JPS63292532A - Manufacture of semiconductive electric circuit - Google Patents
Manufacture of semiconductive electric circuitInfo
- Publication number
- JPS63292532A JPS63292532A JP62128851A JP12885187A JPS63292532A JP S63292532 A JPS63292532 A JP S63292532A JP 62128851 A JP62128851 A JP 62128851A JP 12885187 A JP12885187 A JP 12885187A JP S63292532 A JPS63292532 A JP S63292532A
- Authority
- JP
- Japan
- Prior art keywords
- superconducting
- oxide
- material layer
- layer
- electric circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 16
- 238000011282 treatment Methods 0.000 claims abstract description 16
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 239000002887 superconductor Substances 0.000 claims abstract description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000001301 oxygen Substances 0.000 claims abstract description 11
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 11
- 238000006243 chemical reaction Methods 0.000 claims abstract description 8
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 7
- 239000000956 alloy Substances 0.000 claims abstract description 7
- 239000000126 substance Substances 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims description 18
- 239000002994 raw material Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 13
- 238000007743 anodising Methods 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 abstract description 9
- 238000007254 oxidation reaction Methods 0.000 abstract description 9
- 229910001325 element alloy Inorganic materials 0.000 abstract description 2
- 238000011328 necessary treatment Methods 0.000 abstract 1
- 239000004020 conductor Substances 0.000 description 9
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- -1 Ba0H or Ca0H Chemical class 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052706 scandium Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 229910010320 TiS Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052705 radium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
- Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
Description
【発明の詳細な説明】
Ｕ産業上の利用分野１
本発明は、超電導マグネットに使用されるシートコイル
、あるいはジョセフソン素子としてコンピュータの回路
中へ設けられたり、あるいはトランジスタのゲートとし
て用いられる電気回路等の超電導電気回路の製造方法に
関するものである。Detailed Description of the Invention U Industrial Application Field 1 The present invention is applicable to sheet coils used in superconducting magnets, or electric circuits provided in computer circuits as Josephson elements, or used as gates of transistors. The present invention relates to a method of manufacturing a superconducting electric circuit such as the above.
［技術背景］
近時、常電導状態から超電導状態へ遷移する臨界温度（
Ｔ ｃ）がきわめて高いＬ ａ−Ｂ ａ−Ｃｕ−０系、
Ｙ−８ｒ−Ｃｕ−０系等のいわゆるＡ −Ｂ −Ｃｕ−
０系（ただし、ＡはＬａ、Ｃｅ、Ｙ、Ｙｂ、Ｓｃ等のＴ
ＩＩａ族元素を示し、ＢはＳｒ、Ｂａ等のアルカリ土類
金属元素を示す）の酸化物系超電導体が種々発見されて
おり、さらに、この酸化物系超電導体を基板上に回路パ
ターンとして形成した電気回路の製造が種々試みられて
いる。[Technical background] Recently, the critical temperature at which the normal conductive state transitions to the superconducting state (
L a-B a-Cu-0 system with extremely high T c),
So-called A-B-Cu- such as Y-8r-Cu-0 series
0 series (However, A is T such as La, Ce, Y, Yb, Sc, etc.)
Various oxide-based superconductors have been discovered, and these oxide-based superconductors can be formed as circuit patterns on substrates. Various attempts have been made to manufacture such electric circuits.
［問題点を解決するための手段］
本発明は上記事情に鑑みてなされたものであって、基板
上に、酸化物系超電導体の構成元素のうち酸素を除く元
素からなる多元系合金の超電導原料層を形成し、この超
電導原料層に、陽極酸化処理、化成化処理等を施して製
造すべき電流回路と同一の酸化物層を形成し、次に熱処
理を施して酸化物層の酸素および各元素と、前記超電導
原料層の各元素を反応させて酸化物系超電導体からなる
電流回路を形成することを特徴としている。[Means for Solving the Problems] The present invention has been made in view of the above circumstances, and includes a superconductor of a multi-component alloy consisting of elements other than oxygen among the constituent elements of an oxide superconductor on a substrate. A raw material layer is formed, and this superconducting raw material layer is subjected to anodic oxidation treatment, chemical conversion treatment, etc. to form an oxide layer that is the same as the current circuit to be manufactured, and then heat treatment is performed to remove oxygen and oxygen in the oxide layer. The method is characterized in that a current circuit made of an oxide-based superconductor is formed by reacting each element with each element of the superconducting raw material layer.
［実施例］
以下、本発明をＹ −Ｂ ａ−Ｃｕ−０系の超電導導体
を具備する超電導シートコイルの製造方法に適用した例
を図面を参照して具体的に説明する。[Example] Hereinafter, an example in which the present invention is applied to a method for manufacturing a superconducting sheet coil including a Y-B a-Cu-0 based superconducting conductor will be specifically described with reference to the drawings.
まず、第１図（ａ）に示すように、所定の組成比に配合
されたＹ −Ｂ ａ−Ｃｕａ元系合金からなるターゲッ
トを、Ｃｕ、Ａｇ、Ｐｔ、Ａｕ、Ｐｄ等からなり、所定
厚さを有する正方形状の基板ｌの表面にスパッタ法等に
より所定厚さに被着させ、超電導原料層２を形成する。First, as shown in FIG. 1(a), a target made of a Y-B a-Cua element alloy blended in a predetermined composition ratio is made of Cu, Ag, Pt, Au, Pd, etc. to a predetermined thickness. A superconducting raw material layer 2 is formed by depositing the superconducting material layer 2 on the surface of a square substrate 1 having a predetermined thickness by sputtering or the like to a predetermined thickness.
次に、第１図（ｂ）に示すよう上記超電導原料層２の上
に、製造すべきシートコイルの電流回路と同一のらせん
状パターン３が切り取られたポリイミド等の高分子材料
からなる遮蔽シート４を、焼き付は等の手段により張り
付け、第１図（ｃ）に示すような材料板５を得る。この
際、ポリイミド溶液をワニスとして、超電導層２の上に
らせん状パターン３が残るよう塗布することによって材
料板５を得るようにしてもよい。Next, as shown in FIG. 1(b), a shielding sheet made of a polymeric material such as polyimide is placed on top of the superconducting raw material layer 2, in which a spiral pattern 3 identical to the current circuit of the sheet coil to be manufactured is cut out. 4 is attached by baking or other means to obtain a material plate 5 as shown in FIG. 1(c). At this time, the material plate 5 may be obtained by applying a polyimide solution as a varnish so that the spiral pattern 3 remains on the superconducting layer 2.
続いて、この材料板５を、ＮａＯＨ、Ｋ ＯＨ。Next, this material plate 5 was treated with NaOH and KOH.
Ｂａ０Ｈ，Ｃａ０Ｈ等のアルカリ金属の水酸化物の水溶
液中に浸漬するとともに、この水溶液中に通電して陽極
酸化処理を行なう。これによって、材料板５表面の遮蔽
シート４に覆われていない部分、つまり遮蔽シート４の
らせん状パターン３から露出している部分に酸化物層６
が形成されろ。It is immersed in an aqueous solution of a hydroxide of an alkali metal such as Ba0H or Ca0H, and is anodized by passing electricity through the aqueous solution. As a result, an oxide layer 6 is formed on the part of the surface of the material plate 5 that is not covered with the shielding sheet 4, that is, the part exposed from the spiral pattern 3 of the shielding sheet 4.
be formed.
この酸化物層６は、陽極酸化処理の際の電流密度と処理
時間を調節することによって所望の厚さに形成すること
ができる。なお、この酸化物層の形成は、陽極酸化処理
のみならず、クロム酸化合物等を用いた化成化処理によ
っても行なうことができる。This oxide layer 6 can be formed to a desired thickness by adjusting the current density and treatment time during the anodic oxidation treatment. Note that this oxide layer can be formed not only by anodic oxidation treatment but also by chemical conversion treatment using a chromic acid compound or the like.
次に、上記のようにらせん状の酸化物層６が形成された
材料板５を、８００〜９５０℃程度の温度に数時間〜１
００時間加熱する加熱処理を施す。Next, the material plate 5 on which the spiral oxide layer 6 has been formed as described above is heated to a temperature of about 800 to 950°C for several hours to 1 hour.
Heat treatment is performed for 00 hours.
この加熱処理条件は、生成する酸化物系超電導材料の種
類により適宜設定されるが、Ａ −Ｂ −Ｃｕ−０系の
超電導材料を生成するには７００〜１１００°Ｃに１〜
３００時間加熱する条件であればよく、特に面述の範囲
が好ましい。The conditions for this heat treatment are appropriately set depending on the type of oxide-based superconducting material to be produced, but in order to produce A-B-Cu-0-based superconducting material, the temperature is 700 to 1100°C.
Any condition may be used as long as it is heated for 300 hours, and the range described above is particularly preferred.
このような加熱処理によって、酸化物層６に含まれる酸
素と各元素が相互に拡散して超電導原料層２を構成する
元素と反応し、前記酸化物層６が形成された部分に酸化
物系超電導導体が生成され、これが電流回路となる。そ
して、基板５の周縁を削り、第１図（ｄ）に示すような
円板状にしてシートコイル７を得る。このようなシート
コイル７を多数枚積層すれば、第１図（ｅ）に示すよう
なマグネットコイル８となり、このマグネットコイル８
は、加速器用マグネット、超電導発電機用マグネット等
の超電導機器用に使用することができる。Through such heat treatment, oxygen and each element contained in the oxide layer 6 mutually diffuse and react with the elements constituting the superconducting raw material layer 2, and an oxide-based material is formed in the portion where the oxide layer 6 is formed. A superconducting conductor is created, which becomes a current circuit. Then, the peripheral edge of the substrate 5 is shaved to form a disk shape as shown in FIG. 1(d) to obtain a sheet coil 7. If a large number of such sheet coils 7 are stacked, a magnet coil 8 as shown in FIG. 1(e) is obtained, and this magnet coil 8
can be used for superconducting equipment such as accelerator magnets and superconducting generator magnets.
なお、上記実施例の変形例として、超電導原料層２を形
成してから次に陽極酸化処理を施して超電導層２の表面
全体に酸化物層を形成し、この酸化物層を、硫酸や硝酸
等の強酸を電解液として用いた電解エツチング等の化学
的な方法、または、放電加工や旋盤加工等の機械加工に
よって切削することによりらせん状の酸化物層とし、そ
の後上記実施例と同様に、加熱処理を施してらせん状の
酸化物層の部分を酸化物系超電導導体とすることにより
超電導シートコイルを得る方法を実施してもよい。As a modification of the above embodiment, after forming the superconducting raw material layer 2, an anodizing treatment is performed to form an oxide layer on the entire surface of the superconducting layer 2, and this oxide layer is treated with sulfuric acid or nitric acid. A spiral oxide layer is formed by cutting it by a chemical method such as electrolytic etching using a strong acid such as the above as an electrolyte, or by machining such as electric discharge machining or lathe machining, and then, as in the above example, A method of obtaining a superconducting sheet coil by heat-treating the helical oxide layer to convert it into an oxide-based superconducting conductor may be implemented.
以上の超電導シートコイルの製造方法によれば、容易に
かつ確実に酸化物系超電導導体からなる電流回路を形成
することができ、また、酸化物層６の形成は、加熱処理
における酸化作用によるものではなく陽極酸化処理によ
って形成するので、加熱処理の際にガス雰囲気を厳密に
制御する必要がないという利点もある。According to the method for manufacturing a superconducting sheet coil described above, it is possible to easily and reliably form a current circuit made of oxide-based superconducting conductors, and the formation of the oxide layer 6 is due to the oxidation effect during heat treatment. Since it is formed by anodic oxidation treatment instead of a heat treatment, there is also the advantage that there is no need to strictly control the gas atmosphere during the heat treatment.
また、このようにして得られた酸化物系の超電導シート
コイル７は、液体窒素で冷却することによって超電導状
態に遷移するものであり、従来の合金系の超電導導体や
化合物系の超電導導体に比較して格段に有利な冷却条件
で使用することができる。In addition, the oxide-based superconducting sheet coil 7 thus obtained transitions to a superconducting state by cooling with liquid nitrogen, and is compared to conventional alloy-based superconducting conductors and compound-based superconducting conductors. It can be used under extremely advantageous cooling conditions.
なお、上記実施例では、本発明をＹ −Ｂ ａ−Ｃｕ−
Ｏ系の酸化物系超電導導体を具備するノートコイルに適
用したが、Ｙの代わりにＬａ、Ｓｃ、Ｃｅ、Ｐｒ。In addition, in the above-mentioned example, the present invention was described as Y-B a-Cu-
It was applied to a note coil equipped with an O-based oxide-based superconducting conductor, but instead of Y, La, Sc, Ce, and Pr were used.
Ｎｄ、Ｐｍ、Ｅｕ、Ｇｄ、Ｔｂ、’Ｄｙ、Ｈｏ、Ｅｒ、
Ｔｍ、Ｙｂ、Ｌｕ等のｌ１ｌａ族元素の１種以」−１ま
た、Ｂａの代わりに、Ｓｒ、Ｂｅ、Ｍｇ、Ｒａ等のアル
カリ土類金属元素の１種以上が用いられた酸化物系のも
のを適用してもよく、さらに、シートコイルに限らず、
ジョセフソン素子としてコンピュータの回路中へ設けら
れたり、あるいはトランジスタのゲートとして用いられ
る電気回路等に適用してもよい。Nd, Pm, Eu, Gd, Tb, 'Dy, Ho, Er,
One or more of the l1la group elements such as Tm, Yb, Lu, etc.''-1 Also, oxide-based oxides in which one or more of the alkaline earth metal elements such as Sr, Be, Mg, and Ra are used instead of Ba. Furthermore, it is not limited to sheet coils,
It may be provided in a computer circuit as a Josephson element, or applied to an electric circuit used as a gate of a transistor.
また、上記基板Ｉとしては、Ｃｕ、Ａｇ、Ｐ ｔ、Ａｕ
。Further, as the substrate I, Cu, Ag, Pt, Au
.
Ｐｄの他に、Ｓｉ、Ａｌ２Ｏ３、Ｔ ｉＳ ｒｏ ３、
あるいはＳ ｌ ％ Ｇ ａ Ａ ｓ等を用いてもよい
。さらに、超電導原料層２を形成する方法としては、上
記スパッタ法の他に、原料粉末を加圧焼成する方法や、
蒸着法、ＭＢＥ法、ＣＶＤ法等によっても実施し得る。In addition to Pd, Si, Al2O3, TiS ro 3,
Alternatively, S 1 % Ga As or the like may be used. Furthermore, as a method for forming the superconducting raw material layer 2, in addition to the above-mentioned sputtering method, a method of pressurizing and firing raw material powder,
It can also be carried out by a vapor deposition method, an MBE method, a CVD method, or the like.
［製造例］
ＹＩ７原子％、Ｂａ３′３原子％となるように、Ｃｕ−
Ｙ−Ｂａａ元系合金を配合し、この合金を、厚さ０ 、
５ ｍｍ、直径３００ｍｍのＣｕからなる基板の上に蒸
着させ、厚さ１μｍの超電導層を形成した。次に、この
超電導層の上に、ポリイミドからなり、かつ、らせん状
のパターンが切り取られた遮蔽シートを焼き付けて基板
を得た。[Production example] Cu-
A Y-Baa elemental alloy is blended, and this alloy is made into a material with a thickness of 0,
A superconducting layer with a thickness of 1 μm was formed by vapor deposition on a substrate made of Cu with a thickness of 5 mm and a diameter of 300 mm. Next, a shielding sheet made of polyimide with a spiral pattern cut out was baked onto this superconducting layer to obtain a substrate.
この基板に陽極酸化処理を施し、遮蔽シートが覆われて
いない前記パターンから露出している基板表面に酸化物
層を形成した。This substrate was anodized to form an oxide layer on the surface of the substrate exposed from the pattern not covered with the shielding sheet.
陽極酸化処理の条件は、 ・処理水溶液の組成−ＮａＯＨ１０％ ・電流密度−２Ａ／ｃｍ’ ・処理温度および時間−６０℃、１０分で行なった。The conditions for anodizing treatment are: ・Composition of treated aqueous solution - NaOH 10% ・Current density -2A/cm' - Processing temperature and time: -60°C for 10 minutes.
次に、前記基板を、（８００）’Ｃで（５０）時間加熱
処理を行ない、らせん状の酸化物層の酸素を超電導層の
各元素と反応させ、らせん状の超電導体導体を生成させ
て超電導シートコイルを製造した。Next, the substrate is heat-treated at (800)'C for (50) hours to cause oxygen in the spiral oxide layer to react with each element in the superconducting layer to generate a spiral superconductor conductor. A superconducting sheet coil was manufactured.
この超電導シートコイルの電流回路の一部を取り出し抵
抗値がゼロとなる臨界温度を測定したところ、９０にと
いう優秀な値を示した。When a part of the current circuit of this superconducting sheet coil was taken out and the critical temperature at which the resistance value becomes zero was measured, it showed an excellent value of 90.
［発明の効果］
以上説明したように、本発明の超電導電気回路の製造方
法によれば、基板上に、超電導導体からなる回路パター
ンを形成するにあたり、基板上に酸化物系超電導体の構
成元素のうち酸素を除く元素からなる多元系合金の超電
導原料層を形成し、この超電導原料層に、陽極酸化処理
、化成化処理等を施して製造すべき電流回路と同一の酸
化物層を形成して基板を得、次にこの基板に熱処理を施
して酸化物層の酸素および各元素と、前記超電導原料層
の各元素を反応させる方法であるから、容易にかつ確実
に電流回路を形成することができ、また、陽極酸化処理
等の化成処理の条件を調節することによって所望の厚さ
の超電導層を形成することができる。[Effects of the Invention] As explained above, according to the method for manufacturing a superconducting electric circuit of the present invention, when forming a circuit pattern made of a superconducting conductor on a substrate, constituent elements of an oxide-based superconductor are formed on the substrate. A superconducting raw material layer of a multi-component alloy consisting of elements excluding oxygen is formed, and this superconducting raw material layer is subjected to anodizing treatment, chemical conversion treatment, etc. to form an oxide layer that is the same as the current circuit to be manufactured. This method enables the formation of a current circuit easily and reliably, since the method involves obtaining a substrate, and then subjecting this substrate to heat treatment to cause oxygen and each element in the oxide layer to react with each element in the superconducting raw material layer. Furthermore, a superconducting layer with a desired thickness can be formed by adjusting the conditions of chemical conversion treatment such as anodic oxidation treatment.
さらに、加熱処理における酸化作用によって酸化物層を
形成するのでなく、陽極酸化処理等によって酸化物層を
形成するので、加熱処理の際にガス雰囲気を厳密に制御
する必要がないという利点もある。Furthermore, since the oxide layer is not formed by oxidation during heat treatment but by anodization or the like, there is also the advantage that there is no need to strictly control the gas atmosphere during heat treatment.
第１図（ａ）〜（ｄ）は本発明を説明するためのもので
、第１図（ａ）は超電導原料層が形成された基板の斜視
図、第１図（ｂ）は基板および遮蔽シートの斜視図、第
１図（ｃ）は材料板の斜視図、第１図（ｄ）はシートコ
イルの斜視図、第１図（ｅ）はシートコイルを用いて作
られたマグネットコイルの斜視図である。
ｌ ・・・基板、 ２・・・・・・超電導原料層、
６・・ ・酸化物層、７・・・・シートコイル。1(a) to 1(d) are for explaining the present invention. FIG. 1(a) is a perspective view of a substrate on which a superconducting raw material layer is formed, and FIG. 1(b) is a perspective view of a substrate and a shield. FIG. 1(c) is a perspective view of a sheet, FIG. 1(c) is a perspective view of a material plate, FIG. 1(d) is a perspective view of a sheet coil, and FIG. 1(e) is a perspective view of a magnet coil made using a sheet coil. It is a diagram. l...Substrate, 2...Superconducting raw material layer,
6... Oxide layer, 7... Sheet coil.
Claims (1)
く元素からなる多元系合金の超電導原料層を形成し、こ
の超電導原料層に、陽極酸化処理、化成化処理等を施し
て製造すべき電流回路と同一の酸化物層を形成し、次に
熱処理を施して酸化物層の酸素および各元素と、前記超
電導原料層の各元素を反応させて酸化物系超電導体から
なる電流回路を形成することを特徴とする超電導電気回
路の製造方法。A superconducting raw material layer of a multi-component alloy consisting of constituent elements of an oxide superconductor excluding oxygen is formed on a substrate, and this superconducting raw material layer is subjected to anodizing treatment, chemical conversion treatment, etc. to produce the superconducting material. The same oxide layer as the current circuit is formed, and then heat treatment is performed to react the oxygen and each element in the oxide layer with each element in the superconducting raw material layer to form a current circuit made of an oxide-based superconductor. A method for manufacturing a superconducting electric circuit, comprising: forming a superconducting electric circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62128851A JPS63292532A (en) | 1987-05-26 | 1987-05-26 | Manufacture of semiconductive electric circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62128851A JPS63292532A (en) | 1987-05-26 | 1987-05-26 | Manufacture of semiconductive electric circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63292532A true JPS63292532A (en) | 1988-11-29 |
Family
ID=14994946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62128851A Pending JPS63292532A (en) | 1987-05-26 | 1987-05-26 | Manufacture of semiconductive electric circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63292532A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04137408A (en) * | 1990-09-28 | 1992-05-12 | Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai | Oxide superconductive wire material and coil using the material |
| US5116810A (en) * | 1989-10-16 | 1992-05-26 | American Superconductor Corporation | Process for making electrical connections to high temperature superconductors using a metallic precursor and the product made thereby |
-
1987
- 1987-05-26 JP JP62128851A patent/JPS63292532A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5116810A (en) * | 1989-10-16 | 1992-05-26 | American Superconductor Corporation | Process for making electrical connections to high temperature superconductors using a metallic precursor and the product made thereby |
| US5321003A (en) * | 1989-10-16 | 1994-06-14 | American Superconductor Corporation | Connection between high temperature superconductors and superconductor precursors |
| JPH04137408A (en) * | 1990-09-28 | 1992-05-12 | Chodendo Hatsuden Kanren Kiki Zairyo Gijutsu Kenkyu Kumiai | Oxide superconductive wire material and coil using the material |
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