JPS63137308A - Fine positioning device - Google Patents
Fine positioning deviceInfo
- Publication number
- JPS63137308A JPS63137308A JP61283063A JP28306386A JPS63137308A JP S63137308 A JPS63137308 A JP S63137308A JP 61283063 A JP61283063 A JP 61283063A JP 28306386 A JP28306386 A JP 28306386A JP S63137308 A JPS63137308 A JP S63137308A
- Authority
- JP
- Japan
- Prior art keywords
- parallel
- displacement
- rigid body
- beam displacement
- positioning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 130
- 230000007246 mechanism Effects 0.000 claims abstract description 69
- 238000005452 bending Methods 0.000 claims description 6
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005553 drilling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 241000238366 Cephalopoda Species 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
- B23Q15/20—Automatic control or regulation of feed movement, cutting velocity or position of tool or work before or after the tool acts upon the workpiece
- B23Q15/22—Control or regulation of position of tool or workpiece
- B23Q15/24—Control or regulation of position of tool or workpiece of linear position
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
- G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
- G05B19/23—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41133—Compensation non linear transfer function
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/41—Servomotor, servo controller till figures
- G05B2219/41352—Alternative clamping dilation of piezo, caterpillar motion, inchworm
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Nanotechnology (AREA)
- Human Computer Interaction (AREA)
- Molecular Biology (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Life Sciences & Earth Sciences (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Position Or Direction (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、半導体製造装置、電子顕微鏡等のサブμｍオ
ーダの調節を必要とする装置に使用される微細位置決め
装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a fine positioning device used in devices that require adjustment on the sub-μm order, such as semiconductor manufacturing equipment and electron microscopes.
近年、各種技術分野においては、サブμｍのオーダーの
微細な変位調節が可能である装置が要望されている。そ
の典型的な例がＬＳＩ（大規模集積回路）、超ＬＳＩの
製造工程において使用されるマスクアライナ、電子線描
画装置等の半導体製造装置である。これらの装置におい
ては、サブμｍオーダーの微細な位置決めが必要であり
、位置決めの精度が向上するにしたがってその集積度も
増大し、高性能の製品を製造することができる。In recent years, in various technical fields, there has been a demand for devices capable of fine displacement adjustment on the order of sub-μm. Typical examples are semiconductor manufacturing equipment such as mask aligners and electron beam lithography equipment used in the manufacturing process of LSIs (Large Scale Integrated Circuits) and VLSIs. These devices require fine positioning on the order of sub-μm, and as the positioning accuracy improves, the degree of integration also increases, making it possible to manufacture high-performance products.
このような微細な位置決めは上記半導体装置に限らず、
電子顕微鏡をはじめとする各種の高倍率光学装置等にお
いても必要であり、その精度向上により、バイオテクノ
ロジ、宇宙開発等の先端技術においてもそれらの発展に
大きく寄与するものである。Such fine positioning is not limited to the above semiconductor devices,
It is also necessary for various high-magnification optical devices such as electron microscopes, and its improved accuracy will greatly contribute to the development of advanced technologies such as biotechnology and space exploration.
従来、このような微細位置決め装置は、例えば「機械設
計」誌、第２７巻第１号（１９８３年１月号）の第３２
頁乃至第３６頁に示されるような種々の型のものが提藁
されている。これらのうち、特に面倒な変位縮小機構が
不要であり、かつ、構成が簡単である点で、平行ばねと
微動アクチュエータを用いた型の微細位置決め装置が優
れていると考えられるので、以下、これを第４図に基づ
い説明する。Conventionally, such a fine positioning device has been described, for example, in "Mechanical Design" magazine, Vol. 27, No. 1 (January 1983 issue), No. 32.
Various types have been proposed, as shown on pages 36 to 36. Among these, a type of fine positioning device using a parallel spring and a fine movement actuator is considered to be superior in that it does not require a particularly troublesome displacement reduction mechanism and has a simple configuration. will be explained based on FIG.
第６図は従来の微細位置決め装置の側面図である０図で
、１は支持台、２ａ、２ｂは支持台１上に互いに平行に
固定された板状の平行ばね、３は平行ばね２ａ、 ２
ｂ上に固定された剛性の高い微動テーブルである。４は
支持台１と微動テーブル３との間に装架された微動アク
チュエータである。FIG. 6 is a side view of a conventional fine positioning device, in which 1 is a support base, 2a and 2b are plate-shaped parallel springs fixed parallel to each other on the support base 1, 3 is a parallel spring 2a, 2
This is a highly rigid fine movement table fixed on the top. Reference numeral 4 denotes a fine movement actuator mounted between the support base 1 and the fine movement table 3.
この微動アクチュエータ４には、圧電素子、電磁ソレノ
イド等が用いられ、これを励起することにより、微動テ
ーブル３に図中に示す座標軸のＸ軸方向の力が加えられ
る。This fine movement actuator 4 uses a piezoelectric element, an electromagnetic solenoid, etc., and by exciting it, a force is applied to the fine movement table 3 in the X-axis direction of the coordinate axis shown in the figure.
ここで、平行ばね２ａ、２ｂはその構造上、Ｘ軸方向の
剛性は低く、これに対してｚ軸方向、ｙ軸方向（紙面に
垂直な方向）の剛性が高いので、微動アクチュエータが
励起されると、微動テーブル３はほぼＸ軸方向にのみ変
位し、他方向の変位はほとんど発生しない。Here, due to their structure, the parallel springs 2a and 2b have low rigidity in the X-axis direction, but have high rigidity in the z-axis and y-axis directions (directions perpendicular to the paper), so the fine movement actuator is excited. Then, the fine movement table 3 is displaced almost only in the X-axis direction, and almost no displacement occurs in other directions.
第７図は前述の参考文献に開示された例から容易に考え
られる従来の他の微細位置決め装置の斜視図である。図
で、６は支持台、７ａ、７ｂは支持台６上に互いに固定
された板状の平行ばね、８は平行ばね７ａ、７ｂに固定
された剛性の高い中間テーブル、９ａ、９ｂは平行ばね
７ａ、７ｂと直交する方向において互いに平行に中間テ
ーブル８に固定された板状の平行ばね、１０は平行ばね
９ａ、９ｂ上に固定された剛性の高い微動テーブルであ
る。座標軸を図中に示すように定めると、平行ばね７ａ
、７ｂはＸ軸方向に沿って配置され、平行ばね９ａ、９
ｂはｙ軸方向に沿って配置されている。この構造は、基
本的には第６図に示す１軸（Ｘ軸方向の変位を生じる）
の場合の構造を２段に積層した構造である。矢印Ｆ８は
微動テーブル１０に加えられるＸ軸方向の力、矢印Ｆｙ
は中間テーブル８に加えられるｙ軸方向の力を示し、力
Ｆｘ、Ｆ、を加えることができる図示されていない微動
アクチュエータが支持台６と微動テーブル１０１支持台
６と中間テーブル８との間にそれぞれ設けられる。FIG. 7 is a perspective view of another conventional fine positioning device that can be easily considered from the example disclosed in the above-mentioned reference document. In the figure, 6 is a support base, 7a and 7b are plate-shaped parallel springs fixed to each other on the support base 6, 8 is a highly rigid intermediate table fixed to the parallel springs 7a and 7b, and 9a and 9b are parallel springs. A plate-shaped parallel spring is fixed to the intermediate table 8 in parallel with each other in a direction perpendicular to 7a and 7b, and 10 is a highly rigid fine movement table fixed on the parallel springs 9a and 9b. If the coordinate axes are set as shown in the figure, the parallel spring 7a
, 7b are arranged along the X-axis direction, and parallel springs 9a, 9
b is arranged along the y-axis direction. This structure basically consists of one axis (displacement in the X-axis direction) as shown in Figure 6.
This is a structure in which the structure in the case of 2 is stacked in two layers. Arrow F8 is a force applied to the fine movement table 10 in the X-axis direction, arrow Fy
indicates a force in the y-axis direction applied to the intermediate table 8, and a fine movement actuator (not shown) capable of applying forces Fx, F is provided between the support stand 6 and the fine movement table 101 and the support stand 6 and the intermediate table 8. Each is provided.
微動テーブル１０に力Ｆ、が加えられると、平行ばね９
ａ、９ｂが変形し、一方、平行ばね７ ａ ＋７ｂはＸ
軸方向の力Ｆ、に対しては高い剛性有するので、微動テ
ーブル１０はほぼＸ軸方向のみ変位する。また、中間テ
ーブル８に力Ｆ、が加えられると、平行ばね７ａ、７ｂ
が変形し、微動テーブル１０は平行ばね９ａ、９ｂを介
してほぼｙ軸方向にのみ変位する。さらに、両方の力Ｆ
、、Ｆ。When a force F is applied to the fine movement table 10, the parallel spring 9
a, 9b are deformed, while parallel spring 7a + 7b is
Since it has high rigidity against the axial force F, the fine movement table 10 is displaced approximately only in the X-axis direction. Furthermore, when a force F is applied to the intermediate table 8, the parallel springs 7a and 7b
is deformed, and the fine movement table 10 is displaced approximately only in the y-axis direction via the parallel springs 9a and 9b. Furthermore, both forces F
,,F.
が同時に加えられると、各平行ばね７ａ、７ｂ。are applied simultaneously, each parallel spring 7a, 7b.
９ａ、９ｂは同時に変形し、微動テーブルｌＯはこれに
応じて２次元的に変位する。9a and 9b are deformed simultaneously, and the fine movement table IO is two-dimensionally displaced accordingly.
このように、第７図に示す装置は、第６図に示す装置が
１軸方向のみの位置決め装置であるのに対して２軸方向
の位置決めを行うことができる。In this way, the device shown in FIG. 7 can perform positioning in two axial directions, whereas the device shown in FIG. 6 is a positioning device in only one axial direction.
ところで、第６図および第７図に示す微細位置決め装置
は、１次元および２次元の位置決めができるが、例えば
、第６図に示す微細位置決め装置において、平行ばね２
ａ、２ｂがＸ軸方向に押されて変形したとき、微動テー
ブル３はＸ軸方向に変位するとともに、極く僅かではあ
るがＺ軸方向下向きにも変位を生じる。このような横変
位が発生することはその構造上明らかである。又、第７
図に示す微細位置決め装置においても、同様に２軸方向
下向きの横変位が発生するのは明らかである。そして、
サブμｍオーダの微細位置決めを行う場合、このような
掻く僅かな横変位も無視できなくなる。By the way, the fine positioning device shown in FIGS. 6 and 7 is capable of one-dimensional and two-dimensional positioning. For example, in the fine positioning device shown in FIG.
When a and 2b are pushed and deformed in the X-axis direction, the fine movement table 3 is displaced in the X-axis direction, and is also slightly displaced downward in the Z-axis direction. It is obvious from the structure that such lateral displacement occurs. Also, the seventh
It is clear that downward lateral displacement in the two axial directions similarly occurs in the fine positioning device shown in the figure. and,
When performing fine positioning on the order of sub-μm, such slight lateral displacement cannot be ignored.
さらに、Ｘ軸方向およびｙ軸方向の２軸の変位を実施し
ようとする場合、第７図に示す装置ではｙ軸方向の寸法
が大きくなり、さらにｙ軸方向の変位や、Ｘ軸、ｙ軸、
２軸まわりの変位を発生する装置を付加しようとする場
合、微細位置決め装置全体が大形となるのを避けること
はできない。Furthermore, when attempting to perform displacement in two axes, the X-axis direction and the y-axis direction, the device shown in FIG. ,
When attempting to add a device that generates displacement around two axes, it is unavoidable that the entire fine positioning device becomes large.
本発明の目的は、上記従来技術の問題点を解決し、横変
位の発生を防止することができ、かつ、構造簡単で小型
に構成することができる微細位置決め装置を提供するに
ある。SUMMARY OF THE INVENTION An object of the present invention is to provide a fine positioning device which can solve the problems of the prior art described above, can prevent the occurrence of lateral displacement, and can be constructed with a simple and compact structure.
上記の目的を達成するため、本発明は、中心剛体部から
、直交する２つの軸のうちの第１の軸方向に沿って張出
した１対の第１の張出し部と、第２の軸方向に沿って張
出した他の１対の第２の張出し部とを備え、第１の張出
し部の一方側の張り出し部および他方側の張出し部のそ
れぞれに平行たわみ梁変位機構を設け、両側の平行たわ
み梁変位機構が互いに中心剛体部を中心に対称に配置さ
れており、かつ、平行たわみ梁変位機構は第２の軸方向
の並進変位を発生させ、又、第２の張出し部の一方側の
張出し部および他方側の張出し部のそれぞれに平行たわ
み梁変位機構を中心剛体部を中心に互いに対称になるよ
うに配置し、それら各平行たわみ梁変位機構は第１の軸
方向の並進変位を発生させるようにしたことを特徴とす
る。In order to achieve the above object, the present invention provides a pair of first overhanging parts that overhang from a central rigid body part along the first axial direction of two orthogonal axes, and and another pair of second overhangs extending along the first overhang, and a parallel deflection beam displacement mechanism is provided on each of the overhang on one side and the overhang on the other side of the first overhang. The flexible beam displacement mechanisms are arranged symmetrically to each other about the central rigid body part, and the parallel flexible beam displacement mechanism generates a translational displacement in the second axial direction, and the parallel flexible beam displacement mechanism generates a translational displacement in the second axial direction. Parallel flexible beam displacement mechanisms are arranged in each of the overhanging part and the other side overhang part so as to be symmetrical with respect to the central rigid body part, and each of the parallel flexible beam displacement mechanisms generates a translational displacement in the first axial direction. It is characterized by being made to do.
２つの平行たわみ梁変位機構によりＸ軸、ｙ軸のうちの
任意の方向又はそれらの合成方向に並進変位を生じさせ
る。Translational displacement is caused in any direction of the X-axis and y-axis, or in a composite direction thereof, by two parallel deflection beam displacement mechanisms.
以下、本発明を図示の実施例に基づいて説明する。 Hereinafter, the present invention will be explained based on illustrated embodiments.
第１図は本発明の第１の実施例に係る微細位置決め装置
の分解斜視図である。図で、ｘ、ｙ、ｚは互いに直交す
る座標軸を示す、１５は剛性の高い部材より成る中心剛
体部、１６ａは中心剛体部１５からｙ軸方向に張出した
張出し部、１６ｂは中心剛体部１５から張出し部１６ａ
と反対向きに張出した張出し部、１７ａは中心剛体部１
５からＸ軸方向に張出した張出し部、１７ｂは中心剛体
部１５から張出し部１７ａと反対向きに張出した張出し
部である。１８ａ、１８ｂはそれぞれ張出し部１６ａ、
１６ｂの端部下端に設けられた固定部、１９ａ、１９ｂ
はそれぞれ張出し部１７ａ。FIG. 1 is an exploded perspective view of a fine positioning device according to a first embodiment of the present invention. In the figure, x, y, and z indicate coordinate axes that are orthogonal to each other, 15 is a central rigid body part made of a highly rigid member, 16a is an overhanging part extending from the central rigid body part 15 in the y-axis direction, and 16b is a central rigid body part 15 From the overhanging part 16a
The overhanging part 17a that overhangs in the opposite direction is the central rigid body part 1.
An overhanging portion 17b overhanging from the central rigid body portion 15 in the X-axis direction is an overhanging portion extending from the central rigid body portion 15 in the opposite direction to the overhanging portion 17a. 18a and 18b are the overhanging portions 16a and 18b, respectively.
Fixing parts provided at the lower end of the end of 16b, 19a, 19b
are overhanging portions 17a, respectively.
１７ｂの端部上端に設けられた微動テーブル連結部、２
０は微動テーブルである。A fine movement table connecting portion provided at the upper end of 17b, 2
0 is a fine movement table.
張出し部１６ａ、１６ｂ、１７ａ、１７ｂ、固定部１８
ａ、１８ｂ、および微動テーブル連結部１９ａ、１９ｂ
はそれぞれ中心剛体部１５と同じ部材で構成され、中心
剛体部１５とともに１つのブロックから加工成形される
。Overhanging parts 16a, 16b, 17a, 17b, fixed part 18
a, 18b, and fine movement table connection parts 19a, 19b
are each made of the same material as the central rigid body part 15, and are processed and formed together with the central rigid body part 15 from one block.
１６ Ｆ、ａ、 １６ Ｆ、ｈはそれぞれ張出し部１
６ａ。16 F, a, 16 F, h are respectively overhang parts 1
6a.
１６ｂに構成された平行たわみ梁変位機構であり、互い
に中心剛体部１５に対して対称的に構成されている。平
行たわみ梁変位機構１６Ｆ、□１６Ｆ、ｂは共働してＸ
軸方向の並進変位を発生する。１７Ｆｙ□１７Ｆｙｂは
それぞれ張出し部１７２．１７ｂに構成された平行たわ
み梁変位機構であり、互いに中心剛体部１５に対して対
称的に構成されている。平行たわみ梁変位機ＦＩＬ ７
Ｆ、−、１７Ｆｙｈは共働してｙ軸方向の並進変位を
発生する。なお、平行たわみ梁変位機構の構造について
は後述する。16b, and are configured symmetrically with respect to the central rigid body portion 15. The parallel deflection beam displacement mechanisms 16F, □16F, b work together to
Generates axial translational displacement. 17Fy□17Fyb are parallel deflection beam displacement mechanisms respectively constructed on the overhanging portions 172 and 17b, and are constructed symmetrically with respect to the central rigid body portion 15. Parallel deflection beam displacement machine FIL 7
F, -, 17Fyh work together to generate a translational displacement in the y-axis direction. The structure of the parallel deflection beam displacement mechanism will be described later.
上記平行たわみ梁変位機構１６ ＦＸ−、１６Ｆ−ｂ。The above parallel deflection beam displacement mechanism 16 FX-, 16F-b.
１７ Ｆ、、、 １７ Ｆｙｂは各張出し部１６ａ、
１６ｂ。17 F, 17 Fyb is each overhang portion 16a,
16b.
１７ａ、１７ｂの所定個所に所定の貫通孔を形成するこ
とにより構成される。なお、Ｓは各平行たわみ梁変位機
構に設けられたストレンゲージである。It is constructed by forming predetermined through holes at predetermined locations of 17a and 17b. Note that S is a strain gauge provided in each parallel deflection beam displacement mechanism.
次に、上記平行たわみ梁変位機構の構成を図により説明
する。第２図（ａ）、（ｂ）は対称形の平行たわみ梁変
位機構の側面図である。図で、３１ａ、３１ｂ、３１ｃ
は剛体部、３４ａ＋、３４ａｚは剛体部３１ｃ、３１ａ
間に互いに平行に連結された平行たわみ梁である。平行
たわみ梁３４ａ、。Next, the configuration of the parallel deflection beam displacement mechanism will be explained with reference to the drawings. FIGS. 2(a) and 2(b) are side views of a symmetrical parallel beam displacement mechanism. In the figure, 31a, 31b, 31c
is a rigid body part, 34a+, 34az are rigid body parts 31c, 31a
These are parallel flexible beams connected parallel to each other in between. Parallel flexible beam 34a.
３４ａｔは剛体部にあけた貫通孔３２ａにより形成され
る。３４Ｊ、３４ｔ１ｇは剛体部３１ｂ。34at is formed by a through hole 32a drilled in the rigid body part. 34J and 34t1g are rigid body parts 31b.
３１ｃ間に互いに平行に連結された平行たわみ梁であり
、剛体部にあけられた貫通孔３２ｂにより形成される。31c are parallel flexible beams connected in parallel to each other, and are formed by through holes 32b drilled in the rigid body part.
３６ａ、３６ｂは圧電アクチュエータであり、それぞれ
貫通孔３２ａ、３２ｂ内に突出した剛体部からの突出部
間に装着されている。Piezoelectric actuators 36a and 36b are mounted between protrusions from the rigid body parts protruding into the through holes 32a and 32b, respectively.
剛体部３１ｃの中心から左方の構成により平行たわみ梁
変位機構３９ａが、又、右方の構成により平行たわみ梁
変位機構３９ｂが構成される。Ｓは各平行たわみ梁の適
所に設けられたストレンゲージである。The configuration to the left of the center of the rigid body portion 31c constitutes a parallel flexible beam displacement mechanism 39a, and the configuration to the right constitutes a parallel flexible beam displacement mechanism 39b. S is a strain gauge provided at a suitable position on each parallel flexible beam.
ここで、座標軸を図示のように定める（ｙ軸は紙面に垂
直な方向）、今、圧電アクチュエータ３６ａ、３６ｂに
同時に電圧を印加して同一大きさのＺ軸方向の力ｆを発
生させる。このとき、一方の平行たわみ梁変位機構、例
えば平行たわみ梁変位機構３９ａに生じる変位について
考える。圧電アクチュエータ３６ａに電圧が印加される
ことにより、剛体部３１ｃは力ｆによりｚ軸方向に押圧
されることになる。このため、平行たわみ梁３４ａＩ、
３４ａ＊は第４図に示す平行ばね２ａ。Here, the coordinate axes are determined as shown (the y-axis is perpendicular to the plane of the paper), and voltages are simultaneously applied to the piezoelectric actuators 36a and 36b to generate the same force f in the Z-axis direction. At this time, consider the displacement that occurs in one parallel flexible beam displacement mechanism, for example, the parallel flexible beam displacement mechanism 39a. By applying a voltage to the piezoelectric actuator 36a, the rigid body portion 31c is pressed in the z-axis direction by a force f. For this reason, the parallel deflection beam 34aI,
34a* is the parallel spring 2a shown in FIG.
２ｂと同じように曲げ変形を生じ、剛体部３１９は第２
図（ｂ）に示すように２軸方向に変位する。Similar to 2b, bending deformation occurs, and the rigid body part 319
As shown in Figure (b), it is displaced in two axial directions.
このとき、仮に他方の平行たわみ梁変位機構３９ｂが存
在しないとすると剛体部３１ｃには極めて微小ではある
が横変位（Ｘ軸方向の変位）をも同時に生じるはずであ
る。At this time, if the other parallel deflection beam displacement mechanism 39b were not present, a very small lateral displacement (displacement in the X-axis direction) would also occur in the rigid body portion 31c at the same time.
又、平行たわみ梁変位機構３９ａが存在しない場合、他
方の平行たわみ梁変位機構３９ｂに生じる変位について
考えると、平行たわみ梁変位機構３９ｂは剛体部３１ｃ
の中心を通るｙ軸方向に沿う面（基準面）に対して平行
たわみ梁変位機構３９ａと面対称に構成されていること
から、基準面に関して面対称な力ｆを受けると上記と同
様に、剛体部３１ｃにはｚ軸方向の変位と同時に上記横
変位が生じ、その大きさや方向は、平行たわみ梁変位機
構３９ａのそれと基準面に関して面対称となる。すなわ
ち、上記横変位についてみると、平行たわみ梁変位機構
３９ａに生じる横変位は、Ｘ軸方向の変位については図
で左向き、ｙ軸まわりの回転変位については図で反時計
方向に生じ、一方、平行たわみ梁変位機構３９ｂに生じ
る横変位は、Ｘ軸方向変位については図で右向き、ｙ軸
まわりの回転変位については図で時計方向に生じる。Moreover, when considering the displacement that occurs in the other parallel flexible beam displacement mechanism 39b when the parallel flexible beam displacement mechanism 39a does not exist, the parallel flexible beam displacement mechanism 39b is the rigid body part 31c.
Since it is constructed in plane symmetry with the parallel deflection beam displacement mechanism 39a with respect to the plane (reference plane) along the y-axis direction passing through the center of The above-mentioned lateral displacement occurs in the rigid portion 31c at the same time as the displacement in the z-axis direction, and its magnitude and direction are symmetrical with respect to the reference plane with respect to the parallel deflection beam displacement mechanism 39a. That is, regarding the above-mentioned lateral displacement, the lateral displacement that occurs in the parallel deflection beam displacement mechanism 39a occurs in the left direction in the figure for displacement in the X-axis direction, and counterclockwise in the figure for rotational displacement around the y-axis. The lateral displacement that occurs in the parallel deflection beam displacement mechanism 39b occurs in the right direction in the figure for displacement in the X-axis direction, and clockwise in the figure for rotational displacement around the y-axis.
そして、それら各Ｘ軸方向変位の大きさおよびｙ軸まわ
りの回転変位の大きさは等しい、したがって、両者に生
じる横変位は互いにキャンセルされる。この結果、力ｆ
が加わったことにより、各平行たわみ梁３４ａ＋、３４
ａ、、３４ｂ＋、３４ｂｚにその長手方向の伸びによる
僅かな内部応力の増大が生じるだけで、剛体部３１ｃは
ｚ軸方向のみの変位（主変位）εを生じる。The magnitude of each displacement in the X-axis direction and the magnitude of rotational displacement around the y-axis are equal, and therefore, the lateral displacements occurring in both cancel each other out. As a result, the force f
By adding , each parallel flexible beam 34a+, 34
A, , 34b+, 34bz generate only a slight increase in internal stress due to their longitudinal extension, and the rigid body portion 31c produces a displacement (principal displacement) ε only in the z-axis direction.
圧電アクチュエータ３６ａ、３６ｂに印加されている電
圧が除かれると、各平行たわみ梁３４ａ＋。When the voltage applied to the piezoelectric actuators 36a, 36b is removed, each parallel flexible beam 34a+.
３４ａｔ、３４ｂ、３４ｂｔは変形前の状態に復帰し、
平行たわみ梁変位機構３９ａ、３９ｂは第３図（ａ）に
示す状態に戻り、変位εは０となる。34at, 34b, and 34bt return to the state before deformation,
The parallel deflection beam displacement mechanisms 39a and 39b return to the state shown in FIG. 3(a), and the displacement ε becomes zero.
なお、上記の作動中、各ストレンゲージＳを用いて実際
の変位量を検出し、これに基づいてフィードバック制御
を行うことにより正確な位置決めを実施することができ
る。Note that during the above operation, accurate positioning can be performed by detecting the actual displacement amount using each strain gauge S and performing feedback control based on this.
次に、第１図に示す本実施例の動作を説明する。Next, the operation of this embodiment shown in FIG. 1 will be explained.
今、平行たわみ梁変位機構１６ Ｆ−、１６ＦＸｂの各
圧電アクチュエータに等しい電圧を印加すると、その平
行たわみａ３４ａ１．３４ａｔ、３４ｂ１．３４ｂｔが
印加電圧に応じて第１図のＸ軸方向に第２図（ｂ）に示
ように変形し、並進変位する。Now, when an equal voltage is applied to each piezoelectric actuator of the parallel deflection beam displacement mechanisms 16F- and 16FXb, the parallel deflections a34a1.34at and 34b1.34bt change in the X-axis direction of FIG. 1 according to the applied voltage as shown in FIG. It deforms and undergoes translational displacement as shown in (b).
これら平行たわみ梁変位機構１６ Ｆ、、、 １６ Ｆ
、。These parallel deflection beam displacement mechanisms 16F,..., 16F
,.
は、中心剛体部１５、平行たわみ梁変位機構１７Ｆｙ、
、 １７ Ｆ、、、および固定部１９ａに固定された
微動テーブル２０と一体であるので、そのＸ軸方向の並
進変位はそのまま微動テーブル２ｏに伝達され、微動テ
ーブル２ｏは同量だけＸ軸方向に並進変位する。同様に
、平行たわみ梁変位機構１７ Ｆｙｌｌ ７ Ｆｙｂの
圧電アクチュエータに同一電圧を印加した場合、微動テ
ーブル２０はｙ軸方向に並進変位する。さらに、これら
各平行たわみ梁変位機構を同時に駆動すると、合成され
た並進変位を得ることができる。are the central rigid body part 15, the parallel deflection beam displacement mechanism 17Fy,
, 17 F, , and are integrated with the fine movement table 20 fixed to the fixed part 19a, the translational displacement in the X-axis direction is directly transmitted to the fine movement table 2o, and the fine movement table 2o moves by the same amount in the X-axis direction. Translationally displaced. Similarly, when the same voltage is applied to the piezoelectric actuator of the parallel deflection beam displacement mechanism 17 Fyll 7 Fyb, the fine movement table 20 is translated in the y-axis direction. Furthermore, by simultaneously driving each of these parallel deflection beam displacement mechanisms, a combined translational displacement can be obtained.
このように、本実施例では、一方の張出し部にＸ軸方向
に並進変位する平行たわみ梁変位機構を設け、他方の張
出し部にｙ軸方向に並進変位する平行たわみ梁変位機構
を設け、一方の張出し部の端部を固定し、他方の張出し
部の端部に微動テーブルを固定したので、横変位を防止
することができるとともに、極めて簡単かつ小形の構成
で２軸の並進変位を得ることができる。As described above, in this embodiment, one of the overhangs is provided with a parallel flexible beam displacement mechanism that translates in the X-axis direction, and the other overhang is provided with a parallel flexible beam displacement mechanism that translates in the Y-axis direction. Since the end of one overhang is fixed and the fine movement table is fixed to the end of the other overhang, lateral displacement can be prevented and two-axis translational displacement can be obtained with an extremely simple and compact configuration. I can do it.
第３図は本発明の第２の実施例に係る微細位置決め装置
の分解斜視図である０図で、第１図に示す部分と同一部
分には同一符号を付して説明を省略する。２１は剛性の
高い部材より成る中心剛体部であり、微動テーブル２０
が固定される。２２ａは中心剛体部２１からＸ軸方向に
張出した張出し部、２２ｂは中心剛体部２１から張出し
部２２ａと反対向きに張出した張出し部である。２３ａ
。FIG. 3 is an exploded perspective view of a fine positioning device according to a second embodiment of the present invention, and the same parts as those shown in FIG. 1 are given the same reference numerals and their explanation will be omitted. Reference numeral 21 denotes a central rigid body portion made of a highly rigid member, and the fine movement table 20
is fixed. Reference numeral 22a denotes an overhanging portion extending from the central rigid body portion 21 in the X-axis direction, and 22b represents an overhanging portion extending from the central rigid body portion 21 in the opposite direction to the overhanging portion 22a. 23a
.
２３ｂはそれぞれ張出し部２２ａ、２２ｂの端部下方か
ら突出した固定部であり、固定部１９ａ。Reference numeral 23b denotes a fixing portion protruding from below the ends of the overhanging portions 22a and 22b, respectively, and is the fixing portion 19a.
１９′ｂと結合される。この結合の１個所が２点鎖線で
示されている。中心剛体部２１、各張出し部２２ａ、２
２ｂ、および連結部２３ａ、２３ｂはそれぞれ１つの部
材から一体に加工成形される。19'b. One location of this bond is indicated by a chain double-dashed line. Center rigid body part 21, each overhanging part 22a, 2
2b and the connecting portions 23a, 23b are each integrally formed from one member.
２２ Ｆ−−、２２Ｆ−ｂはそれぞれ張出し部２２ａ。22F-- and 22F-b are respective overhanging portions 22a.
２２ｂに構成された第２図（ａ）に示すものと同じ平行
たわみ梁変位機構であり、互いに中心剛体部２１に対し
て対称的に配置されている。これら平行たわみ梁変位機
構２２Ｆ１□ ２２Ｆ−ｂは共働してｙ軸方向の並進変
位を発生する。平行たわみ梁変位機構２２ Ｆ、、、
２２ Ｆ−ｈは各張出し部２２ａ、２２ｂの所定個所
に所定の貫通孔を形成することにより構成される。22b is the same parallel flexible beam displacement mechanism as shown in FIG. These parallel deflection beam displacement mechanisms 22F1□ 22F-b work together to generate translational displacement in the y-axis direction. Parallel deflection beam displacement mechanism 22 F...
22F-h is constructed by forming a predetermined through hole at a predetermined location of each of the overhanging portions 22a and 22b.
次に本実施例の動作を説明する。張出し部１７ａ、１７
ｂと張出し部２２ａ、２２ｂとは連結されており、かつ
、中心剛体部２１と微動テーブル２０も連結されている
ので、平行たわみ梁変位機構１６Ｆ−＝ １６Ｆ＊ｂ
、１７ＦＦ−９−１７Ｆｙｂにより発生した並進変位は
そのまま微動テーブル２０を並進変位させる。端部２２
ａ、２２ｂは、端部１７ａ、１７ｂ、平行たわみ梁変位
機構１７ Ｆ、、。Next, the operation of this embodiment will be explained. Overhanging parts 17a, 17
b and the overhanging parts 22a and 22b are connected, and the central rigid body part 21 and the fine movement table 20 are also connected, so the parallel deflection beam displacement mechanism 16F-= 16F*b
, 17FF-9-17Fyb directly translates the fine movement table 20. End portion 22
a, 22b are end portions 17a, 17b, parallel deflection beam displacement mechanism 17F, .
１７Ｆ、い中心剛体部１５、平行たわみ梁変位機構１６
Ｆ、、、 １６ Ｆｘ＆、および端部１６ａ、１６
ｂを介して固定部１８ａ、１８ｂに固定されている。し
たがって、平行たわみ梁変位機構２２ Ｆ、、。17F, central rigid body part 15, parallel deflection beam displacement mechanism 16
F,,, 16 Fx&, and end portions 16a, 16
It is fixed to fixed parts 18a and 18b via b. Therefore, the parallel deflection beam displacement mechanism 22F, .
２２Ｆ−ｂの各圧電アクチュエータに同一電圧を印加す
ると、これら平行たわみ梁変位機構２２Ｆ、、。When the same voltage is applied to each piezoelectric actuator of 22F-b, these parallel deflection beam displacement mechanisms 22F, .
２２Ｆ−ｂは第２図（ｂ）に示すように変位し、微動テ
ーブル２０も２軸方向に同一量変位する。22F-b is displaced as shown in FIG. 2(b), and the fine movement table 20 is also displaced by the same amount in the two axial directions.
このように、本実施例では、さきの実施例に、さらにｙ
軸方向の並進変位を発生する平行たわみ梁変位機構を連
結したので、横変位を防止できるとともに、簡単かつ小
形の構成で３軸の並進変位を得ることができる。In this way, in this example, in addition to the previous example, y
Since the parallel flexible beam displacement mechanism that generates translational displacement in the axial direction is connected, lateral displacement can be prevented, and translational displacement in three axes can be obtained with a simple and compact configuration.
第４図は本発明の第３の実施例に係る微細位置決め装置
の分解斜視図である０図で、第１図に示す部分と同一部
分には同一符号を付して説明を省略する。２６は剛性の
高い部材より成る中心剛体部であり、微動テーブル２０
が結合される。その結合の１個所が２点鎖線で示されて
いる。２７ａは中心剛体部２６からＸ軸方向に張出した
張出し部、２７ｂは中心剛体部２６から張出した張出し
部である。張出し部２７ａと端部１７ａ、および張出し
部２７ｂと端部１７ｂとはそれぞれ連結さ ゛れて
いる。その結合の１個所が２点鎖線で示されている。FIG. 4 is an exploded perspective view of a fine positioning device according to a third embodiment of the present invention, and the same parts as those shown in FIG. Reference numeral 26 denotes a central rigid body portion made of a highly rigid member, and the fine movement table 20
are combined. One location of the bond is indicated by a two-dot chain line. 27a is an overhanging portion extending from the central rigid body portion 26 in the X-axis direction, and 27b is an overhanging portion extending from the central rigid body portion 26. The overhanging portion 27a and the end portion 17a and the overhanging portion 27b and the end portion 17b are connected, respectively. One location of the bond is indicated by a two-dot chain line.
２７ Ｍ、、、 ２７ Ｍ、ｂはそれぞれ張出し部２
７ａ。27 M, , 27 M and b are respectively the overhanging parts 2
7a.
２７ｂに構成された放射たわみ梁変位機構であり、互い
に中心剛体部２６に対して対称的に配置されている。こ
れら平行たわみ梁変位機構２７ Ｍ、、。27b, which are arranged symmetrically with respect to the central rigid body part 26. These parallel deflection beam displacement mechanisms 27 M, .
２１Ｍｍｂは共働して２軸まわりの回転変位を発生する
。これら放射たわみ梁変位機構２７ Ｍ、、。21Mmb work together to generate rotational displacement around two axes. These radial deflection beam displacement mechanisms 27 M, .
２７Ｍ−ｂはそれぞれ所定個所に所定の貫通孔を形成す
ることにより構成される。なお、放射たわみ梁変位機構
の構造については後述する。各放射たわみ梁変位機構２
７Ｍ、□ ２７Ｍ、い中心剛体部２６、張出し部２７ａ
、２７ｂは一体に加工成形される。27M-b is constructed by forming predetermined through holes at predetermined locations, respectively. The structure of the radial deflection beam displacement mechanism will be described later. Each radial deflection beam displacement mechanism 2
7M, □ 27M, center rigid body part 26, overhang part 27a
, 27b are integrally processed and molded.
次に、上記放射たわみ梁変位機構の構成を図によ゛り説
明する。第５図（ａ）、 （ｂ）は対称形の放射たわ
み梁変位機構の側面図である。Next, the configuration of the radial deflection beam displacement mechanism will be explained with reference to the drawings. FIGS. 5(a) and 5(b) are side views of a symmetrical radial beam displacement mechanism.
図で、４１ ａ、４１ ｔ）＋ ４１ ｃは剛体部、
４４ａ１，４４ａｚ 、４４１）＋、４４ｂｔは放射た
わみ梁である。各放射たわみ梁４４ａ＋’、４４ａｇ、
４４ｂ＋、４４ｂｔは剛体部４１ｃの中心を通る紙面に
垂直な軸０に対して一点ｆｌｔｍｔ、＋、ｔ、＊に沿っ
て放射状に延びており、それぞれ隣接する剛体部間を連
結している。放射たわみ梁４４ａ＋、４４ａｇは貫通孔
４２ａをあけることにより形成され、又、放射たわみ梁
４４ｂ＋、４４ｂｚは貫通孔４２ｂをあけることにより
形成される。４６ａ、４６ｂは圧電アクチュエータであ
り、それぞれ貫通孔４２ａ、４２ｂに剛体部から突出し
た突出部間に装着されている。軸Ｏの左側の構成により
放射たわみ梁変位機構４９８が、又、右側の構成により
放射たわみ梁変位機構４９ｂが構成される。なお、Ｓは
放射たわみ梁の適所に設けられたストレンゲージである
。In the figure, 41 a, 41 t) + 41 c are rigid parts,
44a1, 44az, 441)+, and 44bt are radial deflection beams. Each radial deflection beam 44a+', 44ag,
44b+ and 44bt extend radially along one point fltmt, +, t, * with respect to the axis 0 perpendicular to the paper plane passing through the center of the rigid body part 41c, and connect adjacent rigid body parts, respectively. The radial bending beams 44a+, 44ag are formed by drilling the through hole 42a, and the radial bending beams 44b+, 44bz are formed by drilling the through hole 42b. Piezoelectric actuators 46a and 46b are mounted between protrusions protruding from the rigid body in the through holes 42a and 42b, respectively. The configuration on the left side of the axis O constitutes the radial flexure beam displacement mechanism 498, and the configuration on the right side constitutes the radial flexure beam displacement mechanism 49b. Note that S is a strain gauge provided at a proper location on the radial deflection beam.
今、圧電アクチュエータ４６ａ、４６ｂに同時に所定の
電圧を印加して同一の大きさの、中心軸Ｏを中心とする
円に対する接線方向の力ｆを発生させる。そうすると、
剛体部４１ｃの左方の突出部は圧電アクチュエータ４６
ａに発生した力により上記接線に沿って上向きに押され
、剛体部４１Ｃの右方の突出部は圧電アクチュエータ４
６ｂに発生した力により上記接線に沿って下向きに押さ
れる。剛体部４１ｃは両開体部４１ａ、４１ｂに放射た
わみ梁４４ａ＋、４４ａｚ、４４ｔ）＋、４４ｂｚで連
結された形となっているので、上記の力を受けた結果、
第５図（ｂ）に示すように放射たわみ梁４４ａｒ、４４
ａｔ、４４ｂ＋、４４ｂｔの剛体部４１ ａ、 ４
ｌ ｂに連結されている部分は点Ｏから放射状に延びる
直ＳｓＬ ＋、 Ｌ ｚ上にあるが、剛体部４１ｃに連
結されている部分は、上記直線Ｌ１゜Ｌよから僅かにず
れた直線（この直線も点Ｏから放射状に延びる直線であ
る。）Ｌ＋ ′、Ｌｘ ′上にずれる微小変位を生
じる。このため、剛体部４１ｃは図で時計方向に微小角
度δだけ回動する。Now, a predetermined voltage is simultaneously applied to the piezoelectric actuators 46a and 46b to generate a force f of the same magnitude in a tangential direction to a circle centered on the central axis O. Then,
The left protrusion of the rigid body part 41c is a piezoelectric actuator 46.
a is pushed upward along the tangent line, and the right protrusion of the rigid body part 41C is pushed upward by the piezoelectric actuator 4.
The force generated at 6b pushes it downward along the tangent line. Since the rigid body part 41c is connected to both open body parts 41a and 41b by radial bending beams 44a+, 44az, 44t)+, and 44bz, as a result of receiving the above force,
As shown in FIG. 5(b), the radial deflection beams 44ar, 44
at, 44b+, 44bt rigid body portion 41 a, 4
The part connected to l b is on the straight line SsL +, L z extending radially from point O, but the part connected to the rigid body part 41c is on a straight line ( This straight line is also a straight line extending radially from point O.) A minute displacement occurs on L+' and Lx'. Therefore, the rigid body portion 41c rotates by a small angle δ clockwise in the figure.
この回転変位δの大きさは、放射たわみ梁４４ａ＋。The magnitude of this rotational displacement δ is the radial deflection beam 44a+.
４４ａ＊、４４ｂ＋、４４ｂ露の曲げに対する剛性によ
り定まるので、力ｆを正確に制御すれば、回転変位δも
それと同じ精度で制御できることになる。Since it is determined by the bending rigidity of the 44a*, 44b+, and 44b dews, if the force f is accurately controlled, the rotational displacement δ can also be controlled with the same precision.
圧電アクチュエータ４６ ａ、 ４６ ｂに印加され
ている電圧が除かれると、放射たわみ梁４４ ａ ＋。When the voltage applied to the piezoelectric actuators 46a, 46b is removed, the radiating deflection beam 44a+.
４４ａｘ、４４ｂ１．４４ｂｔは変形前０）状ＬＱｔ、
＝復３％し、回転変位機構は第５図（ａ）に示す状態に
戻り、変位δは０となる。なお、上記の動作中、各スト
レンゲージＳを用いて実際の変位量を検出し、これに基
づいてフィードバック制御を行うことにより正確な位置
決めを実施することができる。44ax, 44b1.44bt is 0)-like LQt before deformation,
= 3%, the rotational displacement mechanism returns to the state shown in FIG. 5(a), and the displacement δ becomes 0. Note that during the above operation, accurate positioning can be performed by detecting the actual displacement amount using each strain gauge S and performing feedback control based on this.
次に本実施例の動作を説明する。張出し部１７ａ、１７
ｂと張出し部２７ａ、２７ｂとは連結されており、かつ
、中心剛体部２６と微動テーブル２０も連結されている
ので、平行たわみ梁変位機構１６Ｆ−，１６Ｆ、１ｍ、
１７Ｆ、−，１７Ｆ−ｂにより発生した並進変位はその
まま微動テーブル２０を並進変位させる。又、端部２７
ａ、２７ｂは、端部１７ａ、１７ｂ、平行たわみ梁変位
機構１７Ｆｙ、１７Ｆ、い中心剛体部１５、平行たわみ
梁変位機構１６ Ｆ−、１６ＦＸイおよび端部１６ａ。Next, the operation of this embodiment will be explained. Overhanging parts 17a, 17
b and the overhanging parts 27a and 27b are connected, and the central rigid body part 26 and the fine movement table 20 are also connected, so that the parallel deflection beam displacement mechanisms 16F-, 16F, 1m,
The translational displacement generated by 17F, -, 17F-b directly translates the fine movement table 20. Also, the end portion 27
a, 27b are the ends 17a, 17b, the parallel flexible beam displacement mechanisms 17Fy, 17F, the central rigid body part 15, the parallel flexible beam displacement mechanisms 16F-, 16FXa, and the end 16a.
１６ｂを介して固定部１８ａ、１８ｂに固定されている
。したがって、放射たわみ梁変位機構２７Ｍ、、、２７
Ｍ、、の各圧電アクチュエータに同一電圧を印加すると
、これら放射たわみ梁変位機構２７ Ｍ−ａ、２７ Ｍ
ｍｂは第５図（ｂ）に示すように回転変位し、微動テー
ブル２０も２軸まわりに同一量回転変位する。It is fixed to fixed parts 18a and 18b via 16b. Therefore, the radial deflection beam displacement mechanism 27M, 27
When the same voltage is applied to each piezoelectric actuator of M, , these radial deflection beam displacement mechanisms 27 M-a, 27 M
mb is rotationally displaced as shown in FIG. 5(b), and the fine movement table 20 is also rotationally displaced by the same amount around the two axes.
このように、本実施例では、第１の実施例に、さらに２
軸まわりの回転変位を発生する放射たわみ梁変位機構を
連結したので、横変位を防止できるとともに、簡単かつ
小形の構成で２軸の並進変位およびｌ軸まわりの回転変
位を得ることができる。In this way, this embodiment has two additional features in addition to the first embodiment.
Since the radial deflection beam displacement mechanism that generates rotational displacement around the axes is connected, lateral displacement can be prevented, and translational displacement on two axes and rotational displacement around the l-axis can be obtained with a simple and compact configuration.
なお、上記実施例の説明では、ｙ軸方向の張出し部の端
部を固定し、Ｘ軸方向の張出し部の端部に微動テーブル
を設けた例について説明したが、これとは逆に、Ｘ軸方
向の張出し部の端部を固定し、ｙ軸方向の張出し部の端
部に微動テーブルを設けてもよいのは明らかである。又
、上記各実施例の説明において、微動テーブル３０を長
方形として図示したが、これに限ることはなく、機体部
分を長方形等、対象物体を載置固定し易い形状とするこ
とは当然である。In the above embodiment, an example was explained in which the end of the overhang in the y-axis direction was fixed and a fine movement table was provided at the end of the overhang in the X-axis direction. It is clear that the end of the axial extension may be fixed and a fine movement table may be provided at the end of the y-axis extension. Further, in the description of each of the above embodiments, the fine movement table 30 is illustrated as a rectangle, but the shape is not limited to this, and it is natural that the body portion may have a shape such as a rectangle that makes it easy to place and fix a target object.
以上述べたように、本発明では、直交する２つの方向の
張出し部にそれぞれ並進方向が直交する平行たわみ梁変
位機構を構成したので、横変位を防止することができる
とともに、極めて簡単な構成で２軸方向の並進変位を得
ることができる。As described above, in the present invention, a parallel deflection beam displacement mechanism is constructed in which the translation directions are perpendicular to the overhanging portions in two orthogonal directions, so that lateral displacement can be prevented and the structure is extremely simple. Translational displacement in two axial directions can be obtained.
第１図は本発明の第１の実施例に係る微細位置決め装置
の分解斜視図、第２図（ａ） 、（ｂ）は第１図に示す
平行たわみ梁変位機構の側面図、第３図および第４図は
それぞれ本発明の第２および第３の実施例に係る微細位
置決め装置の分解斜視図、第５図（ａ）、（ｂ）は第１
図に示す放射たわみ梁変位機構の側面図、第６図および
第７図は従来の微細位置決め装置の側面図および斜視図
である。
１５・・・・・・中心剛体部、１６ａ、１６ｂ、１７ａ
。
１７ ｂ ・・・・・・張出し部、１６Ｆ、−、１６Ｆ
−ｂ、 １７Ｆ、、、 １７ Ｆｙｂ＋ ・・・・
・・平行たわみ梁変機構、２０・・・・・・微動テーブ
ル。
第１図
１ｆＳ中」（剛４不卸
１６ａ、ｌｋｂ、／りａ、／りｂ；匙し舒／’Ｆｙａ＋
／６Ｆｘｈｒ １７Ｆｘａｒ１７Ｆｗｈ’ 手オ？Ａ
？フンｒ’Ｌ％イカ：ｆｉＦｊＬ２０： 独χ動デー７
）し
第２図
（ｂ）
第３図
第４図
第５図Figure 1 is an exploded perspective view of a fine positioning device according to the first embodiment of the present invention, Figures 2 (a) and (b) are side views of the parallel deflection beam displacement mechanism shown in Figure 1, and Figure 3. and FIG. 4 are exploded perspective views of fine positioning devices according to the second and third embodiments of the present invention, respectively, and FIGS.
6 and 7 are side views and perspective views of a conventional fine positioning device. 15... Central rigid body part, 16a, 16b, 17a
. 17 b... Overhang, 16F, -, 16F
-b, 17F,,, 17 Fyb+...
...Parallel deflection beam change mechanism, 20...Fine movement table. FIG.
/6Fxhr 17Fxar17Fwh' Hand O? A
? Hun r'L% squid: fiFjL20: Dokkido Day 7
) Figure 2 (b) Figure 3 Figure 4 Figure 5
Claims (4)
に対称的に突出する第１の組の張出し部と、前記中心剛
体部から前記第１の軸と直交する第２の軸方向に対称的
に突出する第２の組の張出し部と、前記第１の組の張出
し部にそれぞれ対称的に設けられ前記第２の軸方向の並
進変位を発生させる平行たわみ梁変位機構の組と、前記
第２の組の張出し部にそれぞれ対称的に設けられ前記第
１の軸方向の並進変位を発生させる平行たわみ梁変位機
構の組とを備えたことを特徴とする微細位置決め装置。(1) a central rigid body part, a first set of overhanging parts symmetrically protruding from the central rigid body part in a first axis direction, and a second axis extending from the central rigid body part and perpendicular to the first axis; a second set of overhangs that protrude symmetrically in the direction; and a parallel flexible beam displacement mechanism that is symmetrically provided on the first set of overhangs and generates a translational displacement in the second axial direction. and a set of parallel deflection beam displacement mechanisms that are symmetrically provided on the overhangs of the second set and generate translational displacement in the first axial direction.
たわみ梁変位機構は、それぞれの変位発生方向の力によ
り曲げ変形を生じる互いに平行な複数のたわみ梁と、こ
れらたわみ梁に前記力を作用させるアクチュエータとに
より構成されていることを特徴とする微細位置決め装置
。(2) In claim (1), each of the parallel flexible beam displacement mechanisms includes a plurality of mutually parallel flexible beams that undergo bending deformation due to forces in respective displacement generating directions, and A fine positioning device characterized by comprising: an actuator that acts.
ュエータは圧電アクチュエータであることを特徴とする
微細位置決め装置。(3) The fine positioning device according to claim (2), wherein the actuator is a piezoelectric actuator.
体部、および前記各平行たわみ梁変位機構は１つの剛体
ブロックから加工成形されることを特徴とする微細位置
決め装置。（５）特許請求の範囲第（１）項において、
前記第１の組の張出し部および前記第２の組の張り出し
部は、一方の組の張出し部の各端部が固定され、かつ、
他方の組の張出し部の各端部間に微細テーブルが備えら
れていることを特徴とする微細位置決め装置。(4) The fine positioning device according to claim (1), wherein the central rigid body portion and each of the parallel deflection beam displacement mechanisms are fabricated from one rigid block. (5) In claim (1),
The first set of overhanging parts and the second set of overhanging parts are such that each end of one set of overhanging parts is fixed, and
A micro-positioning device characterized in that a micro-table is provided between each end of the other set of overhangs.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61283063A JPH071450B2 (en) | 1986-11-29 | 1986-11-29 | Fine positioning device |
| DE3788773T DE3788773T2 (en) | 1986-09-09 | 1987-09-08 | Device for fine adjustment and device for controlling these adjustments. |
| EP87201701A EP0264147B1 (en) | 1986-09-09 | 1987-09-08 | Fine positioning device and displacement controller therefor |
| US07/244,101 US4991309A (en) | 1986-09-09 | 1988-09-14 | Fine positioning device and displacement controller therefor |
| US07/244,169 US4920660A (en) | 1986-09-09 | 1988-09-14 | Fine positioning device and displacement controller therefor |
| US07/244,168 US4888878A (en) | 1986-09-09 | 1988-09-14 | Fine positioning device |
| US07/244,102 US5005298A (en) | 1986-09-09 | 1988-09-14 | Displacement controller for fine positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61283063A JPH071450B2 (en) | 1986-11-29 | 1986-11-29 | Fine positioning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63137308A true JPS63137308A (en) | 1988-06-09 |
| JPH071450B2 JPH071450B2 (en) | 1995-01-11 |
Family
ID=17660721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61283063A Expired - Lifetime JPH071450B2 (en) | 1986-09-09 | 1986-11-29 | Fine positioning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071450B2 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3786332A (en) * | 1969-03-19 | 1974-01-15 | Thomson Houston Comp Francaise | Micro positioning apparatus |
| JPS57107751A (en) * | 1980-12-26 | 1982-07-05 | Nippon Seiko Kk | Minute position adjusting device |
| JPS5994103A (en) * | 1982-11-19 | 1984-05-30 | Nec Corp | Controller of electromechanical transducer |
| JPS5996880A (en) * | 1982-11-19 | 1984-06-04 | Nec Corp | Electromechanical transducer |
| JPS6025284A (en) * | 1983-07-22 | 1985-02-08 | Hitachi Ltd | Positioning device |
-
1986
- 1986-11-29 JP JP61283063A patent/JPH071450B2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3786332A (en) * | 1969-03-19 | 1974-01-15 | Thomson Houston Comp Francaise | Micro positioning apparatus |
| JPS57107751A (en) * | 1980-12-26 | 1982-07-05 | Nippon Seiko Kk | Minute position adjusting device |
| JPS5994103A (en) * | 1982-11-19 | 1984-05-30 | Nec Corp | Controller of electromechanical transducer |
| JPS5996880A (en) * | 1982-11-19 | 1984-06-04 | Nec Corp | Electromechanical transducer |
| JPS6025284A (en) * | 1983-07-22 | 1985-02-08 | Hitachi Ltd | Positioning device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH071450B2 (en) | 1995-01-11 |
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