JPS63141437U - - Google Patents
Info
- Publication number
- JPS63141437U JPS63141437U JP3280887U JP3280887U JPS63141437U JP S63141437 U JPS63141437 U JP S63141437U JP 3280887 U JP3280887 U JP 3280887U JP 3280887 U JP3280887 U JP 3280887U JP S63141437 U JPS63141437 U JP S63141437U
- Authority
- JP
- Japan
- Prior art keywords
- signal generating
- generating section
- semiconductor
- stacked
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Description
第１図は本考案の一実施例の斜視図である。
１……半導体基板、２……ホール素子、２０…
…ホール素子部、５……受圧板、６……永久磁石
。
FIG. 1 is a perspective view of an embodiment of the present invention. 1... Semiconductor substrate, 2... Hall element, 20...
...Hall element part, 5...Pressure plate, 6...Permanent magnet.
Claims (1)
れた信号発生部と、該信号発生部の上に重ねられ
、信号発生部の材料より小さい弾性係数をもつ材
料よりなる受圧部と、該受圧部の上の前記磁電変
換素子の上方にそれぞれ位置して両磁極を同一極
性で上下に有する永久磁石とを備えたことを特徴
とする半導体圧力センサ。 a signal generating section in which a plurality of semiconductor magnetoelectric transducers are arranged in an array; a pressure receiving section made of a material that is stacked on the signal generating section and has a smaller elastic modulus than the material of the signal generating section; A semiconductor pressure sensor comprising: permanent magnets located above the above magneto-electric conversion element and having both magnetic poles of the same polarity above and below.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3280887U JPS63141437U (en) | 1987-03-06 | 1987-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3280887U JPS63141437U (en) | 1987-03-06 | 1987-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63141437U true JPS63141437U (en) | 1988-09-19 |
Family
ID=30839838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3280887U Pending JPS63141437U (en) | 1987-03-06 | 1987-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63141437U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009229453A (en) * | 2008-02-28 | 2009-10-08 | Seiko Epson Corp | Pressure detection device and pressure detecting method |
-
1987
- 1987-03-06 JP JP3280887U patent/JPS63141437U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009229453A (en) * | 2008-02-28 | 2009-10-08 | Seiko Epson Corp | Pressure detection device and pressure detecting method |