JPS63282668A - Apparatus for measuring surface resistance distribution - Google Patents
Apparatus for measuring surface resistance distributionInfo
- Publication number
- JPS63282668A JPS63282668A JP11695587A JP11695587A JPS63282668A JP S63282668 A JPS63282668 A JP S63282668A JP 11695587 A JP11695587 A JP 11695587A JP 11695587 A JP11695587 A JP 11695587A JP S63282668 A JPS63282668 A JP S63282668A
- Authority
- JP
- Japan
- Prior art keywords
- surface resistance
- conductive film
- constant voltage
- current
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 19
- 238000005259 measurement Methods 0.000 abstract description 14
- 239000000758 substrate Substances 0.000 abstract description 9
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- HDRXZJPWHTXQRI-BHDTVMLSSA-N diltiazem hydrochloride Chemical compound [Cl-].C1=CC(OC)=CC=C1[C@H]1[C@@H](OC(C)=O)C(=O)N(CC[NH+](C)C)C2=CC=CC=C2S1 HDRXZJPWHTXQRI-BHDTVMLSSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、表面抵抗分布測定装置に関する。詳しくは、
基板の表面に導電性皮膜を有する導電性基材の表面抵抗
分布測定装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a surface resistance distribution measuring device. For more information,
The present invention relates to a surface resistance distribution measuring device for a conductive base material having a conductive film on the surface of the substrate.
（従来技術）
基板の表面に導電性皮膜を有する導電性基材、汐１１え
ばポリエチレンテレフタレートフィルムのような高分子
基板の片面又は両面に、蒸着法又はスパッタ法等によっ
て金属及び／又は、金属酸［ヒ物を積層した導電性フィ
ルムは、各種表示用透明′ｄ℃極、タッチ・ξネル、熱
線反射フィルム、電出波遮へい板等広範囲に用途が展開
されている。(Prior art) A conductive substrate having a conductive film on the surface of the substrate, such as a polymer substrate such as a polyethylene terephthalate film, is coated with metal and/or metal acid by vapor deposition or sputtering on one or both sides of the substrate. [Conductive films laminated with cylindrical materials are used in a wide range of applications, including transparent 20°C polarity for various displays, touch/200° panels, heat ray reflective films, and electromagnetic wave shielding plates.
中でもタッチノミネルは、ディスプレイの表面を指又は
ペン等で軽く触れるだけで指示できる新しい入力機器と
して銀行のＡ．Ｔ．Ｍ．やオフィスオートメーンヨン機
器等に使用されている。Among them, Touch Nominel is a new input device that allows you to give instructions by simply touching the surface of the display with your finger or a pen. T. M. It is used in office automation equipment, etc.
タッチ・ξネルに使用する導電性フィルムは、う明快（
透過率）、表面抵抗（導電率）などのフ〜イルムの表面
特性が重要とされる。The conductive film used for touch and ξ channels is transparent (
The surface properties of the film, such as transmittance) and surface resistance (electrical conductivity), are important.
特にアナログ式タッチパネルに於ては、表面抵抗が導電
皮膜全面にわたり均一であること、つまり、表面抵抗分
布の均一性が重要な評価項目の一つとなっている。Particularly in analog touch panels, one of the important evaluation items is that the surface resistance is uniform over the entire surface of the conductive film, that is, the uniformity of the surface resistance distribution.
この表面抵抗分布の測定は、人手により例え、ば第４図
に示すような装置を用いて行われていた。The surface resistance distribution has been measured manually using, for example, a device as shown in FIG.
導電性皮膜を有する導電性基材６の両端を、ペースト７
′が陽極、ペースト７が陰極に、なるように直流定電圧
電源８を用いて定電圧を印加する。A paste 7 is applied to both ends of the conductive base material 6 having a conductive film.
A constant voltage is applied using a DC constant voltage power source 8 such that ' is an anode and paste 7 is a cathode.
次いで導電性基材６のＡ点からＢ点までの間を、一定間
隔ν１１えば１０＃間隔毎に通電端子４を接触させ各点
の電圧を測定する。更に、Ａ点よシ例えば２０鴎下の位
置Ｃ点から上記と同様の操作をＤ点まで行う。この操作
を繰り返して導電性基材６の全面にわたって接触させた
点の′電圧を測定する。Next, the current-carrying terminal 4 is brought into contact with the conductive base material 6 from point A to point B at regular intervals ν11, for example, every 10#, and the voltage at each point is measured. Furthermore, the same operation as above is performed from point C, which is located 20 minutes from point A, for example, to point D. This operation is repeated to measure the voltage at the points brought into contact over the entire surface of the conductive base material 6.
Ａ点からＢ点まで或は、６点からＤ点までの間に於て、
表面抵抗が均一であれば電圧の測定値は直線的に増加す
る。しかし均一でない場合は、電圧は、理論値より算出
される直線からずれを生じる。From point A to point B or from point 6 to point D,
If the surface resistance is uniform, the measured voltage will increase linearly. However, if it is not uniform, the voltage will deviate from the straight line calculated from the theoretical value.
従来は、測定された各点のべ圧をグラフ［ヒし、上記の
理論値から算出された直線とのずれで表面抵抗分布の均
一性を評価していた。Conventionally, the uniformity of the surface resistance distribution was evaluated by plotting the measured pressure at each point on a graph, and by looking at the deviation from the straight line calculated from the above-mentioned theoretical values.
（発明が解決しようとする問題点）
上記のよう々測定を行う際、正確で精度の高い結果を得
るために測定者は、通電端子を予め定められた点に正確
に且つ一定した圧力で接触させる必要があり、高度な熟
練を要求されていた。更に測定点は、導電性基材の面積
によっても異なるが、通常よく利用される大きさＡ４サ
イズ：２１０ｓａＸ２９７ｍｍの場合では３００点程度
の多数の点を測定しなければならないので測定に長時間
を要する問題点がちった。(Problem to be Solved by the Invention) When performing measurements as described above, in order to obtain accurate and highly accurate results, the measurer must touch the current-carrying terminal to a predetermined point with precision and constant pressure. This required a high degree of skill. Furthermore, the measurement points vary depending on the area of the conductive substrate, but in the case of the commonly used A4 size: 210sa x 297mm, it is necessary to measure a large number of about 300 points, so it takes a long time to measure. There was a problem.
（問題点を解決するための手段）
本発明者らは、上記問題点を克服し、高精度で効率的に
測定できる導電性皮膜の表面抵抗分布測定装置を鋭意検
討した結果、定電圧又は定電流電源と、Ｘ−Ｙ軸駆動装
置とＸ−Ｙ軸駆動装置のペン固定治具に固定された通電
端子と、該通電端子からの出力に基づいて、導電性皮膜
の表面抵抗を測定する手段とを有する表面抵抗分布測定
装置により、上記の問題点が解決されることを見出し、
この知見に基づき不発明を完成した。(Means for Solving the Problems) As a result of intensive study on a surface resistance distribution measuring device for conductive films that can overcome the above problems and measure efficiently with high accuracy, the present inventors have found that constant voltage or constant voltage A means for measuring the surface resistance of a conductive film based on a current power supply, an X-Y axis drive device, a current-carrying terminal fixed to a pen fixing jig of the X-Y-axis drive device, and an output from the current-carrying terminal. We have discovered that the above problems can be solved by a surface resistance distribution measuring device having
Based on this knowledge, he completed his invention.
次に図面を用いて本発明の実施態様を具体的に例示して
詳細に説明する。Next, embodiments of the present invention will be specifically illustrated and explained in detail using the drawings.
第１図は不発明の装置の一例であり、第２図は第１図の
通電端子４の拡大図である。又第３図は、第１図の装置
で測定した測定結果の一例である。FIG. 1 shows an example of the inventive device, and FIG. 2 is an enlarged view of the current-carrying terminal 4 shown in FIG. Moreover, FIG. 3 is an example of the measurement results measured with the apparatus shown in FIG. 1.
第１図中１は、Ｘ−Ｙプロッターの上面に設けられた記
録ノミネル、２はペン５駆動枠、３はペンキャリッジ、
４は通電端子、５はＸ−Ｙプロッターの作動制御装置で
ある。また８は定電圧電源、９はＡ／Ｄコンノζ−ター
、１０は演算処理装置、１０′は表示装置である。In Fig. 1, 1 is a recording nominal provided on the top surface of the X-Y plotter, 2 is a pen 5 drive frame, 3 is a pen carriage,
Reference numeral 4 represents a power supply terminal, and reference numeral 5 represents an operation control device for the X-Y plotter. Further, 8 is a constant voltage power supply, 9 is an A/D controller, 10 is an arithmetic processing unit, and 10' is a display device.
基板の表面に導電性皮膜を有する導電性基材６は、導電
皮膜が上になるように記録パネル１の上に固定される。A conductive base material 6 having a conductive film on the surface of the substrate is fixed onto the recording panel 1 with the conductive film facing upward.
このとき、導電性基材の一辺が記録パネル１のＸ軸方向
と平行になるよつに固定される。At this time, the conductive base material is fixed so that one side thereof is parallel to the X-axis direction of the recording panel 1.
導電性基材６の対向する２辺には、定電圧を印加するＩ
Ｊ−−線を接続するために導電性の良好なペースト７
、７’が３〜５嶋の幅で上記の対向する２辺全長にわた
シ塗布される。ペースト７．７−としては、例えば金ペ
ースト、銀慇−スト等が用いられる。該ペースト７ 、
７’には、通常直流定電圧電源８から出力される直流電
圧が、例えば７が陰極、７パが陽極となるように接続さ
れ印加される。A constant voltage is applied to two opposing sides of the conductive base material 6.
Good conductive paste 7 to connect J-- wire
, 7' are applied across the entire length of the above two opposing sides with a width of 3 to 5 wafers. As the paste 7.7-, for example, gold paste, silver paste, etc. are used. The paste 7,
A DC voltage normally outputted from a DC constant voltage power source 8 is applied to 7' by connecting it so that 7 becomes a cathode and 7P becomes an anode.
直流定電圧電源の代りに交流定電圧電源又は交流もしく
は直流の定電流電源を使用しても差し支えない。Instead of the DC constant voltage power supply, an AC constant voltage power supply or an AC or DC constant current power supply may be used.
Ｘ−Ｙ軸駆動装置は、・ξネル上に設けられたペン固定
治具がＸ軸及びＹ軸の任意の方向に移動し、且つペン固
定治具がアンプダウンの機能を有する装置であり、その
作動は通常コンピューターからの情報により制御される
。The X-Y axis drive device is a device in which a pen fixing jig provided on the ξ channel moves in any direction of the X axis and Y axis, and the pen fixing jig has an amplifier down function, Its operation is usually controlled by information from a computer.
Ｘ−Ｙ軸駆動装置としては、例えば第１図で用いた公知
のＸ−Ｙプロッターが挙げられる。本発明に於いてＸ−
、Ｙプロッターを使用する際は導電性基材がツクネル上
に固定され、ペンがＸ−Ｙ方向に移動するフラットベラ
−型プロッターが好ましい。又、本発明のＸ−Ｙ軸駆動
装置のペン固定治具は、Ｘ−Ｙプロッターのベンキャリ
ッジに相当する。As the X-Y axis drive device, for example, the known X-Y plotter used in FIG. 1 can be mentioned. In the present invention, X-
When using a Y plotter, a flat-bell type plotter in which the conductive substrate is fixed on a tunnel and the pen moves in the X-Y direction is preferred. Further, the pen fixing jig of the X-Y axis drive device of the present invention corresponds to the Benn carriage of an X-Y plotter.
本発明で最も大きな特徴は、ペン固定治具に導電性を有
する通電端子を取り付けたことにある。The most significant feature of the present invention is that a conductive current terminal is attached to the pen fixing jig.
通電端子４は、第２図に示すように通電端子の本体４１
の先端部に接触子４２を設けたものである。The current-carrying terminal 4 has a main body 41 of the current-carrying terminal as shown in FIG.
A contact 42 is provided at the tip.
通電端子の本体４１の材質は絶縁性物質例えば、絶縁性
の合成樹脂等が用いられ接触子４２の材質としては、導
電性の良好な、導電性ゴム、導電性樹脂及び金、銀、銅
、アルミニウム等の金属が使用される。接触子４２は、
第２図（ａ）〜（ｃ）に示すように、板状（ａｌ、柱状
、半球状（ｂｌとして固定、或は、ローラー又はボール
状等の回転可能な形状（ｃｌとして本体４１に取り付け
られる。導電性ゴムは、適度な硬さと柔軟性を有するの
で好ましい。導電性ゴムとしては例えばンリコンゴムに
カーゼンブラック、グラファイト、銀、ニッケル等の粒
子を錬シ込んだものが用いられる。接触子４２をローラ
ー又はボール状とする場合は、導電性ゴムでも金属でも
よい。The material of the main body 41 of the current-carrying terminal is an insulating material, such as an insulating synthetic resin, and the material of the contact 42 is a material with good conductivity such as conductive rubber, conductive resin, gold, silver, copper, etc. Metals such as aluminum are used. The contact 42 is
As shown in FIGS. 2(a) to (c), a plate-like shape (al, columnar shape, hemispherical shape (bl) may be fixed, or a rotatable shape such as a roller or ball shape (cl) may be attached to the main body 41. Conductive rubber is preferable because it has appropriate hardness and flexibility. For example, conductive rubber used is non-conductive rubber in which particles of carzen black, graphite, silver, nickel, etc. are injected. Contactor 42 When it is shaped like a roller or ball, it may be made of conductive rubber or metal.
接触子４２は太きすぎると導電性基材との接触面積が広
くなり、測定点が少なくなるので得られる分布はマクロ
的となる。即ち表面抵抗分布の正確さが低下する。通常
、接触子４２が導電性皮膜に接触する面積は、００１〜
１ｍ２、好ましくは００５〜０，５−の大きさとされる
。If the contactor 42 is too thick, the contact area with the conductive base material will be large, and the number of measurement points will be reduced, so that the obtained distribution will be macroscopic. That is, the accuracy of the surface resistance distribution decreases. Usually, the area where the contactor 42 contacts the conductive film is 001~
The size is 1 m2, preferably 0.05 to 0.5.
接触子４２は、導電性基材６の例えば、陰極から陽極に
向けて、固定された接触子のときは断続的に、回転可能
な接触子のときは断続的又は連続的に接触を行いつつ移
動する。しかして陽極まで達したならば、Ｙ軸方向に１
〜３０＝ａｍ行を変えて再度陰極側から同様の操作を行
うよう制御される。The contact 42 contacts the conductive base material 6, for example, from the cathode to the anode, intermittently in the case of a fixed contact, and intermittently or continuously in the case of a rotatable contact. Moving. However, once it reaches the anode, it is 1 in the Y-axis direction.
~30 = Control is performed so that the am row is changed and the same operation is performed again from the cathode side.
接触子４２と導電性皮膜とが接触を繰り返す間隔は小さ
い方が正確さが向上するので好ましい。即ち回転可能に
設けられた接触子４２を連続的に接触させる方法が最も
好ましい。断続的に接触させるときの最小の間隔は、接
触子４２の大きさ及びＸ−Ｙ軸駆動゛装置の性能に制限
され、通常接触する間隔は１〜１０−の範囲から選ばれ
る。これらの作動は第１図に於てはＸ−Ｙプロッターの
作動制御装置５により行われる。It is preferable that the interval at which the contactor 42 and the conductive film repeatedly make contact is small because accuracy is improved. That is, the most preferable method is to bring the rotatably provided contactor 42 into continuous contact. The minimum interval for intermittent contact is limited by the size of the contactor 42 and the performance of the X-Y axis drive device, and the usual contact interval is selected from the range of 1 to 10-. These operations are performed by an operation control device 5 of the X-Y plotter in FIG.
導電皮膜の表面抵抗は、ペースト７即ち定電圧電源８の
陰極と通電端子４との間にかかる電圧信号の大きさによ
り判定することができる。電圧信号は、表示、記録及び
／′又は演算等の処理装置に入力され処理される。例え
ばＣＲＴディスプレイ、記録計等に表示、記録し、又は
、パーソナルコンピューターを用いた演算処理により所
望の形態でアウトプットを得ることができる。The surface resistance of the conductive film can be determined by the magnitude of the voltage signal applied between the paste 7, that is, the cathode of the constant voltage power source 8, and the current-carrying terminal 4. The voltage signal is input to and processed by a processing device for display, recording and/or calculation. For example, output can be obtained in a desired form by displaying and recording on a CRT display, recorder, etc., or by arithmetic processing using a personal computer.
演算処理される場合、第１図に於てアナログ信号の電圧
は、Ａ／’Ｄコンバーター９によシディジタル信号に変
換される。When arithmetic processing is performed, the voltage of the analog signal in FIG. 1 is converted into a sidigital signal by the A/'D converter 9.
該ディジタル信号は、清算処理装置１０で別途Ｘ−Ｙプ
ロッターの制御装置５より入力された通電端子４の作動
データと共に演算処理される。演算処理結果は、表示装
置１０′に表示及び／゛又は、記録される。Ｘ−Ｙプロ
ッターの作動制御装置５の容量（能力）が大きければ、
同装置を用いてＡ／Ｄコンノ々−ター９の出力信号を処
理することもできる。即ちＸ−Ｙプロッターの作動制御
装置５と演算処理装置１０の両方を一台の・ξ−ソナル
コンピューターを用いて行うこともできる。The digital signal is subjected to arithmetic processing in the settlement processing device 10 together with the operation data of the energizing terminal 4 inputted separately from the control device 5 of the X-Y plotter. The arithmetic processing results are displayed and/or recorded on the display device 10'. If the capacity (ability) of the operation control device 5 of the X-Y plotter is large,
The same device can also be used to process the output signal of the A/D converter 9. That is, both the operation control device 5 and the arithmetic processing device 10 of the X-Y plotter can be performed using one ξ-sonal computer.
接触子４２にｌｍＸ１ｍの導電性ゴムの平板を用いた第
１図及び第２図（ａ）の装置で表面抵抗分布を測定した
結果の一例を第３図に示す。第３図中、１２は測定対象
となる導電性基材を表し、ＥＦｆａ’１の直線１３は理
論値より得られる標準線である。FIG. 3 shows an example of the results of measuring the surface resistance distribution using the apparatus shown in FIGS. 1 and 2(a) using a conductive rubber flat plate measuring 1 m x 1 m as the contactor 42. In FIG. 3, 12 represents the conductive base material to be measured, and the straight line 13 of EFfa'1 is a standard line obtained from theoretical values.
又、ＥＦ間の曲線１４は接触子が接触して得られた電圧
信号を演算処理により、標準線との偏差で表した測定線
である。これをＹ軸方向に繰り返して測定し演算処理し
て表した線が各々、Ｇ−Ｈ。Further, the curve 14 between EF and EF is a measurement line obtained by calculating the voltage signal obtained when the contactor contacts and expressing the deviation from the standard line. The lines obtained by repeatedly measuring and processing this in the Y-axis direction are GH.
Ｉ−Ｊ 、 Ｋ−Ｌ 、 Ｍ−Ｎ 、 Ｏ−Ｐ間の曲線
である。These are curves between I-J, K-L, MN, and OP.
測定線１４が標準線１３より上側では、理論値より抵抗
は大きく、下側では小さいことを表している。測定線１
４が標準線１３と平行ならば、表面抵抗分布はＸ軸方向
に均一であり又、Ｙ軸方向の分布は、Ｙ軸に平行な線上
にある各測定線の偏差比べることによシ、分布の均一性
を知ることができる。即ち理想的な導電性基材の場合は
、標準線１３と測定線１４が一致することになる。When the measurement line 14 is above the standard line 13, the resistance is larger than the theoretical value, and when it is below it is smaller. Measurement line 1
4 is parallel to the standard line 13, the surface resistance distribution is uniform in the X-axis direction, and the distribution in the Y-axis direction can be determined by comparing the deviation of each measurement line on a line parallel to the Y-axis. It is possible to know the uniformity of That is, in the case of an ideal conductive base material, the standard line 13 and the measurement line 14 will match.
第３図の場合、各測定線は、標準線の上側に位置してお
９全面にわたって表面抵抗が高いことを表している。Ｘ
軸方向の表面抵抗はＥＦ−ＧＷコＩＪ間に於ては、変動
がやや大きく、特に中央部付近の値が高い。一方、ＫＬ
ＸＭＮＸ ０２間に於ては変動が、小さく特に、０２間
の抵抗は高目であるがほぼ均一となっている。即ち、全
体的に表面抵抗は高目であり分布は、中央部より上側で
特に高い傾向にあり、他の部分はほぼ均一となっている
ことが判る。In the case of FIG. 3, each measurement line is located above the standard line, indicating that the surface resistance is high over the entire surface. X
The surface resistance in the axial direction fluctuates somewhat between EF and GW and IJ, and the value near the center is particularly high. On the other hand, K.L.
The variation between XMNX 02 is small, and in particular, the resistance between 02 and 02 is high, but almost uniform. That is, it can be seen that the surface resistance is high overall, and the distribution tends to be particularly high above the center, and is almost uniform in other parts.
本発明の表面抵抗分布測定装置によれば測定者は、導電
性基材を記録パネルに固定するのみで自動的に測定でき
るので、素人でも誤差の少ない結果が短時間で得られ労
務も削減できる。According to the surface resistance distribution measuring device of the present invention, the measurer can automatically measure by simply fixing the conductive substrate to the recording panel, so even an amateur can obtain results with few errors in a short time and reduce labor. .
更に通電端子からの出力をデジタ）ｖ変換し、演算処理
することにより、偏差値、平均値及びＹ軸方向の分布線
図等多数の情報を得ることができる。Further, by digitally converting the output from the current-carrying terminal and performing arithmetic processing, a large amount of information such as a deviation value, an average value, and a distribution diagram in the Y-axis direction can be obtained.
このように本発明によれば、従来高度な熟練を要し、か
つ長時間を必要とした測定が短時間に精度高く効率的に
行なうことができその効果は極めて大きいものである。As described above, according to the present invention, measurements that conventionally required a high level of skill and took a long time can be carried out in a short time, accurately and efficiently, and the effect is extremely large.
（ｃｌはそれぞれ通電端子を例示する拡大図である。(cl is an enlarged view illustrating a current-carrying terminal, respectively.
第３図は、第１図の装置を用いて測定して得られた結果
の測定線の一例である。又、第４図は従来実施されてい
た装置の一例である。FIG. 3 is an example of a measurement line obtained by measuring using the apparatus shown in FIG. 1. Further, FIG. 4 shows an example of a conventional device.
ｌ・・・記録パネル、２・・・ペン駆動枠、３・・・ベ
ンキャリッジ、４・・・通電端子、４１・・・通電端子
の本体、４２・・・接触子、５・・・Ｘ−Ｙプロッター
の作動制御装置、６・・・導電性基材、７ 、７’・・
・ペースト、８・・・定電圧電源、９・・・Ａ／Ｄコン
、５−ター、１ｏ・・・演算処理装置、１０′・・・表
示装置、１１・・・電圧計、１２・・・導電性基材（外
形線）、１３・・・標應線、１４・・・測定線。l...Recording panel, 2...Pen drive frame, 3...Ben carriage, 4...Electricity terminal, 41...Main body of the electricity supply terminal, 42...Contact, 5...X -Y plotter operation control device, 6... conductive base material, 7, 7'...
・Paste, 8... Constant voltage power supply, 9... A/D converter, 5-ter, 1o... Arithmetic processing unit, 10'... Display device, 11... Voltmeter, 12... - Conductive base material (outline line), 13... Marking line, 14... Measurement line.
第１区
第２図
（ａ） （ｂ） （Ｃ）
第３図
）′District 1, Figure 2 (a) (b) (C)
Figure 3)'
Claims (1)
−Ｙ軸駆動装置のペン固定治具に固定された通電端子と
、該通電端子からの出力に基づいて導電性皮膜の表面抵
抗を測定する手段とを有することを特徴とする表面抵抗
分布測定装置。 ２、Ｘ−Ｙ軸駆動装置が、Ｘ−Ｙプロッターである特許
請求の範囲第１項記載の表面抵抗分布測定装置。 ３、通電端子の材質が、導電性ゴムである特許請求の範
囲第１項記載の表面抵抗分布測定装置。 ４、導電性皮膜の表面抵抗を測定する手段が、Ａ／Ｄコ
ンバーターと演算処理装置と表示装置との組み合わせで
ある特許請求の範囲第１項記載の表面抵抗分布測定装置
。[Claims] 1. Constant voltage or constant current power source, X-Y axis drive device,
- A surface resistance distribution measuring device characterized by having a current-carrying terminal fixed to a pen fixing jig of a Y-axis drive device, and means for measuring the surface resistance of a conductive film based on the output from the current-carrying terminal. . 2. The surface resistance distribution measuring device according to claim 1, wherein the X-Y axis drive device is an X-Y plotter. 3. The surface resistance distribution measuring device according to claim 1, wherein the material of the current-carrying terminal is conductive rubber. 4. The surface resistance distribution measuring device according to claim 1, wherein the means for measuring the surface resistance of the conductive film is a combination of an A/D converter, an arithmetic processing device, and a display device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62116955A JPH0697240B2 (en) | 1987-05-15 | 1987-05-15 | Surface resistance distribution measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62116955A JPH0697240B2 (en) | 1987-05-15 | 1987-05-15 | Surface resistance distribution measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63282668A true JPS63282668A (en) | 1988-11-18 |
| JPH0697240B2 JPH0697240B2 (en) | 1994-11-30 |
Family
ID=14699871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62116955A Expired - Fee Related JPH0697240B2 (en) | 1987-05-15 | 1987-05-15 | Surface resistance distribution measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0697240B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010256145A (en) * | 2009-04-24 | 2010-11-11 | Hioki Ee Corp | Apparatus and method for measuring sheet resistance |
| JP2018184625A (en) * | 2017-04-25 | 2018-11-22 | 名古屋メッキ工業株式会社 | Metallic roller, electric resistance measuring means, and plating apparatus |
| CN114019241A (en) * | 2021-11-11 | 2022-02-08 | 江苏科技大学 | Method and device for determining resistance value of resistor in power device driving circuit |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4431404Y1 (en) * | 1967-01-20 | 1969-12-24 | ||
| JPS5214464A (en) * | 1975-07-23 | 1977-02-03 | Minolta Camera Co Ltd | Surface resistance measuring device |
| JPS57154069A (en) * | 1981-03-19 | 1982-09-22 | Matsushita Electric Ind Co Ltd | Measuring device for electric resistance |
| JPS6244271U (en) * | 1985-09-06 | 1987-03-17 |
-
1987
- 1987-05-15 JP JP62116955A patent/JPH0697240B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4431404Y1 (en) * | 1967-01-20 | 1969-12-24 | ||
| JPS5214464A (en) * | 1975-07-23 | 1977-02-03 | Minolta Camera Co Ltd | Surface resistance measuring device |
| JPS57154069A (en) * | 1981-03-19 | 1982-09-22 | Matsushita Electric Ind Co Ltd | Measuring device for electric resistance |
| JPS6244271U (en) * | 1985-09-06 | 1987-03-17 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010256145A (en) * | 2009-04-24 | 2010-11-11 | Hioki Ee Corp | Apparatus and method for measuring sheet resistance |
| JP2018184625A (en) * | 2017-04-25 | 2018-11-22 | 名古屋メッキ工業株式会社 | Metallic roller, electric resistance measuring means, and plating apparatus |
| CN114019241A (en) * | 2021-11-11 | 2022-02-08 | 江苏科技大学 | Method and device for determining resistance value of resistor in power device driving circuit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0697240B2 (en) | 1994-11-30 |
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