JPS63266745A - Visual field shifting device for sample image - Google Patents
Visual field shifting device for sample imageInfo
- Publication number
- JPS63266745A JPS63266745A JP62101246A JP10124687A JPS63266745A JP S63266745 A JPS63266745 A JP S63266745A JP 62101246 A JP62101246 A JP 62101246A JP 10124687 A JP10124687 A JP 10124687A JP S63266745 A JPS63266745 A JP S63266745A
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- Prior art keywords
- movement
- field
- view
- stage
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000000007 visual effect Effects 0.000 title abstract description 14
- 238000010894 electron beam technology Methods 0.000 claims abstract description 30
- 230000003287 optical effect Effects 0.000 claims abstract 4
- 239000002245 particle Substances 0.000 claims 2
- 238000000034 method Methods 0.000 abstract 1
- 230000003321 amplification Effects 0.000 description 8
- 238000003199 nucleic acid amplification method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、走査型電子顕微鏡等の装置に用いられる試料
像の視野移動装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a field-of-view moving device for a sample image used in an apparatus such as a scanning electron microscope.
（従来の技術）
従来、走査型電子顕微鏡等の装置に於いて、通常、ジョ
イスティックやトラックボール等を用いてなされるステ
ージの移動あるいは走査用電子ビーム等の偏向による視
野移動指示器の指示方向は、ステージのＸ、Ｙ軸の方向
に対応しており、例えばジョイスティックを左に倒すと
ステージが−Ｘ方向に移動するか、あるいは電子ビーム
の走査領域を電気的にＸ方向に移動することによって試
料像が表示器上で左方向に移動する。同様にジョイステ
イクを手前に倒すとステージが−Ｙ方向に移動するか、
あるいは電子ビームの走査領域を電気的にＹ方向に移動
することによって試料像がＣＲＴ上で下方に移動するよ
うな構造になっている。(Prior Art) Conventionally, in devices such as scanning electron microscopes, the direction indicated by a visual field movement indicator is usually determined by moving the stage using a joystick, trackball, etc., or by deflecting a scanning electron beam, etc. , corresponds to the X and Y axes of the stage. For example, by tilting the joystick to the left, the stage moves in the -X direction, or by electrically moving the scanning area of the electron beam in the The image moves to the left on the display. Similarly, if you tilt the joystick toward you, the stage will move in the -Y direction, or
Alternatively, the sample image is moved downward on the CRT by electrically moving the scanning area of the electron beam in the Y direction.
一方、試料をステージ上に設置する試料設置台は、従来
、ステージと同一面内で回転可能な機構が付いたものが
多かった。しかし、近年にあっては電子ビームの試料面
上での走査領域を電気的に回転させることによって、試
料設置台は固定したままで、機械的に回転させた場合と
同様に試料像を回転することのできる装置が開発されて
おり、この様な装置は試料台の構造が簡単になるため、
製造コストを下げられるというメリットがある。On the other hand, conventional sample mounting tables for placing samples on a stage have often been equipped with a mechanism that allows them to rotate within the same plane as the stage. However, in recent years, by electrically rotating the scanning area of the electron beam on the sample surface, it is possible to rotate the sample image in the same way as if it were mechanically rotated, while the sample mounting table remains fixed. A device has been developed that allows for
This has the advantage of reducing manufacturing costs.
（発明が解決しようとする問題点）
しかしながら、電子ビームの走査領域を電気的に回転さ
せて試料像を表示した場合には、ステージ移動による機
械的な視野移動、あるいは電子ビーム偏向による電気的
な視野移動を行なうと、視野移動指示器の指示方向とＣ
ＲＴ上で試料像が実際に移動する方向が合わなくなると
いう問題点が生ずる。(Problems to be Solved by the Invention) However, when displaying a sample image by electrically rotating the scanning area of the electron beam, mechanical field of view movement due to stage movement or electrical movement due to electron beam deflection is required. When you move the field of view, the direction indicated by the field of view movement indicator and C
A problem arises in that the directions in which the sample images actually move on RT do not match.
この問題を第２図及び第３図に従って具体的に説明する
と次のようになる。This problem will be explained in detail with reference to FIGS. 2 and 3 as follows.
第２図はステージ１０上に設置された試料９上を電子ビ
ームで走査する状態を示しており、電子ビームの偏向方
向をθだけ回転させた点線で囲まれた矩形の領域３０を
観察するものとする。ここで３２はステージのＸ、Ｙ座
標系である。FIG. 2 shows a state in which an electron beam is scanned over a sample 9 placed on a stage 10, and a rectangular area 30 surrounded by a dotted line with the deflection direction of the electron beam rotated by θ is observed. shall be. Here, 32 is the X, Y coordinate system of the stage.
第３図は第２図の領域３０を走査したときのＣＲＴ上の
表示像４０を視野移動指示器としてのジョイスティック
２１と共に示す。FIG. 3 shows a display image 40 on a CRT when the area 30 in FIG. 2 is scanned, together with a joystick 21 as a visual field movement indicator.
今、第２図、第３図に於ける円形の観察希望パターン３
４をＣＲＴ画面の中心に移動して観察したい場合、観察
者はパターン３４が画面の右側に有ることから左方向に
移動すべく第３図のジョイスイック２゛１を矢印で示す
左方向に倒す。ジョイスティック２１はステージの駆動
機構に信号を送り、ステージ１０を第２図のステージ移
動方向３６で示す−Ｘ方向に移動する。その結果、ＣＲ
Ｔ上の試料像４０は第３図の矢印４２の方向に移動する
ことになり、観察者が意図したものとは異なった方向に
なってしまう。Now, the desired circular observation pattern 3 in Figures 2 and 3
4 to the center of the CRT screen, the observer should move the joy switch 2'1 in the left direction indicated by the arrow in Figure 3 to move it to the left since the pattern 34 is on the right side of the screen. . Joystick 21 sends a signal to the stage drive mechanism to move stage 10 in the -X direction indicated by stage movement direction 36 in FIG. As a result, CR
The sample image 40 on T will move in the direction of arrow 42 in FIG. 3, resulting in a direction different from that intended by the observer.
即ち、観察者がＣＲＴ表示器を見ながら視野移動指示器
を操作した方向とＣＲＴ表示器上の試料像の移動方向が
一致しない。That is, the direction in which the observer operates the visual field movement indicator while looking at the CRT display does not match the direction in which the sample image on the CRT display moves.
これは電子ビームによる走査領域をステージの座標系に
対して回転させたことで、視野移動指示器の指示方向（
ステージ座標系と同一）とＣＲＴ表示器上の座標系が回
転して方向が合わなくなったためである。このことはス
テージ移動による機械的視野移動に限らず電子ビーム偏
向による電気的視野移動の場合も同様に起こる。This is achieved by rotating the scanning area by the electron beam with respect to the coordinate system of the stage, so that the direction indicated by the field of view movement indicator (
This is because the coordinate system (same as the stage coordinate system) and the coordinate system on the CRT display have rotated and their directions no longer match. This phenomenon occurs not only when moving the mechanical field of view by moving the stage, but also when moving the field of view electrically by deflecting the electron beam.
（問題点を解決するための手段）
本発明は、このような従来の問題点に鑑みてなされたも
ので、電子ビーム走査領域の回転角に無関係に、視野移
動指示器の指示方向とＣＲＴ表示器上の座標系を常に一
致させるようにして操作性を向上するようにした試料像
の視野移動装置を提供することを目的とする。(Means for Solving the Problems) The present invention has been made in view of the above-mentioned problems of the conventional art. It is an object of the present invention to provide a field-of-view moving device for a sample image, which improves operability by always matching the coordinate systems on the instrument.
この目的を達成するため本発明にあっては、電子ビーム
による走査領域をステージの座標系に対して回転させて
も不都合が起きないように、視野移動指示器からの視野
移動信号を移動方向補正手段により電子ビーム走査領域
の回転角に応じて補正した後、機械的あるいは電気的な
視野移動手段に伝えて視野移動を行うようにしたもので
ある。In order to achieve this objective, the present invention corrects the movement direction of the visual field movement signal from the visual field movement indicator so that no problem occurs even if the scanning area by the electron beam is rotated with respect to the coordinate system of the stage. After correction is made according to the rotation angle of the electron beam scanning area by the means, the correction is transmitted to a mechanical or electrical field of view moving means to move the field of view.
（作用）
このような構成を備えた本発明の試料像の視野移動装置
によれば、電子ビームによる走査領域がステージ座標系
統に対し回転していても、ＣＲＴ表示器上の座標系に基
づいた視野移動指示器の操作方向に視野を移動するよう
に機械的又は電気的電子ビーム偏向による走査領域の移
動が行なわれ、ｖＡ察者が意図した方向に試料像を移動
することができる。(Function) According to the field-of-view moving device for a specimen image of the present invention having such a configuration, even if the scanning area by the electron beam is rotated with respect to the stage coordinate system, The scanning area is moved by mechanical or electrical electron beam deflection so as to move the field of view in the operating direction of the field of view movement indicator, and the sample image can be moved in the direction intended by the vA observer.
（実施例）
第１図は走査型電子顕微鏡を例にとって本発明の一実施
例を示した説明図である。(Example) FIG. 1 is an explanatory diagram showing an example of the present invention using a scanning electron microscope as an example.
第１図において、１は電子銃、２，４は電子ビーム制限
用のアパーチャ、３は電子ビームを大きく変更してアパ
ーチャ４により遮ることにより遮断するブランカ−１５
はＸ方向用変更器、６はＹ方向用偏向器、７は対物レン
ズ、８はディテクター、９は観察試料、１０はＸ、Ｙ方
向に移動自在なステージである。In FIG. 1, 1 is an electron gun, 2 and 4 are apertures for limiting the electron beam, and 3 is a blanker 15 that greatly changes the electron beam and blocks it by blocking it with the aperture 4.
6 is a deflector for the X direction, 6 is a deflector for the Y direction, 7 is an objective lens, 8 is a detector, 9 is an observation sample, and 10 is a stage movable in the X and Y directions.
また、１１は電子銃制御回路、１２はブランキング制御
回路、１３はＸＹ走査信号発生回路、１４はＸ方向走査
信号増幅回路、１５はＹ方向走査信号増幅回路、１６は
対物レンズ制御回路、１７は画像信号増幅回路、１８は
ＣＲ７表示器、１９はステージ駆動回路、２１は視野移
動指示器である。Further, 11 is an electron gun control circuit, 12 is a blanking control circuit, 13 is an XY scanning signal generation circuit, 14 is an X direction scanning signal amplification circuit, 15 is a Y direction scanning signal amplification circuit, 16 is an objective lens control circuit, 17 18 is a CR7 display, 19 is a stage drive circuit, and 21 is a visual field movement indicator.
このような走査型電子顕微鏡の構成は従来と同じである
が、これに加えて本発明にあっては、視野移動指示器２
１とステージ駆動回路１９の間に移動方向補正回路２０
を新たに設けている。The configuration of such a scanning electron microscope is the same as the conventional one, but in addition to this, the present invention has a field movement indicator 2.
A moving direction correction circuit 20 is provided between the stage drive circuit 1 and the stage drive circuit 19.
has been newly established.
第１図の実施例をその作用と共に詳細に説明すると、電
子銃１から射出されアパーチャ２．４を通り扱けた電子
ビームはＸ方向偏向器５及びＹ方向偏向器６で変更され
た後、対物レンズ７で集束されて観察試料９にあたる。To explain the embodiment of FIG. 1 in detail along with its operation, the electron beam emitted from the electron gun 1 and passed through the aperture 2.4 is changed by the X-direction deflector 5 and the Y-direction deflector 6, and then It is focused by a lens 7 and hits an observation sample 9.
このとき観察試料９から発生する２次電子或いは反射電
子はディテクター８に入って電気信号に変換され、画像
信号増幅回路１７でＣＲＴ表示器１８の入力に必要なレ
ベルまで増幅され、ＸＹ走査信号発生回路１３からの電
子ビームの偏向走査に同期した水平・垂直掃引信号と共
にＣＲＴ上に試ｙＩ４ｍを形成する。At this time, the secondary electrons or reflected electrons generated from the observation sample 9 enter the detector 8 and are converted into electrical signals, which are amplified by the image signal amplification circuit 17 to the level required for input to the CRT display 18 to generate an XY scanning signal. A sample yI4m is formed on the CRT together with horizontal and vertical sweep signals synchronized with the deflection scanning of the electron beam from the circuit 13.
一方、ＸＹ走査信号発生回路１３はＣＲＴ表示器１８内
の水平及び垂直方向偏向器をドライブする鋸歯状波掃引
信号）−１，Ｖと観察試料９における電子ビーム走査領
域の回転角支持信号θと更に電子顕微鏡のＸ、Ｙ方向偏
向器５，６をドライブする走査信号Ｘ、Ｙを発生し、鋸
歯状波掃引信号Ｈ２ＶをＣＲＴ表示器１８に、走査信＠
Ｘ、ＹをそれぞれＸ、Ｙ方向走査信号増幅器１４．１５
に、更に回転角指示信号θを移動方向補正回路２０に出
力する。On the other hand, the XY scanning signal generation circuit 13 generates a sawtooth wave sweep signal (-1, V) which drives the horizontal and vertical deflectors in the CRT display 18 and a rotation angle support signal θ of the electron beam scanning area in the observation sample 9. Furthermore, it generates scanning signals X and Y that drive the X and Y direction deflectors 5 and 6 of the electron microscope, and sends a sawtooth wave sweep signal H2V to the CRT display 18 and sends the scanning signal @
X and Y direction scanning signal amplifiers 14.15
Furthermore, a rotation angle instruction signal θ is output to the movement direction correction circuit 20.
ここで電子顕微鏡のＸ方向、Ｙ方向の偏向信号Ｘ、Ｙは
垂直及び水平掃引信号Ｈ，Ｖ及び回転角指示信号θとの
間で次式で表わされる関係をもつ。Here, the deflection signals X and Y in the X and Y directions of the electron microscope have a relationship expressed by the following equation with the vertical and horizontal sweep signals H and V and the rotation angle instruction signal θ.
この第（１）式で与えられる走査信号Ｘ、Ｙは、Ｘ、Ｙ
方向走査信号増幅回路１４．１５で電子顕微鏡の観察倍
率に応じた振幅に増幅され、Ｘ、 Ｙ方向偏向器５，６
を駆動する。その結果、例えば第２図に示したように試
ＦＩ９上のθだけ傾いた領域３０が電子ビームで走査さ
れ、第３図４０に示すような試料像がＣＲＴ上に表示さ
れる。The scanning signals X and Y given by this equation (1) are
The direction scanning signal amplification circuits 14 and 15 amplify the amplitude according to the observation magnification of the electron microscope, and the X and Y direction deflectors 5 and 6
to drive. As a result, for example, as shown in FIG. 2, a region 30 tilted by θ on the sample FI 9 is scanned by the electron beam, and a sample image as shown in FIG. 3 is displayed on the CRT.
このようなステージ座標系３２に対し、θだけ傾いた領
域３０の電子ビーム走査による表示状態で視野移動指示
器２１を操作すると、操作方向に応じてＸＯ，ＹＯとな
る移動信号が移動方向補正回路２０に送られる。移動方
向補正回路２０はこのときＸＹ走査信号発生回路１３よ
り受けている回転角指示信号θによって次式で示す移動
信号Ｘｉ 、Ｙｌに補正する。When the field of view movement indicator 21 is operated in a state where the area 30 tilted by θ is displayed by electron beam scanning with respect to the stage coordinate system 32, a movement signal that becomes XO or YO depending on the operation direction is sent to the movement direction correction circuit. Sent to 20th. The movement direction correction circuit 20 corrects movement signals Xi and Yl expressed by the following equations using the rotation angle instruction signal θ received from the XY scanning signal generation circuit 13 at this time.
移動方向補正回路２０において前記第（２）式に従って
補正された移動信号ＸＩ 、Ｙｌは、ステージ駆動回路
１９にステージ駆動信号として与えられ、ステージ駆動
回路１９は例えばモータ駆動等によりステージ１０を補
正された移動信号Ｘ１゜Ｙｌの大きさに対応した速さで
駆動し、その結果、ステージ１０は視野移動指示器２１
による指示方向に対し回転角指示信号θにより定まる角
度だけ傾いたθ方向へ移動するようになる。The movement signals XI and Yl corrected according to the equation (2) in the movement direction correction circuit 20 are given to the stage drive circuit 19 as stage drive signals, and the stage drive circuit 19 corrects the stage 10 by, for example, driving a motor. As a result, the stage 10 is driven at a speed corresponding to the magnitude of the movement signal X1°Yl.
It moves in the θ direction that is tilted by the angle determined by the rotation angle instruction signal θ with respect to the direction indicated by the rotation angle instruction signal θ.
従って、ＣＲＴ表示器１８に表示している試料像はＣＲ
７表示器１８上の表示座標系に従って視野移動指示器２
１で指示した方向に移動するようになる。Therefore, the sample image displayed on the CRT display 18 is CR
7 Visual field movement indicator 2 according to the display coordinate system on display 18
It will move in the direction specified in step 1.
尚、上記の実施例にあっては移動方向補正回路２０で前
記第（２）式に従って補正された移動信号ｘｉ 、Ｙｌ
をステージ駆動回路１９に与えてステージ１０の移動に
より機械的に視野移動を行なっているが、移動方向補正
回路２０で補正された移動信＠ＸＩ、Ｙｌを、ＸＹ走査
信号発生回路１３からのＸ、Ｙ方向偏向信号Ｘ、Ｙと合
成してＸ、Ｙ方向走査信号増幅回路１４．１５に入力し
、Ｘ、Ｙ方向偏向器５．６による電子ビームの走査位置
の移動でＣＲ７表示器１８上の座標系に従って視野移動
指示器２１で指示した方向に試料像を移動するようにし
ても良い。In the above embodiment, the movement signals xi, Yl corrected by the movement direction correction circuit 20 according to the equation (2) above are
is applied to the stage drive circuit 19 to mechanically move the field of view by moving the stage 10. However, the movement signals @XI, Yl corrected by the movement direction correction circuit 20 are applied to the , Y-direction deflection signals X, Y are combined and inputted to the X- and Y-direction scanning signal amplification circuit 14.15. The sample image may be moved in the direction indicated by the visual field movement indicator 21 according to the coordinate system.
（発明の効果）
以上説明したように本発明によれば電子ビームによる走
査領域をステージの座標系に対し回転させていても、Ｃ
ＲＴ表示器上に表示された試料像の移動方向が視野移動
指示器で指示した方向と常に一致するため、観察者は電
子ビーム走査領域の回転を全く意識せずにＣＲＴ表示器
上の試料像だけに注目し、ＣＲＴ上の座標系に従って視
野移動指示器を操作することができる。このため本発明
にあっては、ＣＲＴ表示器を見ながら、視野移動指示器
を操作して大きな試料の中から観察したいパターンを探
し出す際の操作性が著しく向上し、その結果、試料を観
察するための時間を大幅に短縮することができる。(Effects of the Invention) As explained above, according to the present invention, even if the scanning area by the electron beam is rotated with respect to the coordinate system of the stage, C
Since the moving direction of the sample image displayed on the RT display always matches the direction indicated by the field of view movement indicator, the observer can move the sample image on the CRT display without being aware of the rotation of the electron beam scanning area. The visual field movement indicator can be operated in accordance with the coordinate system on the CRT. Therefore, in the present invention, the operability when searching for a pattern to be observed in a large sample by operating the field of view movement indicator while looking at the CRT display is significantly improved, and as a result, it is possible to observe the sample. The time required for this can be significantly reduced.
第１図は走査型電子顕微鏡を例にとって本発明の一実施
例を示した説明図、第２図は試料面の電子ビーム走査領
域を示した説明図、第３図は第２図のビーム走査による
ＣＲＴ表示画面の説明図である。
１：電子銃
２．４ニアパーチヤ
３ニブランカー
５：Ｘ方向偏向器
６：Ｙ方向偏向器
７：対物レンズ
８：ディテクター
９：観察試料
１０：ステージ
１１：電子銃制御回路
１２ニブランキング制御回路
１３：ＸＹ走査信丹発生回路
１４：Ｘ方向走査信号増幅回路
１５：Ｙ方向走査信号増幅回路
１７：画像信号増幅回路
１Ｂ ：ＣＲＴ表示器
１９：ステージ駆動回路
２０：移動方向補正回路
２１：視野移動指示器（ジョイスティック、トラックボ
ール）Fig. 1 is an explanatory diagram showing one embodiment of the present invention using a scanning electron microscope as an example, Fig. 2 is an explanatory diagram showing the electron beam scanning area on the sample surface, and Fig. 3 is an explanatory diagram showing the electron beam scanning area of the sample surface. FIG. 1: Electron gun 2.4 Near aperture 3 Ni blanker 5: X direction deflector 6: Y direction deflector 7: Objective lens 8: Detector 9: Observation sample 10: Stage 11: Electron gun control circuit 12 Ni blanking control circuit 13: XY Scanning signal generation circuit 14: X direction scanning signal amplification circuit 15: Y direction scanning signal amplification circuit 17: Image signal amplification circuit 1B: CRT display 19: Stage drive circuit 20: Movement direction correction circuit 21: Visual field movement indicator ( joystick, trackball)
Claims (3)
度を持った矩形の領域を２次元的に走査する電子光学系
と； 該電子光学系の２次元走査によって試料から得られる信
号を前記荷電粒子線による試料面の走査と同期、あるい
は等価的に同期した掃引により陰極線管（ＣＲＴ）上等
に試料像として表示する表示器と； 該表示器上での試料像の視野移動を指示する視野移動指
示器と； 前記視野移動指示器によって指示された移動信号を、前
記電子ビーム等による試料面走査時の走査領域回転角度
に応じて補正する移動方向補正手段と； 該移動方向補正手段によって補正された移動信号によっ
て前記試料像の視野を移動させる視野移動制御手段と； を備えたことを特徴とする試料像の視野移動装置。(1) An electron optical system that two-dimensionally scans a rectangular area at an arbitrary angle on the sample surface with a charged particle beam such as an electron beam; and a signal obtained from the sample by the two-dimensional scanning of the electron optical system. a display device that displays the sample image on a cathode ray tube (CRT) or the like by synchronizing the scanning of the sample surface with the charged particle beam, or equivalently synchronizing the sweep; a field of view movement indicator for instructing; a movement direction correction means for correcting a movement signal instructed by the field of view movement indicator in accordance with a scanning area rotation angle when the sample surface is scanned by the electron beam or the like; said movement direction correction A field-of-view moving device for a sample image, comprising: a field-of-view movement control means for moving the field of view of the sample image according to a movement signal corrected by the means.
に移動するステージ移動手段を含み前記移動方向補正手
段で補正された移動信号により前記移動ステージ手段を
駆動して機械的に視野移動を行なうことを特徴とする特
許請求の範囲第１項記載の試料像の視野移動装置。(2) The field of view movement control means includes a stage movement means for mechanically moving the sample position, and drives the movement stage means by the movement signal corrected by the movement direction correction means to mechanically move the field of view. A field-of-view moving device for a sample image according to claim 1, characterized in that:
で補正された移動信号により前記電子光学系を偏向駆動
して電気的に視野移動を行うことを特徴とする特許請求
の範囲第１項記載の試料像の視野移動装置。(3) The field of view movement control means electrically moves the field of view by deflecting and driving the electron optical system using the movement signal corrected by the movement direction correction means. The device for moving the field of view of the sample image described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62101246A JPS63266745A (en) | 1987-04-24 | 1987-04-24 | Visual field shifting device for sample image |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62101246A JPS63266745A (en) | 1987-04-24 | 1987-04-24 | Visual field shifting device for sample image |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63266745A true JPS63266745A (en) | 1988-11-02 |
Family
ID=14295546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62101246A Pending JPS63266745A (en) | 1987-04-24 | 1987-04-24 | Visual field shifting device for sample image |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63266745A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013065511A (en) * | 2011-09-20 | 2013-04-11 | Hitachi High-Tech Science Corp | Composite charged particle beam device |
| JPWO2020179102A1 (en) * | 2019-03-05 | 2021-12-16 | 株式会社島津製作所 | Analysis equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58178949A (en) * | 1982-04-15 | 1983-10-20 | Jeol Ltd | Sample image display unit |
-
1987
- 1987-04-24 JP JP62101246A patent/JPS63266745A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58178949A (en) * | 1982-04-15 | 1983-10-20 | Jeol Ltd | Sample image display unit |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013065511A (en) * | 2011-09-20 | 2013-04-11 | Hitachi High-Tech Science Corp | Composite charged particle beam device |
| JPWO2020179102A1 (en) * | 2019-03-05 | 2021-12-16 | 株式会社島津製作所 | Analysis equipment |
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