JPS63141437U - - Google Patents
Info
- Publication number
- JPS63141437U JPS63141437U JP3280887U JP3280887U JPS63141437U JP S63141437 U JPS63141437 U JP S63141437U JP 3280887 U JP3280887 U JP 3280887U JP 3280887 U JP3280887 U JP 3280887U JP S63141437 U JPS63141437 U JP S63141437U
- Authority
- JP
- Japan
- Prior art keywords
- signal generating
- generating section
- semiconductor
- stacked
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Description
第１図は本考案の一実施例の斜視図である。
１……半導体基板、２……ホール素子、２０…
…ホール素子部、５……受圧板、６……永久磁石
。
…ホール素子部、５……受圧板、６……永久磁石
。
Claims (1)
- 複数の半導体磁電変換素子がアレイ状に配置さ
れた信号発生部と、該信号発生部の上に重ねられ
、信号発生部の材料より小さい弾性係数をもつ材
料よりなる受圧部と、該受圧部の上の前記磁電変
換素子の上方にそれぞれ位置して両磁極を同一極
性で上下に有する永久磁石とを備えたことを特徴
とする半導体圧力センサ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3280887U JPS63141437U (ja) | 1987-03-06 | 1987-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3280887U JPS63141437U (ja) | 1987-03-06 | 1987-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63141437U true JPS63141437U (ja) | 1988-09-19 |
Family
ID=30839838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3280887U Pending JPS63141437U (ja) | 1987-03-06 | 1987-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63141437U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009229453A (ja) * | 2008-02-28 | 2009-10-08 | Seiko Epson Corp | 圧力検出装置及び圧力検出方法 |
-
1987
- 1987-03-06 JP JP3280887U patent/JPS63141437U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009229453A (ja) * | 2008-02-28 | 2009-10-08 | Seiko Epson Corp | 圧力検出装置及び圧力検出方法 |