JPS63156036U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は一実施例を示す縦断面図、第２図は第
１図のＡ―Ａ線位置での断面図、第３図は本考案
が適用されるマイケルソン干渉計を示す概略図、
第４図は従来の固定鏡調節機構を示す縦断面図、
第５図は第４図のＢ―Ｂ線位置での断面図である
。 ６……固定鏡、１２……ミラーホルダ、１６…
…微調整ホルダ、２０……センターバー、２２，
２２ａ……積層圧電アクチユエータ、２４，２４
ａ……バネユニツト、３０……ボール、３６……
皿バネ、３８……微調整ベース、４０……ピン、
４４，４６……ネジ。 FIG. 1 is a longitudinal sectional view showing one embodiment, FIG. 2 is a sectional view taken along line A-A in FIG. 1, and FIG. 3 is a schematic diagram showing a Michelson interferometer to which the present invention is applied.
FIG. 4 is a longitudinal sectional view showing a conventional fixed mirror adjustment mechanism;
FIG. 5 is a sectional view taken along line BB in FIG. 4. 6...Fixed mirror, 12...Mirror holder, 16...
... Fine adjustment holder, 20 ... Center bar, 22,
22a...Laminated piezoelectric actuator, 24, 24
a... Spring unit, 30... Ball, 36...
Belleville spring, 38...fine adjustment base, 40...pin,
44, 46...screw.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 表面に固定鏡を保持するミラーホルダの裏面の
中心にセンターバーを取りつけてミラーホルダの
法線方向が調節できるように支持し、ミラーホル
ダの裏面上で前記センターバーの取りつけ位置を
中心とする円上の互いに９０度をなす４点にそれ
ぞれの調節部材の先端のボールを点接触させ、１
８０度の位置に配置されている一対の調節部材は
一方が積層圧電アクチユエータ、他方が皿バネを
備えたバネユニツトであり、各調節部材はミラー
ホルダを点接触で押しつけるボールを先端に備え
ており、かつ、前記センターバー及び前記４個の
調節部材をハウジングにより支持し、このハウジ
ングは固定鏡の法線の上下方向及び左右方向の傾
きを調整する２方向の調整機構を備えているフー
リエ変換赤外分光光度計の固定鏡調節機構。 A center bar is attached to the center of the back surface of a mirror holder that holds a fixed mirror on the front surface, and the normal direction of the mirror holder is supported so as to be adjustable, and a circle centered on the mounting position of the center bar is formed on the back surface of the mirror holder. Place the ball at the tip of each adjustment member in point contact with the four points on the top that are at 90 degrees to each other, and
A pair of adjustment members arranged at 80 degrees are each a spring unit with one having a laminated piezoelectric actuator and the other having a disk spring, and each adjustment member has a ball at its tip that presses the mirror holder in point contact. The center bar and the four adjustment members are supported by a housing, and the housing is equipped with a two-way adjustment mechanism for adjusting the vertical and horizontal inclinations of the normal line of the fixed mirror. Spectrophotometer fixed mirror adjustment mechanism.