JPS633661A - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPS633661A JPS633661A JP61145149A JP14514986A JPS633661A JP S633661 A JPS633661 A JP S633661A JP 61145149 A JP61145149 A JP 61145149A JP 14514986 A JP14514986 A JP 14514986A JP S633661 A JPS633661 A JP S633661A
- Authority
- JP
- Japan
- Prior art keywords
- film
- stator
- ultrasonic motor
- diamond
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 21
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 19
- 230000001681 protective effect Effects 0.000 claims abstract description 19
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 9
- 239000010432 diamond Substances 0.000 claims abstract description 9
- 125000004432 carbon atom Chemical group C* 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 5
- 239000002356 single layer Substances 0.000 abstract description 4
- 230000000704 physical effect Effects 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 2
- 150000001721 carbon Chemical group 0.000 abstract 2
- 239000010408 film Substances 0.000 description 82
- 239000007789 gas Substances 0.000 description 15
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- 239000004760 aramid Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229920003235 aromatic polyamide Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、圧電振動子の微小超音波振動を、直線運動、
あるいは、回転運動として取出す超音波モーターに関す
るものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention is a method of converting minute ultrasonic vibrations of a piezoelectric vibrator into linear motion,
Alternatively, it relates to an ultrasonic motor that extracts rotational motion.
従来の技術
商品の軽薄短小化対応モーター、あるいは微小駆動機構
用モーターとして、超音波モーターがある。超音波モー
ターは以前より数種類開発され、−部実用化されており
、方式により定在波方式と進行波方式がある。Ultrasonic motors are available as motors for miniaturizing conventional technological products, or as motors for micro-drive mechanisms. Several types of ultrasonic motors have been developed and put into practical use, and there are two types: standing wave type and traveling wave type.
第３図に従来技術による定在波方式の超音波モーターの
一例を示す（参考文献：日経エレクトロニクス１９８５
年９月２３日号、Ｐ、１１５〜Ｐ、１１６）。以下にこ
の従来例の超音波モーターの動作機構を説明する。Figure 3 shows an example of a conventional standing wave type ultrasonic motor (Reference: Nikkei Electronics 1985).
September 23, issue, P, 115-P, 116). The operating mechanism of this conventional ultrasonic motor will be explained below.
超音波振動子１３で発生した縦振動は、固定子であるね
じり振動発生用円板１４に伝わる。このとき力が加わる
のはねじり振動発生用円板１４の二つの足の部分である
。ねじり振動発生用円板１４の中心はボルト１５で固定
しであるので、ねじり振動発生用円板１４は屈曲運動す
る。このねじり振動発生用円板１４の上部には突起１６
が設けである。突起１６の向きは二つの足に対して斜め
になっているため、突起１６はねじり振動をする。The longitudinal vibration generated by the ultrasonic vibrator 13 is transmitted to the torsional vibration generating disk 14, which is a stator. At this time, the force is applied to the two legs of the torsional vibration generating disk 14. Since the center of the torsional vibration generating disk 14 is fixed with a bolt 15, the torsional vibration generating disk 14 bends. A projection 16 is provided on the top of this torsional vibration generating disk 14.
is the provision. Since the projection 16 is oriented diagonally with respect to the two legs, the projection 16 vibrates torsionally.
そのねじり振動のうち、突起１６が可動子１７の面に平
行な期間を利用して可動子１７を回転させることかでき
る。この超音波モーターでは可動子１了と突起１６との
摺動面にＣｒを塗り摩耗を防止している。Among the torsional vibrations, the movable element 17 can be rotated by utilizing the period in which the protrusion 16 is parallel to the surface of the movable element 17. In this ultrasonic motor, the sliding surfaces of the movable element 1 and the projections 16 are coated with Cr to prevent wear.
この超音波モーターは印加電圧１００Ｖ（４０ＫＨｚ）
で９０ｒｐｍの回転数と、１３に９−ｃｙのトルクを得
ている。This ultrasonic motor has an applied voltage of 100V (40KHz)
With this, a rotation speed of 90 rpm and a torque of 9-cy were obtained.
第４図に従来技術による進行波方式の超音波モーターの
−ＺＩＪを示す（参考文献二日経エレクトロ＝クス、１
９８６年３月２４日号、Ｐ、９０−Ｐ、９２）。Figure 4 shows -ZIJ of a traveling wave type ultrasonic motor according to the prior art (Reference: Ninikkei Electro-X, 1
March 24, 986 issue, P, 90-P, 92).
以下にこの従来例の超音波モーターの動作機構について
説明する。The operating mechanism of this conventional ultrasonic motor will be explained below.
第１圧電振動子１８と第２圧電振動子１９を２２．５度
ずらして重ね合せ、それぞれの圧電振動子に時間的に９
０度の位相差のある高周波電界を電極２ｏによってかけ
れば、固定子基体２１にたわみ振動の進行波が立つ。こ
の様にして発生した固定子基体２１の進行波は、可動子
２２と、固定子基体２１とをライニング材２３を介して
摩擦接触させ、回転力を取出す。この従来例ではライニ
ング材２３に芳香属ポリアミド繊維を樹脂で固めた複合
プラスチックを用いて摩耗を防止している。The first piezoelectric vibrator 18 and the second piezoelectric vibrator 19 are overlapped with each other by 22.5 degrees, and each piezoelectric vibrator is
When a high frequency electric field with a phase difference of 0 degrees is applied by the electrode 2o, a traveling wave of flexural vibration is generated in the stator base body 21. The traveling waves of the stator base body 21 generated in this manner bring the movable element 22 and the stator base body 21 into frictional contact through the lining material 23, and extract rotational force. In this conventional example, a composite plastic made of aromatic polyamide fibers hardened with resin is used for the lining material 23 to prevent wear.
この超音波モーターは入力電界周波数が７２ＫＨｚ、入
力電力が３．５Ｗのとき、無負荷時回転数ば６００ｒｐ
ｍ、静止トルクは１．０に９・（７）を得ている。This ultrasonic motor has a no-load rotation speed of 600 rpm when the input electric field frequency is 72 KHz and the input power is 3.5 W.
m, the static torque is 9·(7) at 1.0.
発明が解決しようとする問題点
以上記したように、超音波モーターでは固定子にある振
動子で発生した超音波振動を、摩擦により可動子に伝え
回転運動あるいは直線運動として取出す。このように摩
擦により出力を取出すので、固定子と可動子との摺動面
の摩耗を抑えるため、前記したように例えば、Ｃｒを塗
ったり、あるいは芳香属ポリアミド繊維を樹脂で固めた
複合プラスチックをライニング材として用いている。と
ころが、超音波モーターで大きい出力を得ようとした場
合、固定子と可動子との押付は力を増大し、摩擦力を増
加することが必要である。従来の技術の超音波モーター
で摩擦力を増加した場合、Ｃｒの耐摩耗層、あるいは、
芳香属ポリアミド繊維を樹脂で固めた複合プラスチック
のライニング材の摩耗量が増加するだめ、特に高負荷運
転時での超音波モーターの耐久性が不十分であった。ま
た、Ｃｒ、および複合プラスチックなどは超音波を高効
率で伝播できないことも超音波モーターの効率が低い一
因となっていた。Problems to be Solved by the Invention As described above, in an ultrasonic motor, ultrasonic vibrations generated by a vibrator in a stator are transmitted to a movable element by friction and extracted as rotational motion or linear motion. Since output is obtained through friction in this way, in order to suppress the wear on the sliding surfaces between the stator and mover, for example, as mentioned above, we coat them with Cr, or use composite plastics made of aromatic polyamide fibers hardened with resin. It is used as a lining material. However, when trying to obtain a large output with an ultrasonic motor, it is necessary to increase the pressing force between the stator and the movable element, and to increase the frictional force. When increasing the friction force in conventional ultrasonic motors, a wear-resistant layer of Cr or
The durability of the ultrasonic motor was insufficient, especially during high-load operation, due to increased wear of the lining material, which is made of a composite plastic made of aromatic polyamide fibers hardened with resin. Furthermore, the inability of Cr, composite plastics, and the like to propagate ultrasonic waves with high efficiency has also been a factor contributing to the low efficiency of ultrasonic motors.
問題点を解決するための手段
上記のような従来技術にあった問題点は、超音波モータ
ーの固定子と可動子とが相対して摺動する部分の、固定
子、あるいは、可動子の少なくとも一方に、炭素原子を
含む保護膜を形成することによって解決できる。Means for Solving the Problems The problem with the prior art as described above is that at least the stator or the movable part of the ultrasonic motor where the stator and the movable part slide relative to each other. On the other hand, this problem can be solved by forming a protective film containing carbon atoms.
ここに、炭素原子を含む保護膜とは、ダイヤモンド膜、
ダイヤモンド状炭素膜、ＴａＣ膜、、ＷＣ膜。Here, the protective film containing carbon atoms includes diamond film,
Diamond-like carbon film, TaC film, WC film.
ＴａＣ膜、ＳｉＣ膜、Ｂ４Ｃ膜、ＮｂＣ膜などの少なく
とも１層から成るものである。It consists of at least one layer such as TaC film, SiC film, B4C film, NbC film, etc.
作 用
ダイヤモンド膜、ダイヤモンド状炭素膜、ＳｉＣ膜、Ｂ
４Ｃ膜では炭素原子相互、あるいは炭素原子とＳｉ、Ｂ
原子とが共有結合をしており、またＴａＣ膜、ＷＣ膜、
ＴｉＣ膜、ＮｂＣ膜では炭素原子と各原子が金属間化合
物を構成しているので、例えばビッカース硬さはダイヤ
モンド膜が１ｏｏｏｏＫｚ／ｍａ、ダイヤモンド状炭素
膜が２０００−３０００ Ｋｇ／ｒｔｌｒｊ 。Action Diamond film, diamond-like carbon film, SiC film, B
In the 4C film, carbon atoms interact with each other or with Si, B
Atoms are covalently bonded, and TaC film, WC film,
In the TiC film and the NbC film, carbon atoms and each atom constitute an intermetallic compound, so for example, the Vickers hardness of the diamond film is 1 ooooo Kz/ma, and the diamond-like carbon film is 2000-3000 Kg/rtlrj.
ＳｉＣ膜が２５ｏｏＫｑ／ｍＡ、Ｂ４Ｃ膜が２ ａｏｏ
Ｋｖ／ｍａ、ＴａＣ膜が１ｓ ｏ ｏ Ｋ９／ｍａｒ、
ＷＣ膜が２５００ Ｋｑ／、ｌｊ、ＴｉＣ膜、ＮｂＣ膜
が２５ｏＯＫｑ／−と前記従来例に示したＣｒの耐摩耗
耐膜が２００Ｋｑ／−に比べ極めて硬く、耐摩耗性に富
み、また、超音波を殆んど減衰することなく伝播できる
。また、融点が非常に高く、かつ化学的に安定なため、
スティックスリップなどの融着現象が発生しない。その
上、上記の硬さ、超音波の伝播性などの物性値が広い温
度範囲に渡って安定している。SiC film is 25ooKq/mA, B4C film is 2aoo
Kv/ma, TaC film is 1s o o K9/mar,
WC film is 2500Kq/-, lj, TiC film, NbC film is 25oOKq/-, and the Cr film shown in the conventional example is extremely hard and highly wear-resistant compared to 200Kq/-, and it is also highly resistant to ultrasonic waves. can be propagated with almost no attenuation. In addition, it has a very high melting point and is chemically stable, so
No fusion phenomena such as stick-slip occur. Moreover, the physical properties such as hardness and ultrasonic wave propagation properties are stable over a wide temperature range.
従って、本発明の様に、超音波モーターの摺動面に前記
の炭素原子を含む膜を形成すれば、振動子で発生した超
音波振動を殆んど減衰させることなく高効率で出力とし
て取出せ、太きい出力を得るため固定子と可動子との押
付は力を増大しても摺動面の摩耗は問題とならず耐久性
に富み、かつ、摺動面でのスティックスリップも発生し
ないので高負荷運転時でも安定した出力特性が得れる超
音波モーターとなる。Therefore, if a film containing carbon atoms is formed on the sliding surface of an ultrasonic motor as in the present invention, the ultrasonic vibrations generated by the vibrator can be extracted as output with high efficiency without attenuation. In order to obtain a large output, the pressing between the stator and the mover does not cause wear on the sliding surfaces even if the force is increased, and is highly durable, and stick-slip does not occur on the sliding surfaces. This is an ultrasonic motor that provides stable output characteristics even during high-load operation.
実施例 以下に本発明の超音波モーターの実施例を示す。Example Examples of the ultrasonic motor of the present invention are shown below.
第１図は固定子１の可動子と相対して摺動する面に、保
護膜２としてダイヤモンド膜、ダイヤモンド状炭素膜、
ＴａＣ膜、 ＷＣ膜、ＴｉＣ膜、ＳｉＣ膜、Ｂ４Ｃ膜、
あるいはＮｂＣ膜の単層膜を形成した超音波モーターの
固定子部分略図である。これらの炭素原子を含む膜は、
いずれも前記の様に極めて耐摩耗性に優れ、音波の伝達
性が良く、かつ、様々な環境、広い温度範囲に渡って化
学的、物理的特性が安定しているだめ、第１図に例示し
た超音波モーターは、高負荷運転時でも安定して高効率
な出力特性を示し、優れた耐久性を得ることができる。FIG. 1 shows a protective film 2 such as a diamond film, a diamond-like carbon film,
TaC film, WC film, TiC film, SiC film, B4C film,
Alternatively, it is a schematic diagram of a stator portion of an ultrasonic motor in which a single layer of NbC film is formed. Films containing these carbon atoms are
As mentioned above, all of them have excellent wear resistance, good sound wave transmission, and stable chemical and physical properties in various environments and over a wide temperature range, as shown in Figure 1. This ultrasonic motor exhibits stable and highly efficient output characteristics even during high-load operation, and has excellent durability.
保護膜２は、例えば第１図の様に固定子１に形成する場
合、固定子１の構成材料と強く結合し、かつ、熱膨張係
数が近いものであることが、固定子１から剥離しにくい
ため望ましい。When the protective film 2 is formed on the stator 1 as shown in FIG. 1, for example, it must be strongly bonded to the constituent materials of the stator 1 and have a similar coefficient of thermal expansion to prevent it from peeling off from the stator 1. Desirable because it is difficult.
また、第１図では保護膜２を単層膜としたが、前記炭素
原子を含む膜の積層膜としてもかまわない。Further, although the protective film 2 is a single layer film in FIG. 1, it may be a laminated film of films containing the carbon atoms.
次に、第１図に例示した保護膜の形成手段について例示
する。Next, the means for forming the protective film illustrated in FIG. 1 will be illustrated.
従来より、ダイヤモンド膜、ダイヤモンド状炭素膜、
ＷＣ膜、ＴｉＣ膜、 ＳｉＣ膜、Ｂ４Ｃ膜など、炭素原
子を含む膜は、スパンタリング、イオンブレーティング
、イオンビーム蒸着、熱ＣＶＤ 、プラズマＣＶＤなど
によって形成されている。我々はプラズマを利用した薄
膜形成技術として工業的に画期的な手段である、プラズ
マインジェクショｙ−ＣＶＤ法（以下、ＰＩ−ＣＶＤ法
と略記）ｔ−開発した（参考文献：例えば、第３２回応
用物理学関係連合講演会講演予稿集３０Ｐ、Ｑ、９、プ
ラズマ・インジェクションＣＶＤ法による高硬度炭素膜
の形成。および、３０Ｐ、Ｑ、１０、プラズマ・インジ
ェクションＣＶＤ法により形成した炭素膜の分析）。Conventionally, diamond film, diamond-like carbon film,
Films containing carbon atoms, such as WC films, TiC films, SiC films, and B4C films, are formed by sputtering, ion blasting, ion beam evaporation, thermal CVD, plasma CVD, and the like. We have developed the plasma injection CVD method (hereinafter abbreviated as PI-CVD method), which is an industrially revolutionary method for forming thin films using plasma. 30P, Q, 9, Formation of high-hardness carbon film by plasma injection CVD method. 30P, Q, 10, Analysis of carbon film formed by plasma injection CVD method ).
第２図はＰＩ−ＣＶＤ装置の略図であり、以下に第２図
を用いてダイヤモンド状炭素膜を形成する具体的な方法
について例示する。ダイヤモンド状炭素膜を形成する固
定子３をプラズマ管９の吹出し口近傍に設置し、直流電
源５の負施を接続した後、真空容器４とプラズマ管９を
密閉し、真空ポンプ１２で例えば１０ Ｔｏｒｒ程度
に真空排気する。次に反応性ガス了として炭素原子を含
むガス、例えばメタンガス（ＣＨ４）、反応性ガス７の
分解を促進する補助ガス８として例えばアルゴンガスを
プラズマ管９内へ導入し、所定の圧力に設定する。この
メタンガスとアルゴンガスの混合ガスを高周波電源１ｏ
と励起コイル１１とによってプラズマ化し、このプラズ
マ中にはダイヤモンド状炭素膜の主成分である炭素を含
むイオン、およびラジカルが多数存在するのでこのイオ
ンを、直流電源５とメソシー状電極６によって固定子３
方向へクーロン力で加速するとともに、ラジカルもプラ
ズマ管９と真空容器４とのガス圧力差によって固定子３
に吹付けることによって、固定子３の表面にダイヤモン
ド状炭素膜が形成される。例えば、メタンガス０．２
Ｔｏｒｒ 、アルゴンガス０．２Ｔｏｒｒ 、高周波電
力０．２ＫＷ、 直流電圧０．７ ＫＶでは、炭素原
子かＳＰ電子配置のダイヤモンド結合をしたアモルファ
ス構造のダイヤモンド状炭素膜が、成膜速度２００ＯＡ
／ｓｉｎと、他の形成方法に比べ数倍〜１０倍以上もの
高速で形成される。この膜はビッカース硬さが２６０Ｏ
Ｋ９／ｍΔであり、前記実施例に示した様な超音波モー
ターの保護膜として、申し分ない特性を有する。更に、
Ｐ Ｉ −ＣＶＤ法では固定子３を加熱しなくても優れ
たダイヤモンド状炭素膜を形成できるため、固定子３の
熱変形がなく精密モーターとして必要な仕上り寸法精度
を十分に確保できる。その上、ＰＩ−ＣＶＤ法では、他
のＴａＣ膜、ＳｉＣ膜、Ｂ４Ｃ膜などを形成する場合に
は、反応性ガス７を変えるだけで良い。FIG. 2 is a schematic diagram of a PI-CVD apparatus, and a specific method for forming a diamond-like carbon film will be illustrated below using FIG. After installing the stator 3 that forms the diamond-like carbon film near the outlet of the plasma tube 9 and connecting the negative and negative terminals of the DC power source 5, the vacuum vessel 4 and the plasma tube 9 are sealed, and the vacuum pump 12 is used to Evacuate to about Torr. Next, a gas containing carbon atoms, such as methane gas (CH4) as a reactive gas, and argon gas, for example, as an auxiliary gas 8 that promotes the decomposition of the reactive gas 7 are introduced into the plasma tube 9 and set to a predetermined pressure. . This mixed gas of methane gas and argon gas is connected to a high frequency power source 1o
and the excitation coil 11, and this plasma contains a large number of ions and radicals containing carbon, which is the main component of the diamond-like carbon film, so these ions are transferred to the stator by the DC power supply 5 and the mesocye electrode 6. 3
At the same time, the radicals are accelerated in the stator 3 due to the gas pressure difference between the plasma tube 9 and the vacuum vessel 4.
A diamond-like carbon film is formed on the surface of the stator 3 by spraying the carbon onto the surface of the stator 3. For example, methane gas 0.2
Torr, argon gas 0.2 Torr, high-frequency power 0.2 KW, and DC voltage 0.7 KV, a diamond-like carbon film with an amorphous structure with carbon atoms or diamond bonds with SP electron configuration was formed at a deposition rate of 200 OA.
/sin, which is several times to ten times faster than other formation methods. This film has a Vickers hardness of 260O.
K9/mΔ, and has satisfactory characteristics as a protective film for an ultrasonic motor as shown in the above example. Furthermore,
In the PI-CVD method, an excellent diamond-like carbon film can be formed without heating the stator 3, so that the stator 3 is not thermally deformed and the finished dimensional accuracy necessary for a precision motor can be sufficiently ensured. Furthermore, in the PI-CVD method, when forming other TaC films, SiC films, B4C films, etc., it is only necessary to change the reactive gas 7.
例えばＴａＣ膜を形成するには、
ＴｌＣ１４”ＣＨ４→ＴｉＣ＋４Ｈ（：２のどと（Ｔｉ
Ｃ膜が固定子３表面に形成できる。For example, to form a TaC film, TlC14"CH4→TiC+4H(:2 throat (Ti
A C film can be formed on the surface of the stator 3.
以上の様に、ＰＩ−ＣＶＤ法では、スパッタリング、イ
オンブレーティング、イオンビーム蒸着。As mentioned above, the PI-CVD method includes sputtering, ion blating, and ion beam evaporation.
熱ＣＶＤ 、プラズマＣＶＤなどに比べ、固定子３を加
熱しなくても、超音波モーターの摺動面保護膜として申
し分のない特性を有する保護膜を、高成膜速度で、かつ
、簡単な操作で形成できるので、量産性に優れ、従って
、超音波モーターを低コストで生産できる。Compared to thermal CVD, plasma CVD, etc., a protective film with perfect properties as a sliding surface protective film for an ultrasonic motor can be formed at a high deposition rate and with easy operation without heating the stator 3. Since it can be formed with
第１図に例示した保護膜の厚さは、薄すぎると保護膜の
耐摩耗性が十分に発揮できず、また、厚すぎると膜形成
時の内部応力のだめ膜が剥離しゃすくなる傾向があるの
で、概略０．５〜２１．ａｎ程度が好ましい。If the thickness of the protective film illustrated in Figure 1 is too thin, the wear resistance of the protective film cannot be fully demonstrated, and if it is too thick, the film tends to peel off due to internal stress during film formation. Therefore, approximately 0.5 to 21. It is preferably about an.
以上述べた本発明の実施例では、固定子に保護膜が形成
されていたが、可動子に形成されていても、まだ固定子
と可動子の両方に形成されていてもかまわないことはい
うまでもない。In the embodiments of the present invention described above, the protective film is formed on the stator, but it should be noted that the protective film may be formed on the mover or both the stator and the mover. Not even.
発明の効果
以上記した様に本発明の超音波モーターは、固定子と可
動子とが相対して摺動する部分の、固定子、あるいは可
動子の少なくとも一方に、ダイヤモンド膜、ダイヤモン
ド状炭素膜、ＴａＣ膜、Ｗｃｍ 、 Ｔｌｃ膜、 Ｓｔ
Ｃ膜＋ Ｂ４Ｃ，ｆｉ 、 ＮｂＣ膜ナト（７）炭素原
子を含んだ保護膜を形成しているため、高負荷運転でも
安定して高効率な出力特性を示し、かつ、耐摩耗性に優
れているので長寿命なものである。Effects of the Invention As described above, the ultrasonic motor of the present invention has a diamond film or a diamond-like carbon film on at least one of the stator and the mover, where the stator and mover slide relative to each other. , TaC film, Wcm, Tlc film, St
C film + B4C,fi, NbC film (7) Forms a protective film containing carbon atoms, so it exhibits stable and highly efficient output characteristics even during high-load operation, and has excellent wear resistance. It has a long lifespan.
第１図は固定子の可動子と相対して摺動する面に炭素原
子を含む保護膜の単層膜を形成した本発明の一実施し１
］における超音波モーターの固定子部分略図、第２図は
同固定子に炭素原子を含む保護１．３・・−・・固定子
、２・・・・・・保護膜、４・・・・・・真空容器、５
・・・・・・直流電源、６・・−・・・メツシュ状電極
、７・・・・・・反応ガス、８・・・・・・補助ガス、
９・・−・・ブラズ波
マ管、１０・・・・−・高層９電源、１１・・・・・・
励起コイル、１２・・・・・・真空容器。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第
１ 図
第２図
高几尤り、
第３図FIG. 1 shows an embodiment of the present invention in which a single layer of a protective film containing carbon atoms is formed on the surface of the stator that slides against the movable element.
A schematic diagram of the stator part of the ultrasonic motor in Figure 2 is a schematic diagram of the stator part of the ultrasonic motor in Figure 2. The stator contains carbon atoms in the stator. ...Vacuum container, 5
....DC power supply, 6..--mesh-like electrode, 7..-reactant gas, 8..-auxiliary gas,
9...Blasma tube, 10...-High rise 9 power supply, 11...
Excitation coil, 12... vacuum container. Name of agent: Patent attorney Toshio Nakao and 1 other person
1 Figure 2: Takayoshi, Figure 3
Claims (2)
固定子、あるいは可動子の少なくとも一方に炭素原子を
含む保護膜を形成した超音波モーター。(1) The part where the stator and mover slide relative to each other,
An ultrasonic motor in which a protective film containing carbon atoms is formed on at least one of the stator or mover.
イヤモンド状炭素膜、および、炭素とＴａ，Ｗ，Ｔｉ，
Ｓｉ，Ｂ，Ｎｂのうちの少なくとも１元素との化合物か
ら成る膜の少なくとも１層から成ることを特徴とする特
許請求の範囲第１項記載の超音波モーター。(2) The protective film containing carbon atoms is a diamond film, a diamond-like carbon film, and carbon and Ta, W, Ti,
The ultrasonic motor according to claim 1, comprising at least one layer of a film made of a compound with at least one element among Si, B, and Nb.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61145149A JPS633661A (en) | 1986-06-20 | 1986-06-20 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61145149A JPS633661A (en) | 1986-06-20 | 1986-06-20 | Ultrasonic motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS633661A true JPS633661A (en) | 1988-01-08 |
Family
ID=15378550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61145149A Pending JPS633661A (en) | 1986-06-20 | 1986-06-20 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633661A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0420622A2 (en) * | 1989-09-28 | 1991-04-03 | Canon Kabushiki Kaisha | Frictional material for vibration motor |
-
1986
- 1986-06-20 JP JP61145149A patent/JPS633661A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0420622A2 (en) * | 1989-09-28 | 1991-04-03 | Canon Kabushiki Kaisha | Frictional material for vibration motor |
| US5122700A (en) * | 1989-09-28 | 1992-06-16 | Canon Kabushiki Kaisha | Frictional material for vibration wave driven motor |
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