JPS63177990A - Misalignment detector for optical axis in nozzle - Google Patents
Misalignment detector for optical axis in nozzleInfo
- Publication number
- JPS63177990A JPS63177990A JP62009257A JP925787A JPS63177990A JP S63177990 A JPS63177990 A JP S63177990A JP 62009257 A JP62009257 A JP 62009257A JP 925787 A JP925787 A JP 925787A JP S63177990 A JPS63177990 A JP S63177990A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- laser beam
- optical axis
- nozzle
- microholes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 29
- 238000001514 detection method Methods 0.000 claims abstract description 11
- 239000006096 absorbing agent Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000005070 ripening Effects 0.000 description 1
Landscapes
- Laser Beam Processing (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はレーザ加工装置におけるレーザ加工ノズルの
中心に対しレーザビームの光軸ずれを検出する装置１１
こ関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a device 11 for detecting optical axis deviation of a laser beam with respect to the center of a laser processing nozzle in a laser processing device.
This is related to this.
従来、特開昭６０−１７５４７５号公報や特開昭６０−
１７６２８４号公報に開示されてＡるレーザ強度吹出器
は、ＪＰ：電対を直接レーザビームの周囲に２対対抗し
て配置してめる。Previously, JP-A-60-175475 and JP-A-60-
A laser intensity blower disclosed in Japanese Patent No. 176284 has two pairs of JP:electrons arranged directly around the laser beam in opposition to each other.
従来の装置は以上のように構成されているので、レーザ
ビームがレーザ強度検出器に直接あたりレーザ強度検出
器が規損したり、高速度嘉感度のレーザ強度検出器が使
用出来ない欠点があり、また、熟成対の位置精度が悪Ａ
等の問題点があった。Since the conventional device is configured as described above, there are drawbacks such as the laser beam directly hitting the laser intensity detector, causing damage to the laser intensity detector, and the inability to use a high-speed, high-sensitivity laser intensity detector. In addition, the positional accuracy of the ripening pair is poor A.
There were problems such as.
この発明は上記の様な問題点を解消する為になされたも
ので、レーザビームの光軸ずれを高精度に検出できるノ
ズル光軸ずれ検出装置を得ることを目的とする。This invention has been made to solve the above-mentioned problems, and it is an object of the present invention to provide a nozzle optical axis deviation detection device that can detect optical axis deviation of a laser beam with high precision.
この発明に係るノズル光軸ずれ検出装置は、レーザビー
ムの周囲の弱い部分を検出することによりレーザビーム
の光軸ずれを検出するようにしたものである。The nozzle optical axis deviation detection device according to the present invention detects the optical axis deviation of a laser beam by detecting a weak portion around the laser beam.
この発明におけるノズル光軸ずれ検出装置はレーザビー
ムのずれを検出しそのずれ量を表示る。The nozzle optical axis deviation detection device in this invention detects the deviation of the laser beam and displays the amount of deviation.
以下、この発明の一実施例を図について説明する。 An embodiment of the present invention will be described below with reference to the drawings.
第１図においてレーザビーム（１）は加工レンズ（２）
により集光され、また酸素等の加工ガスをノズｙ（６）
からレーザビーム（１）と同軸状餐こ吹き出して、焦点
位＠（３）におＡで被那工物（４）ヲレーザ加工する。In Figure 1, the laser beam (1) is connected to the processing lens (2).
The light is focused by the nozzle y (6), and the processing gas such as oxygen is
A beam coaxial with the laser beam (1) is blown out from the laser beam (1), and the workpiece (4) is laser-processed at the focal point @(3) using A.
ノズル光軸ずれ検出装置（７）はノズＭの直前において
レーザビーム（１］の周囲の弱いレーザビームを検出す
る。A nozzle optical axis deviation detection device (7) detects a weak laser beam around the laser beam (1) immediately in front of the nozzle M.
レーザビーム（１）は第２図れ）のようにシングルモー
ド、すなわちガウシャン分布をしているとすればレーザ
ビームの強度工は中心からの距離ｒに対して指数関数的
に減衰する。レーザビーム（１）の半径をω、レーザビ
ーム（１）のパワーをＱとすると、工＝（２Ｑ７ｇω）
ｅｘ’ｐ（−ｚｒ”／ω２）となる。If the laser beam (1) has a single mode, that is, a Gaussian distribution, as shown in Fig. 2, the intensity of the laser beam attenuates exponentially with respect to the distance r from the center. If the radius of the laser beam (1) is ω and the power of the laser beam (1) is Q, then E = (2Q7gω)
ex'p(-zr''/ω2).
Ｖ−ザビーム（１）は中心から離れるにつれてその弾度
は弱くなるが変化の比率は同じであるので、感度の高め
レーザビーム検出器を使用することにより光軸ずれを高
精度に検出することができる。The elasticity of V-the beam (1) weakens as it moves away from the center, but the rate of change remains the same, so optical axis deviation can be detected with high precision by using a highly sensitive laser beam detector. can.
例工ばレーザビーム（１）が中心を通っていて（８ａ）
（８１）） ｉｎ：ｆ’＞ケるＶ−ザビーＡ（１）ｆ７
）強度（１０ａ）（１０’ｂ）は同じ強度であるが、レ
ーザビーム（１）がずれてＣ１１ａ） （ｌｌｂ） ニ
なったとき（１２ａ） （１２’ｂ） ノようにその強
度に差ができ、レーザビーム（１）の光軸ずれを検出で
きる。For example, if the laser beam (1) passes through the center (8a)
(81)) in:f'>KeruV-ThebeeA(1)f7
) The intensities (10a) and (10'b) are the same, but when the laser beam (1) shifts and becomes C11a) (llb) (12a) (12'b), there is a difference in the intensity. The optical axis deviation of the laser beam (1) can be detected.
また、第２図中）はノズル光軸ずれ検出器＠（７）の横
断面図である。2) is a cross-sectional view of the nozzle optical axis deviation detector @(7).
レーザビーム（１）の周辺強度を反射鏡側により水平方
向に反射し、レーザ光吸収体（至）に設けられた穴α滲
を通過することにより１部分を取り出しレーザ強度検出
器（至）の受光面積に合ったビームを取り出す。The peripheral intensity of the laser beam (1) is reflected in the horizontal direction by the reflecting mirror side, and one portion is taken out by passing through the hole α provided in the laser beam absorber (to) and placed on the laser intensity detector (to). Extracts a beam that matches the receiving area.
対向して設けられ直交する２対のＶ−ザ強度検出器（ト
）により検出された信号はレーザビーム（１）の光軸ず
れにより異なる出力をするので光軸ずれを検出すること
ができる。レーザ強度検出器（至）は熱電対または箔膜
レーザセンサ、ＨｇＱＩＴｅ センサ、パイロエレクト
リックセンサ等の高速応答で高感度のセンサを使用する
。The signals detected by the two pairs of V-laser intensity detectors (g) that are disposed facing each other and orthogonal to each other have different outputs depending on the optical axis deviation of the laser beam (1), so that the optical axis deviation can be detected. The laser intensity detector uses a fast-response, high-sensitivity sensor such as a thermocouple or foil film laser sensor, HgQITe sensor, or pyroelectric sensor.
第８図においてレーザ強度検出器（至）の信号を増幅器
（１６により増幅し対抗するレーザ強度検出器（至）の
信号を差動増幅器αη（至）により差電圧を増幅しメー
タなどの表示器ａ傷（１）によりレーザ光の光軸ずれ量
を表示する。In Fig. 8, the signal of the laser intensity detector (to) is amplified by an amplifier (16), the signal of the opposing laser intensity detector (to) is amplified by a differential amplifier αη (to), and the differential voltage is amplified to display the signal on a meter or other display. The amount of optical axis deviation of the laser beam is displayed by the a scratch (1).
この表示器αｌ（イ）によりレーザビーム（１）がノズ
ルの中心とレーザ光軸の中心をあわせる調整を容易に行
うことができる。ノズルの光軸を調整するにはねじ■を
回すことにより行う。対抗するレーザ強度検出器α９の
信号を加算増幅器（至）（至）により軍圧ヲ７Ｉｌ］算
増幅しメータなどの表示器＠（ハ）によりレーザ光の強
度とビーム径を知ることができる。これによりレーザビ
ーム（１）の状態を知ることができる。This indicator αl (a) allows the laser beam (1) to be easily adjusted to align the center of the nozzle with the center of the laser optical axis. Adjust the optical axis of the nozzle by turning the screw ■. The signal from the opposing laser intensity detector α9 is amplified by the summing amplifier (to) (to) (to), and the intensity and beam diameter of the laser beam can be known from a display such as a meter (c). This allows the state of the laser beam (1) to be known.
第４図はレーザ光軸ずれ自動調整装置の一例を示す。FIG. 4 shows an example of an automatic laser optical axis shift adjustment device.
レーザ発振器のから出力されたレーザビームを反射鏡＠
（至）（至）により伝送し加工レンズ（２）に導き破加
工物（４）をレーザ加工する。ノズル（６）の近傍にノ
ズル光軸ずれ検出装置（７）をもうけ、光軸ずれ自動調
整装置翰とモータコントローラー四により加工ヘッド（
至）に直行する方向に取り付けられたモータ（至）Ｃ３
１）！こよりノズル（６）の位置を制御してノズル（６
）の中心にレーザビーム（１〕を自動的に一致させるこ
とができる。そのため常に最適のレーザ加工を行うこと
が出来る。A mirror that reflects the laser beam output from the laser oscillator @
(to) (to) is transmitted and guided to the processing lens (2) to laser-process the broken workpiece (4). A nozzle optical axis deviation detection device (7) is provided near the nozzle (6), and the processing head (
Motor (to) C3 installed in the direction perpendicular to (to)
1)! This controls the position of the nozzle (6).
) can be automatically aligned with the center of the laser beam (1).Therefore, optimal laser processing can be performed at all times.
以上のように、この発明によればレーザ光軸ずれを高精
度に検出できそのずれ量を表示するので、光軸調整が容
易にできる最適のレーザ加工を行うことが出来るノズル
光軸ずれ検出装置を得ろことが出来る効果がある。As described above, according to the present invention, the nozzle optical axis deviation detection device can detect the laser optical axis deviation with high precision and display the amount of deviation, so that the optical axis can be easily adjusted and the optimum laser processing can be performed. There is an effect that can be obtained.
第１図及び第２図はこの発明の一実施例による動作を説
明するための図、第３図はレーザ光軸ずれを表示する装
置の一例図、第４図はこの発明の他の実施例を示す図で
ある。
図にお＾て、（１）はレーザビーム、（２）はレンズ、
（３）は焦点、（４）は被加工物、（５）は加工ガス、
（６）はノズル、（７）はノズル光軸ずれ検出装置、α
３は反射鏡、α→は穴、（１５ａ） （１５１）） （
１５０） （１５ｄ） ｉ、ｔ Ｖ−４強度検出器、α
ｅは増備器、α７Ｉ０８）は作動増嘔器、じ（イ）ＣＤ
のは表示器、（イ）鏝は加算層］＠器、（ホ）（ハ）（
至）は反射鏡、勾は自動光軸ρ４整装置、■四はモータ
駆動装置、■６引よモータ、（至）はレーザ光吸収体、
翰はねじである。
なお、図中、同一符号は同一、又は相当部分を示す。1 and 2 are diagrams for explaining the operation of one embodiment of the present invention, FIG. 3 is a diagram of an example of a device for displaying laser optical axis deviation, and FIG. 4 is another embodiment of the present invention. FIG. In the figure, (1) is the laser beam, (2) is the lens,
(3) is the focal point, (4) is the workpiece, (5) is the processing gas,
(6) is the nozzle, (7) is the nozzle optical axis deviation detection device, α
3 is a reflecting mirror, α→ is a hole, (15a) (151)) (
150) (15d) i, t V-4 intensity detector, α
e is an increaser, α7I08) is an actuated increaser, and J(a)CD
is the indicator, (a) the trowel is the addition layer] @ device, (e) (c) (
(to) is a reflector, (to) is an automatic optical axis ρ4 adjustment device, (4) is a motor drive device, (6) is a motor, (to) is a laser light absorber,
The kiln is a screw. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (3)
により集光し切断、溶接などのレーザ加工をするレーザ
加工装置において焦点位置の直前においてレーザビーム
の周囲にレーザビーム反射鏡、直交する点が中心を通る
位置に配置され反射レーザビームを通過させる２対の微
***を有するレーザ光吸収体、及び微***を通過したレ
ーザビームを検出するレーザ強度検出器を備えることを
特徴とするノズル光軸ずれ検出装置。(1) In a laser processing device that focuses the laser beam output from a laser oscillator using a lens and performs laser processing such as cutting and welding, a laser beam reflector is placed around the laser beam immediately before the focal point, and the orthogonal point is centered. Detection of nozzle optical axis deviation, characterized by comprising: a laser light absorber having two pairs of microholes arranged at a position through which the reflected laser beam passes; and a laser intensity detector that detects the laser beam that has passed through the microholes. Device.
直行するレーザ強度検出器の信号の差をそれぞれ表示す
ることを特徴とする特許請求の範囲第１項記載のノズル
光軸ずれ検出装置。(2) The nozzle optical axis deviation detection device according to claim 1, characterized in that the difference between the signals of opposing laser intensity detectors and the difference between the signals of the laser intensity detector perpendicular thereto are displayed.
それと直行するレーザ強度検出器の信号の和をそれぞれ
表示することを特徴とする特許請求の範囲第１項記載の
ノズル光軸ずれ検出装置。(3) Nozzle optical axis deviation according to claim 1, characterized in that the sum of signals of a pair of laser intensity detectors facing each other and the sum of signals of a laser intensity detector perpendicular thereto are displayed respectively. Detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62009257A JPS63177990A (en) | 1987-01-19 | 1987-01-19 | Misalignment detector for optical axis in nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62009257A JPS63177990A (en) | 1987-01-19 | 1987-01-19 | Misalignment detector for optical axis in nozzle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177990A true JPS63177990A (en) | 1988-07-22 |
Family
ID=11715364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62009257A Pending JPS63177990A (en) | 1987-01-19 | 1987-01-19 | Misalignment detector for optical axis in nozzle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177990A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0952437A3 (en) * | 1998-04-20 | 2000-06-21 | O.M.C. Co., Ltd. | Laser output detector |
| DE102007048471A1 (en) * | 2007-10-09 | 2009-04-23 | Trumpf Laser- Und Systemtechnik Gmbh | Method for determining a position of a focused laser beam stepping through an opening of a nozzle body of a laser processing nozzle, relative to the opening, comprises moving the nozzle body and the laser beam relative to each other |
| DE102009042529A1 (en) * | 2009-09-22 | 2011-05-26 | Precitec Kg | A laser processing head with a focus position adjustment unit and a system and method for adjusting a focus position of a laser beam |
-
1987
- 1987-01-19 JP JP62009257A patent/JPS63177990A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0952437A3 (en) * | 1998-04-20 | 2000-06-21 | O.M.C. Co., Ltd. | Laser output detector |
| DE102007048471A1 (en) * | 2007-10-09 | 2009-04-23 | Trumpf Laser- Und Systemtechnik Gmbh | Method for determining a position of a focused laser beam stepping through an opening of a nozzle body of a laser processing nozzle, relative to the opening, comprises moving the nozzle body and the laser beam relative to each other |
| DE102007048471B4 (en) * | 2007-10-09 | 2012-04-26 | Trumpf Laser- Und Systemtechnik Gmbh | Method for determining the position of a laser beam relative to a nozzle opening, laser processing nozzle and laser processing head |
| DE102009042529A1 (en) * | 2009-09-22 | 2011-05-26 | Precitec Kg | A laser processing head with a focus position adjustment unit and a system and method for adjusting a focus position of a laser beam |
| DE112010003743B4 (en) * | 2009-09-22 | 2015-05-21 | Precitec Kg | System and method for adjusting a focal position of a laser beam |
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