JPS63148137A - Piezoelectric type pressure detector - Google Patents
Piezoelectric type pressure detectorInfo
- Publication number
- JPS63148137A JPS63148137A JP29447286A JP29447286A JPS63148137A JP S63148137 A JPS63148137 A JP S63148137A JP 29447286 A JP29447286 A JP 29447286A JP 29447286 A JP29447286 A JP 29447286A JP S63148137 A JPS63148137 A JP S63148137A
- Authority
- JP
- Japan
- Prior art keywords
- charge
- converter
- control circuit
- voltage
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 125000006850 spacer group Chemical group 0.000 abstract description 21
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 14
- 239000007769 metal material Substances 0.000 abstract description 9
- 238000006243 chemical reaction Methods 0.000 abstract description 5
- 239000003990 capacitor Substances 0.000 description 11
- 239000012777 electrically insulating material Substances 0.000 description 9
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 7
- 238000009413 insulation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000004859 Copal Substances 0.000 description 1
- 241000782205 Guibourtia conjugata Species 0.000 description 1
- NMFHJNAPXOMSRX-PUPDPRJKSA-N [(1r)-3-(3,4-dimethoxyphenyl)-1-[3-(2-morpholin-4-ylethoxy)phenyl]propyl] (2s)-1-[(2s)-2-(3,4,5-trimethoxyphenyl)butanoyl]piperidine-2-carboxylate Chemical compound C([C@@H](OC(=O)[C@@H]1CCCCN1C(=O)[C@@H](CC)C=1C=C(OC)C(OC)=C(OC)C=1)C=1C=C(OCCN2CCOCC2)C=CC=1)CC1=CC=C(OC)C(OC)=C1 NMFHJNAPXOMSRX-PUPDPRJKSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は圧力検出装置に係り、特に、圧電素子の圧電変
換作用により、エンジン気筒内圧力等の各種圧力を検出
するに適した圧電型圧力検出装置に関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a pressure detection device, and in particular to a piezoelectric pressure detection device suitable for detecting various pressures such as engine cylinder pressure by the piezoelectric conversion action of a piezoelectric element. This invention relates to a detection device.
従来、この種の圧電型圧力検出装置においては、圧電素
子を内蔵する圧力検出器と、この圧力検出器からその圧
電素子の圧電変換作用に基き生じる検出出力を増幅する
増幅器とにより構成したものがある。Conventionally, this type of piezoelectric pressure detection device has been constructed of a pressure detector containing a piezoelectric element and an amplifier that amplifies the detection output generated from the pressure detector based on the piezoelectric conversion action of the piezoelectric element. be.
しかしながら、このような構成において、例えば、車両
のエンジンの一部に圧力検出装置を取付け、この圧力検
出装置の増幅器に適宜な制御回路を接続し、車両に装備
したバッテリを増幅器及び制御回路に接続した場合、増
幅器のアース端子及びパンテリのアース端子の間の接続
配線抵抗と、制御回路のアース端子及びバッテリのアー
ス端子の間の接続配線抵抗との間に差が生じ、且つ車両
に装備したスタータ、オルタネータ、イブナイフ等の作
動時にバッテリの出力電圧の変動により増幅器及び制御
回路に流れる各消費電流が変動するために、増幅器のア
ース電位（部ち、エンジンのアース電位）と制御回路の
アース電位とが互いに一致せず変動して電源電圧変動に
よる出力変動が生じると同時に圧力検出装置のケーシン
グと圧電素子との間の浮遊容量を通し増幅器を充電する
こととなり、その結果、同増幅器の出力に誤差が混入す
るとい不具合が生じる。また、上述のようなエンジンの
アース電位と制御回路のアース電位の各変動が太き（な
ると、増幅器への流入電流が過大となり同増幅器を焼損
等により破損させてしまうというおそれもある。However, in such a configuration, for example, a pressure detection device is attached to a part of the vehicle engine, an appropriate control circuit is connected to the amplifier of this pressure detection device, and a battery installed in the vehicle is connected to the amplifier and control circuit. In this case, there will be a difference between the connection wiring resistance between the amplifier's ground terminal and the battery's ground terminal, and the connection wiring resistance between the control circuit's ground terminal and the battery's ground terminal, and if the starter installed in the vehicle , alternator, Eve knife, etc., the current consumption flowing through the amplifier and control circuit fluctuates due to fluctuations in the output voltage of the battery. do not match each other and fluctuate, causing output fluctuations due to power supply voltage fluctuations. At the same time, the amplifier is charged through the stray capacitance between the casing of the pressure sensing device and the piezoelectric element, and as a result, an error occurs in the output of the amplifier. If it gets mixed in, problems will occur. Furthermore, the above-mentioned fluctuations in the ground potential of the engine and the ground potential of the control circuit become large (if this happens, the current flowing into the amplifier will become excessive and there is a risk that the amplifier will be damaged by burnout or the like).
そこで、本発明は、このようなことに対処すべく、上述
のようなアース電位の変動とはかかわりなく、常に精度
よく圧力検出するようにした圧電型圧力検出装置を提供
しようとするものである。Therefore, in order to cope with this problem, the present invention aims to provide a piezoelectric pressure detection device that can always accurately detect pressure regardless of the above-mentioned fluctuations in ground potential. .
かかる問題の解決にあたり、本発明の構成上の特徴は、
適宜な制御回路に接続される圧電型圧力検出装置におい
て、導電性筒体と、この導電性筒体の先端開口部内に絶
縁部材を介し支持されて圧力を電荷量に変換する圧電変
換部と、前記導電性筒体内に前記絶縁部材を介し支持さ
れて前記圧電変換部からの電荷量を電圧に変換し前記制
御回路に付与する電荷−電圧変換部とを備え、前記制御
回路のアース電位を前記圧電変換部及び電荷−電圧変換
部の各アース電位と実質的に等しくするように、前記制
御回路のアース電位を前記圧電変換部及び電荷−電圧変
換部に導くようにしたことにある。In solving this problem, the structural features of the present invention are as follows:
A piezoelectric pressure detection device connected to an appropriate control circuit includes: a conductive cylinder; a piezoelectric converter that is supported within an opening at the tip of the conductive cylinder via an insulating member and converts pressure into an electric charge; a charge-voltage converter supported within the conductive cylinder via the insulating member to convert the amount of charge from the piezoelectric converter into voltage and apply it to the control circuit; The ground potential of the control circuit is guided to the piezoelectric converter and the charge-voltage converter so as to be substantially equal to each ground potential of the piezoelectric converter and the charge-voltage converter.
しかして、このように本発明を構成したことにより、前
記導電性筒体を例えばエンジンの一部等に取付けて圧力
を検出する場合、前記圧電変換部及び電荷−電圧変換部
が前記絶縁部材により前記導電性筒体から電気的に絶縁
されてフローティング状態に維持され、かつ前記制御回
路のアース電位が前記圧電変換部及び電荷−電圧変換部
にその共通アース電位として導かれるので、前記導電性
筒体のアース電位の変動或いは前記制御回路のアース電
位の変動が生じても、前記圧電変換部及び電荷−電圧変
換部の各出力にアース電位変動による誤差が混入するこ
とがな（、かつ前記導電性筒体と前記各変換部との間の
浮遊容量を介してこれら各変換部が充電されて適正な作
動を損なうこともない。By configuring the present invention in this way, when the conductive cylinder is attached to, for example, a part of an engine to detect pressure, the piezoelectric converter and the charge-voltage converter are connected to each other by the insulating member. The electrically conductive cylinder is electrically insulated from the conductive cylinder and maintained in a floating state, and the ground potential of the control circuit is led to the piezoelectric converter and the charge-voltage converter as their common ground potential. Even if the ground potential of the body or the ground potential of the control circuit varies, errors due to ground potential variations will not be mixed into the outputs of the piezoelectric converter and the charge-voltage converter (and the conductive These converting parts are not charged through stray capacitance between the sex cylinder and each of the converting parts, thereby impairing proper operation.
以下、本発明の一実施例を図面により説明すると、第１
図及び第２図は、本発明に係る圧電型圧力検出装置が、
車両に装備したエンジン及び制御回路１３０に通用され
た例を示している。この圧力検出装置は、保持部材１０
と、この保持部材１０に組付けた圧力センサＳを備えて
おり、保持部材１０は、金属材料により第１図にて図示
断面形状を有するように形成されている。この保持部材
１０に形成した大径部１１の外周面１１ａは把持し易い
ように六角形となっており、一方、同保持部材１０に形
成した小径部１２の外周面には、雄ねし部１２ａが形成
されてエンジンの気筒周壁の一部に螺着され圧力センサ
Ｓを気筒燃焼室内に露呈させている。Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
2 and 2 show that the piezoelectric pressure detection device according to the present invention is
An example in which the present invention is applied to an engine and a control circuit 130 installed in a vehicle is shown. This pressure detection device includes a holding member 10
and a pressure sensor S assembled to this holding member 10, and the holding member 10 is formed of a metal material to have the cross-sectional shape shown in FIG. The outer circumferential surface 11a of the large diameter portion 11 formed on this holding member 10 is hexagonal for easy grip, while the outer circumferential surface of the small diameter portion 12 formed on the same holding member 10 has a male threaded portion. 12a is formed and screwed onto a part of the cylinder peripheral wall of the engine to expose the pressure sensor S into the cylinder combustion chamber.
圧力センサＳは、筒体２０と、スペーサ３０と、センサ
本体４０とにより構成されており、筒体２０は、金属材
料により第１図に示すごとく断面コル状に形成されて、
その開口部２１にて保持部材１０における小径部１２の
開口部１２ｂ内に同軸的にかつ気密的に溶接されている
。筒体２０の底壁２２の外周縁部には、環状薄肉１２２
ａが、底壁２２の内表面側から環状溝を穿設することに
よって形成されており、この環状薄肉部２２ａは底壁２
２のダイアフラムとしてのその板厚方向への弾性歪を許
容する。スペーサ３０は、断熱性及び電気絶縁性を有す
る弾性材料により円板状に形成されており、このスペー
サ３０は、その−例にて筒体２０の底壁２２の内表面に
重合固着されている。The pressure sensor S is composed of a cylindrical body 20, a spacer 30, and a sensor main body 40, and the cylindrical body 20 is formed of a metal material and has a corular cross section as shown in FIG.
The opening 21 is coaxially and airtightly welded into the opening 12b of the small diameter portion 12 of the holding member 10. An annular thin wall 122 is provided at the outer peripheral edge of the bottom wall 22 of the cylindrical body 20.
a is formed by drilling an annular groove from the inner surface side of the bottom wall 22, and this annular thin wall portion 22a is formed by drilling an annular groove from the inner surface side of the bottom wall 22.
As the second diaphragm, elastic strain in the thickness direction is allowed. The spacer 30 is formed into a disk shape from an elastic material having heat insulating and electrically insulating properties, and in this example, the spacer 30 is polymerized and fixed to the inner surface of the bottom wall 22 of the cylindrical body 20. .
センサ本体４０は、電気絶縁材料により円環状に形成し
た絶縁板４１と、金属材料により第１図にて図示断面形
状に形成した支持部材４２とを備えており、絶縁板４１
は、その外周縁部にて保持ｉ１％材１０の大径部１１内
に同心的に嵌着されて保枠部材１０の段部１１ｂに重合
している。支持部材４２に形成した長手状円筒部４２ａ
は、その頚部を、絶縁Ｆｊ、４１の中空部に保持部材１
０の大径部１１側から同心的に嵌着し、保持部材１０の
小径部１２内に同心的に嵌装されて筒体２０内に延出し
ており、円筒部４２ａと同心的にその基端部に直交して
形成した鍔部４２ｂは、絶縁板４１と環状絶縁部材４３
（電気絶縁材料からなる）との間に挟持されている。The sensor main body 40 includes an annular insulating plate 41 made of an electrically insulating material, and a support member 42 made of a metal material having the cross-sectional shape shown in FIG.
is fitted concentrically into the large diameter portion 11 of the holding i1% material 10 at its outer peripheral edge and overlaps with the stepped portion 11b of the holding frame member 10. A longitudinal cylindrical portion 42a formed on the support member 42
attaches its neck to the hollow part of the insulation Fj, 41 with the holding member 1.
It is fitted concentrically from the large diameter part 11 side of the holding member 10, and is fitted concentrically into the small diameter part 12 of the holding member 10 and extends into the cylindrical body 20. The flange portion 42b formed perpendicularly to the end portion is connected to the insulating plate 41 and the annular insulating member 43.
(made of electrically insulating material).
かかる場合、支持部材４２の円筒部４２ａの外径は保持
部材１０の小径部１２の内径よりも所定長さだけ小さく
なっており、また鍔部４２ｂの外径は保持部材１０の大
径部１１の内径よりも所定長さだけ小さくなっている。In such a case, the outer diameter of the cylindrical portion 42a of the support member 42 is smaller than the inner diameter of the small diameter portion 12 of the holding member 10 by a predetermined length, and the outer diameter of the flange portion 42b is smaller than the inner diameter of the large diameter portion 11 of the holding member 10. is smaller than the inner diameter by a predetermined length.
但し、絶縁部材４３は、保持部材１０の大径部１１の内
壁開口端部分に溶接した環状ストッパ４３ａにより抜止
めされている。支持部材４２の円筒部４２ａ内に軸方向
に形成した段付中空部には、電気絶縁材料からなる段付
筒状絶縁部材４４が嵌装されており、円筒部４２ａの先
端開口部分には、金属薄板材料からなる断面コ字状筒体
４５がその開口部４５ａにて気密的かつ同軸的に嵌装溶
接されている。また、この筒体４５はその底壁４５ｂの
外表面にてスペーサ３０の他側に一様に所定圧にて圧接
しており、同筒体４５の周壁外径は筒体２０の周壁内径
よりも小さい。However, the insulating member 43 is prevented from coming off by an annular stopper 43a welded to the open end portion of the inner wall of the large diameter portion 11 of the holding member 10. A stepped cylindrical insulating member 44 made of an electrically insulating material is fitted into a stepped hollow portion formed in the axial direction within the cylindrical portion 42a of the support member 42. A cylindrical body 45 having a U-shaped cross section made of a thin metal plate material is hermetically and coaxially fitted and welded at its opening 45a. Further, the outer surface of the bottom wall 45b of the cylinder 45 is pressed against the other side of the spacer 30 at a uniform predetermined pressure, and the outer diameter of the peripheral wall of the cylinder 45 is greater than the inner diameter of the peripheral wall of the cylinder 20. It's also small.
筒体４５内には、良電導性金属材料からなる一対のスペ
ーサ４６．４７と圧電素子４８とが収容されており、ス
ペーサ４６は筒体４５の底壁４５ｂにより受承され、一
方、スペーサ４７は、絶縁部材４４の大径部Ａｔａ内に
受承されている。圧電素子４８は両スペーサ４６．４７
間にて筒体４５の軸に対し直交して挾持されており、こ
の圧電素子４８のアース側電極４８ａはスペーサ４６を
介し筒体４５の底壁４５ｂに電気的に接続され、一方、
この圧電素子４８の出力側電極４８ｂは、スペーサ４７
を介しリード線４９に電気的に接続されている。リード
線４９は、絶縁部材４４の小径部４４ｂを通り保持部材
１００大径部１１内に延出している。なお、圧電素子４
８は、その両電極４８ａ、４８ｂに対し両スペーサ４６
．４７から加わる圧力を電荷量に変換しこの電荷量を出
力側電極４８ｂから発生させる。A pair of spacers 46 and 47 made of a metal material with good conductivity and a piezoelectric element 48 are accommodated in the cylinder 45. The spacer 46 is received by the bottom wall 45b of the cylinder 45, while the spacer 47 is received within the large diameter portion Ata of the insulating member 44. The piezoelectric element 48 has both spacers 46 and 47
The piezoelectric element 48 is sandwiched between the piezoelectric elements 48 perpendicularly to the axis of the cylinder 45, and the earth side electrode 48a of the piezoelectric element 48 is electrically connected to the bottom wall 45b of the cylinder 45 via the spacer 46.
The output side electrode 48b of this piezoelectric element 48 is connected to the spacer 47
It is electrically connected to a lead wire 49 via. The lead wire 49 passes through the small diameter portion 44b of the insulating member 44 and extends into the large diameter portion 11 of the holding member 100. Note that the piezoelectric element 4
8 has both spacers 46 for both electrodes 48a and 48b.
．． The pressure applied from 47 is converted into an amount of electric charge, and this amount of electric charge is generated from output side electrode 48b.
また、圧力検出装置は、金属材料により断面コ字状に形
成した筒体５０を備えており、この筒体５０はその開口
端部５１にて保持部材１０における大径部１１の開口端
部に同軸的にかつ気密的に嵌装溶接されている。金属板
材料からなる断面コ字状カバー６０は、その開口端部６
１を、支持部材４２における鍔部４２ｂのアース側に同
軸的に溶接するとともに、その底壁６２を、筒体５０内
に向けて延出させてなるもので、このカバー６０内には
、板状電荷−電圧変換器７０がその各り−ドピン７１ａ
、７１ｂを支持部材４２の鍔部４２ｂに溶接して支持さ
れている。The pressure detection device also includes a cylindrical body 50 made of a metal material and having a U-shaped cross section. Coaxially and airtightly fitted and welded. A cover 60 having a U-shaped cross section made of a metal plate material has an open end 6
1 is coaxially welded to the ground side of the flange 42b of the support member 42, and its bottom wall 62 extends into the cylindrical body 50. Inside this cover 60, there is a plate. Each charge-to-voltage converter 70 has a doped pin 71a.
, 71b are welded to and supported by the flange portion 42b of the support member 42.
電荷−電圧変換器７０は、第２図に示すごとく、プリン
ト基板７２と、このプリント基板７２上に配設した演算
増幅器７３、抵抗７４及びコンデンサ７５とを有してお
り、演算増幅器７３は、その非反転入力端子７３ａにて
、リード線４９ （第１図及び第２図参照）の外端に接
続され、その反転入力端子７３ｂにて、リードビン７１
ａ （第１図及び第２図参照）の先端部に接続されてい
る。また、演算増幅器７３は、そのアース端子７６ａ、
電源端子７６ｂ、出力端子７６ｃ及び基準電圧端子７６
ｄにて、カバー６０の底壁６２に各シール部材６２ａ、
６２ｂ、６２ｃ及び６２ｄ（電気絶縁材料からなる）を
介し気密的に嵌着した各リードビン７７ａ、７７ｂ、？
７ｃ及び７７ｄの内端にそれぞれ接続されており、演算
増幅器７３の基準電圧端子７６ｄは、同演算増＠器７３
の反転入 “力端子７３ｂに接続されている。抵抗７４
はその一端にて演算増幅器７３の非反転入力端子７３ａ
に接続されており、この抵抗７４の他端は演算増幅器７
３の出力端子に接続されている。また、コンデンサ７５
は抵抗７４に並列接続されており、このコンデンサ７５
の抵抗７４の一端との接続端子、抵抗７４、及び演算増
幅器７３の非反転入力端子７３ａの周囲には、これらの
高絶縁状態の確保のために、反転入力端子７３ｂと同電
位のガード電極７８が基板７２上にて形成されている。As shown in FIG. 2, the charge-voltage converter 70 includes a printed circuit board 72, an operational amplifier 73, a resistor 74, and a capacitor 75 disposed on the printed circuit board 72. Its non-inverting input terminal 73a is connected to the outer end of the lead wire 49 (see FIGS. 1 and 2), and its inverting input terminal 73b is connected to the lead bin 71.
a (see Figures 1 and 2). Further, the operational amplifier 73 has a ground terminal 76a,
Power supply terminal 76b, output terminal 76c and reference voltage terminal 76
At step d, each sealing member 62a is attached to the bottom wall 62 of the cover 60.
62b, 62c and 62d (made of electrically insulating material), each lead bin 77a, 77b, ?
The reference voltage terminal 76d of the operational amplifier 73 is connected to the inner ends of the operational amplifier 7c and 77d, respectively.
The inverting input of the resistor 74 is connected to the input terminal 73b.
is the non-inverting input terminal 73a of the operational amplifier 73 at one end thereof.
The other end of this resistor 74 is connected to the operational amplifier 7.
It is connected to the output terminal of 3. Also, capacitor 75
is connected in parallel to the resistor 74, and this capacitor 75
A guard electrode 78 having the same potential as the inverting input terminal 73b is installed around the connection terminal with one end of the resistor 74, the resistor 74, and the non-inverting input terminal 73a of the operational amplifier 73 to ensure a high insulation state. is formed on the substrate 72.
なお、電荷−電圧変換器７０は、圧電素子４日からの電
荷量を出力電圧に変換する。Note that the charge-voltage converter 70 converts the amount of charge from the piezoelectric element 4 into an output voltage.
電気絶縁材料からなる円筒状絶縁部材８０は、第１図に
示すごとく、その大径部８１をカバー６０の周壁に嵌装
するとともに、その小径部８２を筒体５０の底壁５２に
固着して、筒体５０内に同軸的に組付けられており、こ
の絶縁部材８０内には、板状出力調整器９０が、その外
周縁部を、同絶縁部材８０の段部とこの絶縁部材８０の
小径部８２内に嵌装した円筒状絶縁部材１００ （電気
絶縁材料からなる）の−開口端との間に挟持して組付け
られている。As shown in FIG. 1, the cylindrical insulating member 80 made of an electrically insulating material has its large diameter part 81 fitted into the peripheral wall of the cover 60, and its small diameter part 82 fixed to the bottom wall 52 of the cylindrical body 50. The plate-shaped output regulator 90 is coaxially assembled inside the cylinder 50 , and the plate-like output regulator 90 is disposed within the insulating member 80 , and its outer peripheral edge is connected to the stepped portion of the insulating member 80 . The cylindrical insulating member 100 (made of electrically insulating material) is fitted into the small diameter portion 82 of the cylindrical insulating member 100 (made of electrically insulating material).
出力調整器９０は、第２図に示すごとく、プリント基板
９１と、このプリント基板９１上に配設した演算増幅回
路９２及び基準電圧発生回路９３とにより構成されてい
る。演算増幅回路９２は、入力抵抗９２ａと、演算増幅
器９２ｂと、調整抵抗９２ｃと、出力抵抗９２ｄを有し
ており、入力抵抗９２ａは、その−側端子にてリードピ
ン７７Ｃ（第１図及び第２図参照）の外端に接続されて
いる。演算増幅器９２ｂは、その非反転入力端子にて入
力抵抗９２ａの他側端子に接続されるとともに、その反
転入力端子にて、リードピン７７ｄ（第１図及び第２図
参照）の外端に接続されており、この演算増幅器９２ｂ
の非反転入力端子及び出力端子間には調整抵抗９２ｃが
接続されている。As shown in FIG. 2, the output regulator 90 includes a printed circuit board 91, an operational amplifier circuit 92, and a reference voltage generation circuit 93 arranged on the printed circuit board 91. The operational amplifier circuit 92 has an input resistor 92a, an operational amplifier 92b, an adjustment resistor 92c, and an output resistor 92d. (see figure). The operational amplifier 92b has its non-inverting input terminal connected to the other terminal of the input resistor 92a, and its inverting input terminal connected to the outer end of the lead pin 77d (see FIGS. 1 and 2). This operational amplifier 92b
An adjustment resistor 92c is connected between the non-inverting input terminal and the output terminal of.
また、出力抵抗９２ｄはその一端子にて演算増幅器９２
ｂの出力端子に接続されており、この出力抵抗９２ｄの
他端子は、筒体５０の底壁５２に雪道コンデンサ５２ａ
を介し気密的に嵌着したり一ドピン９４ａ （第１図及
び第２図参照）の内端に接続されている。Further, the output resistor 92d has one terminal connected to the operational amplifier 92.
The other terminal of this output resistor 92d is connected to the output terminal of the snow capacitor 52a on the bottom wall 52 of the cylinder 50.
It is hermetically fitted through the connector and connected to the inner end of the dowel pin 94a (see FIGS. 1 and 2).
基準電圧発生回路９３は、互いに直列接続した一対の抵
抗９３ａ、９３ｂと、抵抗９３ａに並列接続した安定化
用コンデンサ９３ｃと、一対の抵抗９３ａ、９３ｂに並
列接続した安定化用コンデンサ９３ｄとにより構成され
ており、用抵抗９３ａ、９３ｂの共通接続端子は演算増
幅器９２ｂの反転入力端子及びリードピン７７ｄ（第１
図及び第２図参照）の外端に接続されている。また、抵
抗９３ａの他端子は、リードピン７７ａ （第１図及び
第２図参照）の−外端に接続されるとともに、筒体５０
の底壁５２に貫通コンデンサ５２ｂを介し気密的に嵌着
したり−ドピン９４ｂの内端に接続されており、一方４
、抵抗９３ｂの他端子は、リードピン７７ｂ（第１図及
び第２図参照）の外端に接続されるとともに、筒体５０
の底壁５２に貫通コンデンサ５２ｃを介し気密的に嵌着
したり−ドピン９４Ｃの内端に接続されている。但し、
用抵抗９３ａ、９３ｂの各抵抗値は、両演算増幅器７３
．９２ｂの各反転入力端子に付与すべき基準電圧を特定
するように定められている。The reference voltage generation circuit 93 includes a pair of resistors 93a and 93b connected in series, a stabilizing capacitor 93c connected in parallel to the resistor 93a, and a stabilizing capacitor 93d connected in parallel to the pair of resistors 93a and 93b. The common connection terminal of the resistors 93a and 93b is the inverting input terminal of the operational amplifier 92b and the lead pin 77d (first
(see Figures 1 and 2). The other terminal of the resistor 93a is connected to the -outer end of the lead pin 77a (see FIGS. 1 and 2), and the cylindrical body 50
It is hermetically fitted to the bottom wall 52 of 4 through the feedthrough capacitor 52b and connected to the inner end of the dowel pin 94b, while the 4
, the other terminal of the resistor 93b is connected to the outer end of the lead pin 77b (see FIGS. 1 and 2), and the other terminal of the cylindrical body 50
It is hermetically fitted to the bottom wall 52 of the housing via a feedthrough capacitor 52c, and is connected to the inner end of the dowel pin 94C. however,
The resistance values of the resistors 93a and 93b for both operational amplifiers 73
．． The reference voltage to be applied to each inverting input terminal of 92b is specified.
金属材料からなるカバー１１０は、第１図に示すごと（
、その先端開口部１１１にて、筒体５０の底壁５２から
延出する環状フランジ５３に気密的かつ同軸的に溶接さ
れており、このカバー１１０の中央部に形成した筒状ポ
ス部１１２には、被覆リード線１２０が外方から気密的
に挿通されている。被覆リード線１２０は、その各心線
１２１゜１２２．１２３の内端にて、各リードピン９４
ａ。The cover 110 made of a metal material is made of a metal material as shown in FIG.
, is hermetically and coaxially welded to an annular flange 53 extending from the bottom wall 52 of the cylindrical body 50 at its tip opening 111. A covered lead wire 120 is hermetically inserted from the outside. The coated lead wire 120 is connected to each lead pin 94 at the inner end of each core wire 121, 122, and 123 thereof.
a.
９４ｂ、９４ｃの外端にそれぞれ接続されており、この
被覆リード線１２０の心線１２１，１２２及び１２３は
その各外端にて、制御回路１３０ （第２図参照）の入
力端子１３１．アース端子１３２及び電源端子１３３に
それぞれ接続されている。The core wires 121, 122 and 123 of the coated lead wire 120 are connected to the input terminals 131.94b and 94c of the control circuit 130 (see FIG. 2) at their respective outer ends. It is connected to a ground terminal 132 and a power terminal 133, respectively.
但し、制御回路１３０の電源端子１３３及びアース端子
１３２は、制御回路１３０に設けた電源回路を介し当該
車両のバッテリの正側端子及び負側端子にそれぞれ接続
されている。また、筒体２０、保持部材１０、筒体５０
及びカバー１１０は、電気的に同電位であり、一般に、
保持部材１０の准ネジ部１２ａを介しエンジンの本体に
これと同電位となるように接続されている。なお、エン
ジンの本体は、バッテリの負側端子に電気的に接続され
ている。また、制御回路１３０はエンジンから離れて位
置している。また、制御回路１３０に電源回路を設ける
代りに、用抵抗９３ａ、９３ｂにツェナーダイオードを
並列接続して電源電圧を作るようにしてもよい。However, the power terminal 133 and the ground terminal 132 of the control circuit 130 are connected to the positive terminal and negative terminal of the battery of the vehicle, respectively, via a power circuit provided in the control circuit 130. Further, the cylinder body 20, the holding member 10, the cylinder body 50
and the cover 110 are electrically at the same potential, and generally,
It is connected to the main body of the engine via the semi-threaded portion 12a of the holding member 10 so as to have the same potential as this. Note that the main body of the engine is electrically connected to the negative terminal of the battery. Additionally, control circuit 130 is located remotely from the engine. Further, instead of providing a power supply circuit in the control circuit 130, a Zener diode may be connected in parallel to the resistors 93a and 93b to generate the power supply voltage.
以上のように構成した本実施例において、前記バッテリ
からの直流電圧を制御回路１３０に付与すると、この制
御回路１３０が作動状態になり、同制御回路１３０の電
源端子１３３及びアース端子１３２間に現われる前記バ
ッテリに基き制御回路１３０にて作られた電源電圧が、
被覆リード線１２０の心線１２３．１２２及びリードピ
ン９４Ｃ１９４ｂを通し出力調整器９０に付与されると
ともに、このように出力調整器９０に付与された電源電
圧が、さらに、リードピン７７ｂ、７７ｄを介し電荷−
電圧変換器７０に付与される。すると、出力調整器９０
の演算増幅器９２ｂがリードピン９４ｃからの電源電圧
を受けて作動状態になるとともに、電荷−電圧変換器７
０の演算増幅器７３が、その電源端子７６ｂ及びアース
端子７６ａにて作動状態になる。In this embodiment configured as described above, when the DC voltage from the battery is applied to the control circuit 130, the control circuit 130 is activated, and a voltage appears between the power terminal 133 and the ground terminal 132 of the control circuit 130. The power supply voltage generated by the control circuit 130 based on the battery is
The power supply voltage is applied to the output regulator 90 through the core wire 123, 122 of the coated lead wire 120 and the lead pin 94C 194b, and the power supply voltage thus applied to the output regulator 90 is further transferred to the electric charge through the lead pins 77b and 77d.
applied to voltage converter 70. Then, the output regulator 90
The operational amplifier 92b receives the power supply voltage from the lead pin 94c and becomes operational, and the charge-voltage converter 7
Operational amplifier 73 of No. 0 is activated at its power supply terminal 76b and ground terminal 76a.
また、基準電圧発生回路９３がリードピン９４Ｃからの
直流電圧を両抵抗９３ａ、９３ｂにより分圧しその共通
接続端子からこの分圧電圧を基準電圧として発生し演算
増幅器９２ｂの反転入力端子に付与するとともにリード
ピン７７ｄを通し演算増幅器７３の反転入力端子７３ｂ
に付与する。Further, the reference voltage generation circuit 93 divides the DC voltage from the lead pin 94C by both resistors 93a and 93b, generates this divided voltage as a reference voltage from the common connection terminal, applies it to the inverting input terminal of the operational amplifier 92b, and applies it to the lead pin. 77d to the inverting input terminal 73b of the operational amplifier 73.
be granted to
かかる場合、制御回路１３０の電源端子１３３に現われ
る前記バッテリからの直流電圧を制御回路１３０を介し
出力調整器９０及び電荷−電圧変換器７０の双方に付与
し、かつこれら出力調整器９０及び電荷−電圧変換器７
０の作動にあたり、その各作動の基準点をアース電位よ
り浮かせるので、アース電位が作動の基準の場合のよう
に十−の電源を必要とすることはない。また、これら制
御回路１３０．出力調整器９０及び電荷−電圧変換器７
０の作動に必要な各直流電源を単一のバッテリにて兼用
させ得る。In such a case, the DC voltage from the battery appearing at the power supply terminal 133 of the control circuit 130 is applied to both the output regulator 90 and the charge-voltage converter 70 via the control circuit 130, and the output regulator 90 and the charge-voltage converter 70 are Voltage converter 7
Since the reference point for each operation is set above the ground potential, a 10-volt power supply is not required as in the case where the ground potential is the reference point for operation. In addition, these control circuits 130. Output regulator 90 and charge-voltage converter 7
A single battery can serve as each DC power source necessary for the operation of the 0.
このような状態にて、エンジンの作動に伴い気筒燃焼室
内に圧力（以下、気筒内圧力という）が生じると、圧力
センサＳにおける筒体２０の底壁２２が当該気筒内圧力
を受けて環状薄肉部２２ａにて弾性歪みを生じスペーサ
３０、筒体４５の底壁４５ｂ及びスペーサ４６を介し圧
電素子４８に圧力を付与する。かかる場合、筒体２０の
底壁２２の周囲には環状薄肉部２２ａが形成されている
ため、底壁２２が気筒内圧力に対し応答性よく弾性歪み
を生じる。すると、圧電素子４８がその圧電変換作用に
より前記気筒内圧力を電荷量として出力側電極４８ｂか
ら発生させる。In such a state, when pressure (hereinafter referred to as cylinder internal pressure) is generated in the cylinder combustion chamber due to engine operation, the bottom wall 22 of the cylinder 20 in the pressure sensor S receives the cylinder internal pressure and becomes an annular thin wall. Elastic strain is generated in the portion 22a, and pressure is applied to the piezoelectric element 48 via the spacer 30, the bottom wall 45b of the cylinder 45, and the spacer 46. In this case, since the annular thin wall portion 22a is formed around the bottom wall 22 of the cylindrical body 20, the bottom wall 22 is elastically distorted in response to the cylinder pressure. Then, the piezoelectric element 48 generates the cylinder pressure as a charge amount from the output electrode 48b by its piezoelectric conversion action.
然る後、電荷−電圧変換器７０が、演算増幅器７３の非
反転入力端子７３ａにて、スペーサ４７及びリード線４
９を通し圧電素子４８の出力側電極４８ｂから電荷量を
受け、演算増幅器７３の反転入力端子７３ｂにおける前
記基準電圧を基準として前記電荷量を出力電圧に変換増
幅し演算増幅器７３の出力端子７６ｃに発生させる。つ
いで、出力調整器９０が、演算増幅器９２ｂの非反転入
力端子にて、リードピン７７ｃ及び入力抵抗９２ａを通
し演算増幅器７３の出力端子７６ｃから出力電圧を受け
、調整抵抗９２ｃの調整抵抗値のもとに演算増幅器９２
ｂの反転入力端子における前記基準電圧を基準として前
記出力電圧を調整し、この調整出力電圧を出力抵抗９２
ｄを通し発生させる。すると、制御回路１３０が、その
入力端子１３１にて、リードピン９４ａ及び被覆リード
線１２０の心線１２１を通し出力抵抗９２ｄから出力調
整電圧を受ける。Thereafter, the charge-voltage converter 70 connects the spacer 47 and the lead wire 4 at the non-inverting input terminal 73a of the operational amplifier 73.
9 from the output side electrode 48b of the piezoelectric element 48, converts and amplifies the charge amount into an output voltage using the reference voltage at the inverting input terminal 73b of the operational amplifier 73 as a reference, and outputs the electric charge to the output terminal 76c of the operational amplifier 73. generate. Next, the output regulator 90 receives the output voltage from the output terminal 76c of the operational amplifier 73 through the lead pin 77c and the input resistor 92a at the non-inverting input terminal of the operational amplifier 92b, and adjusts the value of the adjusted resistance of the adjusting resistor 92c. operational amplifier 92
The output voltage is adjusted with reference to the reference voltage at the inverting input terminal of
Generate through d. Then, the control circuit 130 receives an output adjustment voltage from the output resistor 92d at its input terminal 131 through the lead pin 94a and the core wire 121 of the covered lead wire 120.
然るに、このような作用ああたり、本発明装置において
は、支持部材４２、筒体４５及びカバー６０の各外壁面
により囲われる部分、出力調整器９０、並びにリードピ
ン９４ａ〜９４ｃが、スペーサ３０、絶縁板４１並びに
各絶縁部材４３．８０及び１００により、保持部材１０
、並びに各筒体２０及び５０内にてこれらから電気的に
絶縁されてフローティング状態（第２図にて閉曲線Ｐ参
照）にて支持され、かつ制御回路１３０にて作られた電
源電圧が、電源端子１３３及びアース端子１３２を介し
、第１図及び第２図から容易に理解されるごとく、圧電
素子４８、電荷−電圧変換器７０及び出力調整器９０の
各電源電圧として共通に導かれているので、車両のスタ
ータ、オルタネータ、イブナイフ等の作動により前記バ
ッテリからの直流電圧の変動或いはエンジンの本体及び
制御回路１３０のアース電位の変動があっても、圧型素
子４８．電荷−電圧変換器７０．出力調整器９０及び制
御回路１３０間の相互の電源電圧の差が生じることがな
く、その結果、電荷−電圧変換器７０の出力電圧及び出
力調整器９０の出力調整電圧に、前記バッテリからの直
流電圧の変動に起因する誤差が混入することがない。な
お、このことは、上述のように抵抗９３ａ、９３ｂにツ
ェナーダイオードを並列接続した場合にも、同様である
。However, due to such an effect, in the device of the present invention, the portions surrounded by the outer wall surfaces of the support member 42, the cylinder 45, and the cover 60, the output regulator 90, and the lead pins 94a to 94c are The plate 41 and the respective insulating members 43, 80 and 100 allow the holding member 10
, and are electrically insulated from each of the cylinders 20 and 50 and supported in a floating state (see closed curve P in FIG. 2), and the power supply voltage generated by the control circuit 130 is connected to the power supply. As can be easily understood from FIGS. 1 and 2, the power supply voltage of the piezoelectric element 48, the charge-voltage converter 70, and the output regulator 90 is commonly led through the terminal 133 and the ground terminal 132. Therefore, even if there is a fluctuation in the DC voltage from the battery or a fluctuation in the ground potential of the engine body and control circuit 130 due to the operation of the vehicle's starter, alternator, evening knife, etc., the piezo element 48. Charge-to-voltage converter 70. There is no difference in power supply voltage between the output regulator 90 and the control circuit 130, and as a result, the output voltage of the charge-voltage converter 70 and the output adjustment voltage of the output regulator 90 are equal to the direct current from the battery. Errors caused by voltage fluctuations are not introduced. Note that this also applies to the case where Zener diodes are connected in parallel to the resistors 93a and 93b as described above.
また、圧電素子４８及び電荷−電圧変換器７０が、支持
部材４２、筒体４５及びカバー６０により金属シールド
（第２図にて符号ｑ参照、）状態にて被われ、かつこの
金属シールドｑの電位が、第１図及び第２図から容易に
理解されるように、制御回路１３０のアース電位を基準
とする基準電圧発生回路９３からの基準電圧に維持され
るので、保持部材１０、即ちエンジンのアース電位が変
動しても、電荷−電圧変換器７０及び出力調整器９０が
、浮遊容量Ｃａ （第２図参照）を通しコンデンサ７
５に充電されることなく常に本来の機能を適正に確保し
得る。Furthermore, the piezoelectric element 48 and the charge-voltage converter 70 are covered by the support member 42, the cylindrical body 45, and the cover 60 in a metal shield state (see reference numeral q in FIG. 2), and the metal shield q is As can be easily understood from FIGS. 1 and 2, since the potential is maintained at the reference voltage from the reference voltage generation circuit 93 with reference to the ground potential of the control circuit 130, the holding member 10, that is, the engine Even if the ground potential of capacitor 7 fluctuates, charge-voltage converter 70 and output regulator 90
5, the original function can always be properly ensured without being charged.
また、出力調整器９０における基準電圧発生回路９３か
らの基準電圧が、電荷−電圧変換器７０のアース端子（
Ｉ（ＩＩち、リードピン７１ａ）と演算増幅器７３の反
転入力端子７３ｂに導びかれ、かつ当該電荷−電圧変換
器７０における演算増幅器７３の非反転入力端子７３ａ
、並びに抵抗７４及びコンデンサ７５の非反転入力端子
７３ａとの各接続端子の周囲には上述のごとくガード電
極が形成されているので、演算増幅器７３の非反転入力
端子７３ａ、並びにこの非反転入力端子７３ａとの抵抗
７４及びコンデンサ７５の各接続端子及びリードビン７
１ａ （即ち、支持部材４２、筒体４５及びカバー６０
の各外壁）が演算増幅器７３の反転入力端子７３ｂと同
電位に維持されることとなり、その結果、絶縁抵抗の低
下とはかかわりなく、演算増幅器７３の出力電圧のドリ
フトを常に防止し得る。以上の各外壁はガード電極の働
きをすると開時に、また、高絶縁性のある雰囲気内に保
持すべき圧電素子４８及び電荷−電圧変換器７Ｏが支持
部材４２、筒体４５及びカバー６０により一体的かつ気
密的に内包されるようにしたので、この内包のための作
業性及び気密性に対する信頼性が向上し得る。Further, the reference voltage from the reference voltage generation circuit 93 in the output regulator 90 is applied to the ground terminal (
I (II, lead pin 71a) and the inverting input terminal 73b of the operational amplifier 73, and the non-inverting input terminal 73a of the operational amplifier 73 in the charge-voltage converter 70.
, and around each connection terminal with the non-inverting input terminal 73a of the resistor 74 and the capacitor 75, guard electrodes are formed as described above, so that the non-inverting input terminal 73a of the operational amplifier 73 and this non-inverting input terminal Connection terminals of resistor 74 and capacitor 75 with 73a and lead bin 7
1a (that is, the support member 42, the cylinder 45, and the cover 60
) are maintained at the same potential as the inverting input terminal 73b of the operational amplifier 73, and as a result, the output voltage of the operational amplifier 73 can always be prevented from drifting regardless of a decrease in insulation resistance. When each of the above outer walls functions as a guard electrode, when opened, the piezoelectric element 48 and the charge-voltage converter 7O, which should be held in a highly insulating atmosphere, are integrated by the support member 42, the cylinder 45, and the cover 60. Since it is encapsulated in a precise and airtight manner, the reliability of the encapsulation workability and airtightness can be improved.
次に、第３図を参照して本発明の他の実施例を説明する
と、本実施例においては、前記実施例にて述べた保持部
材１０及び圧力センサＳに代えて、保持部材１０Ａ及び
圧力センサＳａを採用し、かつ前記実施例にて述べた出
力調整器９０に代えて、この出力調整器９０及び前記実
施例における電荷−電圧変換器７０を一体化してなる信
号処理部１３０を両絶縁部材８０，１００により挾持す
るようにしたことにその構成上の特徴がある。なお、両
絶縁部材８０，１００はその各基端部にて筒体５０の底
壁５２に固着されている。Next, another embodiment of the present invention will be described with reference to FIG. 3. In this embodiment, instead of the holding member 10 and pressure sensor S described in the previous embodiment, In place of the output regulator 90 described in the previous embodiment, a signal processing section 130 that employs the sensor Sa and integrates this output regulator 90 and the charge-voltage converter 70 in the previous embodiment is installed with both insulation. Its structural feature lies in that it is held between the members 80 and 100. Note that both the insulating members 80 and 100 are fixed to the bottom wall 52 of the cylindrical body 50 at their respective base ends.
圧力センサＳａは、前記実施例における筒体２０及びス
ペーサ３０と、センサ本体１４０とにより構成されてお
り、筒体２０は、その開口部２１にて、保持部材１０Ａ
に形成した段付開口部１２Ｂの大径部内に同軸的かつ気
密的に溶接されている。センサ本体１４０は、絶縁部材
１４１と、シール部材１４２と、前記実施例にて述べた
筒体４５、各スペーサ４６．４７及び圧電素子４８とを
備えており、絶縁部材１４１は、電気絶縁材料により環
状に形成されて、保持部材１０Ａにおける段付開口部１
２Ｂの小径部内に嵌着されている。The pressure sensor Sa is composed of the cylindrical body 20 and the spacer 30 in the above embodiment, and a sensor main body 140, and the cylindrical body 20 has an opening 21 that is connected to the holding member 10A.
The stepped opening 12B is welded coaxially and airtightly into the large diameter portion of the stepped opening 12B. The sensor main body 140 includes an insulating member 141, a sealing member 142, the cylindrical body 45 described in the above embodiment, spacers 46, 47, and a piezoelectric element 48, and the insulating member 141 is made of an electrically insulating material. The stepped opening 1 in the holding member 10A is formed in an annular shape.
It is fitted into the small diameter part of 2B.
なお、保持部材１０Ａのその他の構成は保持部材１０と
実質的に同様である。Note that the other configuration of the holding member 10A is substantially the same as that of the holding member 10.
シール部材１４２は、コパール鉄等の封着金属材料から
なる円筒部１４２ａと、この円筒部１４２ａの中空部内
及び内表面上に気密的に設けたガラス材料からなる絶縁
部１４２ｂとにより構成されて、筒体４５の開口部４５
ａ内に同筒体４５内を真空にした状態にて円筒部１４２
ａを気密的に溶接して嵌着されるとともに、その外端部
にて絶縁材料１４１の内端部内に受承されている。圧電
素子４８は、前記実施例と同様に両スペーサ４６゜４７
を介し筒体４５の底壁４５ｂと絶縁部材１４２ｂとの間
に所定圧にて挾持されており、この圧電素子４８の出力
側電極４８ｂはスペーサ４７を介しシールド線１４３の
心線１４３ａの内端に接続されている。The sealing member 142 is composed of a cylindrical portion 142a made of a sealing metal material such as copal iron, and an insulating portion 142b made of a glass material provided airtight in the hollow portion and on the inner surface of the cylindrical portion 142a. Opening 45 of cylinder 45
The cylindrical part 142 is opened in a state where the inside of the cylindrical body 45 is evacuated.
a is hermetically welded and fitted, and its outer end is received within the inner end of the insulating material 141. The piezoelectric element 48 has both spacers 46° and 47° as in the previous embodiment.
The output electrode 48b of the piezoelectric element 48 is held between the bottom wall 45b of the cylinder 45 and the insulating member 142b at a predetermined pressure via the spacer 47, and the inner end of the core wire 143a of the shielded wire 143 It is connected to the.
シールド線１４３は、電気絶縁材料からなる絶縁チュー
ブ１４４を介し保持部材１０Ａの小径部１２内に同軸的
かつ気密的に挿通されており、このシールド線１４３の
心線１４３ａは、その内端にて、シールド部材１４２の
絶縁部１４２ｂを通りスペーサ４７に接続され、一方、
その外端にて、保持部材１０Ａの大径部１１内に延出し
ている。The shield wire 143 is coaxially and airtightly inserted into the small diameter portion 12 of the holding member 10A via an insulating tube 144 made of an electrically insulating material, and the core wire 143a of the shield wire 143 is inserted at its inner end. , are connected to the spacer 47 through the insulating part 142b of the shield member 142, and on the other hand,
Its outer end extends into the large diameter portion 11 of the holding member 10A.
このシールド線１４３の金属シールド１４３ｂは電気的
には前記実施例における支持部材４２の円筒部４２ａに
相当する。従って、シールド線１４３の金属シールド１
４３ｂは、その内端にて、シールド部材１４２の円筒部
１４２ａの外端中央部に接続されており、この金属シー
ルド１４３ｂの外端は、保持部材１０Ａの大径部１１内
に延出しリード線１４５の一端に接続されている。The metal shield 143b of this shield wire 143 electrically corresponds to the cylindrical portion 42a of the support member 42 in the embodiment. Therefore, the metal shield 1 of the shield wire 143
43b is connected at its inner end to the center of the outer end of the cylindrical portion 142a of the shield member 142, and the outer end of the metal shield 143b extends into the large diameter portion 11 of the holding member 10A and is connected to the lead wire. 145.
信号処理部１３０は、単一のプリント基板上に前記実施
例における電荷−電圧変換器７０及び出力調整器９０の
各回路素子を前記実施例と同様の作用を果すように配設
接続してなるもので、演算増幅器の非反転入力端子７３
ａ及び反転入力端子７３ｂは、リード線１４５の他端及
びシールド線１４３の心線１４３ａの外端にそれぞれ接
続されている。なお、その他の構成は、前記実施例と実
質的に同様である。The signal processing unit 130 is formed by arranging and connecting each circuit element of the charge-voltage converter 70 and the output regulator 90 in the above embodiment on a single printed circuit board so as to perform the same function as in the above embodiment. This is the non-inverting input terminal 73 of the operational amplifier.
a and the inverting input terminal 73b are connected to the other end of the lead wire 145 and the outer end of the core wire 143a of the shield wire 143, respectively. Note that the other configurations are substantially the same as those of the previous embodiment.
以上のように構成した本実施例においては、第３図に示
した構成から容易に理解されるように、前記実施例と実
質的に同様の作用効果を達成し得るのは勿論のこと、か
かる作用効果が、前記実施例における絶縁板４１．支持
部材４２．カバー６０及びその内部構成部材、絶縁部材
４３、並びにストッパ４３ａの省略のちとに、より一層
簡単な構成でもって得られる。また、前記実施例におけ
る支持部材４２．絶縁部材４３及びストッパ４３ａが省
略されているために、保持部材１０Ａの熱膨張が圧電素
子４８に好ましくない圧力の悪影響を及ぼすことがない
。In this embodiment configured as described above, as can be easily understood from the configuration shown in FIG. The effect is that of the insulating plate 41 in the above embodiment. Support member 42. By omitting the cover 60, its internal constituent members, the insulating member 43, and the stopper 43a, an even simpler structure can be obtained. Further, the support member 42 in the above embodiment. Since the insulating member 43 and the stopper 43a are omitted, the thermal expansion of the holding member 10A does not adversely affect the piezoelectric element 48 due to undesirable pressure.
なお、前記各実施例においては、圧電素子４８にその板
厚方向に圧力が加わる例について説明したが、これに代
えて、圧電素子にその板厚方向とは直角方向に圧力が加
わるようにして本発明を実施してもよい。In each of the above embodiments, an example was explained in which pressure is applied to the piezoelectric element 48 in the direction of its thickness, but instead of this, pressure may be applied to the piezoelectric element in a direction perpendicular to the direction of its thickness. The invention may be implemented.
第１図は、本発明の一実施例を示す断面図、第２図は前
記実施例における電気回路構成図、及び第３図は本発明
の他の実施例を示す断面図である。
符号の説明
１０、ＩＯＡ・・・保持部材（導電性筒体）、１２ｂ・
・・開口部、１２Ｂ・・・段付開口部、２０・・・筒体
（導電性筒体）、４５．５０・・・筒体、３０，４６．
４７・・・スペーサ、４０゜１４０・・・センサ本体（
圧電変換部）、４１・・・絶縁板、４２・・・支持部材
、４３．８０゜１００．１４１・・・絶縁部材、４８・
・・圧電素子、７０・・・電荷−電圧変換器（電荷−電
圧変換部）、７１ａ、７１ｂ、７７ａ、９４ｂ−・・リ
ートピン、９０・・・出力調整器、１１０・・・カバー
、１２０・・・被覆リード線、１３０・・・制御回路、
１３２・・・アース端子、１４３・・・シールド線、Ｓ
・・・圧力センサ。FIG. 1 is a sectional view showing one embodiment of the present invention, FIG. 2 is a diagram showing the configuration of an electric circuit in the embodiment, and FIG. 3 is a sectional view showing another embodiment of the invention. Explanation of symbols 10, IOA...holding member (conductive cylinder), 12b.
...Opening, 12B...Stepped opening, 20...Cylinder (conductive cylinder), 45.50...Cylinder, 30,46.
47...Spacer, 40°140...Sensor body (
Piezoelectric converter), 41... Insulating plate, 42... Supporting member, 43.80°100.141... Insulating member, 48...
...Piezoelectric element, 70...Charge-voltage converter (charge-voltage converter), 71a, 71b, 77a, 94b--Leat pin, 90...Output regulator, 110...Cover, 120- ... Covered lead wire, 130 ... Control circuit,
132... Earth terminal, 143... Shield wire, S
...Pressure sensor.
Claims (1)
て、導電性筒体と、この導電性筒体の先端開口部内に絶
縁部材を介し支持されて圧力を電荷量に変換する圧電変
換部と、前記導電性筒体内に前記絶縁部材を介し支持さ
れて前記圧電変換部からの電荷量を電圧に変換し前記制
御回路に付与する電荷−電圧変換部とを備え、前記制御
回路のアース電位を前記圧電変換部及び電荷−電圧変換
部の各アース電位と実質的に等しくするように、前記制
御回路のアース電位を前記圧電変換部及び電荷−電圧変
換部に導くようにしたことを特徴とする圧電型圧力検出
装置。A piezoelectric pressure detection device connected to an appropriate control circuit includes: a conductive cylinder; a piezoelectric converter that is supported within an opening at the tip of the conductive cylinder via an insulating member and converts pressure into an electric charge; a charge-voltage converter supported within the conductive cylinder via the insulating member to convert the amount of charge from the piezoelectric converter into voltage and apply it to the control circuit; A piezoelectric device characterized in that the ground potential of the control circuit is guided to the piezoelectric converter and the charge-voltage converter so as to be substantially equal to each ground potential of the piezoelectric converter and the charge-voltage converter. Mold pressure detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29447286A JPS63148137A (en) | 1986-12-10 | 1986-12-10 | Piezoelectric type pressure detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29447286A JPS63148137A (en) | 1986-12-10 | 1986-12-10 | Piezoelectric type pressure detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63148137A true JPS63148137A (en) | 1988-06-21 |
Family
ID=17808216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29447286A Pending JPS63148137A (en) | 1986-12-10 | 1986-12-10 | Piezoelectric type pressure detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63148137A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5402683A (en) * | 1991-10-30 | 1995-04-04 | Toyota Jidosha Kabushiki Kaisha | Built-in amplifier-type combustion pressure sensor and manufacturing method thereof |
| US5488868A (en) * | 1993-06-01 | 1996-02-06 | Nippondenso Co., Ltd. | High-temperature pressure sensor |
| US5583295A (en) * | 1994-03-14 | 1996-12-10 | Nippondenso Co., Ltd. | Pressure sensor having gauge resistors and temperature compensating resistors on the same surface |
| JP2005002909A (en) * | 2003-06-12 | 2005-01-06 | Denso Corp | Combustion pressure sensor and method for adjusting output thereof |
| JP2012225876A (en) * | 2011-04-22 | 2012-11-15 | Azbil Corp | Pressure sensor |
| JP2012225875A (en) * | 2011-04-22 | 2012-11-15 | Azbil Corp | Pressure sensor |
| CN106415228A (en) * | 2014-03-27 | 2017-02-15 | 西铁城精密器件株式会社 | Pressure-detecting device |
| JP2017075913A (en) * | 2015-10-16 | 2017-04-20 | 本田技研工業株式会社 | Cylinder pressure detection device |
| JP2018189430A (en) * | 2017-04-28 | 2018-11-29 | セイコーエプソン株式会社 | Force detection device and robot |
-
1986
- 1986-12-10 JP JP29447286A patent/JPS63148137A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5402683A (en) * | 1991-10-30 | 1995-04-04 | Toyota Jidosha Kabushiki Kaisha | Built-in amplifier-type combustion pressure sensor and manufacturing method thereof |
| US5488868A (en) * | 1993-06-01 | 1996-02-06 | Nippondenso Co., Ltd. | High-temperature pressure sensor |
| US5583295A (en) * | 1994-03-14 | 1996-12-10 | Nippondenso Co., Ltd. | Pressure sensor having gauge resistors and temperature compensating resistors on the same surface |
| JP2005002909A (en) * | 2003-06-12 | 2005-01-06 | Denso Corp | Combustion pressure sensor and method for adjusting output thereof |
| JP2012225876A (en) * | 2011-04-22 | 2012-11-15 | Azbil Corp | Pressure sensor |
| JP2012225875A (en) * | 2011-04-22 | 2012-11-15 | Azbil Corp | Pressure sensor |
| CN106415228A (en) * | 2014-03-27 | 2017-02-15 | 西铁城精密器件株式会社 | Pressure-detecting device |
| JPWO2015147058A1 (en) * | 2014-03-27 | 2017-04-13 | シチズンファインデバイス株式会社 | Pressure detection device |
| EP3124933A4 (en) * | 2014-03-27 | 2017-11-15 | Citizen Finedevice Co., Ltd. | Pressure-detecting device |
| CN106415228B (en) * | 2014-03-27 | 2019-11-12 | 西铁城精密器件株式会社 | Pressure-detecting device |
| JP2017075913A (en) * | 2015-10-16 | 2017-04-20 | 本田技研工業株式会社 | Cylinder pressure detection device |
| JP2018189430A (en) * | 2017-04-28 | 2018-11-29 | セイコーエプソン株式会社 | Force detection device and robot |
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