JPS6346310B2 - - Google Patents
Info
- Publication number
- JPS6346310B2 JPS6346310B2 JP57037189A JP3718982A JPS6346310B2 JP S6346310 B2 JPS6346310 B2 JP S6346310B2 JP 57037189 A JP57037189 A JP 57037189A JP 3718982 A JP3718982 A JP 3718982A JP S6346310 B2 JPS6346310 B2 JP S6346310B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- disk
- stopper
- valve disk
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010687 lubricating oil Substances 0.000 description 2
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical compound Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Description
【発明の詳細な説明】
本発明は高真空ゲートバルブに関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a high vacuum gate valve.
従来此の種高真空ゲートバルブにおいては潤滑
油が蒸発してしまうためリンク機構を用いたもの
はカジリを生じ、作動が不確実になるばかりでな
くその動作抵抗が大きい欠点があつた。 Conventional high-vacuum gate valves of this type that use a link mechanism suffer from galling due to the evaporation of lubricating oil, which not only makes operation uncertain but also has the drawback of large operating resistance.
本発明の高真空ゲートバルブはこのような欠点
を除くようにしたものであつて、弁デスクとこれ
を弁座に押圧するための弁抑えの互いに対向する
面に矩形断面の凹溝を夫々設け、長手方向に沿つ
た縦断面が菱形の柱体をこの凹溝に共通に挿入せ
しめ、弁デスクの半径方向における弁デスクと弁
抑えの相対的移動により前記柱体を介して前記弁
デスクを弁座に押圧せしめるようにしたことを特
徴とする。 The high-vacuum gate valve of the present invention is designed to eliminate these drawbacks, and includes grooves with a rectangular cross section on the opposing surfaces of the valve desk and the valve stopper for pressing the valve disk against the valve seat. A pillar body having a diamond-shaped vertical cross section along the longitudinal direction is commonly inserted into this groove, and the valve disk is valved via the pillar body by relative movement of the valve disk and the valve stopper in the radial direction of the valve disk. It is characterized by being pressed against the seat.
以下図面によつて本発明の実施例を説明する。 Embodiments of the present invention will be described below with reference to the drawings.
図中１は直径略100mmの弁座、２はこれに対接
される円板状弁デスク、３はこの弁デスク２を前
記弁座１に押圧する弁抑えを示し、本発明におい
てはこの弁抑え３と弁デスク２の間にスプリング
４を連結し、ピストンシリンダ５によつて前記弁
抑え３をピストンロツド６を介して弁デスク２の
半径方向に往復移動せしめるようにし、且つ弁デ
スクストツパー７を設け、このストツパー７に突
き当るよう前記弁デスク２の端部にローラ８を設
けると共に、弁デスク２と弁抑え３の互に対向す
る面に矩形断面の凹溝９，１０を夫々設け、第３
図に示すように長手方向に沿つた縦断面が菱形の
角柱体１１をこの凹溝９，１０に共通に挿入せし
める。 In the figure, 1 is a valve seat with a diameter of approximately 100 mm, 2 is a disk-shaped valve disk that is in contact with the valve seat, and 3 is a valve stopper that presses the valve disk 2 against the valve seat 1. In the present invention, this valve A spring 4 is connected between the stopper 3 and the valve disk 2, and a piston cylinder 5 causes the valve stopper 3 to reciprocate in the radial direction of the valve disk 2 via a piston rod 6. A roller 8 is provided at the end of the valve disk 2 so as to abut against the stopper 7, and grooves 9 and 10 each having a rectangular cross section are provided on the opposing surfaces of the valve disk 2 and the valve stopper 3, respectively. Third
As shown in the figure, a prismatic body 11 having a rhombic longitudinal section is inserted into the grooves 9 and 10 in common.
本発明の高真空ゲートバルブは上記のような構
成であるからピストンシリンダ５を駆動して第１
図、第２図においてピストンロツド６を下方に移
動せしめれば弁抑え３がスプリング４を介して弁
デスク２と共に下方に移動し、弁デスク２のロー
ラ８が前記ストツパー７に突き当つた後はスプリ
ング４に抗して弁抑え３のみが弁デスク２の半径
方向に移動され、この結果互に対応する凹溝９，
１０が第３図のようにずれ、柱体１１の作用によ
り弁デスク２が弁座１に対接されてシールが達成
される。 Since the high vacuum gate valve of the present invention has the above-described configuration, the piston cylinder 5 is driven and the first
When the piston rod 6 is moved downward in FIG. 4, only the valve stopper 3 is moved in the radial direction of the valve disk 2, so that the mutually corresponding grooves 9,
10 is shifted as shown in FIG. 3, and the valve disk 2 is brought into contact with the valve seat 1 by the action of the column 11, thereby achieving a seal.
而して本発明においては第３図に示すようにシ
ール時柱体１１の端面と凹溝９，１０の底面との
接触はナイフエツジ状となり一点接触となるため
両者間にカジリ及び摩擦を生じることがなく潤滑
油が蒸発してしまう真空中においても弁の開閉動
作を容易に且つ確実になし得る大きな利益があ
る。 In the present invention, as shown in FIG. 3, during sealing, the contact between the end surface of the column 11 and the bottom surfaces of the grooves 9 and 10 is in the shape of a knife edge, resulting in a single point contact, so that galling and friction may occur between the two. There is a great advantage that the valve can be opened and closed easily and reliably even in a vacuum where lubricating oil evaporates.
第１図は本発明の高真空ゲートバルブの縦断正
面図、第２図は同じく縦断側面図、第３図はその
要部の作動説明図である。
１……弁座、２……弁デスク、３……弁抑え、
４……スプリング、５……ピストンシリンダ、６
……ピストンロツド、７……ストツパー、８……
ローラ、９，１０……凹溝、１１……柱体。
FIG. 1 is a longitudinal sectional front view of the high vacuum gate valve of the present invention, FIG. 2 is a longitudinal sectional side view thereof, and FIG. 3 is an operational explanatory diagram of the main parts thereof. 1...Valve seat, 2...Valve desk, 3...Valve suppressor,
4...Spring, 5...Piston cylinder, 6
...Piston rod, 7...Stopper, 8...
Roller, 9, 10...concave groove, 11...column.
Claims (1)
えの互いに対向する面に矩形断面の凹溝を夫々設
け、長手方向に沿つた縦断面が菱形の柱体をこの
凹溝に共通に挿入せしめ、弁デスクの半径方向に
おける弁デスクと弁抑えの相対的移動により前記
柱体を介して前記弁デスクを弁座に押圧せしめる
ようにしたことを特徴とする高真空ゲートバル
ブ。1 A groove with a rectangular cross section is provided on the opposing surfaces of the valve desk and the valve stopper for pressing it against the valve seat, and a pillar body with a diamond-shaped vertical cross section along the longitudinal direction is commonly inserted into the groove. A high vacuum gate valve characterized in that the valve disk is pressed against the valve seat via the pillar body by relative movement between the valve disk and the valve stopper in the radial direction of the valve disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3718982A JPS58156781A (en) | 1982-03-11 | 1982-03-11 | High-vacuum gate valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3718982A JPS58156781A (en) | 1982-03-11 | 1982-03-11 | High-vacuum gate valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58156781A JPS58156781A (en) | 1983-09-17 |
| JPS6346310B2 true JPS6346310B2 (en) | 1988-09-14 |
Family
ID=12490629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3718982A Granted JPS58156781A (en) | 1982-03-11 | 1982-03-11 | High-vacuum gate valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58156781A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02108814U (en) * | 1989-02-17 | 1990-08-29 | ||
| JPH02141315U (en) * | 1989-04-26 | 1990-11-28 | ||
| JPH0398843A (en) * | 1989-08-30 | 1991-04-24 | Toyo Seikan Kaisha Ltd | Recycling type self standing container with weighted bottom for gas containing beverage |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60175872A (en) * | 1984-02-22 | 1985-09-10 | Semiconductor Energy Lab Co Ltd | Sluice valve for ultra-high vacuum |
| JPS62104074U (en) * | 1985-12-20 | 1987-07-02 | ||
| JP2504499Y2 (en) * | 1990-07-23 | 1996-07-10 | 株式会社日本製鋼所 | Gate valve for vacuum |
| JP4977900B2 (en) | 2007-07-20 | 2012-07-18 | Ｓｍｃ株式会社 | Linear operated gate valve |
| TWI747381B (en) * | 2020-07-15 | 2021-11-21 | 新萊應材科技有限公司 | Gate valve with locking function |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58137672A (en) * | 1981-11-05 | 1983-08-16 | エイチピ−エス・コ−ポレ−シヨン | Gate valve |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51115639U (en) * | 1975-03-17 | 1976-09-20 |
-
1982
- 1982-03-11 JP JP3718982A patent/JPS58156781A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58137672A (en) * | 1981-11-05 | 1983-08-16 | エイチピ−エス・コ−ポレ−シヨン | Gate valve |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02108814U (en) * | 1989-02-17 | 1990-08-29 | ||
| JPH02141315U (en) * | 1989-04-26 | 1990-11-28 | ||
| JPH0398843A (en) * | 1989-08-30 | 1991-04-24 | Toyo Seikan Kaisha Ltd | Recycling type self standing container with weighted bottom for gas containing beverage |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58156781A (en) | 1983-09-17 |
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