JPS63262455A - Vacuum carburization furnace and its operating method - Google Patents

Vacuum carburization furnace and its operating method

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Publication number
JPS63262455A
JPS63262455A JP9833887A JP9833887A JPS63262455A JP S63262455 A JPS63262455 A JP S63262455A JP 9833887 A JP9833887 A JP 9833887A JP 9833887 A JP9833887 A JP 9833887A JP S63262455 A JPS63262455 A JP S63262455A
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JP
Japan
Prior art keywords
heated
heating chamber
vacuum
door
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9833887A
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Japanese (ja)
Other versions
JPH0514025B2 (en
Inventor
Michio Sugiyama
杉山 道生
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Individual
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Individual
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Priority to JP9833887A priority Critical patent/JPS63262455A/en
Publication of JPS63262455A publication Critical patent/JPS63262455A/en
Publication of JPH0514025B2 publication Critical patent/JPH0514025B2/ja
Granted legal-status Critical Current

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Abstract

PURPOSE:To carry cut carburization without forming a cooling chamber with a vacuum structure and to reduce the man-hours for assembling the title vacuum carburization furnace by filling a heating chamber for a material to be heated and the cooling chamber with an atmospheric inert gas when the material is transferred from the heating chamber to the cooling chamber. CONSTITUTION:A first material M to be heated is charged in the heating chamber 12 and a charging door 15 is closed. The heating chamber 12 is evacuated, the first material M is heated and soaked, then a carburizing gas is supplied to carburize the material, and the material is subsequently cooled and soaked. Gaseous nitrogen is supplied to the heating chamber 12, and the heating chamber 12 is filled with the atmospheric gaseous nitrogen as in the cooling chamber 13. The first material M is transferred to the cooling chamber 13, an intermediate vacuum door 16 is closed, and the first material M is charged in an oil tank 13a and oil-hardened. A second material to be heated is simultaneously charged in the heating chamber 12. Air flows into the heating chamber 12 at this time, and the inside of the heating chamber 12 is cleaned. The first material M is discharged from the cooling chamber 13, and a discharge door 17 is closed.

Description

【発明の詳細な説明】 〈産業上の利用分針〉 本発明は、加熱室と冷却室との2室からなり浸炭処理を
行なう半連続式の真空浸炭炉とその操業方法に間する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Minute Hand> The present invention relates to a semi-continuous vacuum carburizing furnace which is comprised of two chambers, a heating chamber and a cooling chamber, and performs carburizing treatment, and a method of operating the same.

〈従来の技術〉 従来、この種の加熱室と冷却室の2室からなる真空浸炭
炉では、第2図に示す特開昭58−130270号公報
に記載されているものがある。
<Prior Art> Conventionally, a vacuum carburizing furnace of this type consisting of two chambers, a heating chamber and a cooling chamber, is described in Japanese Patent Application Laid-Open No. 130270/1985 as shown in FIG.

この真空浸炭炉1は、加熱室2が高温環境の真空中およ
び大気中において化学的・強度的に安定な発熱体2aお
よび断熱材2bから構成されるとともに、加熱室またび
油槽3aを備えた冷却N3が真空容器4で覆われ、加熱
室2と冷却室3とには共に真空排気源Vが接続されてい
る。また、加熱室2には浸炭ガス源C9冷却N3には冷
却室3内を大気圧以上に加圧可能な窒素ガス等の不活性
ガス源Gがそれぞれ接続されている。
This vacuum carburizing furnace 1 has a heating chamber 2 composed of a heating element 2a and a heat insulating material 2b that are chemically and mechanically stable in high-temperature environments such as vacuum and air, and is equipped with a heating chamber and an oil tank 3a. The cooling N3 is covered with a vacuum container 4, and a vacuum exhaust source V is connected to both the heating chamber 2 and the cooling chamber 3. Further, a carburizing gas source C9 is connected to the heating chamber 2, and an inert gas source G such as nitrogen gas capable of pressurizing the inside of the cooling chamber 3 to atmospheric pressure or higher is connected to the cooling N3.

なお、5は装入扉、6は中間真空扉、7は搬出扉、8は
内部移送装置、9は昇降台であり、さらに、5aは内部
装入i、6aは内部中間扉であるこの真空浸炭炉lの操
業について述べると、っぎのようである(第1表参照)
In addition, 5 is a charging door, 6 is an intermediate vacuum door, 7 is an unloading door, 8 is an internal transfer device, 9 is a lifting platform, 5a is an internal charging i, and 6a is an internal intermediate door. The operation of the carburizing furnace is as follows (see Table 1).
.

まず、予め加熱室2を大気圧状態で所定の温度に加熱し
ておく。
First, the heating chamber 2 is heated in advance to a predetermined temperature under atmospheric pressure.

第1工程・・・装入扉5・5aを開放し、第1被熱物M
1を加熱室2に装入し、直ちに装入扉5・5aを閉鎖す
る。
1st step: Open the charging door 5, 5a, and open the first heated object M.
1 into the heating chamber 2, and immediately close the charging doors 5 and 5a.

第2工程・・・加熱室2を真空排気源Vによって真空排
気しながら、第1被熱物M1を所定温度まで真空加熱し
、その後、浸炭ガス源Cによって所定の浸炭処理をする
。そして再び真空にし拡散処理をし、さらに焼入温度ま
で降温均熱加熱する。なお、その間に冷却室3を真空排
気しておく。
Second step: While the heating chamber 2 is evacuated by the evacuation source V, the first object to be heated M1 is vacuum heated to a predetermined temperature, and then a predetermined carburizing process is performed using the carburizing gas source C. Then, the material is evacuated again and subjected to diffusion treatment, and then the temperature is lowered and soaked to the quenching temperature. Meanwhile, the cooling chamber 3 is evacuated.

第3工程・・・中間真空扉6・6aを開放し、内部移送
装置8によって被熱物M1を冷却室3の昇降台9に移送
し、直ちに中間真空扉6・6aを閉鎖する。
Third step: The intermediate vacuum doors 6 and 6a are opened, the object to be heated M1 is transferred to the lifting platform 9 of the cooling chamber 3 by the internal transfer device 8, and the intermediate vacuum doors 6 and 6a are immediately closed.

第4工程・・・不活性ガス源Gからのガスを供給して冷
却室3を大゛気圧以上に加圧しつつ、昇降台9を降下さ
せて第1被熱物M1を焼入処理する。その間に、高温の
加熱室2へ空気を導入して大気圧状態とし、さらに、装
入扉5・5aを開放して加熱室2に第2被熱物M2を装
入し、直ちに装入扉5・5aを閉鎖する。なお、冷却室
3を大気圧以上に加圧する理由は、加熱室2内に空気が
入り込む際その空気が冷却室3内に入り込まないように
するためである。
Fourth step: While supplying gas from the inert gas source G to pressurize the cooling chamber 3 to a high pressure or higher, the elevator platform 9 is lowered to quench the first object to be heated M1. In the meantime, air is introduced into the high-temperature heating chamber 2 to bring it to atmospheric pressure, and the charging doors 5 and 5a are opened to charge the second object to be heated M2 into the heating chamber 2, and immediately the charging door is opened. Close 5.5a. The reason why the cooling chamber 3 is pressurized above atmospheric pressure is to prevent the air from entering the cooling chamber 3 when air enters the heating chamber 2 .

第5工程・・・昇降台9を上昇させ、搬出5i17を開
放して第1被熱物M1を炉i外へ搬出し、直ちに搬出扉
7を閉鎖して冷却室3を真空排気する。その間に、第2
被熱物M2を第2工程と同様に取扱う。
Fifth step: The lifting table 9 is raised, the carry-out 5i17 is opened, the first object to be heated M1 is carried out of the furnace i, and the carry-out door 7 is immediately closed to evacuate the cooling chamber 3. In the meantime, the second
The object to be heated M2 is handled in the same manner as in the second step.

以下、定常状態では、第3・4・5工程が繰り返される
Thereafter, in the steady state, the third, fourth, and fifth steps are repeated.

〈発明が解決しようとする問題点〉 従来の真空浸炭炉1は、被熱物M1・M2の加熱室2へ
の装入時、加熱室2を大気中にさらすことから、浸炭処
理中に発熱体1aや断熱材1bに付着する煤を焼除する
ことができ、加熱M2内を清浄化することに効果がある
<Problems to be Solved by the Invention> The conventional vacuum carburizing furnace 1 exposes the heating chamber 2 to the atmosphere when the objects to be heated M1 and M2 are charged into the heating chamber 2, so that heat is generated during the carburizing process. The soot adhering to the body 1a and the heat insulating material 1b can be burned off, which is effective in cleaning the inside of the heating M2.

しかし、従来の真空浸炭炉1では、加熱室2から冷却室
3へ被熱物Mを移送する際、被熱物Mを酸化させないよ
う、冷却N3を真空にしており、加熱室2ばかりでなく
冷却室3も真空構造にする必要がある。そのため、浸炭
処理に不可欠な油焼入の油槽3aを備えた大ぎな容積の
冷却室3も真空構造にする必要が生じ、種々の高強度の
外壁や真空シール材を備えた大きな真空容器4が必要と
なり、組付工数及びコストがかかる。
However, in the conventional vacuum carburizing furnace 1, when transferring the heated material M from the heating chamber 2 to the cooling chamber 3, the cooling N3 is evacuated to prevent the heated material M from being oxidized. The cooling chamber 3 also needs to have a vacuum structure. Therefore, the cooling chamber 3, which has a large capacity and is equipped with an oil tank 3a for oil quenching, which is essential for the carburizing process, also needs to have a vacuum structure. This requires additional assembly man-hours and costs.

そしてまた、加熱室2から冷却室3への被熱物Mの移送
を真空状態で行なうことから、内部移送装置8や中間真
空扉6・6aの駆動装置を真空容器4内に配設する必要
が生じ、この種の駆動装置を特殊な機構や部品で構成し
“なければならず、上記問題を助長してしまう。
Furthermore, since the object to be heated M is transferred from the heating chamber 2 to the cooling chamber 3 in a vacuum state, it is necessary to arrange the internal transfer device 8 and the driving device for the intermediate vacuum doors 6 and 6a inside the vacuum container 4. As a result, this type of drive device must be constructed with special mechanisms and parts, which exacerbates the above problems.

本発明は、上述の問題を解決するもので、被熱物の処理
に支障をきたすことなく、組付工数及゛びコストを低減
できる真空浸炭炉とその操業方法を提供することを目的
とする。
The present invention solves the above-mentioned problems, and aims to provide a vacuum carburizing furnace and its operating method that can reduce assembly man-hours and costs without causing any hindrance to the treatment of objects to be heated. .

く問題点を解決するための手段〉 本発明に係る真空浸炭炉は、加熱室と冷却室との2室か
らなる真空浸炭炉であって、 加熱室が、高温環境の真空中及び大気中において化学的
・強度的に安定な発熱体及び断熱材から形成され、前部
に被熱物装入用の装入扉を備えるとともに後部に被熱物
搬出用の中間真空扉を備え、さらに真空排気源、浸炭ガ
ス源、及び不活性ガス源を接続させ、 冷却室が、中間真空扉を介して前部を加熱室に接続させ
、内部に油槽を備えるとともに後部に被熱物搬出用の搬
出扉を備え、さらに不活性ガス源を接続させ、 加熱室のみが真空容器に覆われている、ことを特徴とす
るものである。
Means for Solving Problems> The vacuum carburizing furnace according to the present invention is a vacuum carburizing furnace consisting of two chambers, a heating chamber and a cooling chamber. It is made of a chemically and mechanically stable heating element and heat insulating material, and is equipped with a charging door for charging heated objects at the front, an intermediate vacuum door for removing heated objects at the rear, and a vacuum exhaust system. The cooling chamber is connected to the heating chamber at the front through an intermediate vacuum door, has an oil tank inside, and has an exit door at the rear for transporting heated materials. It is characterized in that it is equipped with an inert gas source, and that only the heating chamber is covered with a vacuum container.

また、本発明に係る真空浸炭炉の操業方法は、予め加熱
室を大気圧状態で所定温度に加熱しておくとともに、冷
却室を不活性ガスの供給により常時大気圧状態の不活性
ガス雰囲気としておぎ、下記第1〜5工程を行なうこと
を特徴とするものである。
Further, in the method of operating the vacuum carburizing furnace according to the present invention, the heating chamber is heated in advance to a predetermined temperature at atmospheric pressure, and the cooling chamber is constantly maintained in an inert gas atmosphere at atmospheric pressure by supplying inert gas. It is characterized by performing the following steps 1 to 5.

■第1工程 装入扉を開放して第1被熱物を加熱室へ装入し、装入扉
を閉鎖する。
■First step The charging door is opened, the first object to be heated is charged into the heating chamber, and the charging door is closed.

■第2工程 加熱室において第1被熱物を真空加熱し、その後、第1
被熱物を浸炭、拡散、及び昇温均熱加熱する。
■Second step The first object to be heated is vacuum heated in the heating chamber, and then the first object is heated in a vacuum.
The object to be heated is carburized, diffused, and heated by soaking.

■第3工程 加熱室を不活性ガスの供給により大気圧状態として中間
真空扉を開放し、第1被熱物を大気圧状態の不活性ガス
雰囲気に保たれた冷却室へ8送し、その後、中間真空扉
を閉鎖する。
■Third step: Bring the heating chamber to atmospheric pressure by supplying inert gas, open the intermediate vacuum door, send the first object to be heated to the cooling chamber maintained in an inert gas atmosphere at atmospheric pressure, and then , close the intermediate vacuum door.

■第4工程 第1被熱物な油焼入するとともに、装入扉を開放して第
2被熱物を加熱室へ装入し、その後、装入扉な閉鎖する
(4) The first object to be heated is oil quenched, the charging door is opened and the second object to be heated is charged into the heating chamber, and then the charging door is closed.

■第5工程 搬出扉を開放して油焼入した第1被熱物を冷却室から搬
出し、その後、搬出扉を閉鎖し、その間に後続の第2被
熱物を前記第2工程以降で処理する。
■Fifth step The carry-out door is opened and the oil-quenched first heat object is carried out from the cooling chamber, and then the carry-out door is closed. During this time, the subsequent second heat object is carried out in the second and subsequent steps. Process.

〈発明の作用・効果〉 本発明に係る真空浸炭炉とその操業方法では、被熱物の
加熱室から冷却室への移送時、加熱室と冷却室とが共に
大気圧状態の不活性ガス雰囲気になっていることから、
被熱物が酸化されず支障なく移送される。そして、被熱
物は、冷却室において大気圧状態の不活性ガス雰囲気で
油焼入され、その後炉外へ搬出されることとなり、支障
なく所定の浸炭処理が施される。
<Operations and Effects of the Invention> In the vacuum carburizing furnace and its operating method according to the present invention, when the object to be heated is transferred from the heating chamber to the cooling chamber, both the heating chamber and the cooling chamber are in an inert gas atmosphere at atmospheric pressure. Since it is,
The object to be heated is not oxidized and can be transferred without any trouble. Then, the object to be heated is oil-quenched in an inert gas atmosphere at atmospheric pressure in the cooling chamber, and then transported out of the furnace, where it is subjected to a predetermined carburizing treatment without any trouble.

すなわち、本発明では、加熱室だけを真空容器で覆い、
冷却室を常時不活性ガスの供給によって大気圧状態の不
活性ガス雰囲気としておくだけでよく、冷却室を真空容
器で覆うような真空構造にすることが不要となる。
That is, in the present invention, only the heating chamber is covered with a vacuum container,
It is sufficient to keep the cooling chamber in an inert gas atmosphere at atmospheric pressure by constantly supplying an inert gas, and there is no need to create a vacuum structure in which the cooling chamber is covered with a vacuum container.

そのため、大台な容積の冷却室を高価な真空構造としな
くともよいことから、従来必要であった大ぎな真空容器
でなくともよく、真空浸炭炉の組付工数及びコストを低
減させることができる。
Therefore, there is no need for a cooling chamber with a large capacity to have an expensive vacuum structure, so there is no need for a large vacuum container that was previously required, and the man-hours and cost for assembling a vacuum carburizing furnace can be reduced. .

また、炉内での被熱物の移送手段や中間真空扉の駆動装
置を従来のような真空容器内に配設する必要がないこと
から、これらの装置を特殊なものでなく通常の機構の市
販品で構成することができ、炉の組付工数及びコストの
低減を助長できる。
In addition, since there is no need to install the means for transferring heated materials in the furnace and the driving device for the intermediate vacuum door inside the vacuum container as in the past, these devices can be constructed using ordinary mechanisms rather than special ones. It can be constructed from commercially available products, and can help reduce furnace assembly man-hours and costs.

特に、冷却室に不活性ガスを常時大気□圧状態で供給し
ていることから、炉内での被熱物の移送時、搬出扉や中
間真空扉を開け、冷却室側の炉外に配置する移送手段を
介して被熱物を移送できるように構成すれば、炉内に被
熱物の移送手段を配設しなくともよく、一層真空浸炭炉
の組付工数及びコストを低減させることができ、また移
送手段の保守点検も容易となる。
In particular, since inert gas is constantly supplied to the cooling chamber at atmospheric pressure, when transferring heated objects in the furnace, the unloading door and intermediate vacuum door are opened and the gas is placed outside the furnace on the cooling chamber side. If the material to be heated is configured to be able to be transferred through the transfer means, there is no need to provide a means for transferring the object to be heated in the furnace, and the man-hours and costs for assembling the vacuum carburizing furnace can be further reduced. This also facilitates maintenance and inspection of the transport means.

以上のように、本発明に係る真空浸炭炉とその操業方法
では、従来必要であった種々の構造・機構等を被熱物の
処理に支障をきたすことなく簡略化する己とができ、炉
の組付工数及びコストを著しく低減することができる。
As described above, the vacuum carburizing furnace and its operating method according to the present invention can simplify the various structures and mechanisms that were conventionally necessary without causing any problems in the treatment of the objects to be heated. Assembling man-hours and costs can be significantly reduced.

また、本発明に係る真空浸炭炉では、常時加熱室及び冷
却室の炉内に浸炭ガスを供給するガス浸炭炉と相違し、
加熱室での浸炭処理時のみに浸炭ガスが供給されること
から、ガス浸炭炉のように爆発の危険性もない。
In addition, the vacuum carburizing furnace according to the present invention is different from a gas carburizing furnace in which carburizing gas is constantly supplied into the heating chamber and cooling chamber,
Since carburizing gas is supplied only during the carburizing process in the heating chamber, there is no danger of explosion unlike in gas carburizing furnaces.

〈実tJt!4例〉 以下、本発明の一実施例を図面に基づいて説明する。<Actual tJt! 4 cases> Hereinafter, one embodiment of the present invention will be described based on the drawings.

第1図に示す実施例の真空浸炭炉1)は、加熱室12と
冷却室13との2室から4+’a成され、加熱室12だ
けが真空容器14に覆われている。
The vacuum carburizing furnace 1) of the embodiment shown in FIG.

加熱室12は、真空客器14内に断熱材12bと発熱体
12aを配設させて構成されている。
The heating chamber 12 is configured by disposing a heat insulating material 12b and a heating element 12a inside the vacuum chamber 14.

発熱体12aは、高温強度が大で、高温状態で直接空気
に触れても酸化燃焼せず、また熱亀裂が生じなくて、高
温真空時でも蒸発しない抵抗発熱体を使用する。例えば
再結晶処理を施した炭化ケイ素系発熱体、またはその表
面にアルミナ溶射被覆層を形成させたもの、あるいは、
最高加熱温度が’1000℃以下、真空圧0.2ト一ル
程度ならばニッケル・クロム系合金発熱体、鉄・クロム
系合金発熱体などが使用できる。
As the heating element 12a, a resistance heating element is used which has high high-temperature strength, does not oxidize and burn when directly exposed to air at high temperatures, does not generate thermal cracks, and does not evaporate even in high-temperature vacuum conditions. For example, a silicon carbide heating element that has been subjected to recrystallization treatment, or one that has an alumina spray coating layer formed on its surface, or
If the maximum heating temperature is below 1,000°C and the vacuum pressure is about 0.2 torr, a nickel-chromium alloy heating element, an iron-chromium alloy heating element, etc. can be used.

断熱材12bは、熱伝導率が小さく、高温状態、で繰返
し真空→大気にさらされても化学的に安定な耐火材、例
えば高純度セラミックファイバーで構成したものを使用
する。
The heat insulating material 12b is made of a refractory material that has a low thermal conductivity and is chemically stable even when exposed repeatedly from vacuum to atmosphere at high temperatures, such as high-purity ceramic fiber.

そして、加熱室12の前部(図中左側)には、被熱物M
装入用の装入扉15が配設されている。
In the front part of the heating chamber 12 (on the left side in the figure), there is a heated object M.
A charging door 15 for charging is provided.

この装入#15は、加熱室12と真空容器14との兼用
の扉であり、リンク機構15トガイドレール152を介
して炉1)に配置される図示しない駆動装置によって上
下方向で開閉されるように構成されている。
This charging #15 is a door that serves both the heating chamber 12 and the vacuum vessel 14, and is opened and closed in the vertical direction by a drive device (not shown) disposed in the furnace 1) via a link mechanism 15 and a guide rail 152. It is configured as follows.

加熱室12の後部(図中右側)には、被熱物M搬出用の
中間真空5i1)6が配設されている。この中間真空5
i1)6は、装入mt5と同様に、加熱室12と真空容
器14との兼用の扉であり、リンク機構16トガイドレ
ール162・チェーン163・スプロケット164を介
し、一方のスプロケット164の釉に接続される炉1)
外の図示しない駆動装置によって、上下方向で開閉され
るように構成されている。
At the rear of the heating chamber 12 (on the right side in the figure), an intermediate vacuum 5i1) 6 for carrying out the object to be heated M is provided. This intermediate vacuum 5
i1) 6, like the charging mt5, is a door that serves both the heating chamber 12 and the vacuum container 14, and the link mechanism 16 is connected to the glaze of one sprocket 164 via the guide rail 162, chain 163, and sprocket 164. Furnace to be connected 1)
It is configured to be opened and closed in the vertical direction by an external drive device (not shown).

また、加熱室12には、真空ポンプ等から構成される真
空排気源Vが真空弁22を備えた管路21を介して接続
されるとともに、浸炭ガス源Cが電磁弁24及び流量調
整器25を備えた管路23を介して接続されている。さ
らに、加熱室12には不活性ガスとしての窒素ガスを供
給する窒素ガス源Gが電磁弁29を備える管路28を介
して接続されている。
Further, a vacuum exhaust source V composed of a vacuum pump or the like is connected to the heating chamber 12 via a conduit 21 equipped with a vacuum valve 22, and a carburizing gas source C is connected to a solenoid valve 24 and a flow rate regulator 25. It is connected via a conduit 23 provided with. Furthermore, a nitrogen gas source G that supplies nitrogen gas as an inert gas is connected to the heating chamber 12 via a conduit 28 that includes a solenoid valve 29 .

なお、18は炉床レール、20は浸炭ガスを攪拌するフ
ァンである。
Note that 18 is a hearth rail, and 20 is a fan that stirs the carburizing gas.

冷却室13は、中間真空扉16の部位で加熱室12後部
に接続され、内部に油焼入を行なう油槽13aを備えて
いる。
The cooling chamber 13 is connected to the rear part of the heating chamber 12 at the intermediate vacuum door 16, and has an oil tank 13a therein for performing oil quenching.

冷却室13の後部(図中右側)には、被熱物M搬出用の
搬出扉17が配設され、この搬出扉1フは、装入扉15
と同様に、リンク機構17トガイドレール172を介し
て炉1)外に配置される図示しない駆動装置によって上
下方向で開閉されるものである。
At the rear of the cooling chamber 13 (on the right side in the figure), an ejection door 17 for ejecting the heated object M is provided.
Similarly, the link mechanism 17 is opened and closed in the vertical direction by a drive device (not shown) disposed outside the furnace 1) via the guide rail 172.

また、冷却室13内を常時大気圧状態で窒素ガス雰囲気
とするよう、冷却室13には、流N調整器31を備える
管路30を介して窒素ガス源Gが接続されている。ちな
みに、実施例の場合、炉1)の操業時には、冷却室13
内が常時大気圧状態を維持できるよう、大気圧より若干
加圧(約20am H20) L/て窒素ガスを流出さ
せるものであるそして、この冷却室13は、従来の冷却
室3のように操業時に真空状態を維持する必要がなく、
窒素ガス雰囲気の大気圧状態を維持できればよいため、
その外壁を高強度の構造にしたり、真空シール材等を利
用しなくともよい。
Further, a nitrogen gas source G is connected to the cooling chamber 13 via a conduit 30 provided with a flow N regulator 31 so that the inside of the cooling chamber 13 is always maintained at atmospheric pressure and in a nitrogen gas atmosphere. Incidentally, in the case of the embodiment, when the furnace 1) is operated, the cooling chamber 13
The cooling chamber 13 is pressurized slightly above atmospheric pressure (approximately 20 am H20) to allow nitrogen gas to flow out so that atmospheric pressure can be maintained at all times. Sometimes there is no need to maintain a vacuum state,
Since it is sufficient to maintain the atmospheric pressure state of the nitrogen gas atmosphere,
It is not necessary to make the outer wall have a high-strength structure or to use a vacuum sealing material.

なお、19は、被熱物Mの油if@ 13 aへの没入
・引上げを行なう昇降台であり、冷却室13外に設けら
れたエアシンリダ34により駆動されるものである。3
2は、流量調整器33を備えた窒素ガスの廃棄用管路で
ある。
Note that 19 is a lifting platform for immersing and lifting the heated object M into the oil if@13a, and is driven by an air cylinder 34 provided outside the cooling chamber 13. 3
2 is a nitrogen gas disposal pipe provided with a flow rate regulator 33.

また、この炉1)の前方には、装入扉15の位置に対応
して被熱物Mの装入用コンベヤ35が配設され、炉1)
の後方には、搬出扉17の位置に対応して被熱物Mの搬
出用コンベヤ3フが配設されている。
Further, in front of this furnace 1), a conveyor 35 for charging the object to be heated M is disposed corresponding to the position of the charging door 15.
A conveyor 3 for carrying out the heated object M is disposed behind the conveyor 3 corresponding to the position of the carrying out door 17.

そして、装入用コンベヤ35内には、装入扉15解放時
装入用コンベヤ35上の被熱物Mを加熱室12内の炉床
レール18上の所定位置に移送可能な押出ロッド36が
設けられている。また、搬出用コンベヤ37内には、先
端を冷却室13内に挿入させ、中間真空J7i1)6の
解放時に加熱室12内の被熱物Mを冷却室13内の昇降
台19上に移送させたり、また、排出扉17の解放時に
冷却室13内の被熱物M、を炉1)外へ搬出させたりす
る引出ロッド38が配設されている。
Inside the charging conveyor 35, there is an extrusion rod 36 that can transfer the heated object M on the charging conveyor 35 to a predetermined position on the hearth rail 18 in the heating chamber 12 when the charging door 15 is released. It is provided. In addition, the tip of the conveyor 37 for carrying out is inserted into the cooling chamber 13, and when the intermediate vacuum J7i1) 6 is released, the heated object M in the heating chamber 12 is transferred onto the lifting platform 19 in the cooling chamber 13. In addition, a pull-out rod 38 is provided for carrying out the heated object M in the cooling chamber 13 to the outside of the furnace 1) when the discharge door 17 is opened.

なお、押出ロッド36や引出ロッド38は、被熱物Mの
移送時、上面に被熱物Mをそれぞれ載置させているパレ
ットPを引掛け、このパレットPを介して被熱物Mの移
送を行なうものである。
In addition, when transferring the object to be heated M, the extrusion rod 36 and the pull-out rod 38 hook the pallet P on which the object to be heated M is placed on the upper surface, and transfer the object to be heated M via this pallet P. This is what we do.

つぎに、実施例の真空浸炭炉1)の操業について説明す
る(第2表参照)。
Next, the operation of the vacuum carburizing furnace 1) of the example will be explained (see Table 2).

まず、予め、加熱室12を大気圧状態で所定の温度に加
熱しておくとともに、流量調整器31を調整して窒素ガ
ス源Gから冷却室13内へ所定流量の窒素ガスを供給し
、冷却室!3内を大気圧状態の窒素ガス雰囲気としてお
く。なお、各界15・16・17は閉鎖させておく。
First, the heating chamber 12 is heated in advance to a predetermined temperature at atmospheric pressure, and the flow rate regulator 31 is adjusted to supply a predetermined flow rate of nitrogen gas from the nitrogen gas source G into the cooling chamber 13 for cooling. Room! 3 is kept in a nitrogen gas atmosphere at atmospheric pressure. Please note that all areas 15, 16, and 17 will be closed.

第1工程 装入扉15を開放し、押出ロッド36を使用して装入用
コンベヤ35上の第1被熱物M1を炉床レール18上の
所定位置に移送し、第1被熱物M1を加熱室12へ装入
する。そして直ちに装入扉15を閉鎖する。
The first process charging door 15 is opened, the first heat target M1 on the charging conveyor 35 is transferred to a predetermined position on the hearth rail 18 using the push rod 36, and the first heat target M1 is transferred to a predetermined position on the hearth rail 18. is charged into the heating chamber 12. Then, the charging door 15 is immediately closed.

第2工程 電磁弁22を開いて加熱室12を真空状態に減圧すると
ともに、第1被熱物M1を所定の浸炭温度まで昇温均熱
加熱し、その後電磁弁22を閉じる。
The second step solenoid valve 22 is opened to reduce the pressure in the heating chamber 12 to a vacuum state, and the first object to be heated M1 is heated and soaked to a predetermined carburizing temperature, and then the solenoid valve 22 is closed.

そして、所定の浸炭温度を維持した状態で、電磁弁24
を開いて加熱室12内に浸炭ガスを所定流量で所定時間
併給し、′y%1被熱物M1を浸炭する。
Then, while maintaining the predetermined carburizing temperature, the solenoid valve 24
is opened and carburizing gas is simultaneously fed into the heating chamber 12 at a predetermined flow rate for a predetermined time to carburize the object to be heated M1.

その後、高温を維持した状態で、電磁弁24を閉じると
ともに、再び電磁弁22を開いて加熱室12内を真空状
態とし、浸炭された第1被熱物M1の表層部の炭素の芯
部への拡散を行なう。
Thereafter, while maintaining the high temperature, the solenoid valve 24 is closed, and the solenoid valve 22 is opened again to create a vacuum state in the heating chamber 12, and the carbon core in the surface layer of the carburized first object to be heated M1 is heated. to spread the information.

そしてその後、第1被熱物M1を油焼入に最適な温度と
なるよう降温均熱加熱する。
Thereafter, the first object to be heated M1 is heated and soaked so as to reach the optimum temperature for oil quenching.

第3工程 電磁弁22を閉じるとともに電磁弁29を開き、加熱室
12内に窒素ガスを供給して、加熱室12を冷却室13
と同様な大気圧状態の窒素ガス雰囲気とし、その後、中
間真空扉16を開放する。
Third step The solenoid valve 22 is closed and the solenoid valve 29 is opened to supply nitrogen gas into the heating chamber 12 and convert the heating chamber 12 into the cooling chamber 13.
After that, the intermediate vacuum door 16 is opened.

そして、引出ロッド38を使用し、炉床レール18上の
第1被熱物M1を昇降台19上に移送して、第1被熱物
M1を冷却室13へ移送し、その後、中間真空扉16を
閉鎖する。ちなみに、この第1被熱物M1の移送時では
、加熱室12と冷却室13とが共に窒素ガス雰囲気とな
っていることから、第1被熱物M1は、酸化されること
がなく、支障なく移送される。
Then, using the pull-out rod 38, the first heated object M1 on the hearth rail 18 is transferred onto the lifting platform 19, the first heated object M1 is transferred to the cooling chamber 13, and then the intermediate vacuum door 16 will be closed. Incidentally, during the transfer of the first heat target M1, both the heating chamber 12 and the cooling chamber 13 are in a nitrogen gas atmosphere, so the first heat target M1 is not oxidized and there is no problem. It will be transferred without any problem.

第4工程 エアシリンダ34を作動させて昇降台19を降下させ、
第1被熱物M1を油4i 13 a内に投入して油焼入
する。
Activating the fourth step air cylinder 34 to lower the lifting platform 19,
The first object to be heated M1 is put into oil 4i 13a and oil quenched.

これと同時に、装入扉15を開放し、押出ロッド36を
介して装入用コンベヤ35上の後続の第2被熱物M2を
加熱室12の炉床レール18上の所定位置に装入し、そ
の後直ちに装入扉15を閉鎖する。その際、加熱室12
内には空気が流入することから、発熱体12aや断熱材
12bに付着していた浸炭ガスの煤が焼除され、加熱室
12内の清浄化が図れる。
At the same time, the charging door 15 is opened, and the subsequent second heated object M2 on the charging conveyor 35 is charged into a predetermined position on the hearth rail 18 of the heating chamber 12 via the push rod 36. , and then immediately closes the charging door 15. At that time, heating chamber 12
Since air flows into the heating chamber 12, the soot of the carburizing gas adhering to the heating element 12a and the heat insulating material 12b is burned off, and the inside of the heating chamber 12 can be cleaned.

第5工程 エアシリンダ34を介して油槽13a中の昇降台19及
び第1被熱物M1を上昇させて元の位置に戻す。そして
、搬出扉17を開放し、引出ロッド38を介して昇降台
19上から搬出用コンベヤ37上(第1被熱物M1を移
送し、第1被熱物M1を冷却室13から撤出後、搬出5
i1)7を閉鎖する、また、加熱室12内では、第2工
程と同様に第2被熱物M2を処理する。
Fifth step The lifting platform 19 and the first heated object M1 in the oil tank 13a are raised via the air cylinder 34 and returned to their original positions. Then, the unloading door 17 is opened, and the first heated object M1 is transferred from the elevator platform 19 to the unloading conveyor 37 via the pull-out rod 38, and after the first heated object M1 is removed from the cooling chamber 13. , unloading 5
i1) 7 is closed, and in the heating chamber 12, the second heat target M2 is processed in the same manner as in the second step.

その後、定常状態では、第3・4・5工程が繰り返され
る。
Thereafter, in a steady state, the third, fourth, and fifth steps are repeated.

したがって、この実施例では、冷却室13を真空状態と
しなくとも支障なく被熱物Mの処理が行なえることから
、既述の発明の作用・効果の欄で述べたと同様な効果を
奏する。
Therefore, in this embodiment, the object to be heated M can be processed without any problem even if the cooling chamber 13 is not in a vacuum state, and therefore, the same effects as described in the section of the above-mentioned functions and effects of the invention are achieved.

そしてまた、この実施例では、可動する装入扉15・中
間真空扉16・搬出扉17・昇降台19・炉1)内での
被熱物M移送用の押出・引出ロッド36・38等が全て
真空容器14内に配設されておらず、自動操業する場合
、各可動部品の位置確認用の検出センサを真空容器14
外に配置させることができ、自動操業時の機構を単純化
でき、自動操業時のハード及びソフトの面で好都合とな
る。
In addition, in this embodiment, movable charging door 15, intermediate vacuum door 16, unloading door 17, elevating table 19, extrusion/drawing rods 36, 38 for transferring heated material M in the furnace 1), etc. If all of the moving parts are not disposed inside the vacuum vessel 14 and automatic operation is required, a detection sensor for confirming the position of each moving part may be installed in the vacuum vessel 14.
It can be placed outside, simplifying the mechanism during automatic operation, and is advantageous in terms of hardware and software during automatic operation.

ちなみに、従来の炉1を自動操業させる場合には、真空
中で各種検出スイッチを作動させることがそれらの接点
の寿命を著しく短かくさせることから、各可動部品の位
置にカムやカムロッド等を配置させて、そのカムロッド
等の端部を真空容器外へ出し、その端部の動きを検出ス
イッチで検出するように構成する必要があり、複雑な機
構となっていた。
By the way, when operating the conventional furnace 1 automatically, cams, cam rods, etc. are placed at the positions of each moving part because operating the various detection switches in a vacuum significantly shortens the life of their contacts. Then, the end of the cam rod or the like must be taken out of the vacuum vessel, and the movement of the end must be detected by a detection switch, resulting in a complicated mechanism.

なお、実施例では常時冷却室13を大気圧状態の窒素ガ
ス雰囲気としておき、加熱室12から冷却室13への被
熱物Mの移送時、加熱室12も大気圧状態の窒素ガス雰
囲気とし、モして被熱物Mを移送させるものを示した。
In the embodiment, the cooling chamber 13 is always kept in a nitrogen gas atmosphere at atmospheric pressure, and when the object to be heated M is transferred from the heating chamber 12 to the cooling chamber 13, the heating chamber 12 is also kept in a nitrogen gas atmosphere at atmospheric pressure. The figure shows one for transporting the object to be heated M.

しかし、実施例の場合、加熱室12から冷却室13へ移
送して被熱物Mを油焼入するまでの時間が比較的短かい
ことから、酸化させても支障がない被熱物を浸炭処理す
る場合には、冷却室13や加熱室12内を窒素ガス雰囲
気としなくともよい、すなわち、浸炭処理後、ショツト
ブラスト装置でパリ取り作業を行なうような場合には、
被熱物M表面に薄い酸化膜が形成されても、その後のパ
リ取り作業中に光輝肌を得ることがでるからである。
However, in the case of the example, since the time required to oil-quench the object M after transferring it from the heating chamber 12 to the cooling chamber 13 is relatively short, the object to be heated M can be carburized without any problem even if it is oxidized. When processing, it is not necessary to create a nitrogen gas atmosphere in the cooling chamber 13 or the heating chamber 12. In other words, when deburring is performed using a shot blasting device after carburizing,
This is because even if a thin oxide film is formed on the surface of the heated object M, a shiny skin can be obtained during the subsequent deburring operation.

第1表 従来の真空浸炭炉の工程 第2工程(第5工程)は 浸炭、拡散、IA埋も含む 第2表 発明した真空浸炭炉の工程Table 1: Conventional vacuum carburizing furnace process The second step (fifth step) is Includes carburizing, diffusion, and IA embedding. Table 2 Process of invented vacuum carburizing furnace

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す真空浸炭炉の断面図、
第2図は従来の炉を示す断面図である。 1)・・・真空浸炭炉、 12・・・加熱室、 12a・・・発熱体、 12b・・・断熱材、 13・・・冷却室、 13a・・・油槽、 14・・・真空容器、 15・・・装入扉、 16・・・中間真空扉、 17・・・搬出扉、 M・・・被熱物、 ■・・・真空排気源、 C・・・浸炭ガス源、 G・・・(不活性ガス源)窒素ガス源。 第2図 自   発   補   正 手続補正書 1、事件の表示 昭和62年 特 許 願 第098338号2、発明の
名称 真空浸炭炉とその操業方法 3、補正をする者 事件との関係   特  許  出  願  人住所 氏 名        杉  山  道  生明細書の
「特許請求の範囲」及び「発明の詳細な説明」の各欄 (1)明細書の特許請求の範囲を別紙のとおり補正する
。 (2)明細書第6頁第9〜10行r・・・に不可欠な油
焼入の油槽3aを備えた大きな・・・」を「・・・に不
可欠な焼入を行なう油槽3a等を備えた大きな・・・」
と補正する。 (3)同第7頁第14行「・・・させ、内部に油槽を備
えるとともに・・・」を「・・・させ、内部に冷却手段
を備えるとともに」と補正する。 (4)同第8頁第18行「第1被熱物を油焼入するとと
もに、・・・」を「第1被熱物を冷却手段により焼入す
るとともに、・・・」と補正する。 (5)同第9頁第2行「搬出扉を開放して油焼入した第
1・・・」を「搬出扉を開放して焼入した第1・・・」
と補正する。 (6)同第9頁第12行「・・・の不活性ガス雰囲気で
油焼入され、」を「・・・の不活性ガス雰囲気で焼入さ
れ、」と補正する。 (7)同第13頁第15行「・・・に接続され、内部に
油焼入を行なう油槽」を「・・・に接続され、内部に焼
入を行なう冷却手段として油槽」と補正する(8)同第
17頁第7行「・・・、第1被熱物M1を油焼入に最適
」を「・・・、第1被熱物M1を焼入に最適」と補正す
る。 (9)同第20頁第19行の次の行に次の文を挿入する
。 「また、実施例では、被熱物を焼入する冷却手段として
、油槽13aを利用するものを示したが、他に、水や水
溶性冷却剤等の焼入液、あるいはガス冷却や流動層冷却
等の周知の冷却手段を利用してもよい。」 2、特許請求の範囲 (1)加熱室と冷却室との2室からなる真空浸炭炉であ
って、 前記加熱室が、高温環境の真空中及び大気中において化
学的・強度的に安定な発熱体及び断熱材から形成され、
前部に被熱物装入用の装入扉を備えるとともに後部に被
熱物搬出用の中間真空扉を備え、さらに真空排気源、浸
炭ガス源、及び不活性ガス源を接続させ、 前記冷却室が、前記中間真空扉を介して前部を前記加熱
室に接続させ、内部に血工土上を備えるとともに後部゛
に被熱物搬出用の搬出扉を備え、さらに不活性ガス源を
接続させ、 前記加熱室のみが真空容器に覆われている、ことを特徴
とする真空浸炭炉。 (2)予め加熱室を大気圧状態で所定温度に加熱してお
くとともに、冷却室を不活性ガスの供給により常時大気
圧状態の不活性ガス雰囲気としておき、下記第1〜5工
程を行なうことを特徴とする真空浸炭炉の操業方法。 ■第1工程 装入扉を開放して第1被熱物を加熱室へ装入し、装入扉
を閉鎖する。 ■第2工程 加熱室において第1被熱物を真空加熱し、その後、第1
被熱物を浸炭、拡散、及び降温均熱加熱する。 ■第3工程 加熱室を不活性ガスの供給により大気圧状態として中間
真空扉を開放し、第1被熱物を冷却室へ移送し、その後
、中間真空扉を閉鎖する。 ■第4工程 第1被熱物を土工王旦且主ユ焼入するとともに、装入扉
を開放し、て第2被熱物を加熱室へ装入し、その後、装
入扉を閉鎖する。 ■第5工程 搬出扉を開放し」大した第1被熱物な冷却室から搬出し
、その後、搬出扉を閉鎖し、その間に後続の第2被熱物
を第2工程以降で一理する。
FIG. 1 is a sectional view of a vacuum carburizing furnace showing an embodiment of the present invention;
FIG. 2 is a sectional view showing a conventional furnace. 1)...Vacuum carburizing furnace, 12...Heating chamber, 12a...Heating element, 12b...Insulating material, 13...Cooling chamber, 13a...Oil tank, 14...Vacuum container, 15...Charging door, 16...Intermediate vacuum door, 17...Carrying out door, M...Heated object, ■...Vacuum exhaust source, C...Carburizing gas source, G...・(Inert gas source) Nitrogen gas source. Figure 2 Written amendment of voluntary amendment procedure 1, Indication of the case 1988 Patent application No. 098338 2, Name of the invention Vacuum carburizing furnace and its operating method 3, Relationship with the person making the amendment Patent application Person Address Name Michi Sugiyama Each column of "Claims" and "Detailed Description of the Invention" in the specification (1) The scope of claims in the specification will be amended as shown in the attached sheet. (2) Page 6 of the specification, lines 9-10 r...'' is changed from ``A large oil tank 3a equipped with an oil tank 3a for oil quenching essential for...'' to ``A large oil tank 3a etc. for quenching essential for... A big prepared...
and correct it. (3) In the 14th line of page 7, "... and equipped with an oil tank inside..." is amended to "... and equipped with a cooling means inside." (4) On page 8, line 18, "The first object to be heated is quenched with oil, and..." is amended to "The first object to be heated is quenched by a cooling means, and..." . (5) Page 9, line 2, “The first oil quenched with the loading door open” has been changed to “The first quenched with the loading door open”
and correct it. (6) On page 9, line 12, ``Oil quenched in an inert gas atmosphere of...'' is corrected to ``quenched in an inert gas atmosphere of...''. (7) On page 13, line 15, "an oil tank that is connected to... and performs oil quenching inside" is corrected to "an oil tank that is connected to... and serves as a cooling means to perform quenching on the inside." (8) On page 17, line 7, "..., the first heat target M1 is most suitable for oil quenching" is corrected to "..., the first heat target M1 is most suitable for quenching". (9) Insert the following sentence on the next line of page 20, line 19. ``In addition, in the embodiment, the oil tank 13a is used as a cooling means for quenching the object to be heated, but other methods include quenching liquid such as water or water-soluble coolant, gas cooling, and fluidized bed cooling means. A well-known cooling means such as cooling may be used.'' 2. Claims (1) A vacuum carburizing furnace consisting of two chambers, a heating chamber and a cooling chamber, wherein the heating chamber is in a high-temperature environment. Made from a heating element and heat insulating material that are chemically and mechanically stable in vacuum and air,
A charging door for charging the heated material is provided at the front, and an intermediate vacuum door for removing the heated material is provided at the rear, and a vacuum exhaust source, a carburizing gas source, and an inert gas source are connected to the cooling. The chamber has a front part connected to the heating chamber via the intermediate vacuum door, is provided with a blood-containing soil in the inside, is provided with an ejection door for carrying out the heated object in the rear part, and is further connected to an inert gas source. A vacuum carburizing furnace characterized in that only the heating chamber is covered with a vacuum container. (2) The heating chamber is preheated to a predetermined temperature at atmospheric pressure, and the cooling chamber is constantly maintained in an inert gas atmosphere at atmospheric pressure by supplying inert gas, and the following steps 1 to 5 are performed. A method of operating a vacuum carburizing furnace characterized by: ■First step The charging door is opened, the first object to be heated is charged into the heating chamber, and the charging door is closed. ■Second step The first object to be heated is vacuum heated in the heating chamber, and then the first object is heated in a vacuum.
The object to be heated is carburized, diffused, and heated by cooling and soaking. (3) Third step: Bring the heating chamber to atmospheric pressure by supplying inert gas, open the intermediate vacuum door, transfer the first object to be heated to the cooling chamber, and then close the intermediate vacuum door. ■Fourth step: While quenching the first object to be heated, open the charging door, charge the second object to be heated into the heating chamber, and then close the charging door. . ■The 5th process: Open the carry-out door and carry out the large 1st heated object from the cooling room. Then, close the carry-out door, and during this time, clean up the subsequent 2nd heated object in the 2nd process and beyond. .

Claims (2)

【特許請求の範囲】[Claims] (1)加熱室と冷却室との2室からなる真空浸炭炉であ
つて、 前記加熱室が、高温環境の真空中及び大気中において化
学的・強度的に安定な発熱体及び断熱材から形成され、
前部に被熱物装入用の装入扉を備えるとともに後部に被
熱物搬出用の中間真空扉を備え、さらに真空排気源、浸
炭ガス源、及び不活性ガス源を接続させ、 前記冷却室が、前記中間真空扉を介して前部を前記加熱
室に接続させ、内部に油槽を備えるとともに後部に被熱
物搬出用の搬出扉を備え、さらに不活性ガス源を接続さ
せ、 前記加熱室のみが真空容器に覆われている、ことを特徴
とする真空浸炭炉。
(1) A vacuum carburizing furnace consisting of two chambers, a heating chamber and a cooling chamber, wherein the heating chamber is made of a heating element and a heat insulating material that are chemically and mechanically stable in high-temperature environments in vacuum and in the atmosphere. is,
A charging door for charging the heated material is provided at the front, and an intermediate vacuum door for removing the heated material is provided at the rear, and a vacuum exhaust source, a carburizing gas source, and an inert gas source are connected to the cooling. The chamber has a front part connected to the heating chamber via the intermediate vacuum door, has an oil tank inside, has an ejection door for carrying out the heated object at the rear part, and is further connected to an inert gas source, and is connected to the heating chamber. A vacuum carburizing furnace characterized in that only the chamber is covered with a vacuum container.
(2)予め加熱室を大気圧状態で所定温度に加熱してお
くとともに、冷却室を不活性ガスの供給により常時大気
圧状態の不活性ガス雰囲気としておき、下記第1〜5工
程を行なうことを特徴とする真空浸炭炉の操業方法。 [1]第1工程 装入扉を開放して第1被熱物を加熱室へ装入し、装入扉
を閉鎖する。 [2]第2工程 加熱室において第1被熱物を真空加熱し、その後、第1
被熱物を浸炭、拡散、及び降温均熱加熱する。 [3]第3工程 加熱室を不活性ガスの供給により大気圧状態として中間
真空扉を開放し、第1被熱物を冷却室へ移送し、その後
、中間真空扉を閉鎖する。 [4]第4工程 第1被熱物を油焼入するとともに、装入扉を開放して第
2被熱物を加熱室へ装入し、その後、装入扉を閉鎖する
。 [5]第5工程 搬出扉を開放して油焼入した第1被熱物を冷却室から搬
出し、その後、搬出扉を閉鎖し、その間に後続の第2被
熱物を第2工程以降で処理する。
(2) The heating chamber is preheated to a predetermined temperature at atmospheric pressure, and the cooling chamber is constantly maintained in an inert gas atmosphere at atmospheric pressure by supplying inert gas, and the following steps 1 to 5 are performed. A method of operating a vacuum carburizing furnace characterized by: [1] First step The charging door is opened, the first object to be heated is charged into the heating chamber, and the charging door is closed. [2] The first heat target is vacuum heated in the second step heating chamber, and then the first
The object to be heated is carburized, diffused, and heated by cooling and soaking. [3] Third step: Bring the heating chamber to atmospheric pressure by supplying inert gas, open the intermediate vacuum door, transfer the first object to be heated to the cooling chamber, and then close the intermediate vacuum door. [4] Fourth step: While oil quenching the first object to be heated, the charging door is opened and the second object to be heated is charged into the heating chamber, and then the charging door is closed. [5] Open the 5th process carry-out door and carry out the oil-quenched first heated object from the cooling chamber, then close the carry-out door, and in the meantime, carry out the subsequent 2nd heated object from the 2nd process onward. Process with.
JP9833887A 1987-04-21 1987-04-21 Vacuum carburization furnace and its operating method Granted JPS63262455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9833887A JPS63262455A (en) 1987-04-21 1987-04-21 Vacuum carburization furnace and its operating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9833887A JPS63262455A (en) 1987-04-21 1987-04-21 Vacuum carburization furnace and its operating method

Publications (2)

Publication Number Publication Date
JPS63262455A true JPS63262455A (en) 1988-10-28
JPH0514025B2 JPH0514025B2 (en) 1993-02-24

Family

ID=14217117

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9833887A Granted JPS63262455A (en) 1987-04-21 1987-04-21 Vacuum carburization furnace and its operating method

Country Status (1)

Country Link
JP (1) JPS63262455A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100599256B1 (en) * 2004-10-11 2006-07-18 동우열처리공업 주식회사 Gas carburization heat treatment furnace with integral salt bath
JP2007127350A (en) * 2005-11-04 2007-05-24 Nachi Fujikoshi Corp Small vacuum carburizing furnace

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60141822A (en) * 1983-12-28 1985-07-26 Chugai Ro Kogyo Kaisha Ltd Atmosphere heat treating furnace provided with vacuum vestibule
JPS6194550U (en) * 1984-11-26 1986-06-18

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60141822A (en) * 1983-12-28 1985-07-26 Chugai Ro Kogyo Kaisha Ltd Atmosphere heat treating furnace provided with vacuum vestibule
JPS6194550U (en) * 1984-11-26 1986-06-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100599256B1 (en) * 2004-10-11 2006-07-18 동우열처리공업 주식회사 Gas carburization heat treatment furnace with integral salt bath
JP2007127350A (en) * 2005-11-04 2007-05-24 Nachi Fujikoshi Corp Small vacuum carburizing furnace

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JPH0514025B2 (en) 1993-02-24

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