JPS6363065B2 - - Google Patents
Info
- Publication number
- JPS6363065B2 JPS6363065B2 JP56013969A JP1396981A JPS6363065B2 JP S6363065 B2 JPS6363065 B2 JP S6363065B2 JP 56013969 A JP56013969 A JP 56013969A JP 1396981 A JP1396981 A JP 1396981A JP S6363065 B2 JPS6363065 B2 JP S6363065B2
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- cellulose
- humidity
- insulating substrate
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 229920002678 cellulose Polymers 0.000 claims description 10
- 239000001913 cellulose Substances 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 8
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 claims description 5
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 claims description 5
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 3
- 239000002244 precipitate Substances 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 2
- 235000010980 cellulose Nutrition 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000011148 porous material Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 235000011114 ammonium hydroxide Nutrition 0.000 description 3
- 239000000020 Nitrocellulose Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- MLFHJEHSLIIPHL-UHFFFAOYSA-N isoamyl acetate Chemical compound CC(C)CCOC(C)=O MLFHJEHSLIIPHL-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920001220 nitrocellulos Polymers 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910018626 Al(OH) Inorganic materials 0.000 description 1
- 229920000168 Microcrystalline cellulose Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007791 dehumidification Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- 229940117955 isoamyl acetate Drugs 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 235000019813 microcrystalline cellulose Nutrition 0.000 description 1
- 239000008108 microcrystalline cellulose Substances 0.000 description 1
- 229940016286 microcrystalline cellulose Drugs 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 229920005597 polymer membrane Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Non-Adjustable Resistors (AREA)
Description
【発明の詳細な説明】
この発明は、電気的に湿度を測定するような感
湿素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a humidity sensing element that electrically measures humidity.
従来、金属酸化物等を用いてその抵抗値変化か
ら湿度を測定する感湿素子、あるいは基板上に高
分子膜を形成してその静電容量変化から湿度を測
定する感湿素子等が知られている。しかしながら
抵抗値変化と湿度変化とは非直線関係にあり、温
度係数が大きく、その補償が困難であり、又、高
分子膜は高湿下において膨潤によりはく離しやす
く、高温・高湿の使用はむずかしい欠点があつ
た。 Hitherto, there have been known moisture-sensing elements that measure humidity from changes in resistance using metal oxides, or humidity-sensing elements that measure humidity from changes in capacitance by forming a polymer film on a substrate. ing. However, there is a non-linear relationship between resistance value changes and humidity changes, and the temperature coefficient is large, making it difficult to compensate for this.Additionally, polymer membranes tend to peel off due to swelling under high humidity conditions, and use at high temperatures and high humidity is difficult. It had a difficult flaw.
この発明の目的は、以上の点に鑑み、多孔質層
を用いて、広範囲な温度範囲において使用できる
感湿素子を提供することである。 In view of the above points, an object of the present invention is to provide a moisture-sensitive element that uses a porous layer and can be used in a wide temperature range.
第１図は、この発明の一実施例を示す構成説明
図、第２図は、断面説明図である。図において、
１はガラス、セラミツク等の絶縁性基板、２は絶
縁性基板上１に真空蒸着等で形成されるPt等の
金属の下部電極、３は下部電極２上に形成される
多孔質層をもつ吸湿担体、４は吸湿担体３上に真
空蒸着等で形成されるAu等の金属よりなる透水
性の上部電極である。そして、上部電極４を透過
して水分は吸湿担体に含まれるため、上部電極４
と下部電極３との間の静電容量変化から湿度の測
定を行うことができる。 FIG. 1 is a configuration explanatory diagram showing one embodiment of the present invention, and FIG. 2 is a cross-sectional explanatory diagram. In the figure,
1 is an insulating substrate such as glass or ceramic, 2 is a lower electrode of metal such as Pt formed on the insulating substrate 1 by vacuum deposition, etc., and 3 is a moisture absorption layer having a porous layer formed on the lower electrode 2. The carrier 4 is a water-permeable upper electrode made of a metal such as Au, which is formed on the hygroscopic carrier 3 by vacuum deposition or the like. Since the moisture passes through the upper electrode 4 and is contained in the moisture absorption carrier, the upper electrode 4
Humidity can be measured from the change in capacitance between the lower electrode 3 and the lower electrode 3.
この吸湿担体３は次のようにして形成される。 This moisture absorption carrier 3 is formed as follows.
まず50ｇの硝酸アルミニウムAl（NO3）3・
9H2Oを250mlの水に溶かし硝酸アルミニウム溶
液とする。又、150mlのアンモニア水NH4OHを
水でうすめて１とし、その中に１ｇ〜50ｇの微
晶セルロースを分散させる。そして硝酸アルミニ
ウム溶液と、セルロースが分散されたアンモニア
水とを混合し、十分かく拌した後、放置し、水酸
化アルミニウムAl（OH）3とセルロースを沈澱さ
せる。 First, 50g of aluminum nitrate Al (NO 3 ) 3 .
Dissolve 9H 2 O in 250 ml of water to make an aluminum nitrate solution. Further, 150 ml of aqueous ammonia NH 4 OH is diluted with water to make 1, and 1 g to 50 g of microcrystalline cellulose is dispersed therein. Then, the aluminum nitrate solution and ammonia water in which cellulose is dispersed are mixed, thoroughly stirred, and then left to precipitate aluminum hydroxide Al(OH) 3 and cellulose.
次に、この水酸化アルミニウムとセルロースの
混合沈澱物を乾燥させて取り出し、これに低熔融
ガラス粉末（ガラスフリツト）を添加し、さらに
酢酸イソアミルとニトロセルロースを混合したも
のをバインダーとして添加してペースト状とし、
これを絶縁性基板１の下部電極２上に印刷または
塗布して付着させる。 Next, this mixed precipitate of aluminum hydroxide and cellulose is dried and taken out, low-melting glass powder (glass frit) is added to it, and a mixture of isoamyl acetate and nitrocellulose is added as a binder to form a paste. year,
This is printed or coated on the lower electrode 2 of the insulating substrate 1 to adhere it.
そして、500〜700℃において、１−数時間焼成
すると水酸化アルミニウムは酸化して細かなアル
ミナAl2O3となり、低熔融ガラスは熔けて絶縁性
基板１等に熔着し、ニトロセルロースとバインダ
ーは焼失する。 Then, when baked at 500 to 700°C for one to several hours, the aluminum hydroxide oxidizes to become fine alumina Al 2 O 3 , and the low melting glass melts and adheres to the insulating substrate 1, etc., and forms nitrocellulose and binder. will be burnt down.
つまり、第３図の模式図で示すように絶縁性基
板１の下部電極２上に、ガラス５の中にアルミナ
６が分散し、セルロースのあつたところは焼失し
て細孔Ａが多数形成された多孔質層となる。 In other words, as shown in the schematic diagram of FIG. 3, alumina 6 is dispersed in the glass 5 on the lower electrode 2 of the insulating substrate 1, and the hot areas of cellulose are burned away and a large number of pores A are formed. It becomes a porous layer.
このセルロース、アルミナ、ガラスは均一によ
く混合されているので、セルロースの焼失による
細孔径は、そろつたもので、平均的に分布してお
り、又、膜厚も数十μｍと薄く、吸湿担体として
好適である。 Since the cellulose, alumina, and glass are uniformly and well mixed, the pore diameters due to cellulose burnout are uniform and evenly distributed, and the film thickness is as thin as several tens of micrometers, making it a moisture-absorbing carrier. It is suitable as
そして、この吸湿担体３の上に上部電極４を形
成し、上部電極４と下部電極２との間の吸湿担体
３の静電容量変化から湿度を測定するようにすれ
ばよい。 Then, the upper electrode 4 may be formed on the moisture absorbing carrier 3, and the humidity may be measured from the change in capacitance of the moisture absorbing carrier 3 between the upper electrode 4 and the lower electrode 2.
又、第４図で示すように上記吸湿担体３を絶縁
性基板１上に形成し、抵抗値調整用の抵抗皮膜７
を形成した後、電極８，９を形成し、電極８，９
間の抵抗値変化から湿度を測定するようにするこ
とができる。 Further, as shown in FIG. 4, the moisture absorption carrier 3 is formed on the insulating substrate 1, and a resistive film 7 for adjusting the resistance value is formed on the insulating substrate 1.
After forming the electrodes 8 and 9, the electrodes 8 and 9 are formed.
Humidity can be measured from the change in resistance value between the two.
以上述べたように、この発明は、吸湿担体とし
て、硝酸アルミニウムおよびセルロースを分散さ
せたアンモニア水を混合して得られる水酸化アル
ミニウムとセルロースの混合沈澱物に低熔融ガラ
ス粉末を添加してペースト状とし、これを絶縁性
基板上に付着させて焼成して多孔質化してなるも
のを用い、その電気的な変化から湿度を測定する
感湿素子である。 As described above, the present invention is a hygroscopic carrier in which low-melting glass powder is added to a mixed precipitate of aluminum hydroxide and cellulose obtained by mixing aqueous ammonia in which aluminum nitrate and cellulose are dispersed to form a paste. This is a moisture-sensing element that measures humidity based on the electrical changes made by attaching this to an insulating substrate and firing it to make it porous.
従つて、この感湿素子の吸湿担体は、水分の吸
湿、脱湿に好適な、細孔径のそろつた、平均的に
分布した細孔を有し、表面積が大きいので感度が
良く、又、膜厚も薄いものとすることができるの
で応答性も速い。又、ガラスにより基板との接着
が強いため、はく離のおそれもなく、機械的に強
固であり、高温使用は耐えうるものである。 Therefore, the moisture-absorbing carrier of this moisture-sensitive element has pores with uniform pore diameters and an average distribution suitable for moisture absorption and dehumidification, has a large surface area, and has good sensitivity. Since the thickness can be made thin, the response is fast. In addition, since glass has strong adhesion to the substrate, there is no fear of peeling, and it is mechanically strong and can withstand high-temperature use.
第１図、第２図、第４図は、この発明の一実施
例を示す構成説明図、第３図は模式説明図であ
る。
１……絶縁性基板、３……吸湿担体、２，４，
８，９……電極。
1, 2, and 4 are configuration explanatory diagrams showing one embodiment of the present invention, and FIG. 3 is a schematic explanatory diagram. 1... Insulating substrate, 3... Moisture absorption carrier, 2, 4,
8, 9... Electrode.
Claims (1)
させたアンモニア水とを混合して得られる水酸化
アルミニウムおよびセルロースの混合沈澱物に低
熔融ガラスを添加してペースト状とし、これを基
板に付着させて焼成して多孔質化してなることを
特徴とする感湿素子。1. Low melting glass is added to a mixed precipitate of aluminum hydroxide and cellulose obtained by mixing an aluminum nitrate solution and aqueous ammonia in which cellulose is dispersed to form a paste, which is then attached to a substrate and fired. A moisture-sensitive element characterized by being made porous.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56013969A JPS57128902A (en) | 1981-02-02 | 1981-02-02 | Moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56013969A JPS57128902A (en) | 1981-02-02 | 1981-02-02 | Moisture sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57128902A JPS57128902A (en) | 1982-08-10 |
| JPS6363065B2 true JPS6363065B2 (en) | 1988-12-06 |
Family
ID=11848040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56013969A Granted JPS57128902A (en) | 1981-02-02 | 1981-02-02 | Moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57128902A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60239657A (en) * | 1984-05-15 | 1985-11-28 | Sharp Corp | Moisture-sensitive element and manufacture thereof |
| JP7300187B2 (en) * | 2018-06-30 | 2023-06-29 | 株式会社フジキン | Diaphragm valve and its monitoring method |
-
1981
- 1981-02-02 JP JP56013969A patent/JPS57128902A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57128902A (en) | 1982-08-10 |
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