JPS631380A - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPS631380A JPS631380A JP61141960A JP14196086A JPS631380A JP S631380 A JPS631380 A JP S631380A JP 61141960 A JP61141960 A JP 61141960A JP 14196086 A JP14196086 A JP 14196086A JP S631380 A JPS631380 A JP S631380A
- Authority
- JP
- Japan
- Prior art keywords
- driver
- driving
- ultrasonic motor
- memory alloy
- traveling wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims abstract description 14
- 239000000919 ceramic Substances 0.000 abstract description 14
- 239000000463 material Substances 0.000 abstract description 7
- 238000005452 bending Methods 0.000 abstract description 4
- 230000005684 electric field Effects 0.000 abstract description 4
- HZEWFHLRYVTOIW-UHFFFAOYSA-N [Ti].[Ni] Chemical compound [Ti].[Ni] HZEWFHLRYVTOIW-UHFFFAOYSA-N 0.000 abstract description 3
- 229910000734 martensite Inorganic materials 0.000 abstract description 3
- 229910001000 nickel titanium Inorganic materials 0.000 abstract description 3
- 239000013013 elastic material Substances 0.000 abstract 1
- 230000007704 transition Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- -1 copper-zinc-aluminum Chemical compound 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は圧電体を用いて駆動カを発生する超音波モータ
ーに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an ultrasonic motor that generates driving force using a piezoelectric material.
従来の技術
最近、圧電セラミック等の圧電体を用いた駆動体に弾性
振動を励起し．これを駆動カとする超音波モーターが注
目されている。Conventional technology Recently, elastic vibrations have been excited in driving bodies using piezoelectric materials such as piezoelectric ceramics. Ultrasonic motors using this as a driving force are attracting attention.
第３図は超音波モーターの一例であり，円環形の弾性体
２１の円環面の一方に円環形圧電セラミック２２を貼り
合わせて，圧電駆動体２３を構成している。２４は耐磨
耗性材料のスライダ，２５は弾性体であり，互いに貼り
合わせられて、動体２６を構成している。動体２６はス
ライダ２４を介して駆動体２３と接触している。圧電セ
ラミック３２に電界を印加すると，駆動体２３の周方向
に曲げ娠動の進行波が励起されて，動体２６を駆動する
。FIG. 3 shows an example of an ultrasonic motor, in which a piezoelectric actuator 23 is constructed by bonding an annular piezoelectric ceramic 22 to one of the annular surfaces of an annular elastic body 21. 24 is a slider made of a wear-resistant material, and 25 is an elastic body, which are bonded together to form a moving body 26. The moving body 26 is in contact with the driving body 23 via the slider 24. When an electric field is applied to the piezoelectric ceramic 32 , a traveling wave of bending motion is excited in the circumferential direction of the driving body 23 , thereby driving the moving body 26 .
尚，同図中の矢印は動体２６の回転方向を示す。この時
，動体２６を円滑に駆動するためには駆動体２３と動体
２６間に適度な接触力が必要であり，通常弾性体２５に
磁石を使用して，駆動体部の弾性体２ｌと磁気回路を構
成して必要な接触力を得ている。このような磁石を用い
る方法では径方向に動体と駆動対を接触させる形の超音
波モータには適切な接触力を与えることは不可能であっ
た。Note that the arrow in the figure indicates the direction of rotation of the moving body 26. At this time, in order to smoothly drive the movable body 26, a moderate contact force is required between the drive body 23 and the movable body 26, and usually a magnet is used for the elastic body 25, so that the elastic body 2l of the drive body part and the magnetic A circuit is constructed to obtain the necessary contact force. With such a method using a magnet, it is impossible to apply an appropriate contact force to an ultrasonic motor in which a moving body and a driving pair are brought into contact with each other in the radial direction.
最近上記のような縦波と結合した横波などの波を進行波
として利用した′Ｉｊ％４図に示すのような径方向駆動
力を用い高トルクを得る超音波モーターも作製されてい
る。斜めの斜面を持つ円筒環形の弾性体３１の円環面の
一方に円環形圧電セラミック３２を貼り合わせて，圧電
駆動体３３を構成している。３４はスライダであり，広
い面積で接触するように駆動体３３内面と同様な形状に
作製している。このようなモータでは前述の面に加えて
側面も利用することができ高いトルクが得られている。Recently, an ultrasonic motor has been manufactured which uses a wave such as a transverse wave combined with a longitudinal wave as described above as a traveling wave and obtains a high torque by using a radial driving force as shown in FIG. A piezoelectric driving body 33 is constructed by bonding a circular piezoelectric ceramic 32 to one of the circular surfaces of a cylindrical ring-shaped elastic body 31 having an oblique slope. Reference numeral 34 denotes a slider, which is made to have the same shape as the inner surface of the drive body 33 so as to make contact over a wide area. In addition to the above-mentioned surface, this type of motor can also utilize the side surface, resulting in high torque.
これらの超音波モーターについては，森等二日本音響学
会講演論文集１．２−１（１９８５．３）５７９などに
ｌ己載されている。These ultrasonic motors are described in Mori et al., Proceedings of the Acoustical Society of Japan, 1.2-1 (March 1985), 579.
発明が解決しようとする問題点
上述のような超音波モーターでは磁石を用いたり，圧電
駆動体とスライダとの接触方法を工夫して，圧電駆動体
とスライダとの接触力を高める方策が用いられ，これに
よって高トルクを得ている。Problems to be Solved by the Invention In the above-mentioned ultrasonic motors, measures are used to increase the contact force between the piezoelectric drive body and the slider by using magnets or devising a contact method between the piezoelectric drive body and the slider. , This results in high torque.
しかしながら径方向の内外面において圧電駆動体と動体
を接触させかつこれらの間に接触力をつねに作用させ高
トルクを得るには，前述のような斜めの斜面と重力を利
用し接触力を得るか或は径方向の力を付与するためには
バネのような弾性体を用いて接触力を得る方法が一般的
に行われている。However, in order to bring the piezoelectric drive body into contact with the moving body on the inner and outer surfaces in the radial direction and to constantly apply a contact force between them to obtain high torque, it is necessary to obtain the contact force by using the diagonal slope and gravity as described above. Alternatively, in order to apply force in the radial direction, a method of obtaining contact force using an elastic body such as a spring is generally practiced.
前者の方法では接触面の精度が高《要求され，均一に駆
動体と導体を接触させることが難しく，後者では全面的
に接触力を付与せしめることが困難なだけでなく動体と
して不必要なバネを用いる必要があった。本発明はこれ
らの超音波モーターの駆動体と動体に常に接触力が必要
であることに鑑み，駆動体と動体に常に接触力を有する
新しい動体を供給し，超音波モーターのトルクを向上さ
せようとするものである。The former method requires high precision of the contact surface, making it difficult to uniformly contact the driving body and the conductor, while the latter method not only makes it difficult to apply contact force over the entire surface, but also creates unnecessary springs as the moving body. It was necessary to use In view of the fact that a contact force is always required between the driving body and the moving body of these ultrasonic motors, the present invention aims to improve the torque of the ultrasonic motor by providing a new moving body that always has a contact force between the driving body and the moving body. That is.
問題点を解決するための手段
圧電体と弾性体とからなる駆動体に弾性進行波を励起す
ることにより，上記駆動体上に接触して設置された動体
を移動させる超音波モーターにおいて，動体に形状記憶
合金を用いて駆動体と動体の間に径方向の接触力を付加
せしめる。Means for Solving the Problems In an ultrasonic motor that moves a moving object placed in contact with the driving body by exciting an elastic traveling wave in the driving body consisting of a piezoelectric body and an elastic body, Shape memory alloy is used to apply radial contact force between the driving body and the moving body.
作用
形状記憶合金の擬弾性効果を用いることによって，常に
，動体から駆動体に力を作用させることにより両者に接
触力を常時付与することができ，これによって超音波モ
ーターの高トルクを実現するものである。By using the pseudo-elastic effect of the working shape memory alloy, it is possible to constantly apply force from the moving body to the driving body, thereby constantly applying contact force between the two, thereby realizing high torque of the ultrasonic motor. It is.
実施例
以下、本発明の実施例について、図を用いて詳細に説明
する。Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
実施例１
第１図は本発明の一実施例の超音波モーターの倒面図及
び断面図である。同図において，１は円環状駆動体に進
行波を励起するための圧電セラミックなどの圧電体であ
り，板厚方向に分極し．同方向に複数個の電極２を形成
している。この電極を使用して時間的，空間的にそれぞ
れ二つの定在波の位相をずらして進行波を形成する。該
圧電セラミック１の外周はその外側に凹凸を形成した弾
性体３に接着されて駆動体４を構成している。一方，駆
動体４の外側には、マルテンサイト変態に起因する弾性
伸び，すなわち擬性弾性を示すニッケルーチタン形状記
憶合金よりなる動体５が配され，常に駆動体４を径方向
に締め付ける状態となっている。圧電セラミック１に電
界を印加すると，駆動体４の周方向に曲げ振動の縦波進
行波が励起されて，さらにこの縦波と結合した横波進行
波が弾性体３に伝わり動体５を回転せしめる。この時動
体５の締め付け圧が常に存在するため，動体５は６の方
向に回転するとともに高トルクを示した。このような同
様な構造で形状記憶合金を用いない通常の金属を用いた
動体を用いた超音波モータでは全《回転を生じなかった
。Embodiment 1 FIG. 1 is a top view and a sectional view of an ultrasonic motor according to an embodiment of the present invention. In the figure, 1 is a piezoelectric material such as a piezoelectric ceramic for exciting a traveling wave in the annular driving body, and is polarized in the thickness direction. A plurality of electrodes 2 are formed in the same direction. Using these electrodes, a traveling wave is formed by temporally and spatially shifting the phases of two standing waves. The outer periphery of the piezoelectric ceramic 1 is adhered to an elastic body 3 having irregularities formed on its outer side to constitute a driving body 4. On the other hand, a moving body 5 made of a nickel-titanium shape memory alloy that exhibits elastic elongation due to martensitic transformation, that is, pseudo-elasticity, is disposed outside the driving body 4, and is always tightened in the radial direction of the driving body 4. It has become. When an electric field is applied to the piezoelectric ceramic 1, a longitudinal traveling wave of bending vibration is excited in the circumferential direction of the driving body 4, and a transverse traveling wave combined with this longitudinal wave is transmitted to the elastic body 3 and causes the moving body 5 to rotate. At this time, since the clamping pressure of the moving body 5 is always present, the moving body 5 rotates in the direction 6 and exhibits high torque. An ultrasonic motor with a similar structure and a moving body made of ordinary metal without shape memory alloy did not produce full rotation.
実施例２
第２図は本発明の他の実施例を示す。実施例１と同様に
，１１は円環状駆動体に進行波を励起するための圧電セ
ラミックなどの圧電体であり，板厚方向に分極し，同方
向に電極１２を形成している。該圧電セラミックの内周
はその内側に凹凸を形成した弾性体１３に接着されて駆
動体１４を構成している。一方，駆動体ｌ４の内側内周
にマルテンサイト変態に起因する弾性伸び，すなわち擬
性弾性を示す銅一亜鉛−アルミニウム形状記憶合金から
なる動体１５を挿入し，常に駆動体１４を拡張する方向
に応力を及ぼす状態となっている。圧電セラミック１１
に電界を印加すると，駆動体１４の周方向に曲げ娠動の
縦波進行波が励起されて，さらにこの縦波と結合した横
波進行波が弾性体１３に伝わり内側に構成された動体を
回転せしめる。この時動体の径方向の拡張圧が常に存在
するため，動体１５は回転を生じるとともに高トルクを
示した。このような同様な構造で形状記憚合金を用いな
い通常の金属を用いた動体を用いた超音波モータでは全
《回転を生じなかった。Embodiment 2 FIG. 2 shows another embodiment of the invention. As in the first embodiment, 11 is a piezoelectric material such as a piezoelectric ceramic for exciting a traveling wave in the annular driving member, and is polarized in the thickness direction, and electrodes 12 are formed in the same direction. The inner periphery of the piezoelectric ceramic is adhered to an elastic body 13 having concavities and convexities formed inside thereof, thereby forming a driving body 14. On the other hand, a moving body 15 made of a copper-zinc-aluminum shape memory alloy that exhibits elastic elongation due to martensitic transformation, that is, pseudoelasticity, is inserted into the inner circumference of the driving body l4, and the driving body 14 is always expanded in the direction of expansion. It is in a state where stress is exerted. piezoelectric ceramic 11
When an electric field is applied to the driving body 14, a longitudinal traveling wave of bending movement is excited in the circumferential direction of the driving body 14, and a transverse traveling wave combined with this longitudinal wave is transmitted to the elastic body 13 and rotates the moving body configured inside. urge At this time, since expansion pressure in the radial direction of the moving body always existed, the moving body 15 rotated and exhibited high torque. An ultrasonic motor with a similar structure and a moving body made of ordinary metal without shape-memory alloy did not produce full rotation.
以上のように実施例においては，動体の形状記憶合金が
駆動体に対し，径方向に常に力を及ぼすことを特徴とす
る超音波モーターについて特に均一な接触力を駆動対一
動体間に付与せしめ，その結果超音波モーターにおいて
高トルクが実現できるが，特に実施例のような構造に限
定されるものではな《同様な力を実現できるものであれ
ばよい。圧電セラミックの分極軸をその厚み方向とした
が，本発明はこれに限定されることな《、分極軸が径方
向であってもよく、また、駆動体と動体の接触は原則的
に接触していればその形状にはよらない。また，圧電セ
ラミックはチタン酸ジルコンサン鉛（Ｐ２Ｔ）が汎用に
使用されるがこれに限定されるものではなく圧電性を示
すものであればその材料によらない。さらに，動体とし
てニッケルーチタニウム，胴系の形状記憶合金を示した
が，これらに限定されるものではな《擬弾性効果を示す
ものであればよい。As described above, in the embodiment, a particularly uniform contact force is applied between the driving body and the driving body for an ultrasonic motor characterized in that the shape memory alloy of the moving body always exerts a force on the driving body in the radial direction. As a result, high torque can be achieved in the ultrasonic motor; however, the present invention is not limited to the structure as in the embodiment, and any structure that can achieve a similar force may be used. Although the polarization axis of the piezoelectric ceramic is taken to be in the thickness direction, the present invention is not limited thereto.The polarization axis may be in the radial direction, and the driving body and the moving body may be in contact with each other in principle. If it is, it doesn't depend on its shape. Furthermore, although lead zirconium titanate (P2T) is commonly used as the piezoelectric ceramic, it is not limited to this, and any material can be used as long as it exhibits piezoelectricity. Further, although nickel-titanium and a shape memory alloy for the body are shown as moving bodies, the present invention is not limited to these, as long as they exhibit a pseudo-elastic effect.
発明の効果
以上のように、本発明の超音波モーターは動体に形状記
憶合金を用いることにより，駆動体と動体間に接触力を
常に付加せしめ，超音波モーターのトルクを大ならしめ
る効果を有する。Effects of the Invention As described above, the ultrasonic motor of the present invention has the effect of constantly applying a contact force between the driving body and the moving body and increasing the torque of the ultrasonic motor by using a shape memory alloy for the moving body. .
第１図（ａ）および（ｂ）は、本発明の一実施例におけ
る超音波モーターの各々側面図及び断面図、第２図（ａ
）および（ｂ）は各々、本発明の他の実施例の側面図及
び断面図、第３図及び第４図は、従来例の側面図である
。
１・・・圧電セラミック， ２・・・電極、 ３・・・
弾性体、 ４・・・駆動体、 ５・・・動体（形状記憶
合金）６・・・回転方向。
代理人の氏名 弁理士 中尾敏男 ほが１名第 １ 図
第２図
第３図FIGS. 1(a) and (b) are a side view and a sectional view, respectively, of an ultrasonic motor in an embodiment of the present invention, and FIG.
) and (b) are respectively a side view and a sectional view of another embodiment of the present invention, and FIGS. 3 and 4 are side views of a conventional example. 1... Piezoelectric ceramic, 2... Electrode, 3...
Elastic body, 4... Drive body, 5... Moving body (shape memory alloy) 6... Rotation direction. Name of agent Patent attorney Toshio Nakao Hoga1 Figure 1 Figure 2 Figure 3
Claims (2)
励起することにより，上記駆動体上に接触して設置され
た動体を移動させる超音波モーターにおいて，動体に形
状記憶合金を用いて駆動体と動体の接触力を付加せしめ
たことを特徴とする超音波モーター。(1) In an ultrasonic motor that moves a moving object placed in contact with the driving body by exciting elastic traveling waves in the driving body made of a piezoelectric body and an elastic body, a shape memory alloy is used for the moving body. An ultrasonic motor characterized by adding contact force between a driving body and a moving body.
に力を及ぼすよう構成されたことを特徴とする特許請求
の範囲第１項記載の超音波モーター。(2) The ultrasonic motor according to claim 1, wherein the shape memory alloy of the moving body is configured to constantly exert a force in the radial direction on the driving body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61141960A JPS631380A (en) | 1986-06-18 | 1986-06-18 | Ultrasonic motor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61141960A JPS631380A (en) | 1986-06-18 | 1986-06-18 | Ultrasonic motor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS631380A true JPS631380A (en) | 1988-01-06 |
Family
ID=15304126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61141960A Pending JPS631380A (en) | 1986-06-18 | 1986-06-18 | Ultrasonic motor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS631380A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63124779A (en) * | 1986-11-11 | 1988-05-28 | Nikon Corp | Ultrasonic motor |
| JPH01154295U (en) * | 1988-04-19 | 1989-10-24 | ||
| JPH0291387A (en) * | 1988-09-29 | 1990-03-30 | Bunka Shutter Co Ltd | Shutter open and close device |
-
1986
- 1986-06-18 JP JP61141960A patent/JPS631380A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63124779A (en) * | 1986-11-11 | 1988-05-28 | Nikon Corp | Ultrasonic motor |
| JPH01154295U (en) * | 1988-04-19 | 1989-10-24 | ||
| JPH0291387A (en) * | 1988-09-29 | 1990-03-30 | Bunka Shutter Co Ltd | Shutter open and close device |
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