JPS63221541A - Liquid metal ion source - Google Patents
Liquid metal ion sourceInfo
- Publication number
- JPS63221541A JPS63221541A JP5373187A JP5373187A JPS63221541A JP S63221541 A JPS63221541 A JP S63221541A JP 5373187 A JP5373187 A JP 5373187A JP 5373187 A JP5373187 A JP 5373187A JP S63221541 A JPS63221541 A JP S63221541A
- Authority
- JP
- Japan
- Prior art keywords
- needle
- anode
- ion source
- liquid metal
- reservoir
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001338 liquidmetal Inorganic materials 0.000 title claims abstract description 17
- 239000000919 ceramic Substances 0.000 claims abstract description 15
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 12
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims description 16
- 238000000605 extraction Methods 0.000 claims description 5
- 230000005684 electric field Effects 0.000 claims description 4
- 239000000155 melt Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 12
- 238000002844 melting Methods 0.000 abstract description 8
- 239000012212 insulator Substances 0.000 abstract description 7
- 238000010884 ion-beam technique Methods 0.000 abstract description 7
- 230000008018 melting Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 4
- 239000002184 metal Substances 0.000 abstract description 4
- 238000005260 corrosion Methods 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 238000003754 machining Methods 0.000 abstract description 3
- 229910052742 iron Inorganic materials 0.000 abstract description 2
- 238000005245 sintering Methods 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 28
- 239000010405 anode material Substances 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- -1 In particular Inorganic materials 0.000 description 2
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 2
- 229910033181 TiB2 Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 229910052580 B4C Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910007948 ZrB2 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009760 electrical discharge machining Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 229910021397 glassy carbon Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 239000005300 metallic glass Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 210000002784 stomach Anatomy 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000003325 tomography Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 150000003754 zirconium Chemical class 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、イオン源に関し、特に反応性の強い物質を使
用する目的で針状陽極材料を選択した液体金属イオン源
に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to an ion source, and particularly to a liquid metal ion source in which a needle-like anode material is selected for the purpose of using highly reactive substances.
（従来の技術と問題点）
高輝度で微少径のイオンビームが得られる液体金属イオ
ン源は、マスクレスイオン注入、イオンビームエツチン
グ、微少面積の薄膜作成等、種々の微細加工技術への利
用が期待されている。(Conventional technology and problems) Liquid metal ion sources, which can obtain high-intensity ion beams with minute diameters, can be used for various microfabrication techniques such as maskless ion implantation, ion beam etching, and the creation of thin films with minute areas. It is expected.
液体金属イオン源においては、針状陽極材料の選択は非
常に重要であり、イオン源の寿命に最も強く影響を及ぼ
す。In liquid metal ion sources, the selection of the acicular anode material is very important and has the strongest effect on the lifetime of the ion source.
特に、反応性の強い溶融物質（例えば、Ａｌ。In particular, highly reactive molten substances (e.g. Al.
Ｂ等）を使用する液体金属イオン源の場合には、溶融物
質と針状陽極材料の反応が容易に進行するため、針状先
端部の材料の消耗のため、液体金属イオン源の寿命が著
しく短縮される。In the case of a liquid metal ion source using a liquid metal ion source (such as B), the reaction between the molten substance and the needle-shaped anode material progresses easily, and the life of the liquid metal ion source is significantly shortened due to the consumption of the material at the needle-shaped tip. be shortened.
従来の針状陽極材料としては、Ｗ、 Ｔ ａ、 Ｍ。Conventional needle-shaped anode materials include W, Ta, and M.
等の高融点金属材料のほかに、特開昭５７−１９１９５
０号公報はＴｔ、Ｚｒ、Ｈｆ、Ｖ、ＮｂおよびＴａの中
から選ばれた少なくとも１種の元素の炭化物、窒化物も
しくは二硼化物または原子番号５７から７０までの希土
類金属元素の少なくとも１種の元素の六硼化物の単結晶
を挙げ、また特開昭５８−１５８８３８号公報は炭素、
特にグラッシーカーボンを挙げ、また特開昭５９−３１
５４２号公報はシリコンカーバイドを挙げ、また、特開
昭５８−４６５４２号公報は、Ｔｉの硼化物。In addition to high melting point metal materials such as JP-A-57-19195
Publication No. 0 discloses a carbide, nitride, or diboride of at least one element selected from Tt, Zr, Hf, V, Nb, and Ta, or at least one rare earth metal element with an atomic number of 57 to 70. JP-A-58-158838 discloses a single crystal of hexaboride of the element carbon,
In particular, glassy carbon is cited, and JP-A-59-31
No. 542 mentions silicon carbide, and JP-A-58-46542 mentions boride of Ti.
ＢＮとＴｉＢ２の複合硼化物、Ｔｉの炭化物を挙げてい
る。A composite boride of BN and TiB2 and a carbide of Ti are listed.
更に特開昭６１−２３７３２８号公報はＣｒ、Ｍｏ、
Ｗの炭化物または硼化物、特開昭６１−２３７３２７号
公報はボロンカーバイドまたはシリコンポライドもしく
はこれらの複合物を挙げている。Furthermore, JP-A-61-237328 discloses Cr, Mo,
Regarding the carbide or boride of W, JP-A-61-237327 mentions boron carbide, silicon poride, or a composite thereof.
しかしこれらの針状陽極材料は、後記する如く問題点が
多く、実用化は困難である。However, these acicular anode materials have many problems as described later, and are difficult to put into practical use.
例えば、特開昭５７−１９１９５０号公報の挙げた、Ｔ
ｉｔ Ｚｒｔ ｆ（ｆ、 Ｖ、 Ｎｂ、 および
Ｔａ等の高融点金属材料の硼化物、炭化物、窒化物の単
結晶は製造が難しく、良質な結晶を得にくい。For example, T
Single crystals of borides, carbides, and nitrides of high-melting point metal materials such as V, Nb, and Ta are difficult to manufacture, and it is difficult to obtain high-quality crystals.
またそのコストも高くて工業的利用価値は低い。Moreover, its cost is high and its value for industrial use is low.
また、他の文献にある炭素および炭化物も、例えば反応
性の強いアルミニウムイオン源の場合は溶融アルミニウ
ムと６５０℃以上で反応を起こし、Ａｌ１４Ｃ３を生成
する。Ａｌｌ液体金属イオン源の動作温度は約７５０〜
９００℃であるから、炭素および炭化物の針状陽極材料
は、溶融Ａｌと反応を起こして消耗し寿命が短縮される
、かまたは消耗しないまでも生成された不純物が針状先
端部に流れてきて、イオンビームを不安定にしたり、ビ
ームの放出をストップさせたり種々の不都合を生じる。Further, carbon and carbides described in other documents also react with molten aluminum at 650° C. or higher to produce Al14C3, for example, in the case of a highly reactive aluminum ion source. The operating temperature of the All liquid metal ion source is approximately 750~
Since the temperature is 900°C, the needle-shaped anode material made of carbon and carbide will either react with the molten Al and be consumed, shortening its lifespan, or even if it is not consumed, the impurities generated will flow into the needle tip. This causes various problems such as making the ion beam unstable or stopping the beam emission.
従って、炭素および炭化物は針状陽極部材としては適当
ではない。Therefore, carbon and carbides are not suitable as needle-shaped anode members.
これに対し、特開昭５８−４６５４２号公報には溶！Ａ
ｕに耐性のある針状陽極部材としてＴｉの硼化物、ＢＮ
、ＴｉＢ２系の複合硼化物を挙げ、特開昭８１−２３７
３２８号公報はＣｒ、Ｍｏ。On the other hand, Japanese Patent Application Laid-open No. 58-46542 discloses that ! A
Boride of Ti, BN as a needle-like anode member resistant to u
, a TiB2-based composite boride, and JP-A-81-237
No. 328 discloses Cr, Mo.
Ｗの硼化物を挙げて、これらが耐食性の点で侵れること
を述べている。It mentions boride of W and states that these are effective in terms of corrosion resistance.
前者は、陽極先端部を針状にする場合に、化学研磨加工
または電界断層加工で製造することを記述しているが、
この方法では実際上製作が難しく且つ量産的ではない。The former describes that when the anode tip is made into a needle shape, it is manufactured by chemical polishing or electric field tomography.
This method is actually difficult to manufacture and is not suitable for mass production.
また、この方法では硼化物の焼結体はボロボロになり、
針状に出来ないことが明かである。また後者の場合は、
針状陽極材料には、高熱伝導率、低抵抗値が望まれるが
、これらの点で必ずしも優れていない。In addition, with this method, the boride sintered body becomes crumbly,
It is clear that it cannot be made into a needle shape. Also, in the latter case,
Acicular anode materials are desired to have high thermal conductivity and low resistance, but they are not necessarily excellent in these respects.
（発明の目的）
本発明は、上記の問題を解決し、反応性の強い溶融物質
を登載し、長寿命で安定なイオンビームを効率よく発生
することの出来る液体金属イオン源の提供を目的とする
。(Objective of the Invention) The purpose of the present invention is to solve the above problems and provide a liquid metal ion source that can load a highly reactive molten substance and efficiently generate a stable ion beam with a long life. do.
（問題を解決するための手段）
本発明は、イオン化すべき物質を溶融させ保持する溜め
部と１．該溜め部から溶融物質が供給される針状先端部
を持つ針状陽極と、該針状先端部に強電界を形成するた
めの陰極とを備えた液体金属イオン源において、該針状
陽極を硼化ジルコニウムを含むセラミックスで構成した
液体金属イオン源によって前記目的を達成したものであ
る。(Means for Solving the Problems) The present invention provides a reservoir portion for melting and retaining a substance to be ionized; In a liquid metal ion source comprising a needle-like anode having a needle-like tip to which a molten substance is supplied from the reservoir, and a cathode for forming a strong electric field in the needle-like tip, the needle-like anode is The above object has been achieved by using a liquid metal ion source made of ceramics containing zirconium boride.
（実施例） 以下、本発明を実施例によって詳細に説明する。(Example) Hereinafter, the present invention will be explained in detail with reference to Examples.
第１図は本発明の実施例であり、碍子１はセラミックス
製の絶縁体である。２，２′はイオン源を固定する２本
のステムで、例えば、コバールで作られ、適当な間隔て
碍子１に銀ロウ、金属ガラスなどで溶着されている。３
，３′はリザーバ支持兼ヒーターで、タングステン、タ
ンタル、モリブデン等の高融点金属細線で形成し、リザ
ーバ４に巻き付けてステム２，２′にスポット溶接され
ている。リザーバ４は、溶融物質との反応性の低い材料
、例えば、セラミックスやボロンナイトライドで出来て
いる。場合によっては、高融点金属材料（Ｗ、 Ｔａ
、 Ｍｏ、 Ｔ ｉ等）のリザーバの表面に、ＣＶＤ
法、・スパッタ法または電解析出法で、セラミックスを
被覆した構造のものでもよい。リザーバ４の底部には細
孔５、上部には細孔６がおいており両線孔５，６を、先
端の頂角３０〜６００、゛先端の半径を１〜’ｉｏ１ｔ
ｍに機械研石した針状陽極７が貫通している。 針状
陽極７の、上部の細孔６から上方に突き出た部分は陽極
固定部材８の一端に固定され、陽極固定部材８の他端は
碍子１に固定されている。FIG. 1 shows an embodiment of the present invention, in which the insulator 1 is a ceramic insulator. Reference numerals 2 and 2' designate two stems for fixing the ion source, which are made of Kovar, for example, and are welded to the insulator 1 at appropriate intervals using silver solder, metallic glass, or the like. 3
, 3' are reservoir supports and heaters, which are made of fine wires of high melting point metals such as tungsten, tantalum, molybdenum, etc., and are wound around the reservoir 4 and spot welded to the stems 2 and 2'. The reservoir 4 is made of a material with low reactivity with the molten substance, such as ceramics or boron nitride. In some cases, high melting point metal materials (W, Ta
, Mo, Ti, etc.) on the surface of the reservoir.
The structure may be coated with ceramics using a sputtering method or an electrolytic deposition method. The reservoir 4 has a small hole 5 at the bottom and a small hole 6 at the top.
A mechanically ground needle-like anode 7 passes through the hole. The portion of the needle-shaped anode 7 that protrudes upward from the upper pore 6 is fixed to one end of an anode fixing member 8, and the other end of the anode fixing member 8 is fixed to the insulator 1.
ステム２，２′には、加速電源（図示せず）の電圧上に
フロートした加熱電源（図示せず）が接続されてリザー
バ支持兼ヒーター３，３′を加熱し、リザーバ４に入れ
られたイオン化すべき物質９を溶融している。A heating power source (not shown) floating on the voltage of an accelerating power source (not shown) is connected to the stems 2, 2' to heat the reservoir support/heater 3, 3', which is placed in the reservoir 4. The substance 9 to be ionized is melted.
陰極（イオン引出し電極）１０はイオン引出し電源（図
示せず）に接続されている。針状陽極７とイオン引出し
電極１０の間には、５〜１５ｋＶの電圧が印加され、こ
れによって針状陽極７の先端部にイオンが電界放出可能
なまでの高電界が形成される。The cathode (ion extraction electrode) 10 is connected to an ion extraction power source (not shown). A voltage of 5 to 15 kV is applied between the acicular anode 7 and the ion extraction electrode 10, thereby forming a high electric field at the tip of the acicular anode 7 to the extent that ions can be field-emitted.
なお、これらとアース電位との間には使用目的に応じて
数ｋＶ〜２００ ｋ Ｖ程度のイオン加速電圧が印加さ
れる。Note that an ion accelerating voltage of about several kV to 200 kV is applied between these and the earth potential depending on the purpose of use.
本発明では、上記の針状陽極７の材料として硼化ジルコ
ニウム系セラミックスを採用した。この硼化ジルコニウ
ム系セラミックスはホットプレス法または常圧焼結法を
用いて作られ、ＺｒＢ２の成型体を形成している。その
相対密度が９９％以上の高純度材料が容易にしかも多量
に得られる。In the present invention, zirconium boride ceramics is used as the material for the needle-like anode 7. This zirconium boride ceramic is made using a hot press method or an atmospheric pressure sintering method, and forms a molded body of ZrB2. A high purity material with a relative density of 99% or more can be easily obtained in large quantities.
また陽極先端の、先端半径１〜１０μｍ、先端角度３０
〜６０”の針状加工も、放電加工もしくは機械加工で容
易に且つ再現性よく製作でき、従来の針状陽極材料に較
べて量産的であり、工業的実用性に富んでいる。In addition, the tip radius of the anode tip is 1 to 10 μm, and the tip angle is 30 μm.
A ~60'' needle can also be manufactured easily and reproducibly by electrical discharge machining or machining, and compared to conventional needle-shaped anode materials, it can be mass-produced and is more industrially practical.
しかも、硼化ジルコニウム系セラミックスは、金属とセ
ラミックスの性質を併せもち、電気抵抗値は鉄と同等で
あって、比抵抗値１０−５Ω−ａｍと低く、熱伝導率も
０． １８〜０． ２０２ （Ｃａｌ／Ｃｍ−８ｅＣ・
℃）であって比較的高く、融点も３０６０℃であって非
常に高い。従来の硼化物系材料の中でも特に優れた特徴
を持っていることがわかる。また溶融金属との濡れ性お
よび耐食性も他の前記文献の硼化物に較べて格段に良い
。Moreover, zirconium boride ceramics have both the properties of metal and ceramics, have an electrical resistance value equivalent to that of iron, a low specific resistance value of 10-5 Ω-am, and a thermal conductivity of 0. 18-0. 202 (Cal/Cm-8eC・
The melting point is 3060°C, which is relatively high. It can be seen that it has particularly excellent characteristics compared to conventional boride-based materials. Furthermore, the wettability with molten metal and corrosion resistance are much better than the borides described in the other documents mentioned above.
そのことを実験の結果によってさらに詳しく説明する。This will be explained in more detail using experimental results.
溶ＷＩ！物質には配線材料として特に利用価値が高く且
つイオン化物質として最も反応性の強いＡｌｌを選んで
第１図のような構成で実験を行なった。Molten WI! For the material, we selected Al, which has a particularly high utility value as a wiring material and has the highest reactivity as an ionizable substance, and conducted experiments with the configuration shown in FIG. 1.
硼化ジルコニウム系セラミックスと溶融Ａｌとの濡れは
、本願の発明者が特願昭６０−２１７３６５号公報「イ
オン源」に開示している、これまで最も成績の良かった
針状陽極材料（Ｐ Ｂ Ｎ）に較べてもそれ以上であり
、従って、Ａｌイオン源として機能するまでに要する時
間はＰＢＮ針状陽極を用いる場合の１０分の１以下にな
り、しかも歩留りは５倍以上に向上することが判った。Wetting of zirconium boride-based ceramics with molten Al was achieved using the acicular anode material (P B Therefore, the time required to function as an Al ion source is less than one-tenth that of using a PBN needle-shaped anode, and the yield is improved by more than five times. It turns out.
また、硼化ジルコニウム系セラミックスと溶融Ａｌとの
反応は、第２図に示した該Ａｌイオン源から放出された
イオンの質量スペクトル分析結果から、陽極材料の溶出
による不純物ピークは観測されず、またこのイオン源の
寿命も５００時間以上と長く、極めて安定に動作してい
るところから、硼化ジルコニウム系セラミックスと溶融
Ａｌは殆んど反応していないと言うことが出来る。Furthermore, regarding the reaction between zirconium boride ceramics and molten Al, the mass spectrometry analysis of ions emitted from the Al ion source shown in Figure 2 shows that no impurity peaks due to elution of the anode material were observed. Since this ion source has a long life of over 500 hours and operates extremely stably, it can be said that there is almost no reaction between the zirconium boride ceramics and molten Al.
このように、種々の点から、従来の針状陽極に較べて優
れていることが判明した。As described above, it has been found that this electrode is superior to conventional needle-shaped anodes in various respects.
次に、Ａ１よりも一層反応性が高く、ドーピング材料と
して利用価値の高いＢ（硼素）に対しても実験を行なっ
た。Next, experiments were also conducted on B (boron), which has higher reactivity than A1 and is highly useful as a doping material.
ここで、Ｂそのものでは融点が高く、蒸気圧が高いので
、他の物質と混ぜ合わせて作ったＢの合金をイオン化物
質としたが、ここでも前記のＡｕイオン源と同様な好い
結果を得ている。Here, since B itself has a high melting point and high vapor pressure, we used an alloy of B mixed with other substances as the ionizing material, but we obtained the same good results as the Au ion source described above. There is.
上記では、ＡｌおよびＢ系合金を用いて説明をした力士
、硼化ジルコニウム系セラミックス針状陽極をよく濡ら
し、かつ反応しにくい材料は上記のＡＱ、やＢに限定さ
れず多くの種類の液体金属イオン源に用いることが出来
る。い。In the above, the sumo wrestlers explained using Al and B-based alloys, and the materials that wet the zirconium boride-based ceramic needle anode well and are difficult to react with are not limited to the above AQ and B, but include many types of liquid metals. Can be used as an ion source. stomach.
（発明の効果）
本発明の液体金属イオン源は、反応性の強い物質を含む
物質の、長寿命で安定なイオンビームな効率よく発生す
ることが出来るイオン源を提供する効果がある。(Effects of the Invention) The liquid metal ion source of the present invention has the effect of providing an ion source that can efficiently generate long-life, stable ion beams of substances including highly reactive substances.
第１図は、本発明の実施例の液体金属イオン源の正面断
面図。
第２図は本発明のＡｌイオン源の質量スペクトルの１例
である。
Ｉ・・・碍子、２，２′・・・ステム、 ３，３′・
・・リザーバ兼ヒーター、４・・・リザーバ、５，６・
・・穴、７・・・針状陽極、８・・・針状陽極固定部材
、９・・・イオン化物質、１０・・・引出し電極。FIG. 1 is a front sectional view of a liquid metal ion source according to an embodiment of the present invention. FIG. 2 is an example of a mass spectrum of the Al ion source of the present invention. I...Insulator, 2,2'...Stem, 3,3'...
... Reservoir and heater, 4... Reservoir, 5, 6.
... Hole, 7... Needle-shaped anode, 8... Needle-shaped anode fixing member, 9... Ionized substance, 10... Extraction electrode.
Claims (1)
リザーバ）と、該溜め部から溶融物質が供給される針状
先端部を持つ針状陽極と、該針状先端部に強電界を形成
するための陰極（引出し電極）とを備えた液体金属イオ
ン源において、 該針状陽極を硼化ジルコニウムを含むセラミックスで構
成したことを特徴とする液体金属イオン源。(1) A reservoir that melts and holds the substance to be ionized (
A liquid metal ion comprising a reservoir), a needle-like anode having a needle-like tip to which a molten substance is supplied from the reservoir, and a cathode (extraction electrode) for forming a strong electric field at the needle-like tip. 1. A liquid metal ion source, wherein the needle-shaped anode is made of ceramics containing zirconium boride.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5373187A JPS63221541A (en) | 1987-03-09 | 1987-03-09 | Liquid metal ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5373187A JPS63221541A (en) | 1987-03-09 | 1987-03-09 | Liquid metal ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63221541A true JPS63221541A (en) | 1988-09-14 |
Family
ID=12950974
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5373187A Pending JPS63221541A (en) | 1987-03-09 | 1987-03-09 | Liquid metal ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63221541A (en) |
-
1987
- 1987-03-09 JP JP5373187A patent/JPS63221541A/en active Pending
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