JPS6353262B2 - - Google Patents
Info
- Publication number
- JPS6353262B2 JPS6353262B2 JP59051141A JP5114184A JPS6353262B2 JP S6353262 B2 JPS6353262 B2 JP S6353262B2 JP 59051141 A JP59051141 A JP 59051141A JP 5114184 A JP5114184 A JP 5114184A JP S6353262 B2 JPS6353262 B2 JP S6353262B2
- Authority
- JP
- Japan
- Prior art keywords
- strip
- zinc
- roll
- evaporation
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 44
- 239000010959 steel Substances 0.000 claims description 44
- 238000001704 evaporation Methods 0.000 claims description 32
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 238000007740 vapor deposition Methods 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 claims description 7
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 78
- 229910052725 zinc Inorganic materials 0.000 description 78
- 239000011701 zinc Substances 0.000 description 78
- 238000007789 sealing Methods 0.000 description 15
- 238000007738 vacuum evaporation Methods 0.000 description 11
- 238000007747 plating Methods 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 229920006395 saturated elastomer Polymers 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000005246 galvanizing Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Coating With Molten Metal (AREA)
Description
【発明の詳細な説明】
〔本発明の技術分野〕
本発明は、帯鋼に連続的に亜鉛などの金属を真
空蒸着させる真空蒸着装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a vacuum evaporation apparatus for continuously vacuum evaporating metal such as zinc onto a steel strip.
帯鋼に連続的にある金属例えば亜鉛を蒸着する
場合、760Torrから漸次真空シール装置を経て蒸
着室に導く。蒸着室の圧力は例えば亜鉛を蒸着す
る場合、1Torr〜0.0001Torrである。蒸着したあ
と帯鋼はシール装置を経て圧力760Torrの大気へ
導かれる。この場合、帯鋼に蒸着された金属例え
ば亜鉛は、蒸着室、及び低圧力のシール装置を通
過中に再蒸発し、蒸着室及びシール装置に付着す
る。長時間蒸着する場合、再蒸発した金属例えば
亜鉛は蒸着室及びシール装置等に多量に堆積し、
その結果、シール装置を停止する等、また付着し
た亜鉛を除去するために設備全体を休止する等設
備の稼動率を低下させる欠点を有する。また、再
蒸発した亜鉛は、そのまま無駄となり損失も大き
い。
When a metal such as zinc is continuously deposited on a steel strip, the 760 Torr is gradually introduced into the deposition chamber through a vacuum sealing device. For example, when depositing zinc, the pressure in the deposition chamber is 1 Torr to 0.0001 Torr. After vapor deposition, the strip passes through a sealing device and is led into the atmosphere at a pressure of 760 Torr. In this case, the metal deposited on the steel strip, such as zinc, reevaporates while passing through the deposition chamber and the low-pressure sealing device, and adheres to the deposition chamber and the sealing device. When vapor deposition is carried out for a long time, a large amount of reevaporated metal such as zinc accumulates in the vapor deposition chamber and sealing equipment.
As a result, there is a drawback that the operating rate of the equipment is lowered, such as by stopping the sealing device or shutting down the entire equipment to remove attached zinc. Moreover, the re-evaporated zinc is wasted as it is, resulting in a large loss.
以上の事情から再蒸発亜鉛を無くし、亜鉛の歩
留を向上させると同時に、設備の稼動率をあげ、
メツキコストの低減を計かる必要がある。 Due to the above circumstances, it is possible to eliminate re-evaporated zinc, improve the zinc yield, and at the same time increase the operating rate of the equipment.
It is necessary to reduce the plating cost.
本発明は、上記従来装置の欠点を解消する真空
蒸着装置を提供することを目的とする。すなわち
本発明は、真空蒸着された亜鉛などの金属の再蒸
発を抑制することにより、該金属の歩留を向上さ
せると同時に設備の稼動率を向上させることがで
きる真空蒸着装置を提供することを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide a vacuum evaporation apparatus that eliminates the drawbacks of the conventional apparatus described above. That is, the present invention aims to provide a vacuum evaporation apparatus that can improve the yield of metal such as zinc that has been vacuum evaporated, and at the same time improve the operating rate of the equipment by suppressing the re-evaporation of the metal. purpose.
そして、本発明は、上記目的を達成する手段と
して、加熱ダクトを、メツキ直後から事実上再蒸
発が起らない真空圧力に保持された室内に配設し
た点にある。すなわち、本発明は、帯鋼に連続的
に亜鉛などの金属の真空蒸着メツキを施す真空蒸
着装置において、メツキ直後から事実上再蒸発の
起らない真空圧力に保持された室内までの間に、
該帯鋼の温度以上に加熱された加熱ダクトを該帯
鋼を囲むように配設したことを特徴とする真空蒸
着装置である。
The present invention, as a means for achieving the above object, resides in that the heating duct is disposed in a chamber maintained at a vacuum pressure that virtually prevents re-evaporation immediately after plating. That is, the present invention provides, in a vacuum evaporation apparatus that continuously applies vacuum evaporation plating of metal such as zinc to steel strips, between immediately after plating and a chamber maintained at a vacuum pressure where re-evaporation does not actually occur.
This vacuum evaporation apparatus is characterized in that a heating duct heated to a temperature higher than the temperature of the steel strip is disposed so as to surround the steel strip.
本発明は、具体的には、真空蒸着装置の出口か
らシール装置間及び、低圧側シール装置間に帯鋼
を囲むインナダクトを設け、このダクトを加熱す
ることにより再蒸発した亜鉛がシール装置等に付
着するのを防止すると同時に、帯鋼に蒸着された
亜鉛の再蒸発温度と同一か若干高めの温度にイン
ナダクトを加熱することにより、亜鉛の温度に相
当した再蒸発亜鉛の飽和蒸気圧ができるだけ維持
できるようにし、インナダクトからの亜鉛蒸気の
洩れを少くするようにしたものである。本発明で
は、このように、連続的に亜鉛が再蒸発するのを
抑制することができ、すなわち、再蒸発を殆んど
皆無にでき、設備の稼動率の向上と亜鉛の歩留を
向上させることができるものである。 Specifically, the present invention provides an inner duct that surrounds the steel strip from the outlet of the vacuum evaporation device to the sealing device and between the low-pressure side sealing device, and by heating this duct, re-evaporated zinc is transferred to the sealing device, etc. At the same time as preventing adhesion, by heating the inner duct to a temperature that is the same as or slightly higher than the re-evaporation temperature of the zinc deposited on the steel strip, the saturated vapor pressure of the re-vaporized zinc, which corresponds to the temperature of the zinc, is maintained as much as possible. This is to reduce the leakage of zinc vapor from the inner duct. In this way, the present invention can suppress the continuous re-evaporation of zinc, that is, almost eliminate re-evaporation, improving the operating rate of equipment and the yield of zinc. It is something that can be done.
以下、第１図に基づいて本発明を詳細に説明す
る。第１図は本発明の実施例である真空蒸着装置
を示す図である。第１図において、帯鋼１は入側
の真空シール装置３１，３３，３４を経て低圧力
の真空槽２に導かれ、ロール３に案内される過程
で、蒸発槽４から蒸発した金属蒸気例えば亜鉛蒸
気５が蒸着メツキされ、ふたたび高圧側へシール
バー３５，３６，３７およびシールロール２８，
２９，３０によつて形成される各真空室３８，３
９，４０を経由して導かれていく。 Hereinafter, the present invention will be explained in detail based on FIG. FIG. 1 is a diagram showing a vacuum evaporation apparatus according to an embodiment of the present invention. In FIG. 1, a steel strip 1 is led to a low-pressure vacuum tank 2 through vacuum sealing devices 31, 33, and 34 on the entrance side, and in the process of being guided to a roll 3, metal vapors evaporated from an evaporation tank 4, such as Zinc vapor 5 is deposited and plated, and the seal bars 35, 36, 37 and the seal roll 28 are moved to the high pressure side again.
Each vacuum chamber 38,3 formed by 29,30
It will lead you through 9 and 40.
帯鋼１に蒸着された固体の亜鉛は、雰囲気圧力
が低い真空圧力下では、ふたたび蒸発を始める。
この現象は再蒸発と呼ばれている。再蒸発は雰囲
気圧力が高くなるにつれて減少するが、真空圧力
10〜20Torrまでは設備上問題となりうる。特に
低圧側では再蒸発量は多い。 The solid zinc deposited on the steel strip 1 starts to evaporate again under vacuum pressure where the atmospheric pressure is low.
This phenomenon is called reevaporation. Re-evaporation decreases as atmospheric pressure increases, but vacuum pressure
Up to 10 to 20 Torr may cause equipment problems. Particularly on the low pressure side, the amount of re-evaporation is large.
帯鋼１に蒸着した亜鉛の有する温度の飽和蒸気
圧に達するまで、固体の亜鉛は再蒸発を続ける。
蒸着後の帯鋼１が通過していく装置、例えば真空
槽２の出口側のシールバー３５，３６，３７、シ
ールロール２８，２９，３０及びこれらを接続す
る中間ダクト７が常温であれば、再蒸発亜鉛８は
前記の各装置に蒸着する。すなわち帯鋼１に蒸着
メツキされた亜鉛面から前記装置へ連続的に再蒸
発が続き、前記装置に堆積する。堆積した亜鉛は
定期的に取除く必要があり、生産性を阻害する。 The solid zinc continues to reevaporate until it reaches the saturated vapor pressure of the temperature of the zinc deposited on the steel strip 1.
If the device through which the steel strip 1 after vapor deposition passes, for example, the seal bars 35, 36, 37 on the exit side of the vacuum chamber 2, the seal rolls 28, 29, 30, and the intermediate duct 7 connecting these, is at room temperature, Re-evaporated zinc 8 is deposited on each of the above devices. That is, zinc is continuously reevaporated from the vapor-plated surface of the steel strip 1 to the device and is deposited on the device. Deposited zinc must be removed periodically and impedes productivity.
チヤンネル９に案内されて来た亜鉛蒸気５がロ
ール３に案内される過程で帯鋼１に蒸着し、蒸着
亜鉛メツキが完了し、ロール３から離れて出てく
る。ロール３の出口にある弓状のカバー１０と１
１にヒーターで加熱されたインナダクト１２を設
け、シールバー３５に接続する。亜鉛蒸着された
帯鋼１を加熱されたインナダクト１２で囲うこと
で、帯鋼１から再蒸発した亜鉛はインナダクト１
２に蒸着できず、再蒸発亜鉛８としてインナダク
ト１２の中に浮遊して存在し、亜鉛蒸気の分圧が
帯鋼１の固体亜鉛の再蒸発温度T1の飽和蒸気圧
P1に達すると再蒸発現象は無くなる。飽和蒸気
圧P1に達したあとは、真空蒸着メツキされた帯
鋼１が連続的にインナダクト１２の中を大量に通
過しても再蒸発は抑制されたままであるので、亜
鉛の歩留も大幅に向上する。また再蒸発亜鉛８が
抑制されるので、設備全体の稼動率が高まり生産
性も大きく向上する。 The zinc vapor 5 guided through the channel 9 is deposited on the steel strip 1 in the process of being guided by the roll 3, and the vapor deposited galvanizing is completed and the zinc vapor 5 leaves the roll 3 and comes out. Arcuate covers 10 and 1 at the exit of roll 3
1 is provided with an inner duct 12 heated by a heater and connected to a seal bar 35. By surrounding the zinc-deposited steel strip 1 with a heated inner duct 12, the zinc reevaporated from the steel strip 1 is transferred to the inner duct 1.
2, and exists floating in the inner duct 12 as reevaporated zinc 8, and the partial pressure of zinc vapor is equal to the saturated vapor pressure at the reevaporation temperature T 1 of solid zinc in the strip steel 1.
When P 1 is reached, the reevaporation phenomenon disappears. After reaching the saturated vapor pressure P 1 , re-evaporation remains suppressed even if a large amount of the vacuum-deposited steel strip 1 passes continuously through the inner duct 12, so the zinc yield is greatly increased. improve. Furthermore, since the re-evaporation of zinc 8 is suppressed, the operating rate of the entire facility is increased and productivity is also greatly improved.
第１図に示す本発明の実施例装置の構成をより
詳細に説明すると、蒸発槽４はヒータ１５で加熱
された亜鉛を溶融する。430℃〜580℃まで加熱溶
融された溶融亜鉛１４は、真空槽２の雰囲気ガ
ス、例えば窒素ガスを真空ポンプ２１で排気し、
真空槽内の雰囲気圧力が１〜0.0001Torrに達す
ると蒸発を開始し、ヒータ１６で加熱された案内
フードであるチヤンネル９に案内された亜鉛蒸気
５は、ロール３に巻付けられた帯鋼１に連続的に
蒸着される。ロール３の内部にはヒータ１９が設
けてあり、ロール３の円筒表面及び円筒両端の円
板（図示しない）の表面温度が亜鉛蒸気５の蒸気
圧下における亜鉛蒸気５の再蒸発温度以上の温
度、例えば1Torrで580℃、0.0001Torrで230℃に
加熱されている。 To explain in more detail the configuration of the apparatus according to the embodiment of the present invention shown in FIG. 1, the evaporation tank 4 melts zinc heated by a heater 15. The molten zinc 14 heated and melted to 430°C to 580°C is heated to evacuate atmospheric gas, such as nitrogen gas, from the vacuum chamber 2 with a vacuum pump 21, and
When the atmospheric pressure in the vacuum chamber reaches 1 to 0.0001 Torr, evaporation starts, and the zinc vapor 5 guided to the channel 9, which is a guide hood heated by the heater 16, passes through the steel strip 1 wound around the roll 3. is continuously deposited. A heater 19 is provided inside the roll 3, and the surface temperature of the cylindrical surface of the roll 3 and the disks (not shown) at both ends of the cylinder is a temperature higher than the re-evaporation temperature of the zinc vapor 5 under the vapor pressure of the zinc vapor 5. For example, it is heated to 580℃ at 1Torr and 230℃ at 0.0001Torr.
前記チヤンネル９に案内された亜鉛蒸気５が真
空槽２に大量に洩れ出ないように、ロール３の帯
鋼１の進入側に弓状のカバー２５を設け、ヒータ
１７で加熱し、一方、帯鋼１のロール３の退出側
にカバー１０を設け、ヒータ１７で加熱すること
で該カバー２５と１０の帯鋼１に面した表面を亜
鉛蒸気５の蒸気圧下における亜鉛蒸気５の再蒸発
温度以上の温度、例えば1Torr〜0.0001Torrで
230℃〜580℃に加熱する。このようにロール３及
び弓状カバー２５及び１０に亜鉛が蒸着しない構
造としている。 In order to prevent the zinc vapor 5 guided through the channel 9 from leaking into the vacuum chamber 2 in large quantities, an arcuate cover 25 is provided on the entrance side of the steel strip 1 of the roll 3, and heated with a heater 17. A cover 10 is provided on the exit side of the roll 3 of the steel 1, and by heating with a heater 17, the surfaces of the covers 25 and 10 facing the steel strip 1 are heated to a temperature higher than the re-evaporation temperature of the zinc vapor 5 under the vapor pressure of the zinc vapor 5. temperature, e.g. 1Torr ~ 0.0001Torr
Heat to 230℃-580℃. In this way, the structure is such that zinc is not deposited on the roll 3 and the arcuate covers 25 and 10.
ロール３と弓状カバー２５及び１０との隙間２
６は、帯鋼１が該カバー２５と１０に接触しない
範囲で極力小さく設定し、かつ、該隙間２６のロ
ール３の円周方向長さを設備の許容する範囲で長
く取り、亜鉛蒸気５が該隙間２６を通過中に圧力
損失をともない真空槽２及びインナダクト１２に
極力出てこないように工夫されている。 Gap 2 between roll 3 and arcuate covers 25 and 10
6 is set as small as possible so that the steel strip 1 does not come into contact with the covers 25 and 10, and the length of the gap 26 in the circumferential direction of the roll 3 is set as long as the equipment allows, so that the zinc vapor 5 While passing through the gap 26, it is devised to prevent pressure loss from coming out into the vacuum chamber 2 and the inner duct 12 as much as possible.
またロール３の帯鋼通過側と反対側にも弓状の
カバー１１を設け、ヒーター１８で亜鉛蒸気５の
再蒸発温度以上に加熱し、該カバー１１の内面に
亜鉛蒸気５が蒸着しないようにしてある。該カバ
ー１１とロール３で作られる隙間２７は、互に接
触しない範囲で極力小さく設定されており、イン
ナダクト１２内の再蒸発亜鉛８が該隙間２７で圧
力損失をともない真空槽２に出てくるのを抑制す
る構造にしてある。 Further, an arcuate cover 11 is provided on the side opposite to the strip passing side of the roll 3, and is heated with a heater 18 to a temperature higher than the re-evaporation temperature of the zinc vapor 5 to prevent the zinc vapor 5 from being deposited on the inner surface of the cover 11. There is. The gap 27 created by the cover 11 and the roll 3 is set as small as possible without contacting each other, and the re-evaporated zinc 8 in the inner duct 12 comes out into the vacuum chamber 2 with a pressure loss in the gap 27. The structure is designed to suppress the
インナダクト１２は該カバー１０と１１に一方
を接続し、他端は膨張代を残してシールバー３５
に接続されており、ヒーター２０で加熱されてい
る。 The inner duct 12 is connected to the covers 10 and 11 at one end, and the other end is connected to the seal bar 35 with an expansion allowance left.
and is heated by a heater 20.
真空室３８及び真空シール装置３４は真空ポン
プ２２で、真空室３９及び真空シール装置３３は
真空ポンプ２３で、真空室４０及び真空シール装
置３１は真空ポンプ２４で、それぞれ真空排気さ
れており、帯鋼１が760Torr（大気圧力）から各
真空シール装置を通過する過程で圧力を下げ、真
空槽２で亜鉛を蒸着する場合、1Torr〜
0.0001Torrに到達し、蒸着後各真空シール装置
を通過する過程で漸次圧力が高くなり、760Torr
に回復し、真空蒸着メツキ作業を完了する。 The vacuum chamber 38 and the vacuum seal device 34 are evacuated by the vacuum pump 22, the vacuum chamber 39 and the vacuum seal device 33 are evacuated by the vacuum pump 23, and the vacuum chamber 40 and the vacuum seal device 31 are evacuated by the vacuum pump 24. When the pressure of steel 1 is lowered from 760 Torr (atmospheric pressure) through each vacuum sealing device and zinc is evaporated in vacuum chamber 2, the pressure is 1 Torr~
The pressure reaches 0.0001Torr, and as it passes through each vacuum sealing device after vapor deposition, the pressure gradually increases until it reaches 760Torr.
to complete the vacuum plating work.
シールロール２８，２９，３０は、再蒸発亜鉛
８が蒸着しないようロールの内部にヒータ（図示
しない）が設けてあり、帯鋼１に蒸着された亜鉛
の再蒸発温度と同等もしくはそれ以上の温度に加
熱されている。またシールバー３５，３６，３７
にもヒータ―（図示しない）が設けてあり、シー
ルロール２８，２９，３０と同じ温度に加熱され
ており、再蒸発亜鉛８が付着しないようにしてあ
る。 The seal rolls 28, 29, and 30 are provided with heaters (not shown) inside the rolls to prevent the reevaporation zinc 8 from being deposited, and the seal rolls 28, 29, and 30 are heated at a temperature equal to or higher than the reevaporation temperature of the zinc deposited on the steel strip 1. is heated to. Also seal bars 35, 36, 37
A heater (not shown) is also provided for the seal rolls 28, 29, and 30, and the rolls are heated to the same temperature as the seal rolls 28, 29, and 30, so that the reevaporated zinc 8 does not adhere to the rolls.
上記真空蒸着装置の作用を説明すると、帯鋼１
に亜鉛蒸気５が蒸着されてロール３から帯鋼１が
出てき、ヒータ２０で加熱されたインナダクト１
２の中を通過する時、帯鋼１の亜鉛面から再蒸発
が起る。インナダクト１２内には窒素ガス（N2）
と再蒸発亜鉛８が混在する。帯鋼１の亜鉛の再蒸
発温度T1に相当する亜鉛の飽和蒸気圧P1に再蒸
発亜鉛８の亜鉛蒸気分圧が到達するまで、帯鋼１
の亜鉛面から再蒸発が続く。 To explain the operation of the above vacuum evaporation device, the steel strip 1
Zinc vapor 5 is deposited on the steel strip 1 from the roll 3, and the inner duct 1 is heated by the heater 20.
When passing through the steel strip 2, re-evaporation occurs from the zinc surface of the steel strip 1. Nitrogen gas (N 2 ) is present in the inner duct 12.
and reevaporated zinc 8 are mixed. Until the zinc vapor partial pressure of the re-evaporated zinc 8 reaches the saturated vapor pressure P 1 of zinc corresponding to the re-evaporation temperature T 1 of the zinc of the steel strip 1, the
Re-evaporation continues from the zinc surface.
この場合ヒータ２０で加熱されたインナダクト
１２の帯鋼１が通過する面（内面）の温度が、帯
鋼１の亜鉛の再蒸発温度T1と同等か、それ以上
の温度に加熱されていると、インナダクト１２の
内面には再蒸発亜鉛８は付着しないこととなる。 In this case, the temperature of the surface (inner surface) of the inner duct 12 heated by the heater 20 through which the steel strip 1 passes is equal to or higher than the re-evaporation temperature T1 of zinc in the steel strip 1. , the reevaporated zinc 8 will not adhere to the inner surface of the inner duct 12.
帯鋼１が真空槽で、シールバー３５，３６，３
７及びシールロール２８，２９，３０を通過する
とき、亜鉛が付着することがでなく連続的に真空
蒸着メツキされた帯鋼が順調に生産されることに
なる。 The steel strip 1 is a vacuum chamber, and the seal bars 35, 36, 3
7 and the seal rolls 28, 29, and 30, the strip steel is continuously vacuum-deposited without zinc adhesion and is smoothly produced.
一方、インナダクト１２内で帯鋼１の亜鉛の再
蒸発温度T1に相当した亜鉛の飽和蒸気圧P1に再
蒸発亜鉛８の亜鉛蒸気分圧が到達したあとは、も
はや再蒸発は起らず、再蒸発で失われる無効亜鉛
蒸気は大巾に低減されることとなる。 On the other hand, after the zinc vapor partial pressure of the reevaporated zinc 8 reaches the saturated vapor pressure P 1 of zinc corresponding to the reevaporation temperature T 1 of zinc in the strip steel 1 in the inner duct 12, reevaporation no longer occurs. , the amount of ineffective zinc vapor lost through re-evaporation will be greatly reduced.
低圧力下のシールバー３５、シールロール２８
とシールバー３６、シールロール２９との間及び
シールバー３６、シールロール２９とシールバー
３７、シールロール３０との間にも前記のインナ
ダクト１２と同様膨張代を残してインナダクト３
２及び３２′が設けてあり、ヒータ２０で加熱さ
れており再蒸発を抑制するようにしてある。 Seal bar 35 and seal roll 28 under low pressure
Similarly to the inner duct 12, an expansion allowance is left between the inner duct 3 and the seal bar 36, and the seal roll 29, and between the seal bar 36, the seal roll 29, and the seal bar 37, and the seal roll 30.
2 and 32' are provided and heated by a heater 20 to suppress re-evaporation.
再蒸発の抑制を必要とする真空圧力は、約
20Torrまでであり、真空槽２から約20Torrの真
空シール装置間はインナダクトを設け、ヒータで
加熱する必要がある。なおインナダクト自身はス
テンレス鋼もしくは普通鋼の薄板でできており、
インナダクト外面は保温材（図示しない）で断熱
してあるので、わずかの電力で加熱することがで
きる。 The vacuum pressure required to suppress reevaporation is approximately
The pressure is up to 20 Torr, and it is necessary to provide an inner duct between the vacuum chamber 2 and the vacuum sealing device of about 20 Torr and heat it with a heater. The inner duct itself is made of a thin plate of stainless steel or ordinary steel.
Since the outer surface of the inner duct is insulated with a heat insulating material (not shown), it can be heated with a small amount of electric power.
なお、インナダクト１２の中の窒素ガス（N2）
と再蒸発亜鉛蒸気８の有する全圧力は、真空槽２
の雰囲気圧力と等しくないと蒸発槽４の中の溶融
亜鉛１４が蒸発し、真空蒸着が帯鋼１へ行われな
くなるので、インナダクト１２，３２及び３２′
は小さな穴（図示しない）が設けてあり、それぞ
れの真空室の雰囲気圧力とインナダクト１２，３
２，３２′のN2ガス及び再蒸発亜鉛８の蒸気の全
圧力を等しくするのはもちろんである。 Note that nitrogen gas (N 2 ) in the inner duct 12
The total pressure of the re-evaporated zinc vapor 8 is
If the atmospheric pressure is not equal to the atmospheric pressure of
are provided with small holes (not shown), and the atmospheric pressure of each vacuum chamber and the inner ducts 12 and 3 are
Of course, the total pressures of the N 2 gas of 2,32' and the vapor of reevaporated zinc 8 are made equal.
この場合インナダクトに設けた穴から外部へ拡
散して出てくる再蒸発亜鉛８の蒸気は無視し得る
ほど少ない。 In this case, the amount of vapor of the reevaporated zinc 8 that diffuses to the outside from the hole provided in the inner duct is negligible.
以上本発明を詳細に説明したが、さらに、本発
明の実施例装置である第１図の装置を用いた実施
例をあげ、本発明をより詳細に説明する。 Although the present invention has been described in detail above, the present invention will be further explained in more detail by giving an example using the apparatus shown in FIG. 1, which is an embodiment of the present invention.
第１図の装置を用い、次の条件下でメツキ作業
を行つた。
Plating work was carried out using the apparatus shown in Figure 1 under the following conditions.
帯 鋼 0.6mm厚さ×300mm巾の普通鋼
通板速度 15ｍ／min
蒸着前の帯鋼板温度 250℃
真空圧力
・真空槽圧力 0.07Torr
・真空室３８の圧力 1.0Torr
・真空室３９の圧力 10Torr
・真空室４０の圧力 70Torr
・インナダクト１２，３２，及び，３２′の
内壁温度 300℃
・溶融亜鉛１４の温度 480℃
・弓状カバー１０，１１及び２５の内壁温度
480℃
・ロール３の外面温度 480℃
・シールロール２８，２９，３０及びシール
バー３５，３６，３７の表面温度 300℃
めつき膜厚 40ｇ／m2
その結果、インナダクト１２，３２及び３２′
の内壁には、再蒸発による亜鉛の付着が認められ
なかつた。またインナダクト１２，３２及び３
２′に設けた小さな穴から出て来た亜鉛の量は、
無視できるほど少く、インナダクト１２，３２及
び３２′を加熱することにより再蒸発が十分抑制
されていることが確認された。Strip steel 0.6mm thick x 300mm width common steel Strip speed 15m/min Steel strip temperature before vapor deposition 250℃ Vacuum pressure/vacuum chamber pressure 0.07Torr ・Pressure in vacuum chamber 38 1.0Torr ・Pressure in vacuum chamber 39 10Torr ・Pressure in vacuum chamber 40: 70Torr ・Inner wall temperature of inner ducts 12, 32, and 32' 300℃ ・Temperature of molten zinc 14 480℃ ・Inner wall temperature of arcuate covers 10, 11, and 25
480℃ ・External surface temperature of roll 3 480℃ ・Surface temperature of seal rolls 28, 29, 30 and seal bars 35, 36, 37 300℃ Plating film thickness 40g/m 2 As a result, inner ducts 12, 32 and 32'
No adhesion of zinc due to re-evaporation was observed on the inner wall. In addition, the inner ducts 12, 32 and 3
The amount of zinc that came out from the small hole made at 2' is
It was confirmed that the re-evaporation was sufficiently suppressed by heating the inner ducts 12, 32 and 32'.
本発明は、以上説明した通り、蒸着された亜鉛
の再蒸発現象を加熱されたインナダクトを設ける
ことにより抑制し、再蒸発する亜鉛量を大巾に少
くし、かつ真空槽、シールバーやシールロール等
の真空シール装置等に再蒸発した亜鉛を極力付着
させることなく、設備全体の稼動率を向上させ、
生産性を上げることができる顕著な効果が生ずる
ものである。
As explained above, the present invention suppresses the re-evaporation phenomenon of deposited zinc by providing a heated inner duct, greatly reduces the amount of zinc re-evaporated, and Improve the operating rate of the entire equipment by minimizing the adhesion of re-evaporated zinc to vacuum sealing devices such as
This produces a remarkable effect of increasing productivity.
第１図は本発明の実施例である真空蒸着装置を
示す図である。
１……帯鋼、２……真空槽、３……ロール、４
……蒸発槽、５……亜鉛蒸気、７……中間ダク
ト、８……再蒸発亜鉛、９……チヤンネル、１
０，１１，２５……カバー、１２，３２，３２′
……インナダクト、３５，３６，３７……シール
バー、１４……溶融亜鉛、１５〜２０……ヒータ
ー、２１〜２４……真空ポンプ、２６，２７……
隙間、２８，２９，３０……シールロール、３
１，３３，３４……真空シール装置。
FIG. 1 is a diagram showing a vacuum evaporation apparatus according to an embodiment of the present invention. 1...Strip steel, 2...Vacuum chamber, 3...Roll, 4
... Evaporation tank, 5 ... Zinc vapor, 7 ... Intermediate duct, 8 ... Reevaporation zinc, 9 ... Channel, 1
0, 11, 25...Cover, 12, 32, 32'
... Inner duct, 35, 36, 37 ... Seal bar, 14 ... Molten zinc, 15-20 ... Heater, 21-24 ... Vacuum pump, 26, 27 ...
Gap, 28, 29, 30...Seal roll, 3
1, 33, 34... Vacuum sealing device.
Claims (1)
せるロール３と、蒸着金属１４を溶融・蒸発させ
る蒸発槽４と、一端が該蒸発槽４の蒸発口と接続
し他端が上記ロール３の帯鋼１通板側に対向して
蒸着口を形成するチヤンネル１９と、一端が該蒸
着口と接続し上記ロール３に巻付けられる帯鋼１
との間に僅かな隙間２６を有する該蒸着口の帯鋼
進入側円弧状カバー２５および帯鋼退出側円弧状
カバー１０と、上記ロール３の帯鋼１非通板側と
の間に僅かな隙間２７を有する帯鋼非通板側円弧
状カバー１１と、上記隙間２６および２７と連通
し上記ロール３通板後シールバー３５，３６およ
びシールロール２８，２９によつて形成される真
空室３８へと走行する帯鋼１からの蒸着金属１４
の再蒸発による飛散を包囲するインナダクト１２
とを設けるとともに、シールバー３５，３６，３
７およびシールロール２８，２９，３０によつて
形成され内部が蒸着金属１４の再蒸発圧力に保持
される真空室３８，３９内に、内部を通過する帯
鋼１からの蒸着金属１４の再蒸発による飛散を包
囲するインナダクト３２，３２′を設け、かつ上
記ロール３、チヤンネル１９、帯鋼進入側円弧状
カバー２５、帯鋼退出側円弧状カバー１０、帯鋼
非通板側円弧状カバー１１、シールバー３５，３
６，３７、シールロール２８，２９，３０および
インナダクト１２，３２，３２′をこれらが存す
る圧力雰囲気下における蒸着金属１４の再蒸発温
度以上に加熱することを特徴とする真空蒸発装
置。1 A roll 3 in which the steel strip 1 is wound and passed through the vacuum tank 2, an evaporation tank 4 in which the deposited metal 14 is melted and evaporated, one end is connected to the evaporation port of the evaporation tank 4, and the other end is connected to the above-mentioned A channel 19 that faces the strip 1 passing side of the roll 3 and forms a vapor deposition port, and a steel band 1 whose one end is connected to the vapor deposition port and is wound around the roll 3.
There is a slight gap 26 between the arc-shaped cover 25 on the strip entrance side and the arc-shaped cover 10 on the strip exit side of the vapor deposition port, and the side of the roll 3 on which the strip 1 is not threaded. A vacuum chamber 38 formed by the arc-shaped cover 11 on the non-threading side of the strip having a gap 27, and the seal bars 35, 36 and the seal rolls 28, 29 that communicate with the gaps 26 and 27 after passing the roll 3. Deposited metal 14 from steel strip 1 traveling to
Inner duct 12 surrounding the scattering due to re-evaporation of
and seal bars 35, 36, 3.
7 and seal rolls 28, 29, 30, the interior of which is maintained at the reevaporation pressure of the deposited metal 14, the reevaporation of the deposited metal 14 from the strip steel 1 passing through the vacuum chambers 38, 39. Inner ducts 32, 32' are provided to surround the scattering caused by the roll 3, the channel 19, the arc-shaped cover 25 on the strip entrance side, the arc-shaped cover 10 on the strip exit side, the arc-shaped cover 11 on the non-threading side of the strip, Seal bar 35,3
6, 37, a vacuum evaporator characterized in that the seal rolls 28, 29, 30 and the inner ducts 12, 32, 32' are heated to a temperature higher than the re-evaporation temperature of the deposited metal 14 in the pressure atmosphere in which they exist.
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5114184A JPS60197876A (en) | 1984-03-19 | 1984-03-19 | Vacuum deposition device |
| DE198585102965T DE155643T1 (en) | 1984-03-19 | 1985-03-14 | DEVICE FOR VAPORIZATION. |
| DE8585102965T DE3578437D1 (en) | 1984-03-19 | 1985-03-14 | DEVICE FOR VAPORIZATION. |
| EP85102965A EP0155643B1 (en) | 1984-03-19 | 1985-03-14 | Vacuum evaporation equipment |
| AU40012/85A AU553239B2 (en) | 1984-03-19 | 1985-03-15 | Preventing reevaporation and sealing strip in continuous metal vacuum evaporation |
| US06/713,743 US4649860A (en) | 1984-03-19 | 1985-03-19 | Vacuum evaporation coating equipment |
| CA000476897A CA1233016A (en) | 1984-03-19 | 1985-03-19 | Vacuum evaporation equipment |
| KR1019850001760A KR890004043B1 (en) | 1984-03-19 | 1985-03-19 | Vacuum evaporation coating equipment |
| CN198585107585A CN85107585A (en) | 1984-03-19 | 1985-10-14 | The method and apparatus that is used for vaccuum deposition coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5114184A JPS60197876A (en) | 1984-03-19 | 1984-03-19 | Vacuum deposition device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60197876A JPS60197876A (en) | 1985-10-07 |
| JPS6353262B2 true JPS6353262B2 (en) | 1988-10-21 |
Family
ID=12878540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5114184A Granted JPS60197876A (en) | 1984-03-19 | 1984-03-19 | Vacuum deposition device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS60197876A (en) |
| CN (1) | CN85107585A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0696767B2 (en) * | 1986-06-11 | 1994-11-30 | 住友重機械工業株式会社 | Continuous vacuum deposition equipment |
| JPH0745712B2 (en) * | 1988-01-18 | 1995-05-17 | 三菱重工業株式会社 | Vacuum deposition equipment |
| CN111270209B (en) * | 2018-12-05 | 2023-12-12 | 东君新能源有限公司 | Steam sputtering device, control system and control method |
| CN113755797A (en) * | 2020-06-02 | 2021-12-07 | 宝山钢铁股份有限公司 | System and method for moving heating and coating Zn layer on surface of strip steel |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5938382A (en) * | 1982-08-26 | 1984-03-02 | Mitsubishi Heavy Ind Ltd | Vacuum deposition device |
-
1984
- 1984-03-19 JP JP5114184A patent/JPS60197876A/en active Granted
-
1985
- 1985-10-14 CN CN198585107585A patent/CN85107585A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5938382A (en) * | 1982-08-26 | 1984-03-02 | Mitsubishi Heavy Ind Ltd | Vacuum deposition device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN85107585A (en) | 1987-05-06 |
| JPS60197876A (en) | 1985-10-07 |
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