JPS63154523A - Transport device - Google Patents

Abstract

PURPOSE:To transport a transport board always in stable ways by a simple structure by setting magnetic fluid between a transport passage and the leg part of the transport board interposed therebetween. CONSTITUTION:Since magnetic liquid 5 possesses the super-paramagnetism, the magnetic fluid 5 is magnetized by the magnetic field generated by each permanent magnet 4 installed on the lower edge surface of the leg part 32 of a transport board 3, and when the transport board 3 is advanced by the driving power in the pulling by a wire rope 21, the magnetic fluid 5 shifts together with the permanent magnet 4. Since, in this case, the transport board 3 is supported at two positions and driven by the wire rope 21, the transport board 3 can be shifted always in the stabilized state. Further, the flow-out of the magnetic fluid 5 outside from the inside of a transport passage 1 is prevented by installing an upper cover part 12 in the transport passage 1, and the evaporation quantity of the solvent of the magnetic fluid 5 can be reduced.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は搬送路と搬送台の複数の脚部との間に磁性流体
を介在させて搬送台を浮上させ、ロープトロリーで移送
する搬送装置に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a conveying device in which a magnetic fluid is interposed between a conveying path and a plurality of legs of a conveying table to levitate the conveying table and the conveying table is transported by a rope trolley.

従来の技術とその問題点 例えば搬送台の底面をリアクションプレートとし、該リ
アクションプレートと前記リアクションプレートに対向
して設けた固定子からなるリニアモータを用いた搬送装
置がある。BACKGROUND ART Conventional techniques and their problems For example, there is a conveyance device that uses a reaction plate on the bottom of a conveyance table, and uses a linear motor consisting of a reaction plate and a stator provided opposite to the reaction plate.

しかしながら、上記装置においてはりニアモータを制御
するのに複雑な制御装置を必要とし、このため設備費用
が高価となる。さらには、かかるタイプの搬送装置では
搬送台を常に安定良く移送するには、そのための装置は
別途装備する必要があり、構造が複雑になるという欠点
があった。However, the above-mentioned device requires a complicated control device to control the beam near motor, resulting in high equipment costs. Furthermore, in order to constantly and stably transport the transport platform, this type of transport apparatus requires a separate device for this purpose, which has the disadvantage of complicating the structure.

本発明は上記事情に鑑みてなされたもので、簡単な構造
で搬送台を常に安定良く移送することを目的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to constantly and stably transport a conveyance table with a simple structure.

問題点を解決するための手段 非磁性材質をもって所要形状の搬送路を形成し、この搬
送路に複数の脚部にて支持される搬送台を走行自在に設
けると共にこの搬送路と搬送台脚部との間に磁性流体を
介在せしめ、かつ搬送路脚部に永久磁石を設け、この磁
石と磁性流体との磁力作用にて前記搬送台を浮」ニさせ
、さらに搬送路下面で、且つ該路に沿って配設される索
条の一部を搬送台に係止し、索条の牽引駆動にて搬送台
を移送せしめる。Means for Solving the Problems A conveyance path of a desired shape is formed using a non-magnetic material, and a conveyance table supported by a plurality of legs is provided in the conveyance path so as to be freely movable, and this conveyance path and the conveyor table legs are provided. A magnetic fluid is interposed between the conveyance path and a permanent magnet is provided at the conveyance path leg, and the conveyance table is made to float by the magnetic force between the magnet and the magnetic fluid. A part of the cables disposed along the line is locked to the conveyor table, and the conveyor table is moved by the traction drive of the cables.

実施例 以下本発明を図面に示す実施例にもとづいて説明する。Example The present invention will be described below based on embodiments shown in the drawings.

図において、１はフレームなどによって固設された搬送
路であり、該搬送路１には、搬送路本体１１の上部に上
部が開口した平行なる２条の凹条溝１３，１３を形成し
、該本体１１の」二面には。In the figure, reference numeral 1 denotes a conveyance path fixed by a frame or the like, and in the conveyance path 1, two parallel concave grooves 13, 13 are formed in the upper part of the conveyance path main body 11, and the upper part is open. On the second side of the main body 11.

すなわち凹条溝の上面にカバ一部１２でもって２条の略
蟻溝をした四条溝１３の上面が必要以上に開口しないよ
うにしている。That is, the upper surface of the four-striped groove 13, which has two substantially dovetail grooves formed by the cover portion 12 on the upper surface of the groove, is prevented from opening more than necessary.

２は索条引留金具であり、搬送台下面の両端に定置され
ている。索条引留金具２にワイヤロープなどの素条２１
の端部が接続係止される。ワイヤロープ２１は駆動装置
によりシーブを介して、ロープドラムに巻取り装置によ
り巻取り牽引される。Reference numeral 2 denotes cable tensioning fittings, which are fixed at both ends of the lower surface of the conveyor table. A string 21 such as a wire rope is attached to the cable clasp 2.
The ends of are connected and locked. The wire rope 21 is wound and pulled onto a rope drum by a winding device via a sheave by a drive device.

この搬送台の駆動方法については第４図に示す。A method of driving this conveyance table is shown in FIG.

該図において６は駆動装置で、搬送路１より下方位置に
設置され、該装置の駆動にて発生する微塵をダウンフロ
ー気流にて下方に処理し、クリーンルーム内に飛散しな
いようになし、被搬送物に直接影響しないようにしてい
る。そしてこの駆動装置６はモータ６１と巻取ドラム６
２とより成り、該ドラム６２に索条２１の中間部を１乃
至２回以上巻収し、搬送路３の両端部位置に配設したシ
ーブ６３，６４にこの索条２１を掛け、且っ索条両端を
第２図に示すように搬送台両端部の索条引留金具２，２
に係止され、これにより巻取ドラムの右又は左の回転方
向を選択的に切り換えて駆動させることにより、搬送台
３を搬送路１に沿って移動する。In the figure, reference numeral 6 denotes a drive device, which is installed at a position below the conveyance path 1, and processes the fine dust generated by the drive of the device downward with a downflow air current to prevent it from scattering in the clean room. I try not to directly affect things. This drive device 6 includes a motor 61 and a winding drum 6.
2, the middle part of the cable 21 is wound around the drum 62 once or twice or more, and the cable 21 is hung around sheaves 63 and 64 arranged at both ends of the conveyance path 3. As shown in FIG.
The conveyance platform 3 is moved along the conveyance path 1 by selectively switching and driving the right or left rotational direction of the winding drum.

３は搬送台であり、これは」二部に被搬送物が載置され
る台部３１と、永久磁石４をそれぞれの下端面に設けた
断面倒立丁字形の一対の脚部３２とで構成されている。Reference numeral 3 denotes a conveyance table, which is composed of a table part 31 on which the object to be conveyed is placed, and a pair of legs 32 in the shape of a vertical T-shape in cross-section, each having a permanent magnet 4 on its lower end surface. has been done.

そして、脚部３２はそれぞれ前記搬送路１の四条溝部１
３に配置され、前記搬送台３を第１図に示すように、そ
の下部の２個所で支持している。The leg portions 32 each correspond to the four-striped groove portion 1 of the conveyance path 1.
As shown in FIG. 1, the conveyor table 3 is supported at two points at its lower part.

この脚部３２の下部に設けられる永久磁石４は＝３− 第６図に示すごとく、搬送台の進行方向前部と後端が上
反り状態とした一つ又は二つの脚下部３３に複数個設け
られ、この永久磁石の下端面もそり状となし、搬送台が
前進又は後進する場合、凹条溝内に設けられる後述する
磁性流体が常に永久磁石と搬送路凹条溝底部間に介在せ
しめるようになす。すなわち永久磁石の角にてこの磁性
流体が破断され、凹条溝と有接衝突しないようになす。The number of permanent magnets 4 provided at the lower part of the leg part 32 is =3- As shown in FIG. The lower end surface of this permanent magnet is also curved, and when the conveyance table moves forward or backward, the magnetic fluid provided in the groove, which will be described later, is always interposed between the permanent magnet and the bottom of the groove of the conveyance path. Do it like this. That is, the magnetic fluid is broken at the corners of the permanent magnet to prevent it from tangentially colliding with the groove.

また搬送台の台３上の上面は左右いずれが片方に若干傾
斜させ、これにより該台上に載置される重積ウェハー等
の被搬送物がその搬送時において左右に振れるのを未然
に防止する。In addition, the upper surface of the table 3 of the transfer table is slightly inclined on either the left or the right to one side, thereby preventing objects placed on the table, such as stacked wafers, from swinging to the left or right during transportation. do.

５は磁性流体であり、永久磁石４の磁界が作用するよう
に前記脚部３２の下端面と搬送路１の凹条溝部１３の底
面との間に設けられている。該磁性流体５は、例えばフ
ェライト等の磁性微粒子の粒子表面を長鎖不飽和脂肪酸
で被覆し、界面活性剤を使って溶液中に分散させたコロ
イド溶液で公知のものである。Reference numeral 5 denotes a magnetic fluid, which is provided between the lower end surface of the leg portion 32 and the bottom surface of the concave groove portion 13 of the conveyance path 1 so that the magnetic field of the permanent magnet 4 acts thereon. The magnetic fluid 5 is a well-known colloidal solution in which the surface of magnetic fine particles such as ferrite is coated with long-chain unsaturated fatty acids and dispersed in a solution using a surfactant.

しかして、前記磁性流体５は磁気的には永久磁気モーメ
ントをもった分子の集合体であり、超常磁性の性質をも
っているので、搬送台３の脚部３２の下端面に設けたそ
れぞれの永久磁石４により発生する磁界の影響によって
、それぞれの磁性流体５は磁化される結果、搬送台３が
ワイヤロープ２１によりロープ牽引の駆動力により進行
するに際して、前記永久磁石４と共に移動することとな
る。この際、搬送台３を２個所で支持させ、ワイヤロー
プ２１で駆動することとなるので、搬送台３を常に安定
した状態にて移動させることができる。また、搬送路１
に上部カバ一部１２を設けることにより、搬送時１の内
部より磁性流体５の外部への流出を防止し、更に磁性流
体５の溶媒の蒸発量を低減できる。Since the magnetic fluid 5 is magnetically an aggregate of molecules having a permanent magnetic moment and has superparamagnetic properties, each permanent magnet provided on the lower end surface of the leg 32 of the carrier 3 As a result, each magnetic fluid 5 is magnetized by the influence of the magnetic field generated by the permanent magnet 4, and as a result, when the conveyance table 3 is advanced by the driving force of the rope pulling by the wire rope 21, it moves together with the permanent magnet 4. At this time, since the conveyance table 3 is supported at two places and driven by the wire rope 21, the conveyance table 3 can be moved in a stable state at all times. In addition, conveyance path 1
By providing the upper cover part 12 in the magnetic fluid 1, it is possible to prevent the magnetic fluid 5 from flowing out from the inside of the magnetic fluid 1 during transportation, and further to reduce the amount of evaporation of the solvent of the magnetic fluid 5.

発明の効果 本発明によれば、次の如き数々の効果を有する。Effect of the invention According to the present invention, there are many effects as follows.

（１）搬送台を複数の脚部で支持し、・前記脚部の下端
面に設けたそれぞれの永久磁石と、搬送路底面に入れた
磁性流体とのそれぞれの磁力作用で搬送台を浮」ニさせ
、索条駆動で搬送台を移送させる簡単な構成でもって搬
送台を常に安定良く移送させることができる。(1) The conveyance table is supported by a plurality of legs, and the conveyance table is floated by the magnetic force of the respective permanent magnets provided on the lower end surfaces of the legs and the magnetic fluid placed in the bottom of the conveyance path.'' With a simple configuration in which the conveyor table is moved by a cable drive, the conveyor table can be constantly and stably transferred.

（２）搬送路内に磁性流体を所定量大れることのみで、
搬送台を搬送路から浮上させることができ、従来のりニ
アモータ駆動手段に比して極めて簡便であり、且つ、搬
送台の下面に索条引留金具を取付けて空間スペースを有
効に利用したので、搬送路の寸法を小さくでき、ひいて
は搬送装置全体の小型化が実現できる。(2) By simply adding a predetermined amount of magnetic fluid into the conveyance path,
The conveyor table can be floated from the conveyor path, which is extremely simple compared to conventional linear motor drive means.Moreover, a cable tensioning fitting is attached to the underside of the conveyor table to effectively utilize the space, making the conveyor easier. The dimensions of the path can be reduced, and the overall size of the conveying device can be reduced.

（３）索条及び索引の牽引駆動装置を搬送路より下方位
置に設置したので、ダウンフローの作用にてクリーンル
ーム内で塵埃を発生せず装置が簡便なので、設備費用及
び維持費用の面において優れており、特にクリーンルー
ム内における搬送装置として好適である。(3) Since the cable and index traction drive device is installed below the conveyance path, no dust is generated in the clean room due to the downflow effect, and the device is simple, which is advantageous in terms of equipment costs and maintenance costs. Therefore, it is particularly suitable as a transport device in a clean room.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明に係る搬送装置の概略を示す断面正面図
、第２図は第１図のＡ−Ａ断面図、第３図は第２図の平
面図、第４図は本発明実施例の外観図、第５図はその平
面図、第６図は搬送台の側面図、第７図は同正面図であ
る。 １は搬送路、２は索条引留金具、２１は索条、３は搬送
台、３１は台、３２は脚部、４は永久磁石、５は磁性流
体、６は駆動装置 回　　　　　　　　　回FIG. 1 is a cross-sectional front view schematically showing a conveying device according to the present invention, FIG. 2 is a cross-sectional view taken along line A-A in FIG. 1, FIG. 3 is a plan view of FIG. 2, and FIG. An external view of the example, FIG. 5 is a plan view thereof, FIG. 6 is a side view of the carrier, and FIG. 7 is a front view thereof. 1 is a conveyance path, 2 is a rope clasp, 21 is a cable, 3 is a conveyance platform, 31 is a stand, 32 is a leg, 4 is a permanent magnet, 5 is a magnetic fluid, 6 is a driving device rotation

Claims (1)

【特許請求の範囲】[Claims] 非磁性材質でもって形成した搬送路と、該搬送路に複数
の脚部にて支持された搬送台と、前記搬送路と搬送台の
脚部とのそれぞれの間に介在させた磁性流体と、前記搬
送台のそれぞれの脚部に設けた永久磁石と、搬送台の下
面に設けた索条引留金具に接続した索条とを備え、且つ
前記搬送台が常に磁性流体により搬送路から浮上されつ
つ、索条にて移送されるようにしたことを特徴とする搬
送装置。a conveyance path formed of a non-magnetic material, a conveyance platform supported by the conveyance path by a plurality of legs, and a magnetic fluid interposed between the conveyance path and the legs of the conveyance platform, respectively; The carrier includes a permanent magnet provided on each leg of the carrier, and a cable connected to a cable clasp provided on the underside of the carrier, and the carrier is always levitated from the carrier path by a magnetic fluid. , a conveyance device characterized in that the conveyance is carried out by a cable.