JPS63241972A - Gas laser device - Google Patents
Gas laser deviceInfo
- Publication number
- JPS63241972A JPS63241972A JP7661187A JP7661187A JPS63241972A JP S63241972 A JPS63241972 A JP S63241972A JP 7661187 A JP7661187 A JP 7661187A JP 7661187 A JP7661187 A JP 7661187A JP S63241972 A JPS63241972 A JP S63241972A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- electrodes
- discharge space
- pin electrode
- electric field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005684 electric field Effects 0.000 claims abstract description 10
- 238000007599 discharging Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000977 initiatory effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
[発明の目的]
(産業上の利用分野)
この発明はレーザ媒質としてのレーザガスを放電エネル
ギで励起してレーザ光を出力するガスレーザ装置に関す
る。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a gas laser device that excites a laser gas as a laser medium with discharge energy to output laser light.
(従来の技術)
一般に、大気圧あるいは高気圧横放電励起形のがスレー
ザ装置においては、レーザ管内に、たとえばCO2、N
2 、f−1eなどを混合したレーザガスやエキシマ用
のレーザガスが収容されているとともに、陽極と陰極と
からなる主1!極が離間対向して配設されている。そし
て、上記主電極間で発生する放電のエネルギによってレ
ーザガスを励起してレーザ光を発振させるとともに、上
記主電極間の放電に先立ってこれら主電極間の放電空間
部を予備電離装置で予備電離し、上記主電極間の放電が
発生しやすいようにしている。(Prior Art) Generally, in an atmospheric pressure or high pressure horizontal discharge excitation type laser device, for example, CO2, N,
2, a laser gas mixed with f-1e, etc., and a laser gas for excimer are accommodated, and the main 1! consists of an anode and a cathode. The poles are spaced apart and facing each other. The energy of the discharge generated between the main electrodes excites the laser gas to oscillate laser light, and the discharge space between the main electrodes is pre-ionized using a pre-ionization device prior to the discharge between the main electrodes. , so that discharge between the main electrodes is likely to occur.
上記予備電離装置としてはピン電極が知られている。す
なわち、端部を所定のギャップを介して離間対向させた
一対のピン電極を主電極の側方に一定間隔で配置し、こ
れらピン電極の端部間で放電を発生させ、その放電によ
って生じる紫外線などの波長の短い光で上記放電空間部
を予備電離するようにしている。A pin electrode is known as the above-mentioned preliminary ionization device. In other words, a pair of pin electrodes whose ends face each other with a predetermined gap in between are arranged at regular intervals on the sides of the main electrode, a discharge is generated between the ends of these pin electrodes, and the ultraviolet rays generated by the discharge are generated. The discharge space is pre-ionized with light having a short wavelength.
このような短波長光は高エネルギ放電によって効果的に
発生する。したがって、そのような短波長光を多く含む
発光は放電開始時に集中しており、とくに放電開始電圧
が高い場合に得られる。Such short wavelength light is effectively generated by high energy discharge. Therefore, such light emission containing a large amount of short wavelength light is concentrated at the time of discharge initiation, and is obtained particularly when the discharge initiation voltage is high.
高い放電開始電圧を得るためには、一対のピン電極間の
ギャップを大きくすることが考えられる。In order to obtain a high discharge starting voltage, it is conceivable to increase the gap between the pair of pin electrodes.
しかしながら、上記ギャップを大きくすると、放電の安
定性が損われるから、そのギャップをあまり大きくする
ことができない。However, if the gap is made large, the stability of the discharge will be impaired, so the gap cannot be made very large.
(発明が解決しようとする問題点)
このように、従来は^い放電開始電圧を得ることが難し
かったので、ピン電極による予備電離効果も十分得られ
なかった。(Problems to be Solved by the Invention) As described above, in the past, it was difficult to obtain a high discharge starting voltage, and therefore a sufficient preliminary ionization effect by the pin electrode could not be obtained.
この発明は上記事情にもとずきなされたもので、その目
的とするところは、一対のピン電極の端部間で生じる放
電の開始電圧を高めることによって、放電空間部の予備
電離を良好に行なえるようにしたガスレーザ装置を提供
することにある。This invention was made based on the above circumstances, and its purpose is to improve pre-ionization in the discharge space by increasing the starting voltage of the discharge that occurs between the ends of a pair of pin electrodes. An object of the present invention is to provide a gas laser device that can perform the following steps.
[発明の効果]
(問題点を解決するための手段及び作用)上記問題点を
解決するためにこの発明は、レーザ管と、このレーザ管
内に離間対向して配設された少なくとも一対の主電極と
、これら主電極間の放電空間部を上記主電極の放電によ
って励起する前に予備放電を発生して予備電離するピン
電極とを具備・し、このピン電極を予備放電時に平等電
界が得られる形状に形成し、それによって放電開始電圧
を高くする。[Effects of the Invention] (Means and Effects for Solving the Problems) In order to solve the above problems, the present invention provides a laser tube and at least a pair of main electrodes disposed in the laser tube in a spaced-apart manner. and a pin electrode that generates a preliminary discharge and pre-ionizes the discharge space between these main electrodes before exciting it with the discharge of the main electrode, and an equal electric field can be obtained during preliminary discharge with this pin electrode. shape, thereby increasing the discharge starting voltage.
(実施例) 以下、この発明の一実施例を図面を参照して説明する。(Example) An embodiment of the present invention will be described below with reference to the drawings.
第2図はガスレーザ装置を示し、このガスレーザ装置は
レーザ管1を備えている。このレーザ管1内には各種の
ガスを混合してなるレーザガスが収容されている。また
、レーザ管1内には一対の保持プレート2が上下方向に
離間対向して配設されている。上方の保持プレート2に
は陽極3が取付けられ、下方の保持プレート2には陰極
4が取付けられている。したがって、陽極3と陰極4と
は所定間隔で離間対向し、これらの間に放電空間部Sを
形成している。FIG. 2 shows a gas laser device, which includes a laser tube 1. As shown in FIG. This laser tube 1 contains a laser gas which is a mixture of various gases. Furthermore, a pair of holding plates 2 are disposed within the laser tube 1 so as to be spaced apart from each other in the vertical direction. An anode 3 is attached to the upper holding plate 2, and a cathode 4 is attached to the lower holding plate 2. Therefore, the anode 3 and the cathode 4 face each other at a predetermined interval, and a discharge space S is formed between them.
上記陽極3と陰極4との両側にはそれぞれ上部ピン電極
5と下部ピン電極6とがこれらの一端を所定の間隔で離
間対向させ、かつ上記一対の電極3.4の長手方向に沿
って一定間隔で配置されている。上記上部ピン電極5の
他端はピーキングコンデンサ7を介して上方の保持プレ
ート2に取付固定され、上記下部ピン電極6の他端は下
方の保持プレート2に取付固定されている。An upper pin electrode 5 and a lower pin electrode 6 are disposed on both sides of the anode 3 and cathode 4, respectively, with their one ends facing each other with a predetermined interval apart, and are constant along the longitudinal direction of the pair of electrodes 3.4. arranged at intervals. The other end of the upper pin electrode 5 is fixed to the upper holding plate 2 via the peaking capacitor 7, and the other end of the lower pin electrode 6 is fixed to the lower holding plate 2.
上記陽極3と陰極4とには高電圧スイッチ7a。A high voltage switch 7a is connected to the anode 3 and cathode 4.
主コンデンサ8および高電圧電源9が順次並列に接続さ
れている。したがって、上記高電圧スイッチ7aが閉じ
ると、主コンデンサ8に蓄えられたエネルギによって上
部ピン電極5と下部ピン電極6との間に放電が発生し、
その放電によって放電空間部Sが十分に予備電離される
と、陽極3と陰極4との間に主放電が発生し、レーザガ
スが励起されてレーザ光が全壁されるようになっている
。A main capacitor 8 and a high voltage power supply 9 are sequentially connected in parallel. Therefore, when the high voltage switch 7a is closed, the energy stored in the main capacitor 8 causes a discharge between the upper pin electrode 5 and the lower pin electrode 6.
When the discharge space S is sufficiently pre-ionized by the discharge, a main discharge is generated between the anode 3 and the cathode 4, the laser gas is excited, and the laser beam is completely irradiated.
上記上部ピン電極5と下部ピン電極6の端部は第1図に
示すように球形部11に形成されている。The ends of the upper pin electrode 5 and the lower pin electrode 6 are formed into spherical parts 11, as shown in FIG.
この球形部11はピン電極5.6の軸部12に比べて十
分大径に形成され、放電に際して上記軸部12が影響す
ることがないようにしている。すなわち、上記各ピン電
極5.6の端部は放電に際して平等電界が得られる形状
に形成されている。This spherical portion 11 is formed to have a sufficiently larger diameter than the shaft portion 12 of the pin electrode 5.6, so that the shaft portion 12 does not have any influence upon discharge. That is, the end portions of each of the pin electrodes 5.6 are formed in a shape that provides a uniform electric field during discharge.
このように、各ピン電極5.6の端部を平等電界が得ら
れる形状にしたことによって、上部ピン電極5と下部ピ
ン電極6との端部間のギャップを大きくしなくとも、放
電開始電圧を高くすることができる。すなわち、電界の
平等性と、放電開始電圧との関係は、第3図に示すよう
に明確な関連性があり、この発明の構造によれば同図に
aで示す範囲の平等性が得られるが、従来のようにピン
電極の端部を単にアール状にしたのでは同図にbで示す
範囲の゛平等性しか得られない。したがって、この発明
によれば、放電開始電圧が高くなることによって予備電
離時に発生する紫外線の波長をより短い領域にすること
ができるから、予備電離を効果的に行なうことができる
。In this way, by making the ends of each pin electrode 5.6 into a shape that allows an equal electric field to be obtained, the discharge starting voltage can be adjusted without increasing the gap between the ends of the upper pin electrode 5 and the lower pin electrode 6. can be made higher. In other words, there is a clear relationship between the equality of electric fields and the discharge starting voltage, as shown in Figure 3, and according to the structure of the present invention, equality within the range indicated by a in the figure can be obtained. However, if the ends of the pin electrodes are simply made into a rounded shape as in the conventional method, only the uniformity within the range indicated by b in the figure can be obtained. Therefore, according to the present invention, the wavelength of the ultraviolet rays generated during pre-ionization can be made into a shorter range by increasing the firing voltage, so that pre-ionization can be performed effectively.
なお、この発明は上記一実施例に限定されず、ピン電極
5.6の端部は第4図に示すようにロゴウスキー形状の
電極部15に形成してもよく、また図示はしないがチャ
ン形状などであってもよく、要は平等電界が得られる形
状であればよい。Note that the present invention is not limited to the above embodiment, and the end of the pin electrode 5.6 may be formed into a Rogowski-shaped electrode portion 15 as shown in FIG. The shape may be any shape as long as it can provide a uniform electric field.
[発明の効果]
以上述べたようにこの発明は、放電空間部を予備電離す
るためのピン電極を平等電界が得られる形状にした。し
たがって、上記ピン電極における放電開始電圧を高くで
きるから、放電空間を効率的に予備電離することができ
る短波長光を効果的に発生させることができる。[Effects of the Invention] As described above, in the present invention, the pin electrode for pre-ionizing the discharge space has a shape that allows a uniform electric field to be obtained. Therefore, since the discharge starting voltage at the pin electrode can be increased, it is possible to effectively generate short wavelength light that can efficiently pre-ionize the discharge space.
第1図はこの発明の一実施例を示すピン電極の端部の拡
大図、第2図はガスレーザ装置全体の構成図、第3図は
放N開始電圧と電界の平等性との関係の説明図、第4図
はこの発明の他の実施例を示すピン電極の端部の拡大図
である。
1・・・レーザ管、3・・・陽極、4・・・陰極、5.
6・・・ピン電極、11・・・球形部。
出願人代理人 弁理士 鈴 江 武 産業1図
第4図
第2因Fig. 1 is an enlarged view of the end of a pin electrode showing an embodiment of the present invention, Fig. 2 is a configuration diagram of the entire gas laser device, and Fig. 3 is an explanation of the relationship between the discharge N start voltage and the equality of the electric field. FIG. 4 is an enlarged view of the end of a pin electrode showing another embodiment of the present invention. 1... Laser tube, 3... Anode, 4... Cathode, 5.
6... Pin electrode, 11... Spherical part. Applicant's agent Patent attorney Takeshi Suzue Industry 1 diagram
Figure 4 2nd cause
Claims (1)
少なくとも一対の主電極と、これら主電極間の放電空間
部を上記主電極の放電によって励起する前に予備放電を
発生して予備電離するピン電極とを具備し、このピン電
極は予備放電時に平等電界が得られる形状に形成されて
いることを特徴とするガスレーザ装置。A laser tube, at least one pair of main electrodes disposed in the laser tube in a spaced-apart manner, and a discharge space between these main electrodes that is pre-ionized by generating a preliminary discharge before exciting the discharge space between the main electrodes by the discharge of the main electrodes. 1. A gas laser device comprising: a pin electrode, the pin electrode being formed in a shape that allows a uniform electric field to be obtained during preliminary discharge.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7661187A JPS63241972A (en) | 1987-03-30 | 1987-03-30 | Gas laser device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7661187A JPS63241972A (en) | 1987-03-30 | 1987-03-30 | Gas laser device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63241972A true JPS63241972A (en) | 1988-10-07 |
Family
ID=13610137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7661187A Pending JPS63241972A (en) | 1987-03-30 | 1987-03-30 | Gas laser device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63241972A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01191486A (en) * | 1988-01-27 | 1989-08-01 | Komatsu Ltd | Reserve ionizing electrode of laser |
-
1987
- 1987-03-30 JP JP7661187A patent/JPS63241972A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01191486A (en) * | 1988-01-27 | 1989-08-01 | Komatsu Ltd | Reserve ionizing electrode of laser |
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