JPS63155904A - Rf generator - Google Patents
Rf generatorInfo
- Publication number
- JPS63155904A JPS63155904A JP30348086A JP30348086A JPS63155904A JP S63155904 A JPS63155904 A JP S63155904A JP 30348086 A JP30348086 A JP 30348086A JP 30348086 A JP30348086 A JP 30348086A JP S63155904 A JPS63155904 A JP S63155904A
- Authority
- JP
- Japan
- Prior art keywords
- output
- power amplifier
- source voltage
- power
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- XUKUURHRXDUEBC-KAYWLYCHSA-N Atorvastatin Chemical compound C=1C=CC=CC=1C1=C(C=2C=CC(F)=CC=2)N(CC[C@@H](O)C[C@@H](O)CC(O)=O)C(C(C)C)=C1C(=O)NC1=CC=CC=C1 XUKUURHRXDUEBC-KAYWLYCHSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、半導体製造装置等の電源部に使用されるＲＦ
発生装置（Ｒａｄｉｏ ＦｒｅｑｕｅｎｃｙＧｅｎｅｌ
ａｔｏｒ）に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention provides an RF
Radio Frequency Genel
ator).
従来のこの種の装置は、第１図の様に構成されている。A conventional device of this type is constructed as shown in FIG.
即ち、’ｒ、は、商用の降圧トランス、ＤＲＩは整流ダ
イオード、ＣＩは平滑用コンデンサ、人は、ＲＦジ、ネ
レータのパワーアンプ部、Ｂは、該アンプ邦人を駆動す
るためのドライブ部及び発振部、Ｃは、制御回路部、Ｐ
Ｄは、アンプ邦人の出力電力Ｐｆを検出する検出回路、
Ｅｆは、該出力電力Ｐｆを設定するための基準信号、Ｖ
ｅｃは、パワー邦人に供給する電源電圧で、アンプ邦人
の最大出力と該アンプ邦人に使用される半導体デバイス
（トランジスタ、ＦＥＴ）により決められる。従来装置
に於てアンプ部Ａの′這源電圧Ｖｃｃは、常に一定電圧
で駆動されるため、該アンプ邦人の電力変換効率ηは、
出力電圧をＶｏ ｓ ｉ ｎｗｔとした場合、η＝０．
７８５礒÷（但し動作モードは、Ｂ級方式とする）で表
す事が出来る。That is, 'r' is a commercial step-down transformer, DRI is a rectifier diode, CI is a smoothing capacitor, RF generator is a power amplifier part of the generator, and B is a drive part and oscillation part for driving the amplifier. part, C is the control circuit part, P
D is a detection circuit that detects the output power Pf of the Japanese amplifier;
Ef is a reference signal for setting the output power Pf, V
ec is the power supply voltage supplied to the Japanese power supply, which is determined by the maximum output of the Japanese amplifier and the semiconductor devices (transistors, FETs) used in the Japanese amplifier. In the conventional device, the source voltage Vcc of the amplifier section A is always driven at a constant voltage, so the power conversion efficiency η of the Japanese amplifier is
When the output voltage is Vo s i nwt, η=0.
It can be expressed as 785 礒÷ (however, the operation mode is class B system).
又、パワーアンプ人に使用されるデバイスの損失Ｐｃは
、Ｐ ｃ ＝Ｐ ｆ （ｑ １ ）で表わされる。第
３図はこの関係を示す特性面で、最大損失Ｐｃｒｎａｘ
は、電源電圧Ｖｃｃが常に一定電圧で駆動されるパワア
ンプ人の場合は、最大出力Ｐｆ時よりも低い点でデバイ
スの最大損失がある。このため負荷の初期運転時、或は
軽負荷時等に損失が大となる欠点がある。本発明はイ糸
令欠点を解消しる
た装置を提供するものである。Further, the loss Pc of the device used in the power amplifier is expressed as Pc = Pf (q1). Figure 3 shows the characteristics showing this relationship, with the maximum loss Pcrnax
In the case of a power amplifier in which the power supply voltage Vcc is always driven at a constant voltage, the maximum loss of the device occurs at a point lower than the maximum output Pf. Therefore, there is a drawback that the loss becomes large during the initial operation of the load or when the load is light. The present invention provides a device which eliminates the drawbacks of the thread control.
第２図は本発明の実施例であって、人はパワーアンプ部
で１００ＫＨｚ乃至１３．５６ＭＨｚ の高周波電力を
発生させる。Ｄは該アンプ邦人を駆動するため一ドライ
ブ部、Ｅは発振部、Ｆは出力の
Ｐｆを定電力するためのオートゲイン回路（ＡＧＣ）、
路、Ｅｆは出力Ｐｆを設定する基準信号電圧、Ｈはアン
プ邦人、及びドライ部Ｂに電源（Ｍａｃ）を供給するた
めのコンバータ部（ＡＣ−ＤＣ−ＡＣ−ＤＣ）で、入力
は、商用ＡＣ１００／２００Ｖになっている。コンバー
タＨは、制御部Ｇから送出される信号ＶＲｅｆに応じた
出力電圧Ｖｃｃが出力される。次にパワーアンプ邦人を
効率良く動作させるには、電源電圧Ｖｃｃの最大電圧を
あらかじめ決めておき（最大電圧は主にアンプ邦人に使
用されるデバイスの耐圧及び最大出力（Ｐｆｍａｘ）で
決定される。）係る装置において、予のパワアンプ人の
最大出力（例えば、ＩＫｗ）になるように基準信号電圧
Ｅｆを設定する。これによりコンバータ部Ｈは、制御部
Ｇより信号Ｖｌｅｆを受は該最大出力に適合する電源電
圧（Ｖｃｃ）を供給する。一方向装置を所要出力（例え
ば７００Ｗ）で使用する時は、使用者か該基準信号Ｂｆ
を可変すればこれに応じて、信号ＶｉＬｅｆが変化し、
電源電圧Ｖｃｃを可変する。つまり本発明によれば、予
め最大出力Ｐｆを設定し、実動時に所要出力Ｐｆ’・に
応じた電源電圧Ｖｅｃをアンプ邦人に供給することによ
り、常に高効率運転が可能である。因みに第３図中特性
（Ｃ４は、本発明装置による主変換デバイスの損失の関
係を示すもので、該コンバータＨの基準電圧（Ｖｌｅｆ
）を所要出力Ｐｆ’により可変することにより理論的効
率は、全出力範囲で理論値に近い（４２７８％）状態で
動作する。FIG. 2 shows an embodiment of the present invention, in which a person generates high frequency power of 100 KHz to 13.56 MHz using a power amplifier section. D is a drive section for driving the amplifier, E is an oscillation section, F is an auto gain circuit (AGC) for making the output Pf a constant power,
Ef is the reference signal voltage for setting the output Pf, H is the converter section (AC-DC-AC-DC) for supplying power (Mac) to the amplifier Japanese and dry section B, and the input is commercial AC100. /200V. Converter H outputs an output voltage Vcc according to a signal VRef sent from control section G. Next, in order to operate the power amplifier Japanese efficiently, the maximum voltage of the power supply voltage Vcc is determined in advance (the maximum voltage is mainly determined by the withstand voltage and maximum output (Pfmax) of the device used in the amplifier Japanese). ) In such a device, the reference signal voltage Ef is set so as to have the maximum output (for example, IKw) of the power amplifier. Thereby, the converter section H receives the signal Vlef from the control section G and supplies a power supply voltage (Vcc) suitable for the maximum output. When using a one-way device at the required output (for example, 700W), the user must
If you vary the signal ViLef, the signal ViLef will change accordingly.
The power supply voltage Vcc is varied. That is, according to the present invention, by setting the maximum output Pf in advance and supplying the power supply voltage Vec corresponding to the required output Pf' to the amplifier during actual operation, highly efficient operation is always possible. Incidentally, the characteristic (C4) in FIG.
) by varying the required output Pf', the theoretical efficiency operates close to the theoretical value (4278%) over the entire output range.
第４図は、従来例と比較した本発明の特性図で夫々出力
１３．５６ＭＨｚ１１Ｋｗ ＲＰＧＥＮＥＲＡ’ＩＯＲ
適用した例を示すもので特性（Ｅは、電源電圧を可変し
て供給した時（本発明）の効率と又、特性（イ）は一定
電源電圧で供給した時の効率を示す。Figure 4 is a characteristic diagram of the present invention compared with the conventional example.
The characteristics (E) shows the efficiency when the power supply voltage is varied (this invention), and the characteristic (A) shows the efficiency when the power supply voltage is supplied at a constant voltage.
以上の説明から明らかなように、パワアンプの要所出力
設定に応じて電源電圧を可変せしめるのみで、装置の広
範な使用範囲で効率向上がはかれる等、実用上の効果は
大きい。As is clear from the above explanation, simply varying the power supply voltage according to the required output setting of the power amplifier has great practical effects, such as improving efficiency over a wide range of use of the device.
第１図は従来回路図、第２図は本発明の一実施例回路図
、第３図、第４図は、従来例及び本発明を比較した特性
図である。図において、人はパワアンプ部、Ｖｃｃはそ
の電源電圧、Ｂ、 Ｄはドライブ部、Ｃ１Ｇは制御部、
Ｅは発振部、Ｆはオートゲイン回路、Ｈはコンバータ部
、Ｅｆは出力電力設定用基準信号、ＶＲｅ ｆはコンバ
ータ出力（Ｖｃｃ）設定用基準信号、ＰＤは出力電力検
出回路である。
特許出願人 新電元工業株式会社
′Ｉ４２−回FIG. 1 is a conventional circuit diagram, FIG. 2 is a circuit diagram of an embodiment of the present invention, and FIGS. 3 and 4 are characteristic diagrams comparing the conventional example and the present invention. In the figure, person is the power amplifier section, Vcc is the power supply voltage, B and D are the drive section, C1G is the control section,
E is an oscillation section, F is an auto-gain circuit, H is a converter section, Ef is a reference signal for setting output power, VRef is a reference signal for setting converter output (Vcc), and PD is an output power detection circuit. Patent applicant Shindengen Kogyo Co., Ltd. 'I42-th
Claims (1)
ンプ部に電源電圧を供給するコンバータ部と、該パワア
ンプ部の制御部を備え、且つ前記コンバータ部は、該パ
ワアンプ部の出力電力設定信号に応じて、前記電源電圧
を可変せしめる機能を備えたことを特徴とするＲＦ発生
装置。The power amplifier section includes a power amplifier section that generates high-frequency power, a converter section that supplies a power supply voltage to the power amplifier section, and a control section for the power amplifier section, and the converter section controls the power amplifier section according to the output power setting signal of the power amplifier section. An RF generator characterized by having a function of varying power supply voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30348086A JPS63155904A (en) | 1986-12-19 | 1986-12-19 | Rf generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30348086A JPS63155904A (en) | 1986-12-19 | 1986-12-19 | Rf generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63155904A true JPS63155904A (en) | 1988-06-29 |
Family
ID=17921460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30348086A Pending JPS63155904A (en) | 1986-12-19 | 1986-12-19 | Rf generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63155904A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007263460A (en) * | 2006-03-28 | 2007-10-11 | Osaka Gas Co Ltd | Heating cooker |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59228392A (en) * | 1983-06-08 | 1984-12-21 | 松下電器産業株式会社 | High frequency heater |
-
1986
- 1986-12-19 JP JP30348086A patent/JPS63155904A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59228392A (en) * | 1983-06-08 | 1984-12-21 | 松下電器産業株式会社 | High frequency heater |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007263460A (en) * | 2006-03-28 | 2007-10-11 | Osaka Gas Co Ltd | Heating cooker |
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