JPS6350083A - Gas laser device - Google Patents
Gas laser deviceInfo
- Publication number
- JPS6350083A JPS6350083A JP19294786A JP19294786A JPS6350083A JP S6350083 A JPS6350083 A JP S6350083A JP 19294786 A JP19294786 A JP 19294786A JP 19294786 A JP19294786 A JP 19294786A JP S6350083 A JPS6350083 A JP S6350083A
- Authority
- JP
- Japan
- Prior art keywords
- resonator
- optical axis
- housing
- bearing
- spherical bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 abstract description 32
- 230000000644 propagated effect Effects 0.000 abstract 1
- 230000008859 change Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 238000005452 bending Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、金属の切断、溶接、熱処理など金属加工のガ
スレーザ装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a gas laser device for metal processing such as metal cutting, welding, and heat treatment.
（従来の技術）
従来のガスレーザ装置の共振器は第３図（ａ）〜（ｄ）
に示すように内部を油冷したメインパイプ１の両端にメ
インフランジ２，２′を取付け、前記メインフランジ２
，２′に絶縁物３を介してカソード４を設け、さらに前
記メインパイプ１の取付脚５鼾こ絶縁物３を介してアノ
ード６を取付け、前記カソード４．アノード６間にガラ
ス製の放電管７を配置し、また、前記メインフランジ２
，２′の外側にそれぞれ全反射ミラー８．ハーフミラ−
９を取付けた構成をしている。(Prior art) The resonator of a conventional gas laser device is shown in Figs. 3(a) to (d).
As shown in the figure, main flanges 2 and 2' are attached to both ends of the main pipe 1 whose interior is oil-cooled, and the main flanges 2 and 2'
, 2' are provided with a cathode 4 via an insulator 3, and an anode 6 is attached via an insulator 3 to the mounting leg 5 of the main pipe 1. A glass discharge tube 7 is arranged between the anodes 6, and the main flange 2
, 2' are provided with total reflection mirrors 8., 2', respectively. half mirror
9 is installed.
一般的にガスレーザ装置は前記の構成ユニットを第３図
（ａ）に示すように、軽量型鋼で造られた筐体１０に納
められ、パネル１１でカッ５−をし、筐体内部に塵埃が
入らないようにする６
前記共振器ユニツトを筐体１０に取付ける際、レーザ発
振中の放熱により筐体内部の温度上昇に伴う筐体１０の
熱歪みにより共振器ユニットが変形を受けないよう、注
意をする必要がある。すなわち、筐体１０の熱歪みによ
り共振器ユニットが変形を受けると前記の全反射ミラー
８．カソード４．アノード６、カソード４．ハーフミラ
−９間の光軸が一直線でなくなり、し、−ザ出力が大き
く低下する。Generally, the above-mentioned constituent unit of a gas laser device is housed in a case 10 made of lightweight steel, as shown in FIG. 6. When installing the resonator unit in the housing 10, be careful not to cause the resonator unit to be deformed due to thermal distortion of the housing 10 due to the rise in temperature inside the housing due to heat dissipation during laser oscillation. It is necessary to That is, when the resonator unit is deformed due to thermal distortion of the casing 10, the total reflection mirror 8. Cathode 4. Anode 6, cathode 4. The optical axis between the half mirrors 9 is no longer in a straight line, and the output is greatly reduced.
かかる変形が生じないよう第３図（ｂ）、（ｃ）に示す
ようにメインフランジと筐体との固定において、メイン
フランジ２側をロッド１２．ローラーベアリング１３を
介して、左右の位置決めができる■ブロック１４上に載
せる。第３図（ｄ）はその拡大図である。In order to prevent such deformation, the main flange 2 side is connected to the rod 12. when fixing the main flange and the housing as shown in FIGS. ■Place it on a block 14 that allows left and right positioning via a roller bearing 13. FIG. 3(d) is an enlarged view thereof.
なお、この従来例においては、第３図（ｃ）に示すよう
にメインフランジ２′側を２本のボルト１５で固定して
いる。In this conventional example, the main flange 2' side is fixed with two bolts 15 as shown in FIG. 3(c).
さらに第４図に示すように、他の従来例では前記ボルト
で固定するのに替えて、さらに筐体の変形影響を受けな
いように鋼球１６を介して共振器を取付けている。Furthermore, as shown in FIG. 4, in another conventional example, instead of fixing with bolts, the resonator is attached via a steel ball 16 so as not to be affected by the deformation of the casing.
（発明が解決しようとする問題点）
第３図の状態でレーザ発振を行なうと、筐体内外の温度
差が３０℃〜４０℃となり、第５図に示すように筐体１
０の内部が膨張し、曲がりが生じ、ボルト固定側が筐体
の変形に伴って片持梁の状態となり、前記メインパイプ
１が曲がる。(Problems to be Solved by the Invention) When laser oscillation is performed in the state shown in FIG.
The inside of the main pipe 1 expands and bends, and the bolt-fixed side becomes a cantilever as the casing deforms, causing the main pipe 1 to bend.
さらに、放電管７からの放熱によりメインパイプ１は加
熱され、内部を３０℃±３℃にコントロールされた油で
冷却されているが、放電管７に近い方と逆側における前
記メインパイプ１の表面温度差は８℃〜１０℃にも達し
、メインパイプ１の曲がり変形を増加させる。Furthermore, the main pipe 1 is heated by the heat dissipated from the discharge tube 7, and is cooled inside with oil controlled at 30°C ± 3°C. The surface temperature difference reaches as much as 8°C to 10°C, which increases the bending deformation of the main pipe 1.
なお、メインパイプ１の軸方向伸びは、前記Ｖブロック
溝のローラーベアリングのスライド機構で吸収している
。The axial elongation of the main pipe 1 is absorbed by the slide mechanism of the roller bearing in the V-block groove.
このようなメインパイプ１の曲がりにより、ローラーベ
アリング位置において５０μｍ〜６５μｍの浮き上りに
相当する変形が生じ、その結果、５００Ｗのレーザ出力
値が４．２％〜６．５％低下する。Such bending of the main pipe 1 causes a deformation equivalent to a lifting of 50 μm to 65 μm at the roller bearing position, and as a result, the 500 W laser output value decreases by 4.2% to 6.5%.
第４図の鋼球１６を介しての固定方式の例においては、
前記のレーザ出力の低下値は０．５％〜１．２％に押え
ることができるが、共振器ユニットの上下方向の固定が
ないために上下振動の影響を受けやすく、第３図の出力
安定性が±１．５％であるのに比べ±２．２％にもなり
、鋼板切断等の加工性能に少なからず影響を及ぼすもの
である。In the example of the fixing method via the steel ball 16 in Fig. 4,
The decrease in the laser output mentioned above can be suppressed to 0.5% to 1.2%, but since the resonator unit is not fixed in the vertical direction, it is easily affected by vertical vibration, and the output stability as shown in Figure 3 Compared to ±1.5%, it becomes ±2.2%, which has a considerable influence on processing performance such as cutting steel plates.
実際、前記の筐体はレーザガスを高速で循環させるため
のメカニカルブースタの近くに位置し、該メカニカルブ
ースタの回転振動を受ける。In fact, said housing is located near a mechanical booster for circulating laser gas at high speed and is subjected to rotational vibrations of said mechanical booster.
本発明は、筐体の変形が生じても共振器の光軸に変化を
生じないようにすることを目的とする。An object of the present invention is to prevent the optical axis of the resonator from changing even if the casing is deformed.
（問題点を解決するための手段）
本発明は上記目的を達成するために、共振器の両端を支
持する支持機構に工夫を行ったものである。すなわち、
本発明は、共振器の一方端部をレーザ装置筐体に取付け
た第１球面軸受とレーザ光の進む方向にスライドする第
１スライド軸受との第１組合せ機構の上に取付けたこと
、前記共振器の他方端部の一片側を前記レーザ装置筐体
に取付けた第２球面軸受とレーザ光の進む方向に対して
直角方向にスライドする第２スライド軸受との第２組５
合せ機構の上に取付けたこと、および前記他方端の他片
側を筐体に固定した第３球面軸受の上に取付けたことを
特徴とするものである。(Means for Solving the Problems) In order to achieve the above object, the present invention devises a support mechanism that supports both ends of a resonator. That is,
The present invention provides that one end of the resonator is attached on a first combination mechanism of a first spherical bearing attached to a laser device housing and a first slide bearing that slides in the direction in which the laser beam advances; a second set 5 of a second spherical bearing having one side of the other end of the device attached to the laser device housing and a second slide bearing sliding in a direction perpendicular to the direction in which the laser beam advances;
The present invention is characterized in that it is mounted on a matching mechanism, and that it is mounted on a third spherical bearing whose other end is fixed to the housing.
（作 用）
本発明は、筐体が光軸方向に曲がった時は球面軸受の作
用で共振器の光軸は変化せず、また、光軸と直角方向に
筐体が曲がっても同様の作用で共振器は変形しない。(Function) In the present invention, when the housing is bent in the optical axis direction, the optical axis of the resonator does not change due to the action of the spherical bearing, and even when the housing is bent in the direction perpendicular to the optical axis, the same effect occurs. The resonator does not deform due to the action.
さらに、筐体が光軸方向、光軸と直角方向に伸びても、
第３球面軸受の位置を固定点にして、第１スライド軸受
、第２スライド軸受により筐体の伸びは吸収され共振器
は変形もせず、位置も変えない。共振器が単独で光軸方
向に伸びた時も同様な作用で光軸は変形しない。Furthermore, even if the housing extends in the direction of the optical axis or in the direction perpendicular to the optical axis,
With the position of the third spherical bearing as a fixed point, the elongation of the casing is absorbed by the first slide bearing and the second slide bearing, so that the resonator does not deform or change its position. Even when the resonator extends alone in the optical axis direction, the optical axis does not deform due to a similar effect.
（実施例）
第１図に示すように、本発明は、両サイドのメインフラ
ンジ２，２′の内、片側のメインフランジ２を２組の軸
受で受ける構成とする。該軸受は第２図（ａ）、（ｂ）
に示すように、一つは（ａ）の如く球面ベアリング１７
を内蔵するハウジング１８であり、もう一つは球面ベア
リング２２の下方にレーザ光の進む方向と直角方向にス
ライドするスライドベアリング１９と、前記球面ベアリ
ング２２とを内蔵するハウジング２０をスライド軸２１
で受ける構成とする。(Example) As shown in FIG. 1, the present invention has a structure in which one of the main flanges 2 and 2' on both sides is supported by two sets of bearings. The bearing is shown in Figures 2(a) and (b).
As shown in (a), one is a spherical bearing 17 as shown in (a).
The other is a slide bearing 19 that slides below a spherical bearing 22 in a direction perpendicular to the direction in which the laser beam travels, and a housing 20 that incorporates the spherical bearing 22 on the slide shaft 21.
It is configured to be received in
さらに、メインフランジ２′を第２図（ｃ）に示すよう
に、レーザ光の進む方向にスライドするスライドベアリ
ング２４と球面軸受とで受ける構成とする。Further, as shown in FIG. 2(c), the main flange 2' is supported by a slide bearing 24 and a spherical bearing that slide in the direction in which the laser beam advances.
第５図に示すように従来例においては、筐体１０の変形
により共振器の光軸の直線性が悪くなっていたが、本実
施例においては第６図に示すように、筐体が光軸方向に
曲がった時は球面軸受の作用で共振器の光軸は変化せず
、また、光軸と直角方向に筐体１０が曲がっても同様の
作用で共振器は変形しない。As shown in FIG. 5, in the conventional example, the linearity of the optical axis of the resonator deteriorated due to the deformation of the housing 10, but in this embodiment, as shown in FIG. When bent in the axial direction, the optical axis of the resonator does not change due to the action of the spherical bearing, and even if the housing 10 is bent in a direction perpendicular to the optical axis, the resonator does not deform due to the same action.
さらに、筐体が光軸方向、光軸と直角方向に伸びても、
第２図（ａ）で示す軸受固定点、第７図では（Ａ）点で
示す位置を固定点に共振器は変形もせず、位置も変えな
い。共振器が単独で光軸方向に伸びた時も同様な作用で
光軸は変形しない。Furthermore, even if the housing extends in the direction of the optical axis or in the direction perpendicular to the optical axis,
The bearing fixing point shown in FIG. 2(a) and the position shown by point (A) in FIG. 7 are fixed points, and the resonator does not deform or change its position. Even when the resonator extends alone in the optical axis direction, the optical axis does not deform due to a similar effect.
第１図、第２図に示すように、共振器の１点を球面軸受
で、他の２点を球面軸受とそれぞれ直角方向のスライド
軸受で受ける３点支持とした。As shown in FIGS. 1 and 2, one point of the resonator is supported by a spherical bearing, and the other two points are supported by a spherical bearing and a slide bearing in a perpendicular direction.
実施例のレーザ装置でレーザ発振をさせたところ、発振
器内の温度上昇が３０℃〜４０℃であったにもかかわら
ず、出力低下率は０．５％〜０．９％に抑えられ、出力
安定性も±０．７％〜０．９％となり、従来の構成のも
のとは大きな差となり、改善効果を得られた。When the laser device of the example was used to oscillate, the output reduction rate was suppressed to 0.5% to 0.9% even though the temperature rise inside the oscillator was 30°C to 40°C, and the output The stability was also ±0.7% to 0.9%, which was a big difference from the conventional configuration, and an improvement effect was obtained.
（発明の効果）
本発明は、共振器の１点を球面軸受で、他の２点を球面
軸受とそれぞれ直角方向のスライド軸受で受ける３点支
持としたので、筐体の変形が生じても共振器の光軸に変
化を及ぼすことがない。(Effects of the Invention) In the present invention, one point of the resonator is supported by a spherical bearing, and the other two points are supported by a spherical bearing and a slide bearing in a right angle direction, so that even if the casing is deformed, There is no change in the optical axis of the resonator.
すなわち、本発明は、筐体が光軸方向に曲がった時は球
面軸受の作用で共振器の光軸は変化せず、また、光軸と
直角方向に筐体が曲がっても同様の作用で共振器は変形
しない。That is, in the present invention, when the housing is bent in the optical axis direction, the optical axis of the resonator does not change due to the action of the spherical bearing, and even when the housing is bent in the direction perpendicular to the optical axis, the same effect occurs. The resonator does not deform.
さらに、筐体が光軸方向、光軸と直角方向に伸びても、
第３球面軸受の位置を固定点にして、第１スライド軸受
、第２スライド軸受により筐体の伸びは吸収され共振器
は変形もせず、位置も変えない。共振器が単独で光軸方
向に伸びた時も同様な作用で光軸は変形しない。Furthermore, even if the housing extends in the direction of the optical axis or in the direction perpendicular to the optical axis,
With the position of the third spherical bearing as a fixed point, the elongation of the casing is absorbed by the first slide bearing and the second slide bearing, so that the resonator does not deform or change its position. Even when the resonator extends alone in the optical axis direction, the optical axis does not deform due to a similar effect.
第１図は本発明の実施例の斜視図、第２図（、）〜（ｃ
）は本発明の実施例の３点の軸受の断面図である。第３
図（ａ）は従来例の正面図、第３図（ｂ）。
（ｃ）はその共振器固定点部を示し、第３図（ｄ）はそ
の部分拡大図である。第４図は軸受部が鋼球である他の
従来例を示し、第５図は第３図（ａ）の従来例の構成に
おいて、筐体の変形に伴って共振器の光軸の直線性が失
なわれた状態を示し、第６図は本発明の実施例において
、筐体変形があっても光軸の直線性が失なわれない状態
を示す。第７図は各軸受部の動きを示す図で、（Ａ）点
はピボット状に動き、（Ｂ）点はさらに光軸に直角方向
のスライド動作を加え、（Ｃ）点は光軸方向のスライド
動作を加えた所を示すものである。
１・・・メインパイプ、 ２，２′・・・メインフラン
ジ、 ４・・・カソード、 ６・・・アノード、７・・
・放電管、 ８・・・全反射ミラー、 ９・・・出力鏡
、１３・・・ローラベアリング、 １６・・・鋼球、
１７・・・球面軸受、 １９・・・スライド軸受。
（ｂ） （ｃ）
（ｄ）
第４図
第５図Figure 1 is a perspective view of an embodiment of the present invention, Figures 2 (,) to (c)
) is a sectional view of a bearing at three points according to an embodiment of the present invention. Third
Figure (a) is a front view of the conventional example, and Figure 3 (b). (c) shows the fixed point portion of the resonator, and FIG. 3(d) is a partially enlarged view thereof. Fig. 4 shows another conventional example in which the bearing part is a steel ball, and Fig. 5 shows the structure of the conventional example shown in Fig. 3(a), in which the linearity of the optical axis of the resonator changes as the casing deforms. FIG. 6 shows a state in which the linearity of the optical axis is not lost even if the housing is deformed in the embodiment of the present invention. Figure 7 is a diagram showing the movement of each bearing part. Point (A) moves in a pivot shape, point (B) further slides in the direction perpendicular to the optical axis, and point (C) moves in the direction of the optical axis. This shows where a sliding motion has been added. 1... Main pipe, 2, 2'... Main flange, 4... Cathode, 6... Anode, 7...
・Discharge tube, 8... Total reflection mirror, 9... Output mirror, 13... Roller bearing, 16... Steel ball,
17... Spherical bearing, 19... Slide bearing. (b) (c) (d) Figure 4 Figure 5
Claims (1)
む方向にスライドする第１スライド軸受との第１組合せ
機構の上に共振器の一方端部を取付け、前記レーザ装置
筐体に取付けた第２球面軸受とレーザ光の進む方向に対
して直角方向にスライドする第２スライド軸受との第２
組合せ機構の上に前記共振器の他方端部の一片側を取付
け、前記他方端の他片側を筐体に固定した第３球面軸受
の上に取付けたことを特徴とするガスレーザ装置。One end of the resonator was attached to the first combination mechanism of the first spherical bearing attached to the laser device casing and the first slide bearing sliding in the direction in which the laser light travels, and the resonator was attached to the laser device casing. A second spherical bearing and a second slide bearing that slide in a direction perpendicular to the direction in which the laser beam travels.
A gas laser device characterized in that one side of the other end of the resonator is mounted on a combination mechanism, and the other side of the other end is mounted on a third spherical bearing fixed to a housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19294786A JPS6350083A (en) | 1986-08-20 | 1986-08-20 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19294786A JPS6350083A (en) | 1986-08-20 | 1986-08-20 | Gas laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350083A true JPS6350083A (en) | 1988-03-02 |
Family
ID=16299658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19294786A Pending JPS6350083A (en) | 1986-08-20 | 1986-08-20 | Gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350083A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5099458A (en) * | 1988-09-05 | 1992-03-24 | Furuno Electric Co., Ltd. | Underwater detection system |
| US6792014B2 (en) | 2002-04-24 | 2004-09-14 | Mitsubishi Denki Kabushiki Kaisha | Orthogonal excitation-type laser oscillator |
| WO2004105200A1 (en) * | 2003-05-20 | 2004-12-02 | Mitsubishi Denki Kabushiki Kaisha | Laser transmitter |
| US6920170B2 (en) | 2002-04-11 | 2005-07-19 | Mitsubishi Denki Kabushiki Kaisha | Orthogonally excited-type laser oscillator |
| JP2006231383A (en) * | 2005-02-25 | 2006-09-07 | Mitsubishi Electric Corp | Laser beam machine |
| JP2007329260A (en) * | 2006-06-07 | 2007-12-20 | Mitsubishi Electric Corp | Laser oscillation device |
| US11146034B2 (en) | 2018-03-30 | 2021-10-12 | Panasonic Industrial Devices Sunz Co., Ltd. | Laser oscillator unit and laser machining device |
-
1986
- 1986-08-20 JP JP19294786A patent/JPS6350083A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5099458A (en) * | 1988-09-05 | 1992-03-24 | Furuno Electric Co., Ltd. | Underwater detection system |
| US6920170B2 (en) | 2002-04-11 | 2005-07-19 | Mitsubishi Denki Kabushiki Kaisha | Orthogonally excited-type laser oscillator |
| US6792014B2 (en) | 2002-04-24 | 2004-09-14 | Mitsubishi Denki Kabushiki Kaisha | Orthogonal excitation-type laser oscillator |
| WO2004105200A1 (en) * | 2003-05-20 | 2004-12-02 | Mitsubishi Denki Kabushiki Kaisha | Laser transmitter |
| JP2006231383A (en) * | 2005-02-25 | 2006-09-07 | Mitsubishi Electric Corp | Laser beam machine |
| JP4628137B2 (en) * | 2005-02-25 | 2011-02-09 | 三菱電機株式会社 | Laser processing equipment |
| JP2007329260A (en) * | 2006-06-07 | 2007-12-20 | Mitsubishi Electric Corp | Laser oscillation device |
| US11146034B2 (en) | 2018-03-30 | 2021-10-12 | Panasonic Industrial Devices Sunz Co., Ltd. | Laser oscillator unit and laser machining device |
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