２７．。The inside of the box-shaped workbench 34 communicates with an exhaust duct 3 provided on the back as an exhaust section. [Exhaust duct] 3 communicates with the inside of the workbench 34 via the connection part 13a, and has a differential pressure detection part 27. .
温度センサ２８とが＆けられている。本実施例では温度
センサ２８か差圧検出部２７より上流側に設けられ、作
業台内の温度上昇を迅速に検出でさるよう構成されてい
る。排気ダクト１３は、内部に防火ダンパとして排気ダ
ンパ２２を備えている。The temperature sensor 28 is disconnected. In this embodiment, the temperature sensor 28 is provided upstream of the differential pressure detection section 27, and is configured to quickly detect a temperature rise within the workbench. The exhaust duct 13 is provided with an exhaust damper 22 as a fire damper inside.
排気ダクト１３中の排気ダイパ２２は、給気浄化部１８
の給気量と建屋からの排気量とのバランスをとるため風
量調整機構をもち、消火器２３が作動した時信号経路２
３ｂを介して、消火器２３と連動し全閉できる機構を設
けている。The exhaust pipe 22 in the exhaust duct 13 is connected to the supply air purification section 18.
It has an air volume adjustment mechanism to balance the air supply volume and the exhaust volume from the building, and when the fire extinguisher 23 is activated, the signal path 2
3b, a mechanism is provided which can be fully closed in conjunction with the fire extinguisher 23.
また、排気ダクト】３は、建屋の排気系統（図示せず）
に接続され、該排気系統に設けらｆ−′したンアン（図
示せず）により作業室】内の空気が吸引され排気される
。作業台３４の下方には脚３２が設けられ脚３２にはキ
ャスタ８か取付けられて搬入、据付時に清浄作業台を移
動できるよう構成さ、ヤ
れでいる。ζらに脚３２にはアシースタ４２が取付けら
れ、据付時に清浄作業台を床面に安定し１設置できるよ
う構成される。脚３２の内側面には消火器２３が設けら
れ、作業室１内での火災発生時に消火剤を配管２３ａを
介して消火ノズル２４から作業室１内に噴射するようコ
ントロールホックス１５内に設けられた消火装置の制御
部４４により制御される。In addition, exhaust duct] 3 is the exhaust system of the building (not shown)
The air in the working chamber is sucked in and exhausted by a vent (not shown) provided in the exhaust system. Legs 32 are provided below the workbench 34, and casters 8 are attached to the legs 32 so that the cleaning workbench can be moved during transportation and installation. Ashistars 42 are attached to the legs 32, so that the cleaning workbench can be stably installed on the floor during installation. A fire extinguisher 23 is provided on the inner surface of the leg 32, and is provided in the control box 15 so as to inject extinguishing agent into the work room 1 from a fire extinguishing nozzle 24 through a pipe 23a in the event of a fire occurring within the work room 1. It is controlled by the control section 44 of the fire extinguishing system.
脚部３２は本実施例において第】２図に示すように、給
気浄化部】８．中ターフ３３９作業台３４゜脚３２を組
み立てる際、上記部品ＯｆＢ缶公差、組立公差などによ
り、脚部端面の合わせに時間かがかるのを防止するため
、脚部端面を作業台３４および中ケース３３の端面より
内側に引込め組立性を向上させている。In this embodiment, the legs 32 are shown in FIG. 2, as shown in FIG. When assembling the legs 32 of the middle turf 339 workbench 34°, in order to prevent it from taking time to align the end faces of the legs due to the above-mentioned component OfB can tolerances, assembly tolerances, etc. It is retracted inward from the end face to improve ease of assembly.
作業室Ｊのル１面＃４は、作業室１の前面を全面開放し
た際に生じる作業室内外の空気の流入、流出を防止する
ため、第１３図、第１４図に示すようにそれぞれ】組の
内側戸４ａ、外側片４ｂとがら成る４枚引戸式として、
前面扉４を全開しても作業室】の前面の全面積よシ小さ
くなるようにしている。また、本実施例では、＃４をサ
ツシを用いた引戸として開閉操作が容易に行えるよう構
成している。第１３図は前面＃４を全閉とした状態、第
１４図は全開とした状態をそれぞれ示している。In order to prevent the inflow and outflow of air inside and outside the workroom that occurs when the front surface of the workroom J is completely opened, surface #4 of the workroom J is designed as shown in Figs. 13 and 14, respectively. As a four-panel sliding door type consisting of a set of inner door 4a and outer door 4b,
Even when the front door 4 is fully opened, the area is smaller than the total area of the front of the work room. Further, in this embodiment, #4 is configured as a sliding door using a sash so that opening and closing operations can be performed easily. FIG. 13 shows a state in which the front surface #4 is fully closed, and FIG. 14 shows a state in which the front surface #4 is fully opened.
さらにエアーカーテン効果を高め空気の流入、流出を防
止するため、前面扉４と吹出パンチング板１９との間に
透視性の垂れ壁２】を設けている。Furthermore, in order to enhance the air curtain effect and prevent air from flowing in and out, a transparent hanging wall 2 is provided between the front door 4 and the blowout punching plate 19.
次に、本実施例における安全機構について第１５図〜第
２１図により説明する。Next, the safety mechanism in this embodiment will be explained with reference to FIGS. 15 to 21.
本実施例における防災対策形清浄作業台では、排気量の
減少に対する安全対策と、火災発生処対する安全対策と
か行われている。In the disaster prevention type clean workbench in this embodiment, safety measures are taken to reduce the amount of exhaust gas and to deal with the occurrence of a fire.
排気量の減少に対する安全対策としては、第１５図〜第
】８図に示すように、排気量か基準値より減少した時、
排気ダクト１３の接続部１３ａ中に設けられた差圧検出
部２７か差圧異常を検知し、操作回路４６中の差圧スイ
ッチが作動し警報フサ−４８および異常表示灯５０によ
り異常を報知する。差圧検出部２７と操作回路４６間は
信号経路４６ａで接続される。As a safety measure against a decrease in displacement, as shown in Figures 15 to 8, when the displacement decreases below the standard value,
The differential pressure detection unit 27 provided in the connection part 13a of the exhaust duct 13 detects a differential pressure abnormality, and the differential pressure switch in the operating circuit 46 is activated to notify the abnormality by the alarm holder 48 and the abnormality indicator light 50. . The differential pressure detection section 27 and the operation circuit 46 are connected through a signal path 46a.
差圧異常発生時には、第１６図のフローチャートに示す
ように、舎報ブｆ−４８および異常表示灯５０による異
常報知に加えて給気ファン７を停止するようにしでもよ
い。When an abnormality in the differential pressure occurs, as shown in the flowchart of FIG. 16, in addition to the abnormality notification by the alarm button F-48 and the abnormality indicator light 50, the air supply fan 7 may be stopped.
これにより排気量か少くなつｆｃ場合、給排気量のバラ
ンスかくすれ、作業ｍｌ内にて発生した可燃性ガス１２
か、室外へ流出するのを防止できる。As a result, if the exhaust volume decreases fc, the balance of supply and exhaust volume is lost, and flammable gas generated within the working mL is 12
Or, it can prevent it from leaking outside.
また、＃４開放時における給排気量のバランスを保つた
めに、第１７図に示すように前面扉４の上部に位動セン
サ３９を設け、第１８図のフローチャートに示すように
前面Ａ４を開放した時位負センサ３９により扉開放状態
を検知して信号線４６ｂを介して操作回路４６へ信号を
伝達し、ファン７の回転数制御を行い給気風量を小さく
する。これにより、作業室ｌ内の可燃性ガス】２が案外
へ流出するのを防止するとともに、作業者に前面扉４開
放の警告を表示灯５ｚＫＪ：ｔ）行う。In addition, in order to maintain the balance of the air supply and exhaust volume when #4 is opened, a position sensor 39 is provided at the top of the front door 4 as shown in Fig. 17, and the front A4 is opened as shown in the flowchart of Fig. 18. At this time, the negative sensor 39 detects the open state of the door and transmits a signal to the operating circuit 46 via the signal line 46b to control the rotation speed of the fan 7 and reduce the amount of air supplied. This prevents the combustible gas [2] in the work chamber 1 from flowing out unexpectedly, and also warns the operator to open the front door 4 using the indicator light 5zKJ:t).
なお、第１５図において、４６ｃはンアン７へ操作回路
４６で制御づれた電力を供給する接続線である。In addition, in FIG. 15, 46c is a connection line that supplies power controlled by the operating circuit 46 to the amplifier 7.
なお、本実施例では差圧検出部２７で差圧を宮気信号に
変換して電ａＫより構成された信号経路４６ａを介して
操作回路４６に伝達し、この信号ｒ（基いて動作するコ
ンタクタを差圧スイッチとしているが、差圧スイッチと
して空気圧により機械的にＯＮ・ＯＦＦする接点を備え
たスイッチを用いて、差圧検出部２７からのを気圧をチ
ューブにより形成された信号経路４６ａを介してこのス
イッチに導いて動作させるようにしてもよい。In this embodiment, the differential pressure detection unit 27 converts the differential pressure into a pressure signal and transmits it to the operating circuit 46 via the signal path 46a composed of the electric current aK. A differential pressure switch is used as a differential pressure switch, but a switch equipped with a contact that is mechanically turned on and off by air pressure is used to transmit the atmospheric pressure from the differential pressure detection section 27 through a signal path 46a formed by a tube. It may also be operated by guiding it to a lever switch.
また、本実施例において、扉の位置センサ３９としては
、リミットスイッチ、１ノードスイツチあるいは光電ス
イッチか用いられる。Further, in this embodiment, as the door position sensor 39, a limit switch, a one-node switch, or a photoelectric switch is used.
火災発生に対する安全対策としては、第】９図〜第２１
図に示すように、作業室」内にて火災が発生した場合、
排気ダクト１３の接続部１３ａ中に設けている温度セン
サ２８が温度異常を検知し、室外へ炎を出さぬようファ
ン７を停止するとともに消火装置を起動し、消火器２３
に配管２３ａを介して接続された消火ノズル２４により
消火剤を作業室」内へ放出し室内の消火を行なう。火災
発生時において消火装置の制御部４４は、信号線４４Ｃ
を介して温度センサ２８からの信号を受信すると、操作
回路４６ヘフアン７を停止させる信号を伝達し、ファン
の停止を行うとともに、信号線４４ｄを介して消火器２
３内に設けられた消火剤容器である消火剤ボンベ５４に
設けられた制御弁５８を開くよう制御して作業室１内に
消火剤を噴射さ書せる。’Ｆ７’Ｃ，本実施例において
は、火災による他のダクトへの防煙、防火のため排気ダ
ンパ２２を全閉させる連動機構を設けている。As a safety measure against fire outbreak, see Figures 9 to 21.
As shown in the figure, if a fire occurs in the work room,
The temperature sensor 28 provided in the connection part 13a of the exhaust duct 13 detects a temperature abnormality, stops the fan 7 to prevent flames from emitting outside, and activates the fire extinguisher.
A fire extinguishing agent is discharged into the work room by a fire extinguishing nozzle 24 connected to the pipe 23a to extinguish the fire inside the room. When a fire occurs, the control unit 44 of the fire extinguishing system connects the signal line 44C.
When the signal from the temperature sensor 28 is received via the signal line 44d, the operation circuit 46 transmits a signal to stop the fan 7, stops the fan, and also turns on the fire extinguisher 2 via the signal line 44d.
A control valve 58 provided in a fire extinguishing agent cylinder 54, which is a fire extinguishing agent container provided in the work chamber 1, is controlled to open to inject the extinguishing agent into the work chamber 1. In 'F7'C, this embodiment is provided with an interlocking mechanism that fully closes the exhaust damper 22 to prevent smoke and fire from spreading to other ducts due to fire.
本実施例における排気ダンパ２２の全閉機構は、停電時
にそなえ消火器２３内に設けられた圧力気体ボンベ５６
に充填さｈｆｒ−圧力気体のガス圧により行う。The fully closing mechanism of the exhaust damper 22 in this embodiment is provided by a pressurized gas cylinder 56 provided inside the fire extinguisher 23 in case of a power outage.
Filled with HFR-pressure gas is carried out by gas pressure.
消火装置の制衡部４４は、火災発生時に信号線４４ｄを
介して消火剤ボンベ５４の制御弁５８を開くとともに、
圧力気体容器である圧力気体ボンベ５６に３けられた第
２の制御弁５９を開くよう制御する。圧力気体ボンベ５
６に充填された圧力気体の圧力はチューブ洗よ多形成さ
れた信号経路２３ｂを介して排気ダンパ２２の駆動機構
２２ｂに伝達され、この圧力にょシ駆動機構２２ｔ）は
タンパの羽根２２ａを全閉する。第】９図ではダンパの
羽根２２ａは１枚のものが図示されているが、これに限
ることはなく、羽根枚数を複数枚としてリンク等で互い
に連動するようにしたものを用いてもよい。でた、本実
施では停電を考慮してガス圧でダンパを駆動したが、非
常電源等が確保できる場合には電動で全閉するようにし
てもよい。The control unit 44 of the fire extinguishing system opens the control valve 58 of the extinguishing agent cylinder 54 via the signal line 44d when a fire occurs, and
A second control valve 59 provided in a pressure gas cylinder 56, which is a pressure gas container, is controlled to open. Pressure gas cylinder 5
The pressure of the pressurized gas filled in the tube 6 is transmitted to the drive mechanism 22b of the exhaust damper 22 via the signal path 23b formed in the tube, and this pressure drive mechanism 22t completely closes the tamper blade 22a. do. Although FIG. 9 shows one damper blade 22a, the damper is not limited to this, and a plurality of blades may be used that are interlocked with each other by links or the like. In this implementation, the damper was driven by gas pressure in consideration of power outages, but if an emergency power source can be secured, it may be fully closed by electric power.
また、ダンパ２２に温度ヒユーズ（図示せず）を設けて
おき、熱により温度ヒユーズが溶断した時にもダンパが
全閉するよう構成することにより、フェイルセイフの機
能を持たせることができ、安全性が向上する。In addition, by providing a temperature fuse (not shown) in the damper 22 and configuring the damper to be fully closed even when the temperature fuse is blown by heat, a fail-safe function can be provided and safety can be improved. will improve.
本実施例において、消火装置の制御部４４は第２０図の
フローチャートに示すように、消火剤を放出するととも
に警報ブザ−４４ａによる警報。In this embodiment, the control unit 44 of the fire extinguishing system discharges the extinguishing agent and issues an alarm with an alarm buzzer 44a, as shown in the flowchart of FIG.
異常表示灯４４１）の点灯による表示を行なう。このよ
うな防災対策形清浄作業台を第２１図如示すようり、数
台差べて使用する場合は、消火ｈｋ起動とともに、制御
部４４が非常信号を発生し、この信号を隣接する他の防
災形清浄作業台に伝達して各作業台の給気ファン７の停
止、あるいは消火剤の噴射を行わせるようにしてもよい
。本実施例におい１、火災発生の判断は、排気ダクト内
の温度により行ったが、作業室内の温度を検出してもよ
く、また、温度以外の元、煙等を検出してもよく、さら
には、これらをＡＮＤ、ＯＲ等の条件付けをして組合せ
てもよい。また、火災発生を他の作業台へ伝達するのに
、警報プサーの周波数あるいは波形を特殊なものにして
おき、この周波数あるいは波形を検知することにより火
災発生を検知できるようにしてもよい。This is indicated by lighting an abnormality indicator light 441). As shown in Fig. 21, when several such disaster prevention type clean work benches are used, the control section 44 generates an emergency signal when the fire extinguisher hk is started, and this signal is transmitted to other adjacent The information may be transmitted to the disaster prevention type clean work benches to stop the air supply fans 7 of each work bench or to inject extinguishing agent. In this example, 1. The occurrence of a fire was determined based on the temperature inside the exhaust duct, but the temperature inside the work room may also be detected, or sources other than temperature, such as smoke, may be detected. may be combined by applying conditions such as AND and OR. Furthermore, in order to transmit the occurrence of a fire to other workbenches, the frequency or waveform of the alarm signal may be set to a special value, and the occurrence of a fire may be detected by detecting this frequency or waveform.
以上の実施例において、消火Ｍ＆の制御部４４は充電可
能な電池によるバックアップ電源を設けておくことによ
り、停電時においても消火装置を作動させることかでき
る。In the above embodiment, the control unit 44 of the fire extinguisher M& can operate the fire extinguisher even during a power outage by providing a backup power source using a rechargeable battery.
また、消火装置の制御部４４および操作回路４６はリレ
ーによるシーケンヌ回路で構成されていてもよ（、また
、マイクロコンピュータを用いた論だ、消火ノズル２４
の下流に形＆てれる乱流により、可燃性ガヌが作業室１
内の気流の上流側へ運ばれて作業室１内に拡散するのを
防止する上でも、作業室Ｊの下刃でスピンナ装置から適
切な距離を保った位置に取付けられるのが望ましい。Further, the control section 44 and the operation circuit 46 of the fire extinguishing system may be configured as a sequence circuit using relays (or, a microcomputer may be used).
Due to the turbulence that forms and flows downstream of the
In order to prevent the blade from being carried upstream in the airflow and dispersing into the working chamber 1, it is desirable that the lower blade of the working chamber J be installed at a position that maintains an appropriate distance from the spinner device.
本発明の第２実施例を第２２図〜第、２６図により説明
する。A second embodiment of the present invention will be described with reference to FIGS. 22 to 26.
本実施例は作業室１内にスピンナ装置ｌ】を２台格納で
きるよう構成したものである。This embodiment is constructed so that two spinner devices 1] can be stored in the work chamber 1.
本実施例において、給気浄化ｆａ、】８内には第２３図
に示すようにファン７、チャンバ２６．Ｔａ性能フィル
タ９．圧力室３１とか設けられ、天井％にはプレフィル
タ６および端子箱６０とが設けられる。なお、７ａは防
振ゴムである。給気浄化部１８の前面にはコントロール
ボックス】５か設けられ、コントロールボックスの前面
には操作パネル２５が給気浄化部の前面と同一面になる
よう、かつ着脱自在ｒＣ取付けられる。コントロールボ
ックス１５の内部には操作回路４６および消火ｈａの制
徂部４４か設けられる。コントロールボックス１５は内
部に格納された電気品を作業室１内の空気から隔離でき
るよう構成されている。給気浄化部１８の前面には、泥
２２図に示すように、操作パネル２５の上刃処ファン７
の運転状態を根株的に表示する差圧計６８か設けられ、
操作パネル２５には漏電ブレーカ６６、消火装置の制御
部４４．差圧異常を報知する警報ブザー４８．電源表示
灯６５゜ファン運転表示灯６２．ファン異常表示灯６４
゜差圧異常表示灯５０． ファン運転スイッチ７】。In this embodiment, a fan 7 and a chamber 26. Ta performance filter9. A pressure chamber 31 is provided, and a pre-filter 6 and a terminal box 60 are provided on the ceiling. Note that 7a is a vibration-proof rubber. A control box [5] is provided in front of the air supply purifying section 18, and an operation panel 25 is detachably attached to the front of the control box so that it is flush with the front surface of the air supply purifying section. Inside the control box 15, an operating circuit 46 and a fire extinguishing ha limiter 44 are provided. The control box 15 is configured to isolate electrical components stored therein from the air in the work chamber 1. On the front side of the supply air purification unit 18, as shown in Figure 22, there is a fan 7 above the operation panel 25.
A differential pressure gauge 68 is provided to essentially display the operating status of the
The operation panel 25 includes an earth leakage breaker 66 and a fire extinguishing system control section 44. Alarm buzzer 48 to notify of differential pressure abnormality. Power indicator light 65° Fan operation indicator light 62. Fan error indicator light 64
゜Differential pressure abnormality indicator light 50. Fan operation switch 7].
ファン停止スイッチ７２．照明点灯スイッチ７３゜照明
消灯スイッチ７４．ブザー停止スイッチ７５とが設けら
れている。火災発生時の警報ブザー４４ａ、火災発生表
示灯４４ｂは制御部４４に設けられている。Fan stop switch 72. Lighting on switch 73° Lighting off switch 74. A buzzer stop switch 75 is provided. An alarm buzzer 44a and a fire indicator light 44b in the event of a fire are provided in the control unit 44.
操作パネル２５の上、下端には空気流通孔２５ａか設け
られ、空気流通孔２５ａを介して、本実施例の防災対策
形清浄作業台が設置されたクリーンルームノ空気ヲコン
トロールボックス１５内に貫流させて、内蔵された電気
品の放熱を良好にする。Air circulation holes 25a are provided at the upper and lower ends of the operation panel 25, and air from the clean room in which the disaster prevention type clean workbench of this embodiment is installed is allowed to flow through the control box 15 through the air circulation holes 25a. This improves heat dissipation from built-in electrical components.
本実施例において、操作パネル２５の位置が高目となり
、例えば床面から操作パネル下端１ての高さが約１５０
０Ｗ位となるため、ファン運転スイッチ７１．フアン停
止スイツチ７２．照明点灯スィッチ７３．照明消灯ヌイ
ツチ７４
の高いスイッチ類を操作パネル２５の下方妊配設し、表
示灯勢子を触れなくて済むものを操作パネル２５の上方
に配設し、操作性を向上している。In this embodiment, the position of the operation panel 25 is high, for example, the height of the lower end 1 of the operation panel from the floor is approximately 150 mm.
Since it becomes about 0W, the fan operation switch 71. Fan stop switch 72. Lighting switch 73. Switches with a high light-off switch 74 are arranged below the operation panel 25, and indicators that do not require touching are arranged above the operation panel 25 to improve operability.
また、表示灯が高い位置に配設窟れているので、作業台
前方に置かれた障害物の影響を受けＫ＜＜遠方からでも
表示灯の状態を容易に確認できる。In addition, since the indicator light is located at a high position, the status of the indicator light can be easily confirmed even from a distance due to the influence of obstacles placed in front of the workbench.
本実施例における防災対策形清浄作業台の電気接続図を
第２５図，第２６図に示す。第２５図は全体の電気系統
を示す接続図、第２６図は消火装置の電気系統を示す接
続図である。第２５図において、ＥＬＢは漏電ブレーカ
６６、ＦＬは照明灯１４、ＦＭはファン７、ＰＬＩ〜Ｐ
Ｌ４はそれぞれ電源表示灯６５，ファン異常表示灯６４
，ファン運転表示灯６２，差圧異常表示灯５０，ＦＢＩ
〜ＰＥ５はそれぞれファン運転スイッチ７１．ファン停
止スイッチ７２，照明点灯スイッチ７３。Electrical connection diagrams of the disaster prevention type cleaning workbench in this embodiment are shown in FIGS. 25 and 26. FIG. 25 is a connection diagram showing the entire electrical system, and FIG. 26 is a connection diagram showing the electrical system of the fire extinguishing device. In FIG. 25, ELB is the earth leakage breaker 66, FL is the lighting lamp 14, FM is the fan 7, and PLI to P
L4 is a power indicator light 65 and a fan error indicator light 64, respectively.
, Fan operation indicator light 62, Differential pressure abnormality indicator light 50, FBI
~PE5 are fan operation switches 71. Fan stop switch 72, lighting switch 73.
照明消灯スイッチ７４．ブザー停止スイッチ７５。Lighting off switch 74. Buzzer stop switch 75.
４９−１はサーマルリレー、５２−１〜５２−４はそれ
ぞれ電磁接触器．Ｔはタイマ、６３は差圧スイッチ、Ｂ
Ｚはブザー４８，ＵＮＩＴ２は消火装置の制御部４４．
７１〜Ｔ１４．Ｔ２５．Ｔ２６はぞれそれ接続端子を示
す。また、第２６図においてＵＮＩＴ２は消火装置の制
御部４４，ＢＯＸは消火装置の消火器格納箱２３，ＴＩ
（は温度センサ２８，ＴＨ（：！１，ＴＨＯ２はそれぞ
れ温度センサの出力が基準値を超えると信号を発生する
信号発生回路でおる。本実施例では約７０℃で信号発生
回路が信号を発生するよう構成され消火を迅速に行える
ようにしている。49-1 is a thermal relay, and 52-1 to 52-4 are electromagnetic contactors. T is a timer, 63 is a differential pressure switch, B
Z is the buzzer 48, and UNIT2 is the control unit 44 of the fire extinguishing system.
71-T14. T25. T26 each indicates a connection terminal. In addition, in FIG. 26, UNIT2 is the control unit 44 of the fire extinguishing system, BOX is the fire extinguisher storage box 23 of the fire extinguishing system, and TI
(Temperature sensor 28, TH(:!1, THO2) are signal generation circuits that generate a signal when the output of the temperature sensor exceeds a reference value. In this example, the signal generation circuit generates a signal at about 70°C. It is designed to extinguish the fire quickly.
給気浄化部］８の下方に形成された作業室１はｍ１面に
開口部５、両側面に側面壁２．背面に背面壁３をそれぞ
れ備え、土面には吹出パンチング板】９．下面には排気
パンチング板２０をそれぞれ備えて成る。開口部５には
、外側片４ａ，内側戸４ｂとから成る引戸により構成さ
れた前面ｉ￥１４が開閉自在に設けられ、内部」戸４ｂ
と吹出パンチング板１９との間には垂れ壁２ｊか設けら
九ている。The working chamber 1 formed below the supply air purifying section] 8 has an opening 5 on the m1 side and side walls 2 on both sides. Each has a back wall 3 on the back, and a blow-out punching board on the soil surface]9. Each exhaust punching plate 20 is provided on the lower surface. The opening 5 is provided with a front surface 14 that can be freely opened and closed and is composed of a sliding door consisting of an outer piece 4a and an inner door 4b, and an inner door 4b.
A hanging wall 2j is provided between the punching plate 19 and the blowing punching plate 19.
吹出パンチング板１９は前面伽１九エアーカーテン吹出
口１９ａが形成され、＃４開放時洸作業呈１の内外を隔
離する。背面壁３には、作業室１内に設りされるスピン
ナ装置１】から発生する可燃性ガスに対する安全性を配
慮して防爆形の器具を用いた埋込形の照明灯】４が設け
られ、その下方には、スピンナ装置】１に対向して消火
ノズル２４が設けられている。本実施例においては、ス
ピンナ装置１１の局部排気も取れるよう、スピンナ装置
１】と背面壁３との間に、作業台３４を貫通するパイプ
８０が設けられている。本実施例では、消火剤容器５４
から消火ノズル２４への配管２３ａは、第２４図に示す
ように２つのノズルの中間で分岐して、分岐点から両ノ
ズルへの距離が等しくなるよう設けである。The blow-off punching plate 19 is formed with nine air curtain blow-off ports 19a on the front side, and isolates the inside and outside of the #4 open work station 1. A recessed lighting lamp 4 using an explosion-proof device is installed on the back wall 3 in consideration of safety against flammable gas generated from the spinner device 1 installed in the work room 1. A fire extinguishing nozzle 24 is provided below it, facing the spinner device 1. In this embodiment, a pipe 80 passing through the workbench 34 is provided between the spinner device 1 and the rear wall 3 so that the spinner device 11 can be locally exhausted. In this embodiment, the extinguishing agent container 54
The pipe 23a from the fire extinguishing nozzle 24 is branched in the middle between the two nozzles, as shown in FIG. 24, so that the distance from the branch point to both nozzles is equal.
作業台３４の下部に連通ずる排気部１３の接続部１３ａ
Ｋは、温度センサ２８として２ケのサミスタがそれぞれ
のスピンナの近傍に配役される。Connection part 13a of exhaust part 13 communicating with the lower part of workbench 34
In K, two thermisters are arranged as temperature sensors 28 near each spinner.
各サミスタの出力は基準値を超えると信号を発生する信
号発生回路ＴＨＣ１，ＴＨＣ！２によ仄火災発住検知信
号として信号経路４４ｃを介して消火装置の制御部４４
に伝達される。Signal generating circuits THC1, THC! that generate signals when the output of each thermistor exceeds a reference value. 2, the control unit 44 of the fire extinguishing system is sent via the signal path 44c as a faint fire detection signal.
transmitted to.
本実施例では、サミスタには数ＫＩＪ（７）抵抗を介し
て５ｖ程度の低電圧が印加され、０．１ ｍ Ａ程度の
電流を流すよう設定されている。そのため、万一サミス
タが短絡しても火花発生を防止できる。In this embodiment, a low voltage of about 5 V is applied to the thermistor via a resistor of several KIJ (7), and the setting is such that a current of about 0.1 mA flows. Therefore, even if the thermistor is short-circuited, sparks can be prevented from occurring.
制御部４４は、ＴＨ（１，ＴＨＣ２の少くともいずれか
一方の出力が発生されたときに火災発生として消火装置
を起動する。本実施例では差圧異常の検出は操作回路４
６内に設けられた空気圧により機械的に接点をＯＮ、
ＯＦＦする差圧スイッチ６３を用い、差圧スイッチ６
３と管継手により構成された差圧検出部２７との間をチ
ューブにより形成された信号経路４６ａで接続してｂる
。The control unit 44 determines that a fire has occurred and starts the fire extinguishing system when at least one of the outputs of TH (1 and THC2) is generated.
The contacts are turned on mechanically by the air pressure provided in 6.
Using the differential pressure switch 63 that turns OFF, the differential pressure switch 6
A signal path 46a formed by a tube is used to connect between the signal path 46a and the differential pressure detection section 27 formed by a pipe joint.
作業台３４に配設された消火器２３には、消火剤ボンベ
５４と、排気ダンパ閉鎖用の圧力気体ボンベ５６とが格
納され、消火剤ボンベ５４および圧力気体ボンベ５６に
は、それぞれ制御部４４からの信号によ朕駆動される制
御弁５８および第２の制御弁５９とが設けられている。A fire extinguisher 23 disposed on the workbench 34 stores a fire extinguisher cylinder 54 and a pressure gas cylinder 56 for closing the exhaust damper. A control valve 58 and a second control valve 59 are provided which are driven by a signal from.
消火剤ボンベ５４には、通称「ハロン：ｔｉヌ」ど呼ば
れるハロゲン化物消火薬剤が充填され、圧力気体ボンベ
５６には圧力気体として二酸化炭素が充填されている。The extinguishing agent cylinder 54 is filled with a halide extinguishing agent commonly called "halon," and the pressurized gas cylinder 56 is filled with carbon dioxide as a pressurized gas.
消火器２３は前面に開閉自在な扉を有し、停電時等には
、扉のハンドル２３ｃを操作して扉を開け、手動操作で
消火剤の噴射もできるよう構成てれている。The fire extinguisher 23 has a door on the front that can be opened and closed, and in the event of a power outage, the door can be opened by operating a handle 23c of the door, and extinguishing agent can also be sprayed manually.
本実施例において、圧力気体により駆動される排気ダン
パ２２は、駆動機構２２１１と、これにより開閉操作さ
れる３枚の羽根よ構成る羽根２２ａとにより構成され、
消火剤の噴射と連動してタンパの全閉を行う。なお、ダ
ンパ２２には温度ヒユーズ（図示せず）も設けてろ九万
−消火器が動作しない場合でもダンパの全閉ができるよ
う構成されている。In this embodiment, the exhaust damper 22 driven by pressurized gas is composed of a drive mechanism 2211 and a blade 22a composed of three blades that are opened and closed by the drive mechanism 2211.
The tamper is fully closed in conjunction with the injection of extinguishing agent. The damper 22 is also provided with a temperature fuse (not shown) so that the damper can be fully closed even when the fire extinguisher does not operate.
本実施例によれは、ダンパ駆動用に専用の圧力気体を用
いているため、消火開始時に消火剤のガス圧を全て消火
剤噴射に用いることができ、消火を有効に行うことがで
きる。でた、消火用の気体とダンパ開閉用圧力気体とを
分けることにより、それぞれボンベを小型化でき、装置
の小形化を図ることができる。According to this embodiment, since a dedicated pressure gas is used for driving the damper, all the gas pressure of the extinguishing agent can be used for extinguishing agent injection at the time of starting extinguishing, so that extinguishing can be carried out effectively. By separating the extinguishing gas and the pressure gas for opening and closing the damper, the respective cylinders can be made smaller, and the apparatus can be made more compact.
なお本実施例では特ンこ作業室３ ｃ）前面の気流の風
速を速くしてエアーカーテンを形成した力ζ気流的に作
業空間内外を隔離できるものであれはこれに限ることは
なく、プッシュプルフードのように略層流状態の気流を
作業室１の全面に流すようにしてもよい。Note that in this embodiment, the special workspace 3 is used. c) The force of increasing the wind speed of the front airflow to form an air curtain A substantially laminar airflow may be made to flow over the entire surface of the work chamber 1 like a pull hood.
以上の実施例によれは、コントロールポツクヌ内で使用
する電気品が防爆仕様でなくても安全を確保でき、装置
の小形化を図ることができる。According to the embodiments described above, safety can be ensured even if the electrical components used in the control pots are not explosion-proof, and the device can be made smaller.
本発明によれば、隔離気流形成手段により形成される気
流て゛作業空間内外を隔離するとともに、この気流に対
し可燃性ガスを発する機器より上流側に作業空間から隔
離して電気品格納箱を設けたことにより、可燃性ガスへ
の電気火花による引火を防止でき、安全性の高い防災対
策形清浄作業台を得ることかできる。また、本発明によ
れは、防災形清浄作業台に消火装置を設け、該消火器＆
を動作状態の表示手段を備えた制御部と消火剤容器部分
とに分割し、制御部を電気品格納箱に格納するとともに
消火剤容器部分を作業台下部に配設したことにより、火
災発生時に制御部が損傷を受けるのを防止でき、かつ、
消火剤容器から消火ノズル１ての配管を短くできるので
消火剤噴射時の圧力損失を低下させることができ、確実
に消火を行うことができて安全性の高い防災形清浄作業
台を得ることができる。According to the present invention, the airflow formed by the isolation airflow forming means isolates the inside and outside of the workspace, and an electrical equipment storage box is provided upstream of the equipment that emits flammable gas and isolated from the workspace. As a result, it is possible to prevent flammable gas from being ignited by electric sparks, and it is possible to obtain a highly safe disaster prevention type clean workbench. Further, according to the present invention, a fire extinguishing device is provided on the disaster prevention clean work table, and the fire extinguisher &
The control unit is divided into a control unit with a display means for operating status and a fire extinguishing agent container, and the control unit is stored in an electrical storage box and the fire extinguishing agent container is located below the workbench. The control unit can be prevented from being damaged, and
Since the piping from the extinguishing agent container to the extinguishing nozzle 1 can be shortened, the pressure loss when injecting extinguishing agent can be reduced, and fire extinguishing can be reliably carried out, making it possible to obtain a highly safe disaster prevention type clean work table. can.
第１図は本発明の第１実施例における防災形清浄作業台
の構成を示す側断面図、第２図は本発明の第１実施例に
おける給気浄化部ど電気品格納箱とを示す斜視図、第３
図は本発明の第１実施例における電気品格納箱からの電
線引出し状態を示す側断面図、第４図はコネクタの取付
状態を示す斜視図、第５図は本発明の第】実施例におけ
る電気品格納箱の第】の変形例を示す側断面図、第６図
。
第７図はそれぞれ本発明の第１実施例における給気浄化
部の第１の変形例および第２の変形例を示す側断面図、
第８図、第９図はそれぞれ本発明の第１実施例における
給気浄化部の第３の変形例および第４の変形例を示す斜
視図、第】０図は本発明の第１実施例における排気パン
チング板とスピンナ装置との状態を示す平面図、第】１
図は排気パンチング板の】変形例を示す平面図、第１２
図は本発明の第１実施例における防災対策形清浄作業台
の作業台、中ケース、および脚部との関係を示す斜視図
、第１３図、第１４図はそれぞれ本発明の第１実施例に
おける防災形清浄作業台の前面扉の閉状態および開状態
を示す正面図、第１５図。
第１６図はそれぞれ本発明の第１実施例における防災形
清浄作業台の差圧異常検知系統を示す側断面図、および
差圧異常検知系統の動作を示すフローチャート、第】７
図は本実施例において扉の位置センサを取付けた状態を
示す正面図、第１８囚は扉位置センサによる動作の例を
示すフローチャート、第、１９図、第２０図はそれぞれ
本発明の第１実施例における消火系統を示す側断面図お
よび消火系統の動作を示すフローチャート、第２１図は
本発明の第１実施例における防災対策形清浄作業台を複
数台並べて使用している状態を示す正面図、第２２図は
本発明の第２実施例における防災対策形清浄作業台の外
観を示す正面図、第２３図は本発明の第２実施例におけ
る防災対策形清浄作業台の構成を示す側断面図、第２４
図は本発明の第２実施例における防災対策形清浄作業台
の作業室底面の一部を断面表示した平面図、第２５図。
第２６図はそれぞれ本発明の第２実施例における防災対
策形清浄作業台の全体の電気接続図および消火装置の電
気接続図、第２７図、第２８図はそれぞれ従来の清浄作
業台の前面扉を半開した場合及び全開し−ｆｃ場合を示
す側断面図である。
１：作業空間、５：開口部、１に機器、１３゜１３ａ：
排気部、１５：電気品格納箱、１８：空気浄化手段、１
９，１９ａ、２０，２０ａ、２０ｂ、 ２０ ｃ、
２０ ｄ ：隔離気流形成手段、２２：防火ダンパ、
２２ｂ：駆動装置、２３，４４：消火装置、２４：消火
ノズル、２５ａ：空気流通孔、２８：火災検出手抜、４
４：制御部、４４ａ、４４ｂ：表示手段、５４：消火剤
容器、５６：圧力気一ノ′
ｌｊ ａ Ａ １８・−府先才化手炊第２０
第３に １１
第５図
第６０
第８０
第９図
潴１５ ｉ
嘱／６１］
第１７圀
第２３１２１
４ｚ ′６
第２４図
第２８０
Ｏ○FIG. 1 is a side sectional view showing the configuration of a disaster prevention clean workbench according to a first embodiment of the present invention, and FIG. 2 is a perspective view showing a storage box for electrical components such as a supply air purification section according to a first embodiment of the present invention. Figure, 3rd
The figure is a side sectional view showing a state in which wires are pulled out from the electrical storage box in the first embodiment of the present invention, FIG. 4 is a perspective view showing a state in which the connector is attached, and FIG. FIG. 6 is a side sectional view showing a modification of the electrical equipment storage box. FIG. 7 is a side sectional view showing a first modification and a second modification of the supply air purification section in the first embodiment of the present invention, respectively;
FIGS. 8 and 9 are perspective views showing a third modification and a fourth modification of the supply air purifying section in the first embodiment of the present invention, respectively, and FIG. 0 is a perspective view of the first embodiment of the present invention. A plan view showing the state of the exhaust punching plate and the spinner device in [1]
The figure is a plan view showing a modified example of the exhaust punching plate, No. 12.
The figure is a perspective view showing the relationship between the workbench, the inner case, and the legs of a disaster prevention type clean workbench according to the first embodiment of the present invention, and FIGS. 13 and 14 respectively show the first embodiment of the present invention. FIG. 15 is a front view showing the closed and open states of the front door of the disaster-prevention clean workbench. FIG. 16 is a side sectional view showing the differential pressure abnormality detection system of the disaster prevention type clean work table in the first embodiment of the present invention, and a flowchart showing the operation of the differential pressure abnormality detection system, and No. 7
The figure is a front view showing the state in which the door position sensor is installed in this embodiment, the 18th figure is a flowchart showing an example of the operation by the door position sensor, and the figures 19 and 20 are the first embodiment of the present invention. FIG. 21 is a side sectional view showing the fire extinguishing system in the example and a flowchart showing the operation of the fire extinguishing system; FIG. 21 is a front view showing a state in which a plurality of disaster prevention type clean work benches are used side by side in the first example of the present invention; FIG. 22 is a front view showing the external appearance of a disaster prevention type clean work table according to the second embodiment of the present invention, and FIG. 23 is a side sectional view showing the configuration of the disaster prevention type clean work table according to the second example of the present invention. , 24th
FIG. 25 is a plan view showing a section of a part of the bottom surface of the work chamber of the disaster prevention clean work table according to the second embodiment of the present invention. Fig. 26 is an overall electrical connection diagram and an electrical connection diagram of a fire extinguishing device of a disaster prevention clean workbench according to the second embodiment of the present invention, and Figs. 27 and 28 are respectively the front door of a conventional clean workbench. FIG. 3 is a side sectional view showing a case where the door is half opened and a case where the door is fully opened -fc. 1: Work space, 5: Opening, 1 equipment, 13° 13a:
Exhaust section, 15: Electrical storage box, 18: Air purification means, 1
9, 19a, 20, 20a, 20b, 20c,
20 d: isolated airflow forming means, 22: fire damper,
22b: Drive device, 23, 44: Fire extinguishing device, 24: Fire extinguishing nozzle, 25a: Air circulation hole, 28: Fire detection omission, 4
4: Control unit, 44a, 44b: Display means, 54: Extinguishing agent container, 56: Pressure gas 18. Fig. 9 潴15 i 嘱/61] 17th Kuni No. 23121 4z '6 Fig. 24 Fig. 280 O○
Claims (1)
を格納する作業空間と、該作業空間の上方に配設された
空気浄化手段と、前記作業空間の下方に連通して前記作
業空間内の空気を排気する排気部とを備えて成る防災対
策形清浄作業台において、隔離気流形成手段と電気品格
納箱とを備え、前記隔離気流形成手段は前記作業空間の
上方に配設され、前記電気品格納箱は前記隔離気流形成
手段により形成される気流に対し前記機器より上流側に
前記作業空間から隔離されて配設されるとともに、前記
作業空間外の空気が前記電気品格納箱内を貫流するよう
空気流通孔が形成されて成ることを特徴とする防災対策
形清浄作業台。 ２、前面に開口部を有し、内部に可燃性物質を扱う機器
を格納する作業空間と、該作業空間の上方に配設された
空気浄化手段と、前記作業空間の下方に連通して前記作
業空間内の空気を排気する排気部と、前記作業空間内の
空気が前記開口部から外部へ流出するのを防止する隔離
気流形成手段とを備えて成る防災対策形清浄作業台にお
いて、電気品格納箱と消火装置と防火ダンパとを備え、
前記電気品格納箱は前記隔離気流形成手段により形成さ
れる気流に対し前記機器より上流側に前記作業空間から
隔離されて配設され、前記消火装置は前記作業台下方に
配設された消火剤容器と前記作業空間内で前記機器の近
傍に配設されて制御弁を介して前記消火剤容器に接続さ
れたノズルと前記機器の近傍に配設された火災検出手段
と、該火災検出手段の信号に基いて消火剤を放出するよ
う前記制御弁を制御する制御部とより成り、該制御部は
動作状態の表示手段を備えて前記電気品格納箱に格納さ
れ、前記防火ダンパは前記排気部内に設けられて前記消
火装置の動作に連動して前記排気部を閉鎖するよう構成
されたことを特徴とする防災対策形清浄作業台。 ３、前記消火装置は圧力気体容器を備え、該圧力気体容
器は第２の制御弁を介して前記防火ダンパの駆動装置に
接続され、前記制御部は前記消火剤の放出時に前記第２
の制御弁を制御して前記圧力気体容器内の気体を放出し
前記防火ダンパの閉動作を行うよう構成されたことを特
徴とする特許請求の範囲第２項記載の防災対策形清浄作
業台。[Claims] 1. A work space having an opening in the front and storing equipment handling flammable substances inside, an air purifying means disposed above the work space, and A disaster prevention type clean workbench comprising an exhaust section that communicates downward and exhausts the air in the work space, and includes an isolation airflow forming means and an electrical equipment storage box, and the isolation airflow forming means is used for the work. Disposed above the space, the electrical equipment storage box is disposed upstream of the equipment and isolated from the work space with respect to the airflow formed by the isolation airflow forming means, and is isolated from the workspace outside the workspace. A disaster prevention clean workbench characterized in that an air circulation hole is formed so that air flows through the electrical equipment storage box. 2. A work space that has an opening in the front and stores equipment that handles flammable substances inside, an air purifying means disposed above the work space, and an air purifying means that communicates with the lower part of the work space. A disaster prevention type clean workbench comprising an exhaust part for exhausting the air in the workspace and an isolation airflow forming means for preventing the air in the workspace from flowing out to the outside from the opening. Equipped with a storage box, a fire extinguisher, and a fire damper,
The electrical equipment storage box is arranged upstream of the equipment and isolated from the work space with respect to the airflow formed by the isolation airflow forming means, and the fire extinguishing device is arranged to be isolated from the work space with respect to the airflow formed by the isolation airflow forming means, and the fire extinguishing device is a fire extinguisher disposed below the workbench. a container, a nozzle arranged near the equipment in the work space and connected to the extinguishing agent container via a control valve, a fire detection means arranged near the equipment, and a fire detection means arranged near the equipment; a control section that controls the control valve to discharge extinguishing agent based on a signal; the control section is equipped with an operating state display means and is stored in the electrical storage box; and the fire damper is arranged in the exhaust section. A disaster-prevention clean workbench, characterized in that the exhaust part is closed in conjunction with the operation of the fire extinguishing device. 3. The fire extinguishing device includes a pressure gas container, the pressure gas container is connected to the drive device of the fire prevention damper through a second control valve, and the control section controls the second pressure gas container when the fire extinguishing agent is released.
3. The disaster prevention clean workbench according to claim 2, wherein the control valve is controlled to release the gas in the pressure gas container and close the fire damper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14685686A JPH0757474B2 (en) | 1986-06-25 | 1986-06-25 | Disaster prevention type clean workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14685686A JPH0757474B2 (en) | 1986-06-25 | 1986-06-25 | Disaster prevention type clean workbench |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS637278A true JPS637278A (en) | 1988-01-13 |
| JPH0757474B2 JPH0757474B2 (en) | 1995-06-21 |
Family
ID=15417101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14685686A Expired - Fee Related JPH0757474B2 (en) | 1986-06-25 | 1986-06-25 | Disaster prevention type clean workbench |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0757474B2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01160188U (en) * | 1988-04-28 | 1989-11-07 | ||
| JPH05295816A (en) * | 1992-01-29 | 1993-11-09 | Shimizu Corp | Partition wall and construction thereof |
| KR100308666B1 (en) * | 1998-08-14 | 2001-11-30 | 윤경주, 김재석 | Aseptic Working Table |
| JP2007017147A (en) * | 2005-07-08 | 2007-01-25 | Gyoseiin Roko Iinkai Roko Anzen Eisei Kenkyusho | Air curtain type air tank |
| JP2007014830A (en) * | 2005-07-05 | 2007-01-25 | Itoki Corp | Draft chamber in sections |
| JP2007255854A (en) * | 2006-03-24 | 2007-10-04 | Hitachi Plant Technologies Ltd | Clean bench |
| JP2009119391A (en) * | 2007-11-16 | 2009-06-04 | Hitachi Industrial Equipment Systems Co Ltd | Safety cabinet |
| JP2017006882A (en) * | 2015-06-25 | 2017-01-12 | ヤマト科学株式会社 | Machine containment device |
| JP2017039081A (en) * | 2015-08-19 | 2017-02-23 | ヤマト科学株式会社 | Equipment-confining apparatus |
-
1986
- 1986-06-25 JP JP14685686A patent/JPH0757474B2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01160188U (en) * | 1988-04-28 | 1989-11-07 | ||
| JPH05295816A (en) * | 1992-01-29 | 1993-11-09 | Shimizu Corp | Partition wall and construction thereof |
| KR100308666B1 (en) * | 1998-08-14 | 2001-11-30 | 윤경주, 김재석 | Aseptic Working Table |
| JP2007014830A (en) * | 2005-07-05 | 2007-01-25 | Itoki Corp | Draft chamber in sections |
| JP2007017147A (en) * | 2005-07-08 | 2007-01-25 | Gyoseiin Roko Iinkai Roko Anzen Eisei Kenkyusho | Air curtain type air tank |
| JP2007255854A (en) * | 2006-03-24 | 2007-10-04 | Hitachi Plant Technologies Ltd | Clean bench |
| JP4655280B2 (en) * | 2006-03-24 | 2011-03-23 | 株式会社日立プラントテクノロジー | Clean bench |
| JP2009119391A (en) * | 2007-11-16 | 2009-06-04 | Hitachi Industrial Equipment Systems Co Ltd | Safety cabinet |
| JP2017006882A (en) * | 2015-06-25 | 2017-01-12 | ヤマト科学株式会社 | Machine containment device |
| JP2017039081A (en) * | 2015-08-19 | 2017-02-23 | ヤマト科学株式会社 | Equipment-confining apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0757474B2 (en) | 1995-06-21 |
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