JPS63271047A - Humidifying method - Google Patents
Humidifying methodInfo
- Publication number
- JPS63271047A JPS63271047A JP62104295A JP10429587A JPS63271047A JP S63271047 A JPS63271047 A JP S63271047A JP 62104295 A JP62104295 A JP 62104295A JP 10429587 A JP10429587 A JP 10429587A JP S63271047 A JPS63271047 A JP S63271047A
- Authority
- JP
- Japan
- Prior art keywords
- water
- air
- porous material
- heating
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 70
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 238000001704 evaporation Methods 0.000 claims abstract description 17
- 239000011148 porous material Substances 0.000 claims abstract description 17
- 230000008020 evaporation Effects 0.000 claims abstract description 13
- 230000002209 hydrophobic effect Effects 0.000 claims abstract description 12
- 238000000889 atomisation Methods 0.000 claims description 2
- 238000009692 water atomization Methods 0.000 claims 1
- 239000010419 fine particle Substances 0.000 abstract description 10
- 238000007599 discharging Methods 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 238000009834 vaporization Methods 0.000 description 4
- 238000001914 filtration Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- -1 polytetrafluoroethylene Polymers 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010413 gardening Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 235000013311 vegetables Nutrition 0.000 description 1
Landscapes
- Air Humidification (AREA)
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は加熱蒸発式加湿方法に係り、特に、クリーンル
ーム等に好適な不純物粒子発生のない加湿方法に関する
。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a heating evaporation type humidification method, and particularly to a humidification method suitable for clean rooms and the like that does not generate impurity particles.
加湿方式には、（１）微細水滴を室内に噴霧して室内の
空気で水滴を蒸発させて空気を加湿するスプレーノズル
や超音波を用いる方式と、（２）水を加熱蒸発させて発
生水蒸気で空気を直接加湿する加熱蒸発方式がある。Humidification methods include (1) a method that uses a spray nozzle or ultrasonic waves to humidify the air by spraying fine water droplets into the room and evaporating the water droplets with the indoor air; and (2) a method that uses water vapor that is generated by heating and evaporating water. There is a heating evaporation method that humidifies the air directly.
なお、この種の装置に関連するものには、例えば、特開
昭５９−６９５７号公報等が挙げられる。Incidentally, examples related to this type of device include, for example, Japanese Unexamined Patent Publication No. 59-6957.
上記従来技術の方式には一長一短がある。前者の噴霧方
式は、微細水滴となるため、蒸発できる表面積が増し、
大量加湿に適しており家庭用及び園芸、ビニールハウス
、野菜等の加湿に広く利用されているが、水滴を直接室
内へ噴霧するため、未蒸発水滴により壁等が濡れやすい
こと及び、水滴が蒸発すると水中に溶解していた不純物
が析出して粒子となって品物等に付着する欠点がある。The conventional techniques described above have advantages and disadvantages. The former spray method produces fine water droplets, increasing the surface area for evaporation.
It is suitable for mass humidification and is widely used for humidifying homes, gardening, greenhouses, vegetables, etc. However, since water droplets are sprayed directly into the room, unevaporated water droplets tend to wet walls, etc., and the water droplets evaporate. This has the disadvantage that impurities dissolved in the water precipitate and form particles that adhere to items.
後者は、室内へ水蒸気のみを放出するため、上記欠点は
ないが、蒸発できる表面積が限定されるため、加湿（蒸
発）速度が遅く大量加湿には向かない。加熱方式が微粒
子発生がないクリーン加湿であるため半導体製造やバイ
オ分野のクリーンルーム加湿用しこ適している。加熱方
式の加湿速度を向上させるために、加熱温度を上げると
水が沸騰し、気泡破裂時に大量の微細水滴が発生し、前
者と同様の問題がでてくる。The latter releases only water vapor into the room, so it does not have the above drawbacks, but since the surface area where it can evaporate is limited, the rate of humidification (evaporation) is slow and it is not suitable for mass humidification. Since the heating method is clean humidification that does not generate particulates, it is suitable for clean room humidification in the semiconductor manufacturing and biotech fields. In order to improve the humidification speed of the heating method, when the heating temperature is raised, the water boils and a large amount of fine water droplets are generated when the bubbles burst, causing the same problem as the former.
本発明の目的は、大容量で、かつ、クリーンな加湿がで
きる加湿方法と装置を得ることにある。An object of the present invention is to provide a humidification method and device that can perform large-capacity and clean humidification.
上記目的は、水を微粒化し、発生水滴を高温の空気で直
接々触加熱し、発生した水蒸気群を疎水性多孔質材で濾
過することにより達成される。The above object is achieved by atomizing water, directly contacting and heating the generated water droplets with high-temperature air, and filtering the generated water vapor through a hydrophobic porous material.
蒸発速度と蒸発量を増大して大量加湿を可能にするには
、水を微細水滴にして蒸発できる表面積を増し、かつ、
水滴への熱の移動を向上させるために、高温のクリーン
空気と水滴を直接々触させる。また、水滴の蒸発で発生
する微粒子や未蒸発水滴は、水をはじく性質をもつ疎水
性多孔質材を通過させることで完全除去できるので、水
蒸気のみのクリーン加湿が可能となる。In order to increase the evaporation rate and amount to enable mass humidification, water can be made into fine droplets to increase the surface area for evaporation, and
Direct contact between hot clean air and water droplets to improve heat transfer to the water droplets. In addition, fine particles and unevaporated water droplets generated by evaporation of water droplets can be completely removed by passing through a hydrophobic porous material that repels water, making it possible to perform clean humidification using only water vapor.
以下、本発明の基本となるシステムフローを第１図に示
す。水１１を微細水滴１２にする霧化部１と、高温の空
気２２を発生させる加熱部４と、高温空気２２で水滴１
２を蒸発させる気化部２と、発生した微粒子と未蒸発水
滴を除去する疎水性多孔質材のフィルタ部３から構成さ
れる。加熱部４の加熱は電気ヒータや水蒸気による間接
加熱が発生高温空気の汚染防止の点で有利であり、霧化
部１はノズルを用いて水を直接加圧噴霧する方式や、高
速空気で噴霧する方式の他に、超音波等の振動噴霧方式
が適用できる。気化部２は、高温空気２２と発生水滴１
２を均一に混合させる構造が必要で、フィルタ部３に用
いる疎水性多孔質材にはポリテトラフルオロエチレン、
ポリプロピレン、弗素樹脂の多孔性のものが滴しており
、微粒子の捕捉能力は、用いるクリーンルームのクラス
により異なるが、粒径０．１ μの微粒子が除去でき
るのが望ましい。The system flow that is the basis of the present invention is shown in FIG. 1 below. An atomizing unit 1 that converts water 11 into fine water droplets 12, a heating unit 4 that generates high-temperature air 22, and a high-temperature air 22 that converts water into fine water droplets 12.
2, and a filter section 3 made of a hydrophobic porous material that removes generated fine particles and unevaporated water droplets. The heating section 4 can be heated by indirect heating using an electric heater or water vapor, which is advantageous in terms of preventing contamination of high-temperature air.The atomizing section 1 can be heated by direct pressure spraying of water using a nozzle or by high-velocity air spraying. In addition to this method, a vibrating spray method such as ultrasonic waves can be applied. The vaporization section 2 contains high-temperature air 22 and generated water droplets 1.
2 is required to be mixed uniformly, and the hydrophobic porous material used for the filter section 3 contains polytetrafluoroethylene, polytetrafluoroethylene,
Porous polypropylene or fluororesin is dripped, and the ability to capture fine particles varies depending on the class of clean room used, but it is desirable to be able to remove fine particles with a particle size of 0.1 μm.
本発明のポイン１−は加湿器に疎水性多孔質材を用いた
点にあるが、一般のガス中の不純物粒子の除去に用いる
フィルタ材として、特に、疎水性は必要ではない。一般
のガスフィルタでは微粒子除去に静電気を加えて除去す
る方策があるが、特に、疎水性に限定されない。しかし
、本発明の構成に必要なフィルタは、空気中に多量の水
蒸気を含んだ湿り空気の中の微粒子と未蒸発水滴を除去
することにある。つまり、フィルタが親水性では、多孔
質材表面しこ濾過された水滴が材料表面を薄膜でコーテ
ィングし、その薄膜に微粒子が溶解して、多孔性材表面
の多孔性を妨害し、空気の流通性を低下させてしまうた
め、濾過ができなくなる。従って、加湿器には、特に疎
水性多孔質材を用いると、多孔質材表面で濾過された水
滴は膜状にならず適状のため、フィルタ面をふさぐこと
がなく、また、微粒子は水滴に溶解するが、適状のため
フィルタ面を汚染することがないので濾過が目詰りなく
持続できる。Although the point 1- of the present invention is that a hydrophobic porous material is used in the humidifier, hydrophobicity is not particularly necessary as a filter material used for removing impurity particles in general gas. In general gas filters, there is a method of removing particulates by adding static electricity, but this is not particularly limited to hydrophobicity. However, the filter necessary for the configuration of the present invention is to remove particulates and unevaporated water droplets from humid air containing a large amount of water vapor. In other words, if the filter is hydrophilic, the water droplets filtered through the surface of the porous material will coat the material surface with a thin film, and fine particles will dissolve in the thin film, interfering with the porosity of the porous material surface and allowing air to flow through the filter. filtration becomes impossible. Therefore, if a hydrophobic porous material is used in a humidifier, the water droplets filtered on the surface of the porous material will not form a film and will not block the filter surface. However, because it is in a suitable state, it does not contaminate the filter surface, allowing filtration to continue without clogging.
本発明の基本システムの一実施例を第２図に示すが、水
タンク５１の水１１が少量づつ超音波振動部５２へ供給
され微細水滴を発生させる。水タンク５１の下部に空気
加熱部４があり、ファン５３で空気２１が供給され加熱
後空気ダクト５４をへて超音波振動部５２へ達し、水滴
と直接々触して蒸発させる。超音波振動部５２の上方に
疎水性多孔質材５５で構成されるフィルタ部３があり、
その内部が気化部２を構成している。気化部２で蒸発に
伴って発生した微粒子と未蒸発水滴は多孔質材５５で除
去され水蒸気３１のみが系外へ放出される。本実施例で
は空気加熱部４が水タンク５１の下部にあるため、加熱
部の放熱は水タンクで回収されるので熱効率が良く省エ
ネルギ性がある。大容量加湿タイプでは水タンクを別置
もしくは連続通水タイプにする方が有利である。An embodiment of the basic system of the present invention is shown in FIG. 2, in which water 11 in a water tank 51 is supplied little by little to an ultrasonic vibrator 52 to generate fine water droplets. There is an air heating section 4 at the bottom of the water tank 51, where air 21 is supplied by a fan 53, heated, passes through an air duct 54, reaches an ultrasonic vibration section 52, and comes into direct contact with water droplets to evaporate them. There is a filter section 3 made of a hydrophobic porous material 55 above the ultrasonic vibrating section 52,
The inside constitutes the vaporization section 2. Fine particles and unevaporated water droplets generated during evaporation in the vaporization section 2 are removed by the porous material 55, and only the water vapor 31 is released to the outside of the system. In this embodiment, since the air heating section 4 is located below the water tank 51, the heat radiated from the heating section is recovered by the water tank, resulting in good thermal efficiency and energy saving. For large-capacity humidifying types, it is more advantageous to have a separate water tank or a continuous water flow type.
第３図に高温空気２２を用いて水１１を霧化すると同時
に蒸発気化させた実施例を示す。加熱部４で加熱された
高温空気２２が二流体ノズル６１に供給され、そこで水
１１を吸引霧化させると同時に発生水滴と高温空気との
直接々触により瞬時に蒸発気化させるため、気化部は不
要となる。ノズル６１の上方に疎水性多孔質材５５で構
成されろフィルタ部３があり、そこで発生した微粒子３
２や未蒸発水滴３３が除去され水蒸気３１のみが放出さ
れ加湿に利用される。本実施例では気化部が不要のため
コンパクト化が可能で、加湿容量により、第３図のよう
にフィルタ部を複数用いれば大容量化できる。FIG. 3 shows an embodiment in which water 11 is atomized and evaporated simultaneously using high-temperature air 22. The high-temperature air 22 heated by the heating section 4 is supplied to the two-fluid nozzle 61, where the water 11 is suctioned and atomized, and at the same time, the generated water droplets are brought into direct contact with the high-temperature air to instantaneously evaporate and vaporize. No longer needed. There is a filter part 3 made of a hydrophobic porous material 55 above the nozzle 61, and the fine particles 3 generated therein are
2 and unevaporated water droplets 33 are removed, and only water vapor 31 is released and used for humidification. Since this embodiment does not require a vaporizing section, it can be made compact, and the humidifying capacity can be increased by using a plurality of filter sections as shown in FIG.
本発明によれば、大量加湿を可能にし、蒸発後の発生微
粒子や未蒸発水滴を外部へ出さずに水蒸気のみでクリー
ン加湿ができる。According to the present invention, a large amount of humidification is possible, and clean humidification can be performed using only water vapor without releasing the fine particles generated after evaporation or unevaporated water droplets to the outside.
第１図は本発明の一実施例のフローシート、第２図は本
発明の基本構造を示す実施例の構造図、第３図は本発明
のコンパクトタイプ加湿器の実施例を示す構造図である
。
１・・・霧化部、２・・・気化部、３・・フィルタ部、
４・・加熱部、５５・・・疎水性多孔質材。Fig. 1 is a flow sheet of an embodiment of the present invention, Fig. 2 is a structural diagram of an embodiment showing the basic structure of the present invention, and Fig. 3 is a structural diagram showing an embodiment of a compact type humidifier of the present invention. . 1... Atomization part, 2... Vaporization part, 3... Filter part,
4... Heating section, 55... Hydrophobic porous material.
Claims (1)
粒化及び加熱蒸発工程で発生した水蒸気を疎水性多孔質
材を通した後、放出させることを特徴とする加湿方法。 ２、特許請求の範囲第１項において、 加熱手段に高温のクリーン空気と水滴を直接接触させた
ことを特徴とする加湿方法。 ３、特許請求の範囲第１項において、 水の微粒化と加熱蒸発手段として、高温クリーン空気を
用いて水を微粒化すると同時に加熱蒸発させることを特
徴とする加湿方法。[Claims] 1. A method of humidifying water by heating and evaporating it, which is characterized in that water vapor generated in the atomization of water and heating and evaporation process is released after passing through a hydrophobic porous material. Method. 2. The humidification method according to claim 1, characterized in that the heating means is brought into direct contact with high temperature clean air and water droplets. 3. A humidification method according to claim 1, characterized in that the water is atomized and heated and evaporated at the same time using high-temperature clean air as the water atomization and heating evaporation means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62104295A JPS63271047A (en) | 1987-04-30 | 1987-04-30 | Humidifying method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62104295A JPS63271047A (en) | 1987-04-30 | 1987-04-30 | Humidifying method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63271047A true JPS63271047A (en) | 1988-11-08 |
Family
ID=14376935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62104295A Pending JPS63271047A (en) | 1987-04-30 | 1987-04-30 | Humidifying method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63271047A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006162097A (en) * | 2004-12-02 | 2006-06-22 | Toyota Central Res & Dev Lab Inc | Humidifier |
| ITUD20090209A1 (en) * | 2009-11-19 | 2011-05-20 | Longhi Appliances S R L Con Soc Io Unico De | EQUIPMENT FOR HUMIDIFYING AN ENVIRONMENT |
| CN114877444A (en) * | 2022-04-21 | 2022-08-09 | 珠海格力电器股份有限公司 | Humidification structure, humidification purification equipment and humidification control method |
-
1987
- 1987-04-30 JP JP62104295A patent/JPS63271047A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006162097A (en) * | 2004-12-02 | 2006-06-22 | Toyota Central Res & Dev Lab Inc | Humidifier |
| JP4734904B2 (en) * | 2004-12-02 | 2011-07-27 | 株式会社豊田中央研究所 | Humidifier |
| ITUD20090209A1 (en) * | 2009-11-19 | 2011-05-20 | Longhi Appliances S R L Con Soc Io Unico De | EQUIPMENT FOR HUMIDIFYING AN ENVIRONMENT |
| WO2011061604A3 (en) * | 2009-11-19 | 2011-07-14 | De' Longhi Appliances Srl Con Unico Socio | Air humidifier |
| CN114877444A (en) * | 2022-04-21 | 2022-08-09 | 珠海格力电器股份有限公司 | Humidification structure, humidification purification equipment and humidification control method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5425902A (en) | Method for humidifying air | |
| JP3907255B2 (en) | Air washer | |
| US20040020361A1 (en) | Method and apparatus for filtering an air stream using an aqueous-froth together with nucleation | |
| JP2007237140A (en) | Desalination device | |
| JPS63271047A (en) | Humidifying method | |
| JP2007245014A (en) | Desalination device | |
| JP3179700B2 (en) | Gas impurity removal equipment | |
| EP1545745B1 (en) | Method and apparatus for filtering an air stream using an aqueous-froth together with nucleation | |
| EP1547664B1 (en) | System and device for mass transfer and elimination of contaminants | |
| US20230242410A1 (en) | Method and apparatus for producing carbonate salts | |
| JP3550709B2 (en) | Method for producing exhaust gas purifying catalyst | |
| JPH0439367B2 (en) | ||
| JPS6138644A (en) | Dust collector | |
| JPS63119832A (en) | Method and apparatus for air-conditioning | |
| JPS6169961A (en) | Nozzle for apparatus for manufacturing thin film by atomization | |
| JP3108867B2 (en) | Electric field-free air cleaning method and apparatus | |
| JP3290921B2 (en) | Air conditioning method and apparatus therefor | |
| JPH03288510A (en) | Air purification, gasification and static prevention device | |
| JP2984252B1 (en) | Component concentrator | |
| JPS62250926A (en) | Exhaust gas treatment method and device | |
| JPS63150540A (en) | Air conditioner with desalination device | |
| JPH10311691A (en) | Gas cooling method and apparatus | |
| RU2144840C1 (en) | Evaporator-condenser unit | |
| JPS6283019A (en) | Dust collector | |
| JP2001087618A (en) | Harmful gas removing apparatus |