CN214373074U - High-temperature film absolute pressure sensor - Google Patents
High-temperature film absolute pressure sensor Download PDFInfo
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- CN214373074U CN214373074U CN202023007023.5U CN202023007023U CN214373074U CN 214373074 U CN214373074 U CN 214373074U CN 202023007023 U CN202023007023 U CN 202023007023U CN 214373074 U CN214373074 U CN 214373074U
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Abstract
The utility model discloses a high-temperature film absolute pressure sensor, which comprises a high-temperature cable, a pressure sensor assembly and a converter; the pressure sensing head assembly comprises a first cable fastening seat, a shell, an L-shaped terminal, a sealing shell, a sputtering film type sensitive core body, a pressure interface seat and a blocking cover; a sealing shell, an L-shaped terminal, a sputtering film type sensitive core body and a blocking cover are arranged in a cavity between the shell and the pressure interface seat; the first cable fastening seat is used for fixedly connecting one end of the high-temperature cable; the pressure interface seat is provided with a pressure guide hole; the converter comprises a second cable fastening seat, a circuit board, a lower cover, an electric connector and an upper cover; the second cable fastening seat is used for fixedly mounting the high-temperature cable. The high-temperature type film absolute pressure sensor has the characteristics of large working temperature range, high precision, vibration and impact resistance, capability of normally working in a high-temperature environment of 550 ℃ and capability of measuring absolute pressure.
Description
Technical Field
The utility model relates to a sensor technical field, concretely relates to high temperature type film absolute pressure sensor.
Background
The high-temperature pressure sensor has wide application prospect in the field of national defense and military industry as a micro electro mechanical system, such as pressure test of heat-resistant cavities and surface parts of jet engines, rockets, satellites and the like, and can participate in attitude control of various aerospace aircrafts and flight control of ultra-high-speed missiles; however, when the conventional pressure sensor is measured in an environment of 120 ℃ or higher, the performance of the sensor is so deteriorated as to be completely failed.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a high temperature type film absolute pressure sensor has that operating temperature range is big, the precision is high, anti vibration strikes, can normally work under 550 ℃ high temperature environment, can measure absolute pressure's characteristics.
The utility model adopts the following specific technical proposal:
a high-temperature film absolute pressure sensor comprises a high-temperature cable, a pressure sensing head assembly and a transducer;
the pressure sensing head assembly comprises a first cable fastening seat, a shell, an L-shaped terminal, a sealing shell, a sputtering film type sensitive core body, a pressure interface seat and a blocking cover; the shell and the pressure interface seat are oppositely arranged and fixedly connected, and the sealing shell, the L-shaped terminal, the sputtering film type sensitive core and the blocking cover are arranged in a cavity between the shell and the pressure interface seat; the first cable fastening seat is mounted on the shell and is used for fixedly connecting one end of the high-temperature cable; the pressure interface seat is provided with a pressure guide hole for introducing a measured medium; the outlet of the pressure guide hole is provided with the plug cover for buffering pressure; the sputtering film type sensitive core body is made of high-temperature-resistant materials and is fixedly connected to the pressure interface seat on the outer peripheral side of the blocking cover; the sealing shell covers the pressure interface seat, seals the sputtering film type sensitive core between the sealing shell and the pressure interface seat, and is used for providing a vacuum environment for the sputtering film type sensitive core; the L-shaped terminal for signal switching is fixedly arranged on the sealing shell, one end of the L-shaped terminal is connected with the high-temperature cable, and the other end of the L-shaped terminal is connected with the sputtering film type sensitive core;
the converter comprises a second cable fastening seat, a circuit board, a lower cover, an electric connector and an upper cover; the upper cover and the lower cover are oppositely arranged and fixedly connected, and a sealed space is formed between the upper cover and the lower cover; the circuit board is fixedly arranged in the sealed space, the input end of the circuit board is connected with the high-temperature cable, and the output end of the circuit board is connected with the electric connector; the second cable fastening seat and the electric connector are oppositely arranged on the lower cover; the second cable fastening seat is used for fixedly mounting the other end of the high-temperature cable; the circuit board is used for compensating, amplifying, A/D converting, operating and transmitting the input voltage signal.
Still further, the seal housing further includes a seal cover provided with a groove;
the sealing shell is provided with a stepped hole opposite to the sputtering film type sensitive core;
the sealing cover is mounted on the stepped hole in a sealing mode.
Further, the sealing case, the sealing cap, and the L-shaped terminal are made of 4J29 Kovar (Kovar) alloy.
Furthermore, the L-shaped terminal is sintered to the sealing shell, and high-temperature glass is used as a sintering sealing material.
Furthermore, the outer side surface of the L-shaped terminal is provided with a gold-plated coating;
the L-shaped terminal is connected with the high-temperature cable through a conducting wire;
the lead is fixedly connected to the top of the L-shaped terminal through a screw and a rivet and is connected with the high-temperature cable through a screw;
the L-shaped terminal is connected with the sputtering film type sensitive core body through a gold wire welding process.
Furthermore, the shell is connected with the pressure interface seat in a welding mode;
the pressure interface seat and the plugging cover are connected into an integral structure through laser welding;
the sealing cover is connected to the sealing case by laser welding.
Further, the high-temperature cable is fixedly mounted on the first cable fastening seat and the second cable fastening seat through a cable clamp and a screw.
Further, the sputtering film type sensitive core comprises a nanometer film strain resistor, a metal elastomer and a ceramic insulating film;
the ceramic insulating film is formed on the metal elastomer, and the nano-thin film strain resistor is formed on the ceramic insulating film.
Furthermore, the nano-film strain resistor is manufactured by adopting an ion beam sputtering process.
Still further, the high temperature cable includes a cable and an insulator coated outside the cable;
the cable is made of nickel wires;
the insulator is made of high silicon oxygen.
Has the advantages that:
the high-temperature film absolute pressure sensor adopts a split structure, the pressure sensing head assembly and the converter are connected through the high-temperature cable, the pressure sensing head assembly adopts the sputtering film type sensitive core body for detection, the pressure of a medium is transmitted to the converter through a voltage signal, and the input voltage signal is processed and sent through the converter; the sputtering film type sensitive core has the characteristics of high precision, good temperature characteristic, vibration impact resistance and 550 ℃ of highest working temperature, and simultaneously, a vacuum environment is provided for the sputtering film type sensitive core at the sealing shell and the pressure interface seat, so that the absolute pressure is measured.
The high-temperature film absolute pressure sensor is mainly used for measuring the pressure of liquid or gas medium in equipment in a high-temperature environment, can measure the absolute pressure, and has the maximum working temperature of 550 ℃.
Drawings
Fig. 1 is a schematic structural view of a pressure sensing head assembly of the high-temperature type thin-film absolute pressure sensor of the present invention;
fig. 2 is a schematic structural diagram of a transducer of the high-temperature type thin-film absolute pressure sensor according to the present invention;
fig. 3 is a schematic diagram of the circuit principle of the transducer of the high-temperature type thin film absolute pressure sensor according to the present invention.
The cable comprises a high-temperature cable 1, a first cable fastening seat 2, a shell 3, a 4-L-shaped terminal 5, a sealing shell 6, a sputtering film type sensitive core 7, a pressure interface seat 8, a blocking cover 9, a sealing cover 10, a second cable fastening seat 11, a circuit board 12, a lower cover 13, an electric connector 13 and an upper cover 14
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings by way of examples.
The utility model provides a high-temperature film absolute pressure sensor, which comprises a high-temperature cable 1, a pressure sensing head assembly and a converter; the high-temperature cable 1 is connected between the pressure sensing head assembly and the transducer and is used for transmitting a pressure signal sensed by the pressure sensing head assembly to the transducer; the structure of fig. 1 shows the connection structure of one end of a high-temperature cable 1, while the structure of fig. 2 shows the connection structure of the other end of the high-temperature cable 1, one end of the high-temperature cable 1 is connected to the top of the pressure sensing head assembly, and the other end of the high-temperature cable 1 is connected to one side of the transducer; the high-temperature cable 1 may include a cable and an insulator coated outside the cable; the cable is made of nickel wires; the insulator is made of high silica and can bear the high temperature of 1000 ℃, the length of the high-temperature cable 1 can be 2m, the high temperature can be effectively prevented from being transmitted to the converter from the pressure sensing head assembly, and the installation and the use are convenient;
as shown in the structure of fig. 1, the pressure sensing head assembly includes a first cable fastening seat 2, a housing 3, an L-shaped terminal 4, a sealing shell 5, a sputtering film type sensitive core 6, a pressure interface seat 7 and a blocking cover 8;
the shell 3 and the pressure interface seat 7 are oppositely arranged and fixedly connected, and a sealing shell 5, an L-shaped terminal 4, a sputtering film type sensitive core 6, a blocking cover 8 and a sealing cover 9 are arranged in a cavity between the shell 3 and the pressure interface seat 7; the shell 3 can be fixedly connected to the top of the pressure interface seat 7 in a welding connection mode and the like, the shell 3 is of a cylindrical structure with an opening at the bottom, and a cavity is formed between the shell 3 and the pressure interface seat 7; the shell 3 is welded outside the sealed shell 5 for protecting the internal structure;
the first cable fastening seat 2 is arranged on the shell 3 and is used for fixedly connecting one end of the high-temperature cable 1; one end of the high-temperature cable 1 can be fixedly arranged on the first cable fastening seat 2 through a cable clamp and a screw; the high-temperature cable 1 is fixed by adopting the first cable fastening seat 2 and the cable clamp, so that the L-shaped terminal 4 is prevented from being stressed due to the external dragging of the high-temperature cable 1, and the reliability of signal transmission is guaranteed;
the pressure interface seat 7 is provided with a pressure guide hole for introducing a measured medium; in the process of pressure detection, a detected medium can enter the pressure interface seat 7 through the pressure guide hole;
a blocking cover 8 for buffering pressure is arranged at the outlet of the pressure guide hole; as shown in the structure of fig. 1, the blocking cover 8 is located between the pressure interface seat 7 and the sputtering film type sensitive core 6, and the blocking cover 8 divides the pressure in the pressure guiding hole, so that the impact of external pressure can be buffered, and the blocking cover is used for protecting the sputtering film type sensitive core 6; the pressure interface seat 7 and the blocking cover 8 can be connected into an integral structure through laser welding;
the sputtering film type sensitive core body 6 is made of high-temperature resistant materials and is fixedly connected to a pressure interface seat 7 on the outer peripheral side of the blocking cover 8; the sputtering film type sensitive core body 6 is used for sensing external pressure, and has the advantages of high precision, good temperature characteristic and vibration and impact resistance due to the adoption of high-temperature resistant materials, and the maximum working temperature can reach 550 ℃;
the sealing shell 5 is covered on the pressure interface seat 7, and the sputtering film type sensitive core 6 is sealed between the sealing shell 5 and the pressure interface seat 7, so that a vacuum environment is provided for the sputtering film type sensitive core 6, and the measurement of absolute pressure can be realized; the sealing shell 5 can be made of 4J29 kovar alloy; the sealing shell 5 is welded on the pressure interface seat 7 in a vacuum environment, and the sealing welding seam is far away from sintered glass, so that the glass is prevented from cracking due to welding;
the L-shaped terminal 4 for signal switching is fixedly arranged on the sealing shell 5, one end of the L-shaped terminal is connected with the high-temperature cable 1, and the other end of the L-shaped terminal is connected with the sputtering film type sensitive core 6; the L-shaped terminal 4 can be made of 4J29 kovar alloy; the L-shaped terminal 4 is sintered in the sealing shell 5, and high-temperature glass is used as a sintering sealing material; the sealing shell 5 and the L-shaped terminal 4 are both processed by 4J29 kovar alloy, the kovar alloy has similar thermal expansion coefficient with glass, the sealing shell 5 and the L-shaped terminal 4 can be sintered together by using a glass sintering mode, the L-shaped terminal 4 and the sealing shell 5 are sintered into a whole to be capable of hermetically installing a cavity of the sputtering film type sensitive core 6, and meanwhile, a plurality of fractional circuit signals of the L-shaped terminal 4 can be led out from the sealed cavity;
as shown in the structure of fig. 2, the inverter includes a second cable fixing base 10, a circuit board 11, a lower cover 12, an electrical connector 13, and an upper cover 14; because the transducer is connected with the pressure sensing head assembly through the high-temperature cable 1, the transducer can be arranged at intervals with the pressure sensing head assembly; the upper cover 14 and the lower cover 12 are oppositely arranged and fixedly connected, and a sealed space is formed between the upper cover 14 and the lower cover 12; the circuit board 11 is fixedly arranged in the sealed space, the input end of the circuit board 11 is connected with the high-temperature cable 1 and used for receiving the voltage signal output by the pressure sensing head assembly, and the output end of the circuit board 11 is connected with the electric connector 13 and used for outputting the conditioned digital signal; the second cable fixing base 10 and the electrical connector 13 are oppositely mounted on the lower cover 12; the second cable fastening seat 10 is used for fixedly mounting the other end of the high-temperature cable 1, and the high-temperature cable 1 is fixedly mounted on the second cable fastening seat 10 through a cable clamp and a screw;
the circuit board 11 is used for compensating, amplifying, A/D converting, operating and transmitting an input voltage signal, and finally outputting an RS485 digital signal through the electric connector 13; as shown in fig. 3, the circuit board 11 may include a voltage stabilizing chip, a compensation circuit, an instrumentation amplifier, an a/D converter, a core processor, a communication module, and a memory, where the compensation circuit is configured to compensate a voltage signal input by the high-temperature cable 1, the instrumentation amplifier is configured to compensate a signal output by the compensation circuit, the a/D converter is configured to perform analog-to-digital conversion on an amplified signal, the core processor is configured to perform operation processing on a converted digital signal, and finally, an RS485 digital signal is output through the communication module and the electrical connector 13. One specific process flow of the converter may be: firstly, a precision resistor is used for carrying out zero point and sensitivity compensation on an output signal of a sputtering film type sensitive core body 6, then an instrumentation amplifier AD8221 is used for carrying out proportional amplification on the compensated signal, the amplified signal is subjected to analog-to-digital conversion through AD1210, the converted digital signal enters a C8051F530A single chip microcomputer, the single chip microcomputer reads a characteristic equation from a memory FM25640, the acquired digital pressure signal is subjected to operation processing, an operation result is sent to a communication chip ADM2682, and finally the operation result is output in an RS485 bus form.
The pressure sensing head assembly is based on a film strain type measuring principle, when the external pressure changes, the sputtered film type sensitive core body 6 deforms to cause a Wheatstone bridge formed by film wire grids to change, a millivolt voltage signal is output under the condition of constant voltage power supply, and the voltage signal is in direct proportion to the external pressure; the voltage signal enters the converter through the high temperature cable 1.
The high-temperature film absolute pressure sensor adopts a split structure, the high-temperature cable 1 is connected with the pressure sensing head assembly and the converter, the pressure sensing head assembly adopts the sputtering film type sensitive core body 6 for detection, the pressure of a medium is transmitted to the converter through a voltage signal, and the input voltage signal is processed and sent through the converter; because the pressure sensing head assembly does not contain the circuit board 11, the sputtering film type sensitive core 6 has the characteristics of high precision, good temperature characteristic, vibration impact resistance and 550 ℃ of highest working temperature, meanwhile, the sealing shell 5 and the pressure interface seat 7 provide a vacuum environment for the sputtering film type sensitive core 6, and the measurement of absolute pressure is realized, therefore, the sputtering film type sensitive core 6 is adopted as a pressure sensing sensitive element, so that the high-temperature film type absolute pressure sensor has the characteristics of large working temperature range, high precision, vibration impact resistance, capability of normally working in a 550 ℃ high-temperature environment, capability of measuring absolute pressure and high reliability at high temperature.
In a specific embodiment, as shown in the structure of fig. 1, the sealing shell 5 further comprises a sealing cover 9 provided with a groove; the sealing cover 9 is made of 4J29 kovar alloy; in order to facilitate the installation of the sealing cover 9, the sealing shell 5 is provided with a stepped hole opposite to the sputtering film type sensitive core 6; the sealing cover 9 is hermetically arranged in the stepped hole; the sealing cover 9 may be attached to the sealing case 5 by laser welding.
Because the middle of the sealing cover 9 is provided with the groove, and the periphery is provided with the flange, the thermal stress can be better released in the welding process, the glass cracking caused by the stress concentration on the sealing shell 5 is avoided, and meanwhile, the sealing cover has better sealing property under the long-term high-temperature environment. The sealing lid 9 is made of 4J29 kovar alloy so that the sealing lid 9 can withstand high temperatures of up to 1000 ℃.
Furthermore, the outer side surface of the L-shaped terminal 4 is provided with a gold-plated coating, so that the L-shaped terminal 4 after gold plating is not easy to oxidize and can endure the temperature of above 550 ℃ for a long time; the L-shaped terminal 4 is connected with the high-temperature cable 1 through a conducting wire; the lead is fixedly connected to the top of the L-shaped terminal 4 through a screw and a rivet and is connected with the high-temperature cable 1 through the screw, and the lead can be prevented from loosening by adopting a mode of fixing the lead through the screw and the rivet, so that the connection reliability between the lead and the L-shaped terminal 4 is improved; the L-shaped terminal 4 is connected with the sputtered film type sensitive core body 6 through a gold wire welding process, the L-shaped terminal 4 can be close to a wire grid bonding pad of the sputtered film type sensitive core body 6 in design, the distance between the L-shaped terminal and the wire grid bonding pad is small, the electric conductivity is good, the arch height formed by gold wire welding is reasonably utilized, the structure is reliable, and the L-shaped terminal can bear vibration impact with larger magnitude.
Specifically, the sputtered thin film sensitive core 6 may include a nano thin film strain resistor, a metal elastomer, and a ceramic insulating film; the ceramic insulating film is formed on the metal elastic body, and the nano-thin film strain resistor is formed on the ceramic insulating film. The nano-film strain resistor is manufactured by adopting an ion beam sputtering process. The ion beam sputtering coating technology is a sputtering coating method in high vacuum or ultra-high vacuum, and utilizes a direct current or high-frequency electric field to ionize inert gas (usually argon) to generate glow discharge plasma, positive ions and electrons generated by ionization bombard a target at high speed to sputter atoms or molecules on the target, and then the atoms or the molecules are deposited on a substrate to form a film. The ions generated by the inert gas in the ion source have higher energy (usually hundreds to thousands of electron volts), and the performance of the ion beam can be controlled by a set of electric system, so that the target material bombarded by the ions is changed to generate different sputtering effects, and the target material is deposited on the substrate to form the nano material. The target material in the sputtering method has no phase change, the components of the compound are not easy to change, and the energy of particles sputtered and deposited on the substrate is dozens of times higher than that of particles evaporated and deposited, so that the formed nano material has large adhesive force and can resist stronger environmental stress and larger temperature stress.
The sputtering film type sensitive element is manufactured by adopting the ion beam sputtering principle, the sensitive film is directly manufactured on the ceramic insulating film tightly combined with the metal elastomer by using the low-energy accelerator bombardment and kinetic energy conversion transfer atomic deposition film technology, so that the atomic combination of the sensitive element, the insulating film, the metal elastomer and the insulating film is realized, the problems of instability and unreliability caused by zero drift generated by forced sliding between the sensitive element and the elastomer of the traditional sensor are solved, and the formed nano material has large adhesive force and can resist stronger environmental stress and larger temperature stress.
In the high-temperature film absolute pressure sensor, the pressure sensing head assembly is fixedly installed by adopting an M12 multiplied by 1.25-6h threaded interface, and the transducer is fixed through an installation hole at the bottom of the lower cover 12; the electric connector 13 of the converter uses a standard J30J-9ZKP socket, is convenient to install and use, and can realize the power supply and signal output functions of the sensor; while the transducer socket is docked using the plug (model J30J-9TK) of the corresponding electrical connector 13, connecting the sensor to the system data acquisition device through the electrical connector 13.
The power supply voltage of the high-temperature film absolute pressure sensor is 15V, the working current is not more than 10mA, the overload capacity is more than 200%, the total accuracy is not more than 1% (including linearity, hysteresis and repetition), and the maximum working temperature of the pressure sensing head assembly is 550 ℃.
The high-temperature type membrane absolute pressure sensor can be used for measuring the pressure of a combustion chamber of an aircraft engine or the internal pressure of high-temperature equipment.
In summary, the above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A high-temperature film absolute pressure sensor is characterized by comprising a high-temperature cable, a pressure sensing head assembly and a transducer;
the pressure sensing head assembly comprises a first cable fastening seat, a shell, an L-shaped terminal, a sealing shell, a sputtering film type sensitive core body, a pressure interface seat and a blocking cover; the shell and the pressure interface seat are oppositely arranged and fixedly connected, and the sealing shell, the L-shaped terminal, the sputtering film type sensitive core and the blocking cover are arranged in a cavity between the shell and the pressure interface seat; the first cable fastening seat is mounted on the shell and is used for fixedly connecting one end of the high-temperature cable; the pressure interface seat is provided with a pressure guide hole for introducing a measured medium; the outlet of the pressure guide hole is provided with the plug cover for buffering pressure; the sputtering film type sensitive core body is made of high-temperature-resistant materials and is fixedly connected to the pressure interface seat on the outer peripheral side of the blocking cover; the sealing shell covers the pressure interface seat, seals the sputtering film type sensitive core between the sealing shell and the pressure interface seat, and is used for providing a vacuum environment for the sputtering film type sensitive core; the L-shaped terminal for signal switching is fixedly arranged on the sealing shell, one end of the L-shaped terminal is connected with the high-temperature cable, and the other end of the L-shaped terminal is connected with the sputtering film type sensitive core;
the converter comprises a second cable fastening seat, a circuit board, a lower cover, an electric connector and an upper cover; the upper cover and the lower cover are oppositely arranged and fixedly connected, and a sealed space is formed between the upper cover and the lower cover; the circuit board is fixedly arranged in the sealed space, the input end of the circuit board is connected with the high-temperature cable, and the output end of the circuit board is connected with the electric connector; the second cable fastening seat and the electric connector are oppositely arranged on the lower cover; the second cable fastening seat is used for fixedly mounting the other end of the high-temperature cable; the circuit board is used for compensating, amplifying, A/D converting, operating and transmitting the input voltage signal.
2. The high temperature type membrane absolute pressure sensor according to claim 1, wherein the sealing case further comprises a sealing cover provided with a groove;
the sealing shell is provided with a stepped hole opposite to the sputtering film type sensitive core;
the sealing cover is mounted on the stepped hole in a sealing mode.
3. The high temperature type membrane absolute pressure sensor according to claim 2, wherein the sealing case, the sealing cover and the L-shaped terminal are made of 4J29 kovar alloy.
4. The high temperature type membrane absolute pressure sensor according to claim 3, wherein the L-shaped terminal is sintered to the sealing housing, and high temperature glass is used as a sintered sealing material.
5. The high temperature type thin film absolute pressure sensor according to claim 4, wherein an outer side surface of the L-shaped terminal is provided with a gold plating coating;
the L-shaped terminal is connected with the high-temperature cable through a conducting wire;
the lead is fixedly connected to the top of the L-shaped terminal through a screw and a rivet and is connected with the high-temperature cable through a screw;
the L-shaped terminal is connected with the sputtering film type sensitive core body through a gold wire welding process.
6. The high temperature type membrane absolute pressure sensor according to claim 2, wherein the housing is welded to the pressure interface seat;
the pressure interface seat and the plugging cover are connected into an integral structure through laser welding;
the sealing cover is connected to the sealing case by laser welding.
7. The high-temperature type membrane absolute pressure sensor according to claim 1, wherein the high-temperature cable is fixedly mounted to the first cable fastening seat and the second cable fastening seat by a cable clamp and a screw.
8. The high temperature type thin film absolute pressure sensor according to claim 1, wherein the sputtered thin film type sensitive core includes a nano thin film strain resistor, a metal elastomer, and a ceramic insulating film;
the ceramic insulating film is formed on the metal elastomer, and the nano-thin film strain resistor is formed on the ceramic insulating film.
9. The high temperature type thin film absolute pressure sensor according to claim 8, wherein the nano thin film strain resistor is formed by an ion beam sputtering process.
10. The sensor according to any one of claims 1 to 9, wherein the high-temperature cable includes a cable and an insulator covering the cable;
the cable is made of nickel wires;
the insulator is made of high silicon oxygen.
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| CN202023007023.5U CN214373074U (en) | 2020-12-15 | 2020-12-15 | High-temperature film absolute pressure sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018470A (en) * | 2021-11-11 | 2022-02-08 | 沈阳仪表科学研究院有限公司 | Pressure measuring sensor not capable of leaving high temperature zone and processing method thereof |
| CN114858337A (en) * | 2022-03-24 | 2022-08-05 | 中国核动力研究设计院 | Nuclear safety level capacitive pressure transmitter and manufacturing method thereof |
| CN116222652A (en) * | 2022-12-26 | 2023-06-06 | 松诺盟科技有限公司 | Nanometer film core and composite sensor |
-
2020
- 2020-12-15 CN CN202023007023.5U patent/CN214373074U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114018470A (en) * | 2021-11-11 | 2022-02-08 | 沈阳仪表科学研究院有限公司 | Pressure measuring sensor not capable of leaving high temperature zone and processing method thereof |
| CN114018470B (en) * | 2021-11-11 | 2023-11-14 | 沈阳仪表科学研究院有限公司 | Pressure measuring sensor incapable of leaving high temperature area and processing method thereof |
| CN114858337A (en) * | 2022-03-24 | 2022-08-05 | 中国核动力研究设计院 | Nuclear safety level capacitive pressure transmitter and manufacturing method thereof |
| CN116222652A (en) * | 2022-12-26 | 2023-06-06 | 松诺盟科技有限公司 | Nanometer film core and composite sensor |
| CN116222652B (en) * | 2022-12-26 | 2023-12-15 | 松诺盟科技有限公司 | Nanometer film core and composite sensor |
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