JPH01157546A - Wafer transfer apparatus - Google Patents
Wafer transfer apparatusInfo
- Publication number
- JPH01157546A JPH01157546A JP62278016A JP27801687A JPH01157546A JP H01157546 A JPH01157546 A JP H01157546A JP 62278016 A JP62278016 A JP 62278016A JP 27801687 A JP27801687 A JP 27801687A JP H01157546 A JPH01157546 A JP H01157546A
- Authority
- JP
- Japan
- Prior art keywords
- vehicle
- magnetic fluid
- permanent magnets
- wafer
- vehicles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 23
- 235000012431 wafers Nutrition 0.000 claims description 36
- 238000000034 method Methods 0.000 abstract description 10
- 239000000428 dust Substances 0.000 abstract description 7
- 230000003749 cleanliness Effects 0.000 abstract description 2
- 239000002245 particle Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 235000021122 unsaturated fatty acids Nutrition 0.000 description 1
- 150000004670 unsaturated fatty acids Chemical class 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Non-Mechanical Conveyors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はウェハーを１枚ずつ搬送する装置に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for transporting wafers one by one.
クリーンルーム内で薄板状物品例えばウェハーを搬送す
る装置として、
（１）ウェハーを空気圧で浮上させ、これをさらに噴射
空気圧にて搬送する方法
（２）ウェハーをコンベヤ上に載置し搬送する方法等が
ある。As a device for conveying thin plate-shaped articles such as wafers in a clean room, there are two methods: (1) a method in which the wafer is levitated by air pressure and is further conveyed by jet air pressure, and (2) a method in which the wafer is placed on a conveyor and conveyed. be.
しかし、前者の方法では常時空気圧を供給する装置を必
要とし、かつウェハーの搬送路のガイド又は停止装置か
ら発塵することがあり、クリーンルーム内で使用するに
は問題があった。However, the former method requires a device that constantly supplies air pressure, and dust may be generated from the guide or stop device for the wafer transport path, which poses problems when used in a clean room.
また後者の方法ではベルト上を搬送するとベルトから発
生した塵がウェハー裏面に付着し、ウェハー製造工程で
の歩留りを悪くする原因の１つとなっていた。Further, in the latter method, when the wafer is conveyed on the belt, dust generated from the belt adheres to the back surface of the wafer, which is one of the causes of poor yield in the wafer manufacturing process.
さらに従来は、ウェハーの各製造装置の工程間ではウェ
ハーを１枚ずつ移動させることはなく、Ｒｅにはウェハ
ーカセットに何枚かのウェハーを収納した状態で搬送さ
れることが多かった。Furthermore, in the past, wafers were not moved one by one between processes in each wafer manufacturing apparatus, and several wafers were often stored in a wafer cassette and transported to Re.
しかし、ウェハーの径が大きくなりまた生産が多品種、
少量生産になるにともなって、ウェハーを１枚ずつ製造
装置の工程間を搬送できる装置が要求されるようになっ
てきた。However, as the diameter of the wafer becomes larger and the production becomes more diverse,
With the trend toward small-volume production, there has been a demand for equipment that can transport wafers one by one between processes in manufacturing equipment.
加えてウェハーの加工が微細化されるにともなって、−
層クリーン度の高い搬送装置が必要となってきた。In addition, as wafer processing becomes finer, -
Conveying equipment with high layer cleanliness has become necessary.
本発明は、簡単な装置で、塵埃を発生させずに、クリー
ン度の高いクリーンルームでも使用でき、ウェハーを１
枚ずつ安定して搬送させることを目的とする。The present invention is a simple device that does not generate dust, can be used even in highly clean rooms, and can handle 1 wafer.
The purpose is to transport sheets stably one by one.
本発明は、ウェハーを１枚ずつ移載装置に受は渡しでき
るようにウェハーを載置する面にスリットを設けたビー
クルと、ビークル下面に設けた永久磁石と、ビークル下
面に設けた永久磁石と搬送路との間に介在させた磁性流
体により搬送路から浮上させ、ビークルをリニアモータ
又はロープトロリー式の駆動装置によって搬送路に沿っ
て移動させ、ビークルに載置したウェハーを１枚ずつ搬
送するウェハーの搬送装置である。The present invention includes a vehicle having a slit in the surface on which the wafer is placed so that the wafers can be received and delivered one by one to a transfer device, a permanent magnet provided on the bottom surface of the vehicle, and a permanent magnet provided on the bottom surface of the vehicle. The vehicle is floated from the transport path by a magnetic fluid interposed between it and the transport path, and the vehicle is moved along the transport path by a linear motor or rope trolley type drive device, and the wafers placed on the vehicle are transported one by one. This is a wafer transport device.
以下本発明ウェハーの搬送装置について図示の実施例に
もとづき説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The wafer conveyance apparatus of the present invention will be explained below based on the illustrated embodiments.
第１図は本発明に係るウェハーの搬送装置の第１の実施
例を示す全体平面図、第２図はその正面図、第３図は縦
断側面図、第４図はロープトロリーの張架を示す説明図
、第５図はビークルと走行ガイドとの関係を示す説明図
である。Fig. 1 is an overall plan view showing a first embodiment of a wafer transport device according to the present invention, Fig. 2 is a front view thereof, Fig. 3 is a vertical side view, and Fig. 4 shows a rope trolley tensioning structure. FIG. 5 is an explanatory diagram showing the relationship between the vehicle and the travel guide.
図において１は非磁性材質でもって構成したる搬送路で
、この搬送路は第１図乃至第３図に示す如く基台１１上
に走行ガイド１２を配設して成り、かつこの走行ガイド
１２にはその頂面に該レールの全長に亘って上面に開口
した１乃至２本以上の凹条溝１３．１３を形成する。ま
たこのガイド１２の側面位置には後述するビークルを搬
送路１の予め定めた定位置で停止させるためにビークル
の位置を検出するセンサー１４を１乃至複数個配設する
。In the figure, reference numeral 1 denotes a conveyance path made of a non-magnetic material, and this conveyance path consists of a traveling guide 12 disposed on a base 11 as shown in FIGS. 1 to 3. One or more grooves 13.13 are formed on the top surface of the rail over the entire length of the rail and are open to the top surface. Further, one or more sensors 14 are disposed on the side of the guide 12 to detect the position of the vehicle, which will be described later, in order to stop the vehicle at a predetermined position on the transport path 1.
搬送路１の両端部にはモータ等の動力源２にて回転駆動
されるドラム３１．３２を対殺し、このドラム３１．３
２を動力源２又は変速機を介して正転と逆−３＝
転とを選択的に駆動可能とする。At both ends of the conveyance path 1, there are mounted drums 31 and 32 which are rotatably driven by a power source 2 such as a motor.
2 can be selectively driven into forward rotation and reverse rotation via the power source 2 or the transmission.
搬送路１には２台のビークル４．５を載置する。Two vehicles 4.5 are placed on the conveyance path 1.
このビークル４，５は同じ形状をしており、−枚のウェ
ハーＷを外部の移載装置のフォークにより移載を容易に
行えるようにウェハーを載置する面にスリットを設ける
と共にビークルの走行ガイド１２の下面に磁石取付台４
１．５１を設け、この磁石取付台４１．５１の下端面に
永久磁石４２．５２を固定する。The vehicles 4 and 5 have the same shape, and have a slit in the surface on which the wafers are placed so that - wafers W can be easily transferred using a fork of an external transfer device, and a traveling guide of the vehicle. Magnet mounting base 4 on the bottom surface of 12
1.51 is provided, and a permanent magnet 42.52 is fixed to the lower end surface of this magnet mount 41.51.
６は磁性流体であり、永久磁石４２．５２の磁界が作用
するように前記磁石取付台４１．５１の下端面と凹条溝
１３との間に介在させている。このビークルの下部に設
けられる永久磁石４２．５２はビークルの進行方向の長
さとほぼ等しい一本の磁石バーとすることもできるが、
第５図に示すようにビークル４゜５の進行方向前部と後
端が上反り状態に複数個設けられ、この永久磁石の下端
面をそり状となし、ビークルが前進又は後進する場合、
凹条溝内に設けられる磁性流体が常に永久磁石と搬送路
凹条溝底部間に介在せしめるようになす。すなわち永久
磁石の角にてこの磁性流体が破断され、凹条溝と有接衝
突しないようになす。6 is a magnetic fluid, which is interposed between the lower end surface of the magnet mount 41.51 and the groove 13 so that the magnetic field of the permanent magnet 42.52 acts thereon. The permanent magnets 42, 52 provided at the bottom of the vehicle may be a single magnetic bar that is approximately equal in length to the direction of travel of the vehicle, but
As shown in FIG. 5, a plurality of permanent magnets are provided with the front and rear ends in the traveling direction of the vehicle 4.5 curved upward, and the lower end surfaces of these permanent magnets are curved, and when the vehicle moves forward or backward,
The magnetic fluid provided in the concave groove is always interposed between the permanent magnet and the bottom of the conveyance path concave groove. That is, the magnetic fluid is broken at the corners of the permanent magnet to prevent it from tangentially colliding with the groove.
この磁性流体６は永久磁石４２．５２の磁界が作用する
ように走行ガイド１２の凹条溝内に配設されるとともに
この磁性流体として例えばフェライト等の磁性微粒子の
粒子表面を長鎖不飽和脂肪酸で被覆し、界面活性剤を使
って溶液中に分散させたコロイド溶液で公知のものであ
る。This magnetic fluid 6 is disposed in the groove of the traveling guide 12 so that the magnetic field of the permanent magnets 42, 52 acts on it, and the magnetic fluid 6 is used to coat the surface of magnetic fine particles such as ferrite with long-chain unsaturated fatty acids. This is a well-known colloidal solution coated with a surfactant and dispersed in the solution using a surfactant.
ビークル４，５の移動はドラム３１．３２とビークル４
，５間に張架させたローブ７．８をドラムへの巻取、巻
戻しによって行う。この一方のローブ７はドラム３１に
１回乃至複数回巻酸しその一端をビークル４に突設した
索条取付具４３に締結し、他端をビークル４の全搬送工
程の外側にあって、かつドラム３１と対向したシーブ９
１にかけた後、ビークル４のローブ取付具４４に締結す
る。従ってローブ７はドラム３１とシーブ９１間に張架
され、両端を同一のビークル４に固着され、ドラム３１
を回動させることにより、ローブ７を介して走行レール
にそって往復移動させる。Vehicles 4 and 5 are moved by drums 31 and 32 and vehicle 4.
, 5 is wound up and unwound onto the drum. One of the lobes 7 is wrapped around the drum 31 once or multiple times, and its one end is fastened to a cable fitting 43 protruding from the vehicle 4, and the other end is located outside of the entire transport process of the vehicle 4. and the sheave 9 facing the drum 31
1, and then fastened to the lobe attachment 44 of the vehicle 4. Therefore, the lobe 7 is stretched between the drum 31 and the sheave 91, and both ends are fixed to the same vehicle 4.
By rotating it, it is caused to reciprocate along the travel rail via the lobe 7.
また他方のローブ８は同様にしてドラム３２に１乃至複
数回巻数した後、その一端をビークル５のローブ取付具
５３に、他端はドラム３２と対向したシーブ９２にかけ
た後ビークル５のロープ取付具５４に締結する。このよ
うにして同一の走行レール１２の凹条溝１３上に２台の
ビークル４，５を永久磁石４２゜５２、磁性流体６を介
して走行自在に対設され、夫々ビークル４．５に張架さ
れたロープ７．８をドラム３１．３２の回動にて選択的
に走行せしめるもので、一方のビークル４は第１図のＡ
点よりＥ点まで、また他方のビークル５はＦ点よりＢ点
まで任意に走行する。このとき両ビークル４．５は互い
に接触しないように制御されて走行するものである。な
おこのビークルの走行距離及び停止位置は作業工程にて
定めるもので、各点間の距離及び停止位置数は図示の実
施例ではその一例で、任意に定められる。そしてビーク
ルの定位置停止はレール側面に配したセンサーにてビー
クルの位置を検出して行うものである。Similarly, the other lobe 8 is wound one or more times around the drum 32, and then one end of the lobe 8 is wrapped around the lobe fitting 53 of the vehicle 5, and the other end is hooked onto the sheave 92 facing the drum 32, and then the rope is attached to the vehicle 5. It is fastened to the fitting 54. In this way, the two vehicles 4 and 5 are placed opposite each other on the concave groove 13 of the same running rail 12 via the permanent magnets 42 and 52 and the magnetic fluid 6 so as to be able to travel freely. The suspended rope 7.8 is selectively made to run by rotating the drum 31.32, and one vehicle 4 is moved to A in FIG.
The other vehicle 5 arbitrarily travels from the point to the point E, and from the point F to the point B. At this time, both vehicles 4.5 are controlled so as not to come into contact with each other. The traveling distance and stopping positions of the vehicle are determined in the work process, and the distance between each point and the number of stopping positions are shown in the illustrated embodiment as an example, and can be arbitrarily determined. The vehicle is stopped at a fixed position by detecting the vehicle's position using a sensor placed on the side of the rail.
さらに搬送路１にはビークル走行時、発生する微塵をク
リーンルーム内に飛散させないようビークルの移動に支
障ないようスリットを設けたカバー１５にて搬送路の一
部もしくは全体を覆うようになす。Further, the conveyance path 1 is partially or entirely covered with a cover 15 provided with a slit so as not to disturb the movement of the vehicle so as not to scatter fine dust generated in the clean room when the vehicle runs.
ビークルは走行ガイド１２上を永久磁石と磁性流体にて
浮上させてロープの牽引により走行させる。The vehicle is floated on the travel guide 12 using a permanent magnet and magnetic fluid, and is driven by a rope.
すなわち磁性流体６は磁気的には永久磁気モーメントを
もった分子の集合体であり、超常磁性の性質をもってい
る。ビークル４，５の下端面に設けたそれぞれの永久磁
石４２．５２により発生する磁界の影響によって、永久
磁石４２．５２の周辺に磁性流体６が吸引され、磁気的
に浮力が発生し永久磁石４２、５２が浮上されることに
なる。このため、永久磁石４２．５２を下部に設けたビ
ークルが浮上することになる。That is, the magnetic fluid 6 is magnetically an aggregate of molecules having a permanent magnetic moment and has superparamagnetic properties. Due to the influence of the magnetic field generated by the respective permanent magnets 42.52 provided on the lower end surfaces of the vehicles 4, 5, the magnetic fluid 6 is attracted around the permanent magnets 42.52, magnetically buoyant force is generated, and the permanent magnets 42 , 52 will be levitated. Therefore, the vehicle with the permanent magnets 42, 52 provided at the bottom will float.
そして、ビークルがロープ７．８によりローブ牽引の駆
動力により磁性流体６は永久磁石４２．５２と共に移動
するので、ビークルは浮上されて移動することになる。Then, the magnetic fluid 6 moves together with the permanent magnets 42.52 due to the driving force of the lobe pulling by the vehicle by the rope 7.8, so that the vehicle is levitated and moves.
この際、本実施例ではビークルを２箇所で支持させ、ロ
ープで駆動することとなるので、ビークルを常に安定し
た状態にて移動させることかできる。また、搬送路】に
カバー１５を設けることにより、搬送路１の内部より磁
性流体の外部への流出を防止し、更に磁性流体の溶媒の
蒸発量を低減できる。At this time, in this embodiment, the vehicle is supported at two locations and driven by a rope, so that the vehicle can always be moved in a stable state. Further, by providing the cover 15 on the conveyance path 1, it is possible to prevent the magnetic fluid from flowing out from the inside of the conveyance path 1 and further reduce the amount of evaporation of the solvent of the magnetic fluid.
第６図は本発明のウェハーの搬送装置の第２の実施例を
示す縦断側面図である。本実施例は本発明のウェハーの
搬送装置のビークルをリニアモータで駆動し、搬送路を
移動させる場合の一実施例を示す図である。前実施例に
おいてはビークルを搬送路に沿って移動させるのにロー
プで駆動する場合を示したが、本実施例はロープにかえ
てリニアモータて駆動し、ビークルを搬送路に沿って移
動させる場合を示ず。FIG. 6 is a longitudinal cross-sectional side view showing a second embodiment of the wafer transport device of the present invention. This embodiment is a diagram showing an example in which the vehicle of the wafer transport apparatus of the present invention is driven by a linear motor to move the transport path. In the previous embodiment, a case was shown in which a rope was used to move the vehicle along the conveyance path, but in this embodiment, a linear motor is used instead of the rope to move the vehicle along the conveyance path. Not shown.
第１図〜第５図と同一部分には同一符号を付して、その
説明を省略する。Components that are the same as those in FIGS. 1 to 5 are designated by the same reference numerals, and their explanations will be omitted.
走行ガイド１２の上面にリニアモータの固定子６１をビ
ークル４．５の進行方向に対し所定間隔をもって定置す
る。又、ビークル４．５はりニアモータ固定子６１と対
抗する底面７１をリニアモータのリアクションプレート
として作用するように、例えばアルミニュウム又は銅板
等の導電性材料で構成し、前記固定子６１と空隙を介し
て相対向し、リニアモータを構成する。A stator 61 of a linear motor is placed on the upper surface of the traveling guide 12 at a predetermined interval in the traveling direction of the vehicle 4.5. In addition, the bottom surface 71 of the vehicle 4.5 facing the linear motor stator 61 is made of a conductive material such as aluminum or copper plate so as to act as a reaction plate of the linear motor, and is connected to the stator 61 through a gap. They face each other and form a linear motor.
このような構成により、ビークルは走行ガイド上を永久
磁石と磁性流体との作用で前述した如く浮上させてリニ
アモータの駆動により走行させる。With this configuration, the vehicle is levitated on the traveling guide by the action of the permanent magnet and the magnetic fluid as described above, and is driven by the linear motor.
前記各実施例においては、凹条溝は２本としたが、凹条
溝の数はこれに限定されずに、１本とした場合さらに３
本以上にすることもかのうなのは勿論である。In each of the above embodiments, the number of grooves is two, but the number of grooves is not limited to this.
Of course, you can do more than just a book.
又、搬送路に載置するビークルの台数は、本実施例の２
台に限定されることはなく、１台ないし２台以上を適宜
選択することは勿論可能である。In addition, the number of vehicles placed on the conveyance path is the same as 2 in this embodiment.
The number of units is not limited, and it is of course possible to select one or more units as appropriate.
本発明はビークルのウェハーを載置する面を一枚のウェ
ハーが安定した状態て載置できるような形状とし、かつ
磁性流体と永久磁石との作用でビークルを浮上させ、ロ
ープの牽引又はリニアモータ駆動により搬送路を走行さ
せるようにしているため、簡単な構造て発塵を抑制し、
ビークルの材質を任意に選択できるので、ウェハーへの
塵の耐着を防止でき、又車輪、ギヤ等の振動の発生源も
ないのでウェハーに振動を与えることがなく、ウェハー
を１枚ずつスムースに搬送でき、構造も極めてコンパク
トでクリーン度の高い搬送ができる利点がある。In the present invention, the surface of the vehicle on which the wafer is placed is shaped so that a single wafer can be placed stably, and the vehicle is levitated by the action of a magnetic fluid and a permanent magnet, and the vehicle is levitated by the action of a magnetic fluid and a permanent magnet. Since the transport path is driven by a drive, the structure is simple and dust generation is suppressed.
Since the material of the vehicle can be selected arbitrarily, it is possible to prevent dust from adhering to the wafers, and since there are no sources of vibration such as wheels or gears, there is no vibration to the wafers, and the wafers can be smoothly processed one by one. It has the advantage of being extremely compact in structure and can be transported in a highly clean manner.
第１図は本発明搬送装置の全体を示す平面図、第２図は
その正面図、第３図は縦断側面図、第４図はロープの張
架を示す説明図、第５図はビークルと走行ガイドとの関
係を示す説明図である。第６図は本発明搬送装置の第２
の実施例の縦断側面図を示す。
１は搬送路、１２は走行ガイド、１３は凹条溝、１５は
カバー、２は動力源、３１．３２はドラム、４，５はビ
ークル、４２．５２は永久磁石、６は磁性流体、６１は
リニアモータ固定子、７，８はローブ、９１゜９２はシ
ーツFig. 1 is a plan view showing the entire transport device of the present invention, Fig. 2 is a front view thereof, Fig. 3 is a vertical side view, Fig. 4 is an explanatory view showing a rope tensioning system, and Fig. 5 is a diagram showing a vehicle and a vehicle. FIG. 3 is an explanatory diagram showing the relationship with a travel guide. Figure 6 shows the second part of the conveying device of the present invention.
FIG. 3 shows a longitudinal side view of the embodiment. 1 is a transport path, 12 is a travel guide, 13 is a groove, 15 is a cover, 2 is a power source, 31.32 is a drum, 4 and 5 are vehicles, 42.52 is a permanent magnet, 6 is a magnetic fluid, 61 is the linear motor stator, 7 and 8 are the lobes, and 91° and 92 are the sheets.
Claims (1)
搬送路と、ウェハーを１枚ずつ移載装置に受渡しできる
ようにウェハーを載置する面にスリットを設けたビーク
ルと、ビークル下面に設けた永久磁石と、ビークル下面
に設けた永久磁石と搬送路との間に介在させた磁性流体
と、ビークルを搬送路に沿って移動させるリニアモータ
又はロープトロリー式の駆動装置とを備え、ビークルが
磁性流体により搬送路から浮上されつつ、ビークルを搬
送路に沿って移動させ、ビークルに載置したウェハーを
１枚ずつ搬送することを特徴とするウェハーの搬送装置
。(1) A transport path for transporting a vehicle that places wafers one by one, a vehicle with a slit on the surface on which the wafer is placed so that the wafers can be delivered one by one to a transfer device, and a slit on the bottom surface of the vehicle. A magnetic fluid interposed between the permanent magnet provided on the underside of the vehicle and a conveyance path, and a linear motor or rope trolley type drive device for moving the vehicle along the conveyance path. A wafer conveying device characterized in that a vehicle is moved along a conveyance path while being levitated from the conveyance path by a magnetic fluid, and wafers placed on the vehicle are conveyed one by one.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62278016A JPH01157546A (en) | 1987-09-19 | 1987-11-02 | Wafer transfer apparatus |
| US07/166,308 US4877123A (en) | 1987-11-02 | 1988-03-10 | Conveyor means for wafers |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23592087 | 1987-09-19 | ||
| JP62-235920 | 1987-09-19 | ||
| JP62278016A JPH01157546A (en) | 1987-09-19 | 1987-11-02 | Wafer transfer apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01157546A true JPH01157546A (en) | 1989-06-20 |
Family
ID=26532395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62278016A Pending JPH01157546A (en) | 1987-09-19 | 1987-11-02 | Wafer transfer apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01157546A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI416848B (en) * | 2008-05-19 | 2013-11-21 | Nidec Copal Corp | Motor |
| CN109436693A (en) * | 2018-10-10 | 2019-03-08 | 上海航天化工应用研究所 | Anti- dust transmission device under dangerous operation environment |
-
1987
- 1987-11-02 JP JP62278016A patent/JPH01157546A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI416848B (en) * | 2008-05-19 | 2013-11-21 | Nidec Copal Corp | Motor |
| CN109436693A (en) * | 2018-10-10 | 2019-03-08 | 上海航天化工应用研究所 | Anti- dust transmission device under dangerous operation environment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4882999A (en) | Transportation system of a floated-carrier type | |
| US5156093A (en) | Transportation system of floated-carrier type | |
| JPS62114403A (en) | Conveyor | |
| US4877123A (en) | Conveyor means for wafers | |
| JPH01157546A (en) | Wafer transfer apparatus | |
| JPS60261302A (en) | Article conveyor in high vacuum | |
| JPS6067326A (en) | Propulsion device of article transport device | |
| JPS6392205A (en) | Carrier equipment for magnetic levitation for vacuum apparatus | |
| JPS6118305A (en) | Conveying apparatus | |
| JPH07108160A (en) | Tunnel conveyor | |
| JPS6146756A (en) | Conveyor | |
| JPH08163712A (en) | Magnetically levitated conveyor | |
| JP2882850B2 (en) | AC magnetic levitation transfer device | |
| JP3212623B2 (en) | Magnetic levitation transfer device and driving method thereof | |
| JPS62118704A (en) | Conveyor | |
| JPH0712335U (en) | Magnetic suspension type carrier | |
| JP2765595B2 (en) | Transfer device | |
| JPS61295926A (en) | Magnetically floated conveying device for vacuum device | |
| JPH04132238A (en) | Semiconductor device transfer equipment | |
| JPS63154523A (en) | Transport device | |
| JPH04222402A (en) | Magnetic levitation carrier and branch mechanism thereof | |
| JPH04244776A (en) | Magnetic levitation carrier and carrying method | |
| JPH04249337A (en) | Conveyance apparatus | |
| JPH02193504A (en) | Transferring equipment of conveyor | |
| JPH01205438A (en) | Magnetic-levitation-type transfer apparatus |